WO2015152153A1 - オキシムエステル化合物及び該化合物を含有する光重合開始剤 - Google Patents
オキシムエステル化合物及び該化合物を含有する光重合開始剤 Download PDFInfo
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- WO2015152153A1 WO2015152153A1 PCT/JP2015/059928 JP2015059928W WO2015152153A1 WO 2015152153 A1 WO2015152153 A1 WO 2015152153A1 JP 2015059928 W JP2015059928 W JP 2015059928W WO 2015152153 A1 WO2015152153 A1 WO 2015152153A1
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- carbon atoms
- compound
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- alkali
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- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
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- 238000000926 separation method Methods 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
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- 239000003549 soybean oil Substances 0.000 description 1
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- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
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- ADXGNEYLLLSOAR-UHFFFAOYSA-N tasosartan Chemical compound C12=NC(C)=NC(C)=C2CCC(=O)N1CC(C=C1)=CC=C1C1=CC=CC=C1C=1N=NNN=1 ADXGNEYLLLSOAR-UHFFFAOYSA-N 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
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- NBOMNTLFRHMDEZ-UHFFFAOYSA-N thiosalicylic acid Chemical compound OC(=O)C1=CC=CC=C1S NBOMNTLFRHMDEZ-UHFFFAOYSA-N 0.000 description 1
- 229940103494 thiosalicylic acid Drugs 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- 238000012546 transfer Methods 0.000 description 1
- 239000001003 triarylmethane dye Substances 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 1
- XHGIFBQQEGRTPB-UHFFFAOYSA-N tris(prop-2-enyl) phosphate Chemical compound C=CCOP(=O)(OCC=C)OCC=C XHGIFBQQEGRTPB-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 229920006163 vinyl copolymer Polymers 0.000 description 1
- UIYCHXAGWOYNNA-UHFFFAOYSA-N vinyl sulfide Chemical compound C=CSC=C UIYCHXAGWOYNNA-UHFFFAOYSA-N 0.000 description 1
- NLVXSWCKKBEXTG-UHFFFAOYSA-N vinylsulfonic acid Chemical compound OS(=O)(=O)C=C NLVXSWCKKBEXTG-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000001018 xanthene dye Substances 0.000 description 1
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- 125000005023 xylyl group Chemical group 0.000 description 1
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- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- NDKWCCLKSWNDBG-UHFFFAOYSA-N zinc;dioxido(dioxo)chromium Chemical compound [Zn+2].[O-][Cr]([O-])(=O)=O NDKWCCLKSWNDBG-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
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- C07D487/02—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00 in which the condensed system contains two hetero rings
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- C07D209/04—Indoles; Hydrogenated indoles
- C07D209/10—Indoles; Hydrogenated indoles with substituted hydrocarbon radicals attached to carbon atoms of the hetero ring
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- C07D401/04—Heterocyclic compounds containing two or more hetero rings, having nitrogen atoms as the only ring hetero atoms, at least one ring being a six-membered ring with only one nitrogen atom containing two hetero rings directly linked by a ring-member-to-ring-member bond
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- C07D405/02—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom containing two hetero rings
- C07D405/04—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom containing two hetero rings directly linked by a ring-member-to-ring-member bond
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- C07D471/02—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, at least one ring being a six-membered ring with one nitrogen atom, not provided for by groups C07D451/00 - C07D463/00 in which the condensed system contains two hetero rings
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- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
Definitions
- the present invention relates to a novel oxime ester compound useful as a photopolymerization initiator for use in a photosensitive composition, a photopolymerization initiator containing the compound, and a polymerizability having an ethylenically unsaturated bond in the photopolymerization initiator.
- the present invention relates to a photosensitive composition containing a compound.
- the photosensitive composition is obtained by adding a photopolymerization initiator to a polymerizable compound having an ethylenically unsaturated bond, and can be polymerized and cured by irradiating energy rays (light). It is used for photosensitive printing plates and various photoresists.
- Patent Documents 1 to 3 below propose using oxime ester compounds.
- the oxime ester compounds described in the following patent documents do not have satisfactory sensitivity.
- the colored alkali-developable photosensitive resin composition containing a color material such as a color filter is required to have high sensitivity, and the photopolymerization initiator in the resist needs to have a high concentration.
- a high concentration photopolymerization initiator has caused residues due to deterioration of developability, contamination of the photomask and heating furnace due to sublimation, and the like.
- the problem to be solved is that there has never been a photopolymerization initiator having satisfactory sensitivity.
- an object of the present invention is to provide a novel compound useful as a highly sensitive photopolymerization initiator that is excellent in stability, has low sublimation properties, and efficiently absorbs and activates near-ultraviolet light such as 365 nm, and the compound.
- Another object of the present invention is to provide a photopolymerization initiator and a photosensitive composition.
- the present invention achieves the above object by providing a novel oxime ester compound represented by the following general formula (I) and a photopolymerization initiator containing the compound.
- R 1 and R 2 each independently represent R 11 , OR 11 , COR 11 , SR 11 , CONR 12 R 13 or CN;
- R 11 , R 12 and R 13 are each independently a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an arylalkyl group having 7 to 30 carbon atoms or a carbon atom.
- the hydrogen atoms of the groups represented by R 11 , R 12 and R 13 are further R 21 , OR 21 , COR 21 , SR 21 , NR 22 R 23 , CONR 22 R 23 , —NR 22 —OR 23 , —NCOR 22.
- R 21 , R 22 and R 23 are each independently a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an arylalkyl group having 7 to 30 carbon atoms or a carbon atom.
- R 21 , R 22 and R 23 may be further substituted with a hydroxyl group, a nitro group, CN, a halogen atom, a hydroxyl group or a carboxyl group
- the alkyl part of the group represented by R 11 , R 12 , R 13 , R 21 , R 22 , R 23 and R 24 may have a branched side chain or a cyclic alkyl.
- R 3 represents a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an arylalkyl group having 7 to 30 carbon atoms, or a heterocyclic group having 2 to 20 carbon atoms.
- the alkyl part of the group represented by R 3 may have a branched side chain or may be a cyclic alkyl, and R 3 and R 7 , R 3 and R 8 , R 4 and R 5 , R 5 and R 6 and R 6 and R 7 may be combined to form a ring,
- the hydrogen atom of the group represented by R 3 is further R 21 , OR 21 , COR 21 , SR 21 , NR 22 R 23 , CONR 22 R 23 , —NR 22 —OR 23 , —NCOR 22 —OCOR 23 , NR 22.
- R 4 , R 5 , R 6 and R 7 are each independently R 11 , OR 11 , SR 11 , COR 14 , CONR 15 R 16 , NR 12 COR 11 , OCOR 11 , COOR 14 , SCOR 11 , OCSR 11 , COSR 14 , CSOR 11 , a hydroxyl group, CN or a halogen atom, R 4 and R 5 , R 5 and R 6, and R 6 and R 7 may be combined to form a ring, R 14 , R 15 and R 16 represent a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, The alkyl part of the group represented by R 14 , R 15 and R 16 may have a branched side chain or a
- this invention provides the photosensitive composition formed by making the said photoinitiator contain the polymeric compound which has an ethylenically unsaturated bond.
- the present invention also provides an alkali-developable photosensitive resin composition comprising the photosensitive composition containing an alkali-developable compound which may have an ethylenically unsaturated group.
- the present invention also provides a colored alkali-developable photosensitive resin composition obtained by further adding a coloring material to the alkali-developable photosensitive resin composition.
- the present invention also provides a cured product obtained by irradiating the photosensitive composition, the alkali-developable photosensitive resin composition, or the colored alkali-developable photosensitive resin composition with energy rays.
- the oxime ester compound of the present invention has excellent stability in the visible light region, low sublimation, efficiently generates radicals for emission lines such as 365 nm (i-line), and is used for photopolymerization used in photosensitive compositions. It is useful as an initiator.
- the oxime ester compound of the present invention is a novel compound represented by the above general formula (I).
- the oxime ester compound has geometric isomers due to oxime double bonds, but these are not distinguished. That is, in the present specification, the compound represented by the above general formula (I), the compound represented by the following general formula (II), which is a preferred form of the compound described later, and the exemplified compound thereof may be a mixture of either or both. It represents one and is not limited to the structure showing the isomer.
- the number of carbon atoms represented by R 3 , R 11 , R 12 , R 13 , R 14 , R 15 , R 16 , R 21 , R 22 , R 23 and R 24 in the general formula (I) is 1 to Examples of the alkyl group of 20 include, for example, methyl, ethyl, propyl, isopropyl, butyl, isobutyl, s-butyl, t-butyl, amyl, isoamyl, t-amyl, hexyl, heptyl, octyl, isooctyl, 2-ethylhexyl, t -Octyl, nonyl, isononyl, decyl, isodecyl, undecyl, dodecyl, tetradecyl, hexadecyl, octadecyl, icosyl, cyclopentyl,
- Examples of the aryl group having 6 to 30 carbon atoms represented by R 3 , R 11 , R 12 , R 13 , R 21 , R 22 , R 23 and R 24 in the general formula (I) include, for example, Phenyl, tolyl, xylyl, ethylphenyl, naphthyl, anthryl, phenanthrenyl, phenyl, biphenylyl, naphthyl, anthryl substituted with one or more of the above alkyl groups.
- Examples of the arylalkyl group having 7 to 30 carbon atoms represented by R 3 , R 11 , R 12 , R 13 , R 21 , R 22 , R 23 and R 24 in the general formula (I) include, for example, , Benzyl, ⁇ -methylbenzyl, ⁇ , ⁇ -dimethylbenzyl, phenylethyl and the like.
- heterocyclic group having 2 to 20 carbon atoms represented by R 3 , R 11 , R 12 , R 13 , R 21 , R 22 , R 23 , and R 24 in the general formula (I) are as follows:
- R 4 and R 5 , R 5 and R 6, R 6 and R 7 , R 3 and R 7, and R 3 and R 8 may be formed as a ring
- Preferred examples include 5- to 7-membered rings such as cyclopentane ring, cyclohexane ring, cyclopentene ring, benzene ring, piperidine ring, morpholine ring, lactone ring, and lactam ring.
- halogen atoms represented by R 4 , R 5 , R 6 , R 7 and R 8 , and R 3 , R 11 , R 12 in the general formula (I) , R 13 , R 21 , R 22 and R 23 may be substituted with fluorine, chlorine, bromine and iodine.
- the alkylene part of the group represented by R 11 , R 12 , R 13 , R 21 , R 22 and R 23 is —O—, —S—, —COO—, —OCO. -, - NR 24 -, - NR 24 CO -, - NR 24 COO -, - OCONR 24 -, - SCO -, - COS -, - OCS- or -CSO- 1 in conditions that do not Tonariawa oxygen atom by ⁇ It may be interrupted 5 times, and the linking group interrupted at this time may be one type or two or more groups. In the case of a group that can be interrupted continuously, two or more groups may be interrupted continuously.
- the alkyl (alkylene) moiety of the group represented by R 11 , R 12 , R 13 , R 21 , R 22 , R 23 and R 24 has a branched side chain. It may be a cyclic alkyl.
- oxime ester compounds of the present invention those in which R 3 is an aromatic ring which may be condensed, or compounds represented by the following general formula (II) are preferable because of high sensitivity and easy production. .
- R 1 , R 2 , R 4 , R 5 , R 6 , R 7 , R 8 and n are the same as in the above general formula (I), and R 31 , R 32 , R 33 , R 34 And R 35 are each independently R 11 , OR 11 , SR 11 , COR 11 , CONR 15 R 16 , NR 12 COR 11 , OCOR 11 , COOR 14 , SCOR 11 , OCSR 11 , COSR 14 , CSOR 11 , hydroxyl group Represents a nitro group, CN or a halogen atom, and R 31 and R 32 , R 32 and R 33 , R 33 and R 34, and R 34 and R 35 may be combined to form a ring.
- R 31 and R 32, R 32 and R 33, examples of the ring R 33 and R 34 and R 34 and R 35 form together the, R 4 and R 5, R 5 and R 6 and R 6 and R 7 and R 3 and R 7 and R 3 and R 8 include the same rings as those mentioned above as examples of the ring may form together.
- R 1 is an alkyl group having 1 to 12 carbon atoms or an arylalkyl group having 7 to 15 carbon atoms
- R 11 is an aryl group having 6 to 12 carbon atoms
- carbon An alkyl group having 1 to 8 atoms is preferred because of high solvent solubility
- R 2 is preferably a methyl group, ethyl group or phenyl group because of high reactivity
- R 4 to R 7 are hydrogen atoms.
- a cyano group particularly a hydrogen atom
- a hydrogen atom as R 8 is preferable because it is easy to synthesize
- n is preferably 1 because of its high sensitivity.
- R 31 - at least one for R 35 but a nitro group, a CN, a halogen atom, COR 11, R 11 is an aryl group having 6 to 12 carbon atoms, and 1 to 8 carbon atoms
- the sensitivity is high is an alkyl group, at least one nitro group of R 31 ⁇ R 35, more preferably those which are CN or halogen atom, those R 33 is a nitro group, CN or halogen atom Particularly preferred.
- oxime ester compound of the present invention represented by the above general formula (I) include the following compound Nos. 1-No. 212.
- the present invention is not limited by the following compounds.
- the oxime ester compound of the present invention represented by the above general formula (I) is not particularly limited, but can be produced, for example, by the method described in JP-A-2000-80068.
- n 0, a method of producing by the following method according to the reaction formula shown in the following ⁇ Example 1> can be mentioned. That is, the ketone body 2 is reacted with the halide to obtain the ketone body 2, and the ketone body 2 is reacted with hydroxylamine hydrochloride to obtain the oxime compound 3.
- the oxime compound 3 is reacted with an acid anhydride 4, an acid chloride 4 ′, or a carboxylate 4 ′′ to obtain the oxime ester compound of the present invention represented by the above general formula (I).
- an acid anhydride 4 an acid chloride 4 ′, or a carboxylate 4 ′′
- the oxime ester compound of the present invention represented by the above general formula (I).
- R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 and R 8 are the same as in the general formula (I).
- R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 and R 8 are the same as in the general formula (I).
- novel oxime ester compound of the present invention described above is useful as a radical polymerization initiator, particularly a photopolymerization initiator or a thermal polymerization initiator. Moreover, the novel oxime ester compound of the present invention can also be suitably used as a sensitizer.
- the photopolymerization initiator of the present invention contains at least one oxime ester compound of the present invention, and is particularly useful as a photopolymerization initiator for a polymerizable compound having an ethylenically unsaturated bond.
- the content of the oxime ester compound of the present invention in the photopolymerization initiator of the present invention is preferably 30 to 100% by mass, more preferably 50 to 100% by mass.
- the photosensitive composition of the present invention contains the photopolymerization initiator of the present invention and a polymerizable compound having an ethylenically unsaturated bond as essential components, and may have an ethylenically unsaturated group as an optional component. It contains a combination of components such as a compound having good alkali developability, an inorganic compound, a coloring material, and a solvent.
- the polymerizable compound having an ethylenically unsaturated bond is not particularly limited, and those conventionally used in photosensitive compositions can be used.
- those conventionally used in photosensitive compositions can be used.
- ethylene, propylene, butylene, isobutylene, vinyl chloride can be used.
- Unsaturated aliphatic hydrocarbons such as vinylidene chloride, vinylidene fluoride, tetrafluoroethylene; (meth) acrylic acid, ⁇ -chloroacrylic acid, itaconic acid, maleic acid, citraconic acid, fumaric acid, hymic acid, crotonic acid, Isocrotonic acid, vinyl acetic acid, allylic acetic acid, cinnamic acid, sorbic acid, mesaconic acid, succinic acid mono [2- (meth) acryloyloxyethyl], phthalic acid mono [2- (meth) acryloyloxyethyl], ⁇ - Carboxypolycaprolactone mono (meth) acrylate has carboxy group and hydroxyl group at both ends Limer mono (meth) acrylate; hydroxyethyl (meth) acrylate malate, hydroxypropyl (meth) acrylate malate, dicyclopentadiene
- A4 methyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, tert-butyl (meth) acrylate, cyclohexyl (meth) acrylate, n-octyl (meth) acrylate, ( Isooctyl (meth) acrylate, isononyl (meth) acrylate, stearyl (meth) acrylate, lauryl (meth) acrylate, methoxyethyl (meth) acrylate, dimethylaminomethyl (meth) acrylate, dimethyl (meth) acrylate Aminoethyl, aminopropyl (meth) acrylate, dimethylaminopropyl (meth) acrylate, ethoxyethyl (meth) acrylate, poly (ethoxy) ethyl (meth) acrylate, butoxyethoxyethyl (
- a mono (meth) acrylate of a polymer having a carboxy group and a hydroxyl group at both ends a polyfunctional (meth) acrylate having one carboxy group and two or more (meth) acryloyl groups, an unsaturated one
- a photopolymerization initiator containing the oxime ester compound of the present invention in an ester of a basic acid and a polyhydric alcohol or polyhydric phenol is suitable.
- These polymerizable compounds can be used alone or in admixture of two or more, and when used in admixture of two or more, they are copolymerized in advance and used as a copolymer. May be.
- the alkali-developable compound that may have an ethylenically unsaturated group is not particularly limited as long as it is soluble in an alkaline aqueous solution, and examples thereof include resins described in JP-A-2004-264414. Can be mentioned.
- the epoxy acrylate resin here is one obtained by allowing (meth) acrylic acid to act on the above-mentioned epoxy compound.
- Examples thereof include Lipoxy SPC-2000, Dicklight UE-777 manufactured by DIC, and Nippon Iupika. Examples include Eupica 4015.
- the compound having alkali developability which may have an ethylenically unsaturated bond preferably contains 0.2 to 1.0 equivalent of an unsaturated group.
- X 1 is a direct bond, methylene group, alkylidene group having 1 to 4 carbon atoms, alicyclic hydrocarbon group having 3 to 20 carbon atoms, O, S, SO 2 , SS, SO, CO, It represents a group represented by OCO or the following partial structural formulas (a), (b) or (c), and the alkylidene group may be substituted with a halogen atom, and R 51 , R 52 , R 53 and R 54 Each independently represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an alkenyl group having 2 to 5 carbon atoms, or a halogen atom, and the above alkyl group, alkoxy group And the alkenyl group may be substituted with a halogen atom, m is an integer of 0 to 10, and the optical isomer present when m is not 0 may be any isomer.)
- Z 3 is a hydrogen atom, a phenyl group optionally substituted by an alkyl group having 1 to 10 carbon atoms or an alkoxy group having 1 to 10 carbon atoms, or an alkyl group having 1 to 10 carbon atoms, or A cycloalkyl group having 3 to 10 carbon atoms which may be substituted by an alkoxy group having 1 to 10 carbon atoms
- Y 1 is an alkyl group having 1 to 10 carbon atoms, alkoxy having 1 to 10 carbon atoms Group, an alkenyl group having 2 to 10 carbon atoms or a halogen atom, wherein the alkyl group, alkoxy group and alkenyl group may be substituted with a halogen atom, and d is an integer of 0 to 5.
- Y 2 and Z 4 are each independently an alkyl group having 1 to 10 carbon atoms which may be substituted with a halogen atom, or 6 to 20 carbon atoms which may be substituted with a halogen atom.
- Examples of the unsaturated monobasic acid that acts on the epoxy compound include acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, sorbic acid, hydroxyethyl methacrylate / malate, hydroxyethyl acrylate / malate, hydroxypropyl methacrylate / malate, hydroxypropyl Acrylate / malate, dicyclopentadiene / malate and the like can be mentioned.
- the polybasic acid anhydride to be acted after the unsaturated monobasic acid is allowed to act is biphenyltetracarboxylic dianhydride, tetrahydrophthalic anhydride, succinic anhydride, biphthalic anhydride, maleic anhydride, Trimellitic anhydride, pyromellitic anhydride, 2,2'-3,3'-benzophenone tetracarboxylic anhydride, ethylene glycol bisanhydro trimellitate, glycerol tris anhydro trimellitate, hexahydrophthalic anhydride , Methyltetrahydrophthalic anhydride, nadic anhydride, methylnadic anhydride, trialkyltetrahydrophthalic anhydride, hexahydrophthalic anhydride, 5- (2,5-dioxotetrahydrofuryl) -3-methyl-3-cyclohexene -1,2-dicarboxylic an
- the reaction molar ratio of the epoxy compound, the unsaturated monobasic acid and the polybasic acid anhydride is preferably as follows. That is, in an epoxy adduct having a structure in which 0.1 to 1.0 carboxyl groups of the unsaturated monobasic acid are added to one epoxy group of the epoxy compound, the hydroxyl group 1 of the epoxy adduct is It is preferable that the ratio of the acid anhydride structure of the polybasic acid anhydride is 0.1 to 1.0. Reaction of the said epoxy compound, the said unsaturated monobasic acid, and the said polybasic acid anhydride can be performed in accordance with a conventional method.
- the alkali-developable photosensitive resin composition of the present invention which is one of the embodiments of the photosensitive composition of the present invention, is a polymerization having the photopolymerization initiator of the present invention and an ethylenically unsaturated bond as essential components. And a compound having an alkali developability which may have an ethylenically unsaturated group, and as an optional component, a combination of components such as an inorganic compound, a coloring material, and a solvent.
- those containing a coloring material are also referred to as the colored alkali-developable photosensitive resin compositions of the present invention.
- the polymerizable compound having an ethylenically unsaturated bond and the compound having alkali developability which may have an ethylenically unsaturated group may be the same compound or different from each other. Moreover, even if it is individual, 2 or more types may be used together.
- the alkali-developable compound that may have an ethylenically unsaturated bond preferably has a solid content acid value in the range of 5 to 120 mgKOH / g, and the amount of monofunctional or polyfunctional epoxy compound used. Is preferably selected so as to satisfy the above acid value.
- Examples of the monofunctional epoxy compound include glycidyl methacrylate, methyl glycidyl ether, ethyl glycidyl ether, propyl glycidyl ether, isopropyl glycidyl ether, butyl glycidyl ether, isobutyl glycidyl ether, t-butyl glycidyl ether, pentyl glycidyl ether, hexyl glycidyl ether, heptyl Glycidyl ether, octyl glycidyl ether, nonyl glycidyl ether, decyl glycidyl ether, undecyl glycidyl ether, dodecyl glycidyl ether, tridecyl glycidyl ether, tetradecyl glycidyl ether, pentadecy
- the polyfunctional epoxy compound when one or more compounds selected from the group consisting of bisphenol-type epoxy compounds and glycidyl ethers are used, a (colored) alkali-developable photosensitive resin composition having better characteristics can be obtained. Is preferable.
- the bisphenol type epoxy compound an epoxy compound represented by the above general formula (III) can be used, and for example, a bisphenol type epoxy compound such as a hydrogenated bisphenol type epoxy compound can also be used.
- glycidyl ethers examples include ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, 1,4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, 1,8-octanediol diglycidyl ether, 1,10-decanediol diglycidyl ether, 2,2-dimethyl-1,3-propanediol diglycidyl ether, diethylene glycol diglycidyl ether, triethylene glycol diglycidyl ether, tetraethylene glycol diglycidyl ether, hexaethylene glycol diglycidyl Ether, 1,4-cyclohexanedimethanol diglycidyl ether, 1,1,1-tri (glycidyloxymethyl) propane, 1,1,1-to (Glycidyloxymethyl) ethane, 1,1,1-tri (glycidy
- novolac epoxy compounds such as phenol novolac epoxy compounds, biphenyl novolac epoxy compounds, cresol novolac epoxy compounds, bisphenol A novolac epoxy compounds, dicyclopentadiene novolac epoxy compounds; 3,4-epoxy-6-methyl Cycloaliphatic epoxy such as cyclohexylmethyl-3,4-epoxy-6-methylcyclohexanecarboxylate, 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, 1-epoxyethyl-3,4-epoxycyclohexane Compound: Glycidyl esters such as diglycidyl phthalate, diglycidyl tetrahydrophthalate, glycidyl dimer, tetraglycidyl diamino Glycidylamines such as phenylmethane, triglycidyl P-aminophenol and N, N-diglycidylaniline; heterocycl
- the content of the photopolymerization initiator of the present invention is not particularly limited, but is preferably 1 with respect to 100 parts by mass of the polymerizable compound having an ethylenically unsaturated bond. It is ⁇ 70 parts by mass, more preferably 1 to 50 parts by mass, and most preferably 5 to 30 parts by mass.
- the photosensitive composition of the present invention is a (colored) alkali-developable photosensitive resin composition
- the content of the alkali-developable compound that may have an ethylenically unsaturated bond is the present invention.
- 1 to 20% by mass, particularly 3 to 12% by mass is preferable.
- a solvent can be further added to the photosensitive composition of the present invention.
- the solvent is usually a solvent capable of dissolving or dispersing each of the above-described components (the photopolymerization initiator of the present invention and a polymerizable compound having an ethylenically unsaturated bond) as necessary, such as methyl ethyl ketone, methyl amyl.
- Ketones such as ketone, diethyl ketone, acetone, methyl isopropyl ketone, methyl isobutyl ketone, cyclohexanone, 2-heptanone; ethyl ether, dioxane, tetrahydrofuran, 1,2-dimethoxyethane, 1,2-diethoxyethane, dipropylene glycol Ether solvents such as dimethyl ether; ester solvents such as methyl acetate, ethyl acetate, acetic acid-n-propyl, isopropyl acetate, n-butyl acetate, cyclohexyl acetate, ethyl lactate, dimethyl succinate, texanol; ethylene glycol monomethyl ether Cellosolve solvents such as ethylene glycol monoethyl ether; alcohol solvents such as methanol, ethanol, iso- or n-propanol, iso- or
- solvents can be used as one or a mixture of two or more.
- ketones, ether ester solvents, and the like, particularly propylene glycol-1-monomethyl ether-2-acetate, cyclohexanone, and the like are preferable in the photosensitive composition because of good compatibility between the resist and the photopolymerization initiator.
- the photosensitive composition of the present invention may further contain a coloring material to form a colored (alkali-developable) photosensitive composition.
- a coloring material include pigments, dyes, and natural pigments. These color materials can be used alone or in admixture of two or more.
- the pigment examples include nitroso compounds; nitro compounds; azo compounds; diazo compounds; xanthene compounds; quinoline compounds; anthraquinone compounds; coumarin compounds; phthalocyanine compounds; isoindolinone compounds; Compound; perylene compound; diketopyrrolopyrrole compound; thioindigo compound; dioxazine compound; triphenylmethane compound; quinophthalone compound; naphthalene tetracarboxylic acid; azo dye, metal complex compound of cyanine dye; lake pigment; Carbon black obtained by the method, or carbon black such as acetylene black, ketjen black or lamp black; Prepared by coating or coating with an epoxy resin, carbon black previously dispersed with a resin in a solvent and adsorbed with 20 to 200 mg / g of resin, carbon black treated with an acidic or alkaline surface, average Graphite having a particle size of 8 nm or more and a DBP oil absorption of 90
- Graphite Graphitized carbon black, activated carbon, carbon fiber, carbon nanotube, carbon microcoil, carbon nanohorn, carbon aerogel, fullerene; aniline black, pigment black 7, titanium black; chromium oxide green, miloli blue, cobalt green, cobalt blue, manganese series , Ferrocyanide Organic or inorganic such as phosphate ultramarine, bitumen, ultramarine, cerulean blue, pyridian, emerald green, lead sulfate, yellow lead, zinc yellow, red bean (red iron (III) oxide), cadmium red, synthetic iron black, amber Pigments can be used. These pigments can be used alone or in combination.
- pigments can also be used as the pigment, for example, Pigment Red 1, 2, 3, 9, 10, 14, 17, 22, 23, 31, 38, 41, 48, 49, 88, 90, 97, 112, 119, 122, 123, 144, 149, 166, 168, 169, 170, 171, 177, 179, 180, 184, 185, 192, 200, 202, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 254; Pigment Orange 13, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 65, 71; Pigment Yellow 1, 3, 12, 13, 14, 16, 17, 20, 24, 55, 60, 73, 81, 83, 86, 93, 95, 9 98, 100, 109, 110, 113, 114, 117, 120, 125, 126, 127, 129, 137, 138, 139, 147, 148,
- dyes As the above dyes, azo dyes, anthraquinone dyes, indigoid dyes, triarylmethane dyes, xanthene dyes, alizarin dyes, acridine dyes stilbene dyes, thiazole dyes, naphthol dyes, quinoline dyes, nitro dyes, indamine dyes, oxazine dyes, phthalocyanine dyes And dyes such as cyanine dyes, and a plurality of these may be used in combination.
- the content of the colorant is preferably 50 to 350 parts by mass, more preferably 100 to 250 parts by mass, with respect to 100 parts by mass of the polymerizable compound having an ethylenically unsaturated bond. Part.
- the photosensitive composition of the present invention can further contain an inorganic compound.
- the inorganic compound include metal oxides such as nickel oxide, iron oxide, iridium oxide, titanium oxide, zinc oxide, magnesium oxide, calcium oxide, potassium oxide, silica, and alumina; lamellar clay mineral, miloli blue, calcium carbonate, Magnesium carbonate, cobalt, manganese, glass powder (especially glass frit), mica, talc, kaolin, ferrocyanide, various metal sulfates, sulfides, selenides, aluminum silicate, calcium silicate, aluminum hydroxide, platinum, Gold, silver, copper, etc. are mentioned.
- glass frit, titanium oxide, silica, layered clay mineral, silver and the like are preferable.
- the content of the inorganic compound is preferably 0.1 to 1000 parts by mass, more preferably 10 to 10 parts by mass with respect to 100 parts by mass of the polymerizable compound having an ethylenically unsaturated bond. 800 parts by mass.
- These inorganic compounds can be used alone or in combination of two or more.
- inorganic compounds are used, for example, as fillers, antireflection agents, conductive agents, stabilizers, flame retardants, mechanical strength improvers, special wavelength absorbers, ink repellents, and the like.
- a dispersant for dispersing a colorant and / or an inorganic compound can be added.
- the dispersing agent is not limited as long as it can disperse and stabilize a coloring material or an inorganic compound, and a commercially available dispersing agent such as BYK series manufactured by BYK Chemie Corporation can be used.
- a polymer dispersant comprising a polyester, polyether, or polyurethane having a basic functional group, a nitrogen atom as the basic functional group, and the functional group having a nitrogen atom is an amine and / or a quaternary salt thereof.
- those having an amine value of 1 to 100 mgKOH / g are preferably used.
- photopolymerization initiator in the photosensitive composition of the present invention, another photopolymerization initiator can be used in combination with the oxime ester compound of the present invention.
- Conventionally known compounds can be used as other photopolymerization initiators that can be used in combination.
- R 21 and R 22 are each independently a hydrogen atom, a cyano group, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, or an arylalkyl having 7 to 30 carbon atoms
- R 23 and R 24 are each independently a halogen atom, nitro group, cyano group, hydroxyl group, carboxyl group, R 25 , OR 26 , SR 27 , NR 28 R 29 , COR 30 , SOR 31 , SO 2 R 32 or CONR 33 R 34 , R 23 and R 24 may be bonded to each other to form a ring;
- R 25 , R 26 , R 27 , R 28 , R 29 , R 30 , R 31 , R 32 , R 33 and R 34 are each independently an alkyl group having 1 to 20 carbon atoms, or 6 to 6 carbon atoms.
- X 2 represents an oxygen atom, a sulfur atom, a selenium atom, CR 35 R 36 , CO, NR 37 or PR 38
- X 3 represents a single bond or CO, R 21 , R 22 , R 25 , R 26 , R 27 , R 28 , R 29 , R 30 , R 35 , R 36 , R 37 and R 38 alkyl group having 1 to 20 carbon atoms, carbon atoms
- the latent additive represented by the following general formulas (A) to (C) can be added to the photosensitive composition of the present invention.
- ring A 1 is a six-membered alicyclic ring, aromatic ring or heterocyclic ring, and R 61 , R 62 , R 63 , R 64 and R 65 are a hydrogen atom, a halogen atom, a cyano group, a hydroxyl group.
- X 10 is a group represented by the following general formula (1), and R 67 , R 68 , R 69 and R 70 are a hydrogen atom, a halogen atom, a cyano group, a hydroxyl group, a nitro group, a carboxyl group.
- X 11 is —CR 71 R 72 —, —NR 73 —, a divalent aliphatic hydrocarbon group having 1 to 35 carbon atoms, or an aromatic group having 6 to 35 carbon atoms.
- R 30 and R 31 Represents a hydrogen atom, an alkyl group having 1 to 8 carbon atoms, an aryl group having 6 to 20 carbon atoms or an arylalkyl group having 7 to 20 carbon atoms, wherein Z 11 and Z 12 are each independently bond, -O -, - S -,
- R 101 represents a hydrogen atom, an optionally substituted phenyl group, or a cycloalkyl group having 3 to 10 carbon atoms
- R 102 represents an alkyl group having 1 to 10 carbon atoms
- f is 0 to 5 Is an integer.
- R 103 and R 104 are each independently an alkyl group having 1 to 10 carbon atoms which may have a substituent, or 6 to 20 carbon atoms which may have a substituent.
- a methylene group in the alkyl group and arylalkyl group may be interrupted by an unsaturated bond, —O— or —S—, and R 103 represents a ring between adjacent R 103 And b is from 0 to 4 And c represents a number from 0 to 8, g represents a number from 0 to 4, h represents a number from 0 to 4, and the total number of g and h is 2 to 4.
- R 75 , R 76 , R 77 and R 78 are a hydrogen atom, a halogen atom, a cyano group, a hydroxyl group, a nitro group, a carboxyl group, an alkyl group having 1 to 40 carbon atoms which may have a substituent, Represents an aryl group having 6 to 20 carbon atoms, an arylalkyl group having 7 to 20 carbon atoms, or a heterocyclic-containing group having 2 to 20 carbon atoms, and at least one of R 75 , R 76 , R 77 and R 78 One is not a hydrogen atom, and the rings A 1 and R 66 are the same as those in the general formula (A).)
- Y 11 represents a trivalent aliphatic hydrocarbon group having 3 to 35 carbon atoms, an alicyclic hydrocarbon group having 3 to 35 carbon atoms, or an alkyl group having 6 to 35 carbon atoms.
- Z 11 , Z 12 and Z 13 are each independently a direct bond, —O—, —S—,> CO, —CO— O-, -O-CO-, -SO 2- , -SS-, -S O—,> NR 79 ,> PR 79 or an aliphatic hydrocarbon group having 1 to 35 carbon atoms which may have a substituent, and an aromatic having 6 to 35 carbon atoms which may have a substituent
- R 79 represents a hydrogen atom or an optionally substituted substituent having 1 to 35 carbon atoms.
- An aliphatic hydrocarbon group an optionally substituted aromatic hydrocarbon group having 6 to 35 carbon atoms or an optionally substituted heterocyclic group having 2 to 35 carbon atoms;
- the aliphatic hydrocarbon group may be interrupted by a carbon-carbon double bond, —O—, —CO—, —O—CO—, —CO—O— or —SO 2 —.
- Y 12 represents a carbon atom, a tetravalent aliphatic hydrocarbon group having 1 to 35 carbon atoms, an aromatic hydrocarbon group having 6 to 35 carbon atoms, or the number of carbon atoms. Represents an heterocyclic group of 2 to 35, and the aliphatic hydrocarbon group may be interrupted by —COO—, —O—, —OCO—, —NHCO—, —NH— or —CONH—, 11 to Z 14 are each independently a group in the same range as the group represented by Z 11 to Z 13 in the general formula (1).
- Y 13 represents a pentavalent aliphatic hydrocarbon group having 2 to 35 carbon atoms, an aromatic hydrocarbon group having 6 to 30 carbon atoms, or a complex having 2 to 30 carbon atoms.
- Y 14 represents a hexavalent aliphatic hydrocarbon group having 2 to 35 carbon atoms, an aromatic hydrocarbon group having 6 to 35 carbon atoms, or a complex having 2 to 35 carbon atoms. represents a cyclic group, the aliphatic hydrocarbon group, -COO -, - O -, - OCO -, - NHCO -, - NH- or -CONH- may be interrupted by, Z 11 ⁇ Z 16 is And each independently a group in the same range as the groups represented by Z 11 to Z 13 in the general formula (1).
- the photosensitive composition of the present invention includes, if necessary, a thermal polymerization inhibitor such as p-anisole, hydroquinone, pyrocatechol, t-butylcatechol, phenothiazine; a plasticizer; an adhesion promoter; a filler; Conventional additives such as a foaming agent, a leveling agent, a surface conditioner, an antioxidant, an ultraviolet absorber, a dispersion aid, a coagulation inhibitor, a catalyst, an effect accelerator, a cross-linking agent, and a thickener can be added.
- an optional component other than the polymerizable compound having an ethylenically unsaturated bond and the oxime ester compound of the present invention (provided that the other photopolymerization initiator and the ethylenically unsaturated group have
- the amount of the alkali-developable compound, inorganic compound (filler), colorant, and solvent, which may be used) is appropriately selected according to the purpose of use and is not particularly limited. The total amount is 50 parts by mass or less with respect to 100 parts by mass of the polymerizable compound having a polymerizable unsaturated bond.
- cured material can also be improved by using another organic polymer with the polymeric compound which has the said ethylenically unsaturated bond.
- the organic polymer include polystyrene, polymethyl methacrylate, methyl methacrylate-ethyl acrylate copolymer, poly (meth) acrylic acid, styrene- (meth) acrylic acid copolymer, (meth) acrylic acid-methyl methacrylate.
- Copolymer ethylene-vinyl chloride copolymer, ethylene-vinyl copolymer, polyvinyl chloride resin, ABS resin, nylon 6, nylon 66, nylon 12, urethane resin, polycarbonate polyvinyl butyral, cellulose ester, polyacrylamide, saturated
- polyester phenol resin, phenoxy resin, polyamideimide resin, polyamic acid resin, epoxy resin, etc.
- polystyrene, (meth) acrylic acid-methyl methacrylate copolymer, and epoxy resin are preferred. Arbitrariness. When other organic polymer is used, the amount used is preferably 10 to 500 parts by mass with respect to 100 parts by mass of the polymerizable compound having an ethylenically unsaturated bond.
- a chain transfer agent a sensitizer, a surfactant, a silane coupling agent, melamine and the like can be further used in combination.
- a sulfur atom-containing compound is generally used.
- Alkyl compounds trimethylolpropane tris (3-mercaptoisobutyrate), butanediol bis (3-mercaptoisobutyrate), hexanedithiol, decanedithiol, 1,4- Methyl mercaptobenzene, butanediol bisthiopropionate, butanediol bisthioglycolate, ethylene glycol bisthioglycolate, trimethylolpropane tristhioglycolate, butanediol bisthiopropionate, trimethylolpropane tristhiopropionate , Trimethylolpropane tristhioglycolate, pentaerythritol tetrakisthiopropionate, pentaerythritol tetrakisthioglycolate, trishydroxyethyltristhiopropionate, diethylthioxanthone, diisopropyl
- the surfactant examples include fluorine surfactants such as perfluoroalkyl phosphates and perfluoroalkyl carboxylates; anionic surfactants such as higher fatty acid alkali salts, alkyl sulfonates, and alkyl sulfates; higher amines Cationic surfactants such as halogenates and quaternary ammonium salts; Nonionic surfactants such as polyethylene glycol alkyl ethers, polyethylene glycol fatty acid esters, sorbitan fatty acid esters, and fatty acid monoglycerides; amphoteric surfactants; silicone surfactants Surfactants such as agents can be used, and these may be used in combination.
- fluorine surfactants such as perfluoroalkyl phosphates and perfluoroalkyl carboxylates
- anionic surfactants such as higher fatty acid alkali salts, alkyl sulfonates, and alkyl sulfates
- silane coupling agent for example, a silane coupling agent manufactured by Shin-Etsu Chemical Co., Ltd. can be used. Among them, an isocyanate group, a methacryloyl group, or an epoxy group, such as KBE-9007, KBM-502, and KBE-403, can be used. A silane coupling agent is preferably used.
- Examples of the melamine compound include all or part of active methylol groups (CH 2 OH groups) in nitrogen compounds such as (poly) methylol melamine, (poly) methylol glycoluril, (poly) methylol benzoguanamine, and (poly) methylol urea.
- nitrogen compounds such as (poly) methylol melamine, (poly) methylol glycoluril, (poly) methylol benzoguanamine, and (poly) methylol urea.
- Examples include compounds in which (at least two) are alkyl etherified.
- examples of the alkyl group constituting the alkyl ether include a methyl group, an ethyl group, and a butyl group, which may be the same as or different from each other.
- the methylol group which is not alkyletherified may be self-condensed within one molecule, or may be condensed between two molecules, and as a result, an oligomer component may be formed.
- an oligomer component may be formed.
- hexamethoxymethyl melamine, hexabutoxymethyl melamine, tetramethoxymethyl glycoluril, tetrabutoxymethyl glycoluril and the like can be used.
- alkyl etherified melamines such as hexamethoxymethyl melamine and hexabutoxymethyl melamine are preferable.
- the photosensitive composition of the present invention is a known method such as spin coater, roll coater, bar coater, die coater, curtain coater, various printing, dipping, soda glass, quartz glass, semiconductor substrate, metal, paper, plastic. It can be applied on a supporting substrate such as. Moreover, after once applying on support bases, such as a film, it can also transfer on another support base
- an ultrahigh pressure mercury lamp used for curing the photosensitive composition of the present invention, an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a medium pressure mercury lamp, a low pressure mercury lamp, a mercury vapor arc lamp, a xenon arc lamp, High electromagnetic wave energy, electron beam, X-ray, radiation, etc. having a wavelength of 2000 angstrom to 7000 angstrom obtained from carbon arc lamp, metal halide lamp, fluorescent lamp, tungsten lamp, excimer lamp, germicidal lamp, light emitting diode, CRT light source, etc.
- energy rays can be used, preferably, an ultra-high pressure mercury lamp, a mercury vapor arc lamp, a carbon arc lamp, a xenon arc lamp, and the like that emit light having a wavelength of 300 to 450 nm are exemplified.
- the laser direct drawing method that directly forms an image from digital information such as a computer without using a mask improves not only productivity but also resolution and positional accuracy.
- the laser light light having a wavelength of 340 to 430 nm is preferably used, but excimer laser, nitrogen laser, argon ion laser, helium cadmium laser, helium neon laser, krypton ion laser.
- lasers that emit light in the visible to infrared region such as various semiconductor lasers and YAG lasers, are also used. When these lasers are used, a sensitizing dye that absorbs the region from visible to infrared is added.
- the photosensitive composition of the present invention comprises a photocurable paint or varnish; a photocurable adhesive; a printed circuit board; a color filter in a color display liquid crystal display element such as a color television, a PC monitor, a personal digital assistant, a digital camera; Color filter of image sensor; Electrode material for plasma display panel; Powder coating; Printing ink; Printing plate; Adhesive; Dental composition; Gel coat; Photoresist for electronics; Electroplating resist; Solder resists; resists for manufacturing color filters for various display applications or for forming structures in the manufacturing process of plasma display panels, electroluminescent display devices, and LCDs; compositions for encapsulating electrical and electronic components Material; Solder resist; Magnetic recording material; Micro machine part Optical waveguide switch; plating mask; etching mask; color test system; glass fiber cable coating; stencil for screen printing; material for manufacturing three-dimensional objects by stereolithography; holographic recording material; A fine electronic circuit; a bleaching material; a bleaching material for an image recording material; a bleaching
- the photosensitive composition of the present invention can also be used for the purpose of forming spacers for liquid crystal display panels and for forming protrusions for vertical alignment type liquid crystal display elements.
- it is useful as a photosensitive composition for simultaneously forming protrusions and spacers for a vertical alignment type liquid crystal display element.
- the spacer for a liquid crystal display panel includes (1) a step of forming a coating film of the photosensitive composition of the present invention on a substrate, and (2) irradiation of the coating film with radiation through a mask having a predetermined pattern shape. (3) a baking step after exposure, (4) a step of developing the coating after exposure, and (5) a step of heating the coating after development.
- the (colored) photosensitive composition of the present invention to which an ink repellent agent is added is useful as a partition-forming resin composition for an inkjet system, and the composition is used for a color filter, and particularly has a profile angle of 50 ° or more. It is preferably used for a partition for an inkjet color filter.
- the ink repellent agent a composition comprising a fluorosurfactant and a fluorosurfactant is preferably used.
- An optical element is formed by a method in which a partition formed from the photosensitive composition of the present invention partitions an image to be transferred, and droplets are applied to the recessed portions on the partitioned image to be transferred by an ink jet method to form an image region. Manufactured. At this time, it is preferable that the droplet contains a colorant and the image region is colored, and a pixel group composed of a plurality of colored regions and at least a partition wall separating the colored regions of the pixel group on the substrate. And an optical element produced by the above-described optical element manufacturing method is preferably used.
- the photosensitive composition of the present invention is also used as a composition for a protective film or insulating film, and is a monofunctional or bifunctional compound containing an ultraviolet absorber, an alkylated modified melamine and / or an acrylic modified melamine, and an alcoholic hydroxyl group in the molecule.
- the photosensitive composition for the protective film and insulating film (A) a carboxyl group-containing resin obtained by reacting a diol compound and a polyvalent carboxylic acid, having a weight average molecular weight of 2,000 to 40,000 and an acid value of 50 to 200 mg KOH / g; (B) an unsaturated compound containing at least one photopolymerizable ethylenically unsaturated bond in one molecule, (C) an epoxy compound, and (D) a photopolymerization initiator, A resin composition mainly composed of The component (C) is contained in an amount of 10 to 40 parts by weight, the component (D) is contained in an amount of 0.01 to 2.0 parts by weight with respect to a total of 100 parts by weight of the components (A) and (B). It is preferable to contain a compound represented by the above general formula (I) as a photopolymerization initiator of the component.
- a compound represented by the above general formula (I) as a photopolymerization initiator of the
- the insulating film is used for the insulating resin layer in a laminate in which an insulating resin layer is provided on a peelable support substrate, and the laminate can be developed with an alkaline aqueous solution.
- the film thickness is preferably 10 to 100 ⁇ m.
- the photosensitive composition of the present invention can be used as a photosensitive paste composition by containing an inorganic material (inorganic compound).
- the photosensitive paste composition is used to form a fired product pattern such as a partition pattern, a dielectric pattern, an electrode pattern, and a black matrix pattern of a plasma display panel.
- ⁇ Step 2> (Compound Nos. 1, 3, 5, 42) 1.0 eq. Of ketone body 2 obtained in step 1 Hydroxylamine hydrochloride 1.5 eq. Then, dimethylformamide was added twice the theoretical yield, and the mixture was heated and stirred at 80 ° C. for 1 hour under a nitrogen atmosphere. After cooling to room temperature, it was poured into ion exchange water and separated into oil and water. Solvent removal gave each oxime compound 3. (Compound Nos. 71, 73, 77, 131) 1.0 eq. Of ketone body 2 ′ obtained in step 1 Dimethylformamide was added in an amount of 3 times the theoretical yield, and 35% hydrochloric acid 1.0 eq.
- Step 3> 1.0 eq. Of oxime compound 3 (or oxime compound 3 ′) obtained in step 2; And dimethylformamide were added in an amount of 5 times the theoretical yield, and acetic anhydride 1.2 eq. Was added dropwise and stirred at room temperature for 3 hours. The precipitate was collected by filtration, sufficiently washed and dried to obtain oxime ester compounds. The analysis results are shown in [Table 1] to [Table 3].
- reaction solution was cooled to room temperature, 42 g of propylene glycol-1-monomethyl ether-2-acetate, 33 g of biphthalic anhydride and 0.24 g of tetra-n-butylammonium bromide were added, and the mixture was stirred at 120 ° C. for 4 hours.
- OXE-02 photopolymerization initiator
- the oxime ester compound of the present invention is excellent in photolithography properties, it is useful as a photopolymerization initiator.
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Abstract
Description
R11、R12及びR13は、それぞれ独立に、水素原子、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基、炭素原子数7~30のアリールアルキル基又は炭素原子数2~20の複素環基を表し、
R11、R12及びR13で表わされる基の水素原子は、更にR21、OR21、COR21、SR21、NR22R23、CONR22R23、-NR22-OR23、-NCOR22-OCOR23、NR22COR21、OCOR21、COOR21、SCOR21、OCSR21、COSR21、CSOR21、水酸基、ニトロ基、CN、ハロゲン原子、又はCOOR21で置換されていてもよく、
R21、R22及びR23は、それぞれ独立に、水素原子、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基、炭素原子数7~30のアリールアルキル基又は炭素原子数2~20の複素環基を表し、
R21、R22及びR23で表される基の水素原子は、更に水酸基、ニトロ基、CN、ハロゲン原子、水酸基又はカルボキシル基で置換されていてもよく、
R11、R12、R13、R21、R22及びR23で表される基のアルキレン部分は、-O-、-S-、-COO-、-OCO-、-NR24-、-NR24CO-、-NR24COO-、-OCONR24-、-SCO-、-COS-、-OCS-又は-CSO-により酸素原子が隣り合わない条件で1~5回中断されていてもよく、
R24は、水素原子、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基、炭素原子数7~30のアリールアルキル基又は炭素原子数2~20の複素環基を表し、
R11、R12、R13、R21、R22、R23及びR24で表される基のアルキル部分は、分岐側鎖があってもよく、環状アルキルであってもよく、
R3は、水素原子、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基、炭素原子数7~30のアリールアルキル基又は炭素原子数2~20の複素環基を表し、R3で表される基のアルキル部分は、分岐側鎖があってもよく、環状アルキルであってもよく、また、R3とR7、R3とR8、R4とR5、R5とR6及びR6とR7はそれぞれ一緒になって環を形成していてもよく、
R3で表わされる基の水素原子は、更にR21、OR21、COR21、SR21、NR22R23、CONR22R23、-NR22-OR23、-NCOR22-OCOR23、NR22COR21、OCOR21、COOR21、SCOR21、OCSR21、COSR21、CSOR21、水酸基、ニトロ基、CN、ハロゲン原子、又はCOOR21で置換されていてもよく、
R4、R5、R6及びR7は、それぞれ独立に、R11、OR11、SR11、COR14、CONR15R16、NR12COR11、OCOR11、COOR14、SCOR11、OCSR11、COSR14、CSOR11、水酸基、CN又はハロゲン原子を表し、R4とR5、R5とR6及びR6とR7はそれぞれ一緒になって環を形成していてもよく、
R14、R15及びR16は、水素原子又は炭素原子数1~20のアルキル基を表し、
R14、R15及びR16で表される基のアルキル部分は、分岐側鎖があってもよく、環状アルキルであってもよく、
R8は、R11、OR11、SR11、COR11、CONR12R13、NR12COR11、OCOR11、COOR11、SCOR11、OCSR11、COSR11、CSOR11、水酸基、CN又はハロゲン原子を表し、
nは、0又は1を表す。)
また、本発明は、上記感光性組成物に、エチレン性不飽和基を有していてもよいアルカリ現像性を有する化合物を含有させてなるアルカリ現像性感光性樹脂組成物を提供するものである。
また、本発明は、上記アルカリ現像性感光性樹脂組成物に、更に色材を含有させてなる着色アルカリ現像性感光性樹脂組成物を提供するものである。
即ち、本明細書において、上記一般式(I)で表わされる化合物、並びに後述する該化合物の好ましい形態である下記一般式(II)で表わされる化合物及びその例示化合物は、両方の混合物又はどちらか一方を表すものであり、異性体を示した構造に限定するものではない。
また、上記一般式(I)中の、R11、R12、R13、R21、R22、R23及びR24で表される基のアルキル(アルキレン)部分は、分岐側鎖があってもよく、環状アルキルであってもよい。
即ち、ケトン体1とハロゲン化物を反応させることによりケトン体2を得、ケトン体2と塩酸ヒドロキシルアミンを反応させることにより、オキシム化合物3を得る。続いて、該オキシム化合物3に、酸無水物4、酸クロリド4’又はカルボン酸塩4”を反応させることにより、上記一般式(I)で表される本発明のオキシムエステル化合物を得る。n=1の場合も、常法に従い、n=0の場合に準じ、例えば<例2>に示す反応式に従って、製造することができる。
これらの中でも、両末端にカルボキシ基と水酸基とを有するポリマーのモノ(メタ)アクリレート、1個のカルボキシ基と2個以上の(メタ)アクリロイル基とを有する多官能(メタ)アクリレート、不飽和一塩基酸及び多価アルコール又は多価フェノールのエステルに、本発明のオキシムエステル化合物を含有する光重合開始剤は好適である。
これらの重合性化合物は、単独で又は2種以上を混合して使用することができ、また2種以上を混合して使用する場合には、それらを予め共重合して共重合体として使用してもよい。
これらの中でも、エポキシアクリレート樹脂、及び、下記一般式(III)で表されるエポキシ化合物のエポキシ基に、不飽和一塩基酸を作用させ、更に多塩基酸無水物を作用させて得られた樹脂が好ましい。
また、上記エチレン性不飽和結合を有していてもよいアルカリ現像性を有する化合物は、不飽和基を0.2~1.0当量含有していることが好ましい。
即ち、上記エポキシ化合物のエポキシ基1個に対し、上記不飽和一塩基酸のカルボキシル基が0.1~1.0個で付加させた構造を有するエポキシ付加物において、該エポキシ付加物の水酸基1個に対し、上記多塩基酸無水物の酸無水物構造が0.1~1.0個となる比率となるようにするのが好ましい。
上記エポキシ化合物、上記不飽和一塩基酸及び上記多塩基酸無水物の反応は、常法に従って行なうことができる。
上記のエチレン性不飽和結合を有する重合性化合物と、上記のエチレン性不飽和基を有していてもよいアルカリ現像性を有する化合物とは同一の化合物であってもよく、異なっていても良く、また、単独であっても2種以上を併用してもよい。
上記ビスフェノール型エポキシ化合物としては、上記一般式(III)で表されるエポキシ化合物を用いることができる他、例えば、水添ビスフェノール型エポキシ化合物等のビスフェノール型エポキシ化合物も用いることができる。
また上記グリシジルエーテル類としては、エチレングリコールジグリシジルエーテル、プロピレングリコールジグリシジルエーテル、1,4-ブタンジオールジグリシジルエーテル、1,6-ヘキサンジオールジグリシジルエーテル、1,8-オクタンジオールジグリシジルエーテル、1,10-デカンジオールジグリシジルエーテル、2,2-ジメチル-1,3-プロパンジオールジグリシジルエーテル、ジエチレングリコールジグリシジルエーテル、トリエチレングリコールジグリシジルエーテル、テトラエチレングリコールジグリシジルエーテル、ヘキサエチレングリコールジグリシジルエーテル、1,4-シクロヘキサンジメタノールジグリシジルエーテル、1,1,1-トリ(グリシジルオキシメチル)プロパン、1,1,1-トリ(グリシジルオキシメチル)エタン、1,1,1-トリ(グリシジルオキシメチル)メタン、1,1,1,1-テトラ(グリシジルオキシメチル)メタン等を用いることができる。
その他、フェノールノボラック型エポキシ化合物、ビフェニルノボラック型エポキシ化合物、クレゾールノボラック型エポキシ化合物、ビスフェノールAノボラック型エポキシ化合物、ジシクロペンタジエンノボラック型エポキシ化合物等のノボラック型エポキシ化合物;3,4-エポキシ-6-メチルシクロヘキシルメチル-3,4-エポキシ-6-メチルシクロヘキサンカルボキシレート、3,4-エポキシシクロヘキシルメチル-3,4-エポキシシクロヘキサンカルボキシレート、1-エポキシエチル-3,4-エポキシシクロヘキサン等の脂環式エポキシ化合物;フタル酸ジグリシジルエステル、テトラヒドロフタル酸ジグリシジルエステル、ダイマー酸グリシジルエステル等のグリシジルエステル類;テトラグリシジルジアミノジフェニルメタン、トリグリシジルP-アミノフェノール、N,N-ジグリシジルアニリン等のグリシジルアミン類;1,3-ジグリシジル-5,5-ジメチルヒダントイン、トリグリシジルイソシアヌレート等の複素環式エポキシ化合物;ジシクロペンタジエンジオキシド等のジオキシド化合物;ナフタレン型エポキシ化合物;トリフェニルメタン型エポキシ化合物;ジシクロペンタジエン型エポキシ化合物等を用いることもできる。
これらの中でも、ケトン類、エーテルエステル系溶媒等、特にプロピレングリコール-1-モノメチルエーテル-2-アセテート、シクロヘキサノン等が、感光性組成物において、レジストと光重合開始剤の相溶性がよいので好ましい。
無機顔料を用いることができる。これらの顔料は単独で、或いは複数を混合して用いることができる。
これらの中でも、ガラスフリット、酸化チタン、シリカ、層状粘土鉱物、銀等が好ましい。本発明の感光性組成物において、上記無機化合物の含有量は、上記エチレン性不飽和結合を有する重合性化合物100質量部に対して、好ましくは0.1~1000質量部、より好ましくは10~800質量部である。尚、これらの無機化合物は1種又は2種以上を使用することができる。
R23及びR24は、それぞれ独立に、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R25、OR26、SR27、NR28R29、COR30、SOR31、SO2R32又はCONR33R34を表し、R23及びR24は、互いに結合して環を形成していてもよく、
R25、R26、R27、R28、R29、R30、R31、R32、R33及びR34は、それぞれ独立に、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基、炭素原子数7~30のアリールアルキル基又は炭素原子数2~20の複素環基を表し、
X2は、酸素原子、硫黄原子、セレン原子、CR35R36、CO、NR37又はPR38を表し、
X3は、単結合又はCOを表し、
R21、R22、R25、R26、R27、R28、R29、R30、R35、R36、R37及びR38中の炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基又は炭素原子数7~30のアリールアルキル基を表し、該アルキル基又はアリールアルキル基中のメチレン基は、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基又は複素環基で置換されていてもよく、-O-で中断されていてもよく、
R39、R40、R41及びR42は、それぞれ独立に、隣接するどちらかのベンゼン環と一緒になって環を形成していてもよく、
aは、0~4の整数を表し、
bは、0~5の整数を表す。)
O-、>NR79、>PR79又は置換基を有していてもよい炭素原子数1~35の脂肪族炭化水素基、置換基を有していてもよい炭素原子数6~35の芳香族炭化水素基又は置換基を有していてもよい炭素原子数2~35の複素環基を表し、R79は、水素原子、置換基を有していてもよい炭素原子数1~35の脂肪族炭化水素基、置換基を有していてもよい炭素原子数6~35の芳香族炭化水素基又は置換基を有していてもよい炭素原子数2~35の複素環基を表し、該脂肪族炭化水素基は、炭素一炭素二重結合、-O-、-CO-、-O-CO-、-CO-O-又は-SO2-で中断されていてもよい。)
他の有機重合体を使用する場合、その使用量は、上記エチレン性不飽和結合を有する重合性化合物100質量部に対して、好ましくは10~500質量部である。
ルキルエーテル化された化合物等を挙げることができる。
ここで、アルキルエーテルを構成するアルキル基としては、メチル基、エチル基又はブチル基が挙げられ、互いに同一であってもよいし、異なっていてもよい。また、アルキルエーテル化されていないメチロール基は、一分子内で自己縮合していてもよく、二分子間で縮合して、その結果オリゴマー成分が形成されていてもよい。
具体的には、ヘキサメトキシメチルメラミン、ヘキサブトキシメチルメラミン、テトラメトキシメチルグリコールウリル、テトラブトキシメチルグリコールウリル等を用いることができる。
これらの中でも、ヘキサメトキシメチルメラミン、ヘキサブトキシメチルメラミン等のアルキルエーテル化されたメラミンが好ましい。
(A)ジオ-ル化合物と多価カルボン酸類とを反応させて得られ、重量平均分子量が2,000~40,000、酸価が50~200mgKOH/gであるカルボキシル基含有樹脂、
(B)光重合可能なエチレン性不飽和結合を一分子中に少なくとも1つ以上含む不飽和化合物、
(C)エポキシ化合物、及び
(D)光重合開始剤、
を主成分とする樹脂組成物であって、
(A)成分と(B)成分の合計100重量部に対して、(C)成分が10~40重量部、(D)成分が0.01~2.0重量部含有され、且つ、(D)成分の光重合開始剤として上記一般式(I)で表される化合物を含有するものが好ましい。
ケトン体1(又はケトン体1’)の1.0eq.、ハロゲン化アルキル又はハロゲン化アリール1.2eq.、炭酸カリウム3.0eq.及びジメチルスルホキシドを理論収量の5倍量入れ、窒素雰囲気下130℃で3時間加熱撹拌した。室温まで冷却後、イオン交換水を加えて析出した固体をろ取した。十分に洗浄及び乾燥し、ケトン体2(又はケトン体2’)をそれぞれ得た。
(化合物No.1、3、5、42)
ステップ1で得られたケトン体2の1.0eq.、塩酸ヒドロキシルアミン1.5eq.及びジメチルホルムアミドを理論収量の2倍量入れ、窒素雰囲気下80℃で1時間加熱撹拌した。室温まで冷却後、イオン交換水にあけ油水分離した。脱溶媒してオキシム化合物3をそれぞれ得た。
(化合物No.71、73、77、131)
ステップ1で得られたケトン体2’の1.0eq.、ジメチルホルムアミドを理論収量の3倍量入れ、窒素雰囲気下5℃で撹拌しながら、35%塩酸1.0eq.及び亜硝酸イソブチル1.5eq.を滴下し、室温で30時間撹拌した。酢酸エチルと水を加え、油水分離し、有機層を水で洗浄した。有機層を脱溶媒し、オキシム化合物3’をそれぞれ得た。
ステップ2で得られたオキシム化合物3(又はオキシム化合物3’)の1.0eq.及びジメチルホルムアミドを理論収量の5倍量入れ、窒素雰囲気下室温で撹拌しながら、無水酢酸1.2eq.を滴下し室温で3時間撹拌した。析出物をろ取し、十分に洗浄及び乾燥し、オキシムエステル化合物をそれぞれ得た。分析結果を〔表1〕~〔表3〕に示す。
<ステップ1>アルカリ現像性樹脂の調製
反応容器に、上記一般式(III)で表されるエポキシ化合物であるビスフェノールフルオレン型エポキシ樹脂(エポキシ当量231)100g、アクリル酸31g、2,6-ジ-tert-ブチル-p-クレゾール0.26g、テトラ-n-ブチルアンモニウムブロミド0.11g及びプロピレングリコール-1-モノメチルエーテル-2-アセテート33gを仕込み、120℃で16時間攪拌した。反応液を室温まで冷却し、プロピレングリコール-1-モノメチルエーテル-2-アセテート42g、ビフタル酸無水物33g及びテトラ-n-ブチルアンモニウムブロミド0.24gを加えて、120℃で4時間攪拌した。更に、テトラヒドロ無水フタル酸10gを加え、120℃で4時間、100℃で3時間、80℃で4時間、60℃で6時間、40℃で11時間攪拌した後、プロピレングリコール-1-モノメチルエーテル-2-アセテート138gを加えて、プロピレングリコール-1-モノメチルエーテル-2-アセテート溶液として目的物のアルカリ現像性樹脂を得た(Mw=5000、Mn=2100、酸価(固形分)92.7mgKOH/g、固形分35質量%)。
<ステップ2>アルカリ現像性感光性樹脂組成物No.1~No.4の調製
<ステップ1>で得られたアルカリ現像性樹脂22.0g、ジペンタエリスリトールペンタ及びヘキサアクリレート(アロニックスM-402;東亜合成(株)製)4.3g、界面活性剤FZ-2122(日本ユニカー(株)製)のシクロヘキサノン1%溶液1.8g、プロピレングリコール-1-モノメチルエーテル-2-アセテート5.0g、並びにシクロヘキサノン16gを混合し、実施例1-3で得られた化合物No.5、実施例1-5で得られた化合物No.71、実施例1-6で得られた化合物No.73及び実施例1-8で得られた化合物No.131のそれぞれ0.1gを添加してよく攪拌し、本発明の感光性組成物であるアルカリ現像性感光性樹脂組成物No.1~No.4を得た。
実施例1-3で得られた化合物No.5をOXE-02(光重合開始剤;BASF社製)に替えた以外は実施例2-1と同様の手法で、比較アルカリ現像性感光性樹脂組成物No.1を得た。
得られたアルカリ現像性感光性樹脂組成物No.1~No.4及び比較アルカリ現像性感光性樹脂組成物No.1の感度評価を以下のようにして行った。
即ち、ガラス基板上にアルカリ現像性感光性樹脂組成物をスピンコート(900rpm、10秒間)し、ホットプレートを用いて、70℃で、20分間プリベークを行い、光源として高圧水銀ランプを用いて露光した。現像液として2.5質量%炭酸ナトリウム水溶液を用い、スピン現像機で40秒間現像後、よく水洗し、オーブンを用いて、230℃で、60分ポストベークを行いパターンを定着させた。マスク開口20μmにおいて線幅が20μmになる露光量を線幅感度とした。試験結果を〔表4〕に示す。
Claims (7)
- 下記一般式(I)で表されるオキシムエステル化合物。
R11、R12及びR13は、それぞれ独立に、水素原子、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基、炭素原子数7~30のアリールアルキル基又は炭素原子数2~20の複素環基を表し、
R11、R12及びR13で表わされる基の水素原子は、更にR21、OR21、COR21、SR21、NR22R23、CONR22R23、-NR22-OR23、-NCOR22-OCOR23、NR22COR21、OCOR21、COOR21、SCOR21、OCSR21、COSR21、CSOR21、水酸基、ニトロ基、CN、ハロゲン原子、又はCOOR21で置換されていてもよく、
R21、R22及びR23は、それぞれ独立に、水素原子、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基、炭素原子数7~30のアリールアルキル基又は炭素原子数2~20の複素環基を表し、
R21、R22及びR23で表される基の水素原子は、更に水酸基、ニトロ基、CN、ハロゲン原子、水酸基又はカルボキシル基で置換されていてもよく、
R11、R12、R13、R21、R22及びR23で表される基のアルキレン部分は、-O-、-S-、-COO-、-OCO-、-NR24-、-NR24CO-、-NR24COO-、-OCONR24-、-SCO-、-COS-、-OCS-又は-CSO-により酸素原子が隣り合わない条件で1~5回中断されていてもよく、
R24は、水素原子、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基、炭素原子数7~30のアリールアルキル基又は炭素原子数2~20の複素環基を表し、
R11、R12、R13、R21、R22、R23及びR24で表される基のアルキル部分は、分岐側鎖があってもよく、環状アルキルであってもよく、
R3は、水素原子、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基、炭素原子数7~30のアリールアルキル基又は炭素原子数2~20の複素環基を表し、R3で表される基のアルキル部分は、分岐側鎖があってもよく、環状アルキルであってもよく、また、R3とR7、R3とR8、R4とR5、R5とR6及びR6とR7はそれぞれ一緒になって環を形成していてもよく、
R3で表わされる基の水素原子は、更にR21、OR21、COR21、SR21、NR22R23、CONR22R23、-NR22-OR23、-NCOR22-OCOR23、NR22COR21、OCOR21、COOR21、SCOR21、OCSR21、COSR21、CSOR21、水酸基、ニトロ基、CN、ハロゲン原子、又はCOOR21で置換されていてもよく、
R4、R5、R6及びR7は、それぞれ独立に、R11、OR11、SR11、COR14、CONR15R16、NR12COR11、OCOR11、COOR14、SCOR11、OCSR11、COSR14、CSOR11、水酸基、CN又はハロゲン原子を表し、R4とR5、R5とR6及びR6とR7はそれぞれ一緒になって環を形成していてもよく、
R14、R15及びR16は、水素原子又は炭素原子数1~20のアルキル基を表し、R14、R15及びR16で表される基のアルキル部分は、分岐側鎖があってもよく、環状アルキルであってもよく、R8は、R11、OR11、SR11、COR11、CONR12R13、NR12COR11、OCOR11、COOR11、SCOR11、OCSR11、COSR11、CSOR11、水酸基、CN又はハロゲン原子を表し、
nは、0又は1を表す。) - 請求項1又は2の何れか1項に記載のオキシムエステル化合物を含有する光重合開始剤。
- 請求項3に記載の光重合開始剤に、エチレン性不飽和結合を有する重合性化合物を含有させてなる感光性組成物。
- 請求項4に記載の感光性組成物に、エチレン性不飽和基を有していてもよいアルカリ現像性を有する化合物を含有させてなるアルカリ現像性感光性樹脂組成物。
- 請求項5に記載のアルカリ現像性感光性樹脂組成物に、更に色材を含有させてなる着色アルカリ現像性感光性樹脂組成物。
- 請求項4に記載の感光性組成物、請求項5に記載のアルカリ現像性感光性樹脂組成物、又は請求項6に記載の着色アルカリ現像性感光性樹脂組成物にエネルギー線を照射してなる硬化物。
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EP3127898A4 (en) | 2017-11-08 |
EP3127898B1 (en) | 2021-08-25 |
JPWO2015152153A1 (ja) | 2017-04-13 |
CN106132929A (zh) | 2016-11-16 |
TW201546046A (zh) | 2015-12-16 |
KR102369426B1 (ko) | 2022-03-03 |
EP3127898A1 (en) | 2017-02-08 |
US20170166575A1 (en) | 2017-06-15 |
KR20160140652A (ko) | 2016-12-07 |
TWI685484B (zh) | 2020-02-21 |
CN106132929B (zh) | 2020-06-19 |
JP6595983B2 (ja) | 2019-10-23 |
US10189847B2 (en) | 2019-01-29 |
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