ATE417492T1 - Galvanischer prozess zur füllung von durchgangslöchern mit metallen, insbesondere von leiterplatten mit kupfer - Google Patents

Galvanischer prozess zur füllung von durchgangslöchern mit metallen, insbesondere von leiterplatten mit kupfer

Info

Publication number
ATE417492T1
ATE417492T1 AT05775130T AT05775130T ATE417492T1 AT E417492 T1 ATE417492 T1 AT E417492T1 AT 05775130 T AT05775130 T AT 05775130T AT 05775130 T AT05775130 T AT 05775130T AT E417492 T1 ATE417492 T1 AT E417492T1
Authority
AT
Austria
Prior art keywords
filling
holes
metals
copper
circuit boards
Prior art date
Application number
AT05775130T
Other languages
English (en)
Inventor
Bert Reents
Thomas Pliet
Bernd Roelfs
Toshiya Fujiwara
Rene Wenzel
Markus Youkhanis
Soungsoo Kim
Original Assignee
Atotech Deutschland Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland Gmbh filed Critical Atotech Deutschland Gmbh
Application granted granted Critical
Publication of ATE417492T1 publication Critical patent/ATE417492T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18—Electroplating using modulated, pulsed or reversing current
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H05K1/115—Via connections; Lands around holes or via connections
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/095—Conductive through-holes or vias
    • H05K2201/09563—Metal filled via
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/14—Related to the order of processing steps
    • H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/14—Related to the order of processing steps
    • H05K2203/1492—Periodical treatments, e.g. pulse plating of through-holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/425—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
    • H05K3/427—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in metal-clad substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)
AT05775130T 2004-09-20 2005-08-30 Galvanischer prozess zur füllung von durchgangslöchern mit metallen, insbesondere von leiterplatten mit kupfer ATE417492T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004045451A DE102004045451B4 (de) 2004-09-20 2004-09-20 Galvanisches Verfahren zum Füllen von Durchgangslöchern mit Metallen, insbesondere von Leiterplatten mit Kupfer

Publications (1)

Publication Number Publication Date
ATE417492T1 true ATE417492T1 (de) 2008-12-15

Family

ID=35447785

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05775130T ATE417492T1 (de) 2004-09-20 2005-08-30 Galvanischer prozess zur füllung von durchgangslöchern mit metallen, insbesondere von leiterplatten mit kupfer

Country Status (10)

Country Link
US (2) US9445510B2 (de)
EP (1) EP1810554B1 (de)
JP (1) JP5078142B2 (de)
KR (1) KR101222627B1 (de)
CN (1) CN101053286B (de)
AT (1) ATE417492T1 (de)
DE (2) DE102004045451B4 (de)
MY (1) MY145344A (de)
TW (1) TWI370715B (de)
WO (1) WO2006032346A1 (de)

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KR20210000514A (ko) 2019-06-25 2021-01-05 삼성전기주식회사 인쇄회로기판 도금 방법 및 인쇄회로기판
CN110306214A (zh) * 2019-07-05 2019-10-08 东莞市斯坦得电子材料有限公司 一种用于高纵横比孔径印制线路板通孔电镀的反向脉冲镀铜工艺
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Also Published As

Publication number Publication date
DE602005011662D1 (de) 2009-01-22
EP1810554A1 (de) 2007-07-25
US9445510B2 (en) 2016-09-13
US20090236230A1 (en) 2009-09-24
DE102004045451B4 (de) 2007-05-03
MY145344A (en) 2012-01-31
US9526183B2 (en) 2016-12-20
WO2006032346A1 (en) 2006-03-30
TWI370715B (en) 2012-08-11
KR101222627B1 (ko) 2013-01-16
JP5078142B2 (ja) 2012-11-21
KR20070053304A (ko) 2007-05-23
TW200623995A (en) 2006-07-01
DE102004045451A1 (de) 2006-03-30
CN101053286A (zh) 2007-10-10
US20160270241A1 (en) 2016-09-15
CN101053286B (zh) 2012-01-18
EP1810554B1 (de) 2008-12-10
JP2008513985A (ja) 2008-05-01

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