WO2006051687A1 - Appareil fournissant un matériau liquide - Google Patents

Appareil fournissant un matériau liquide Download PDF

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Publication number
WO2006051687A1
WO2006051687A1 PCT/JP2005/019572 JP2005019572W WO2006051687A1 WO 2006051687 A1 WO2006051687 A1 WO 2006051687A1 JP 2005019572 W JP2005019572 W JP 2005019572W WO 2006051687 A1 WO2006051687 A1 WO 2006051687A1
Authority
WO
WIPO (PCT)
Prior art keywords
liquid material
dispenser
dispensers
color filter
material supply
Prior art date
Application number
PCT/JP2005/019572
Other languages
English (en)
Japanese (ja)
Inventor
Michinobu Mizumura
Original Assignee
V Technology Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by V Technology Co., Ltd. filed Critical V Technology Co., Ltd.
Priority to KR1020077007765A priority Critical patent/KR101200690B1/ko
Priority to CN2005800353784A priority patent/CN101039758B/zh
Publication of WO2006051687A1 publication Critical patent/WO2006051687A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography

Definitions

  • the present invention provides a liquid material supply in which a liquid material such as a correction ink is supplied and applied to a correction portion when a defective portion generated in a color filter in a liquid crystal display device or the like is corrected. It relates to the device.
  • Patent Document 1 JP-A-8-66652
  • Patent Document 2 JP-A-9-45683
  • Patent Document 3 Japanese Patent Laid-Open No. 2001-252606
  • the conventional liquid material supply apparatus is equipped with only one set of a pipette filled with a liquid material and a mechanism for discharging the liquid material from the pipette, a liquid crystal display
  • a liquid crystal display When there are multiple colored layers such as red, green, and blue filter layers and a black matrix layer as in the device color filter, and defects appear on these different colored layers, Prepare pipettes individually filled with liquid materials corresponding to multiple colored layers After applying the liquid material to the defective part of one colored layer with one pipette, sequentially replace it with another pipette filled with a different liquid material, and add another liquid material to the other colored layer. It is necessary to apply.
  • Such pipette replacement requires complicated work including teaching work to move and position the pipette to the specified application position, especially when it is necessary to apply liquid material to a fine area. As a result, it takes a lot of time and effort, and there is a problem that the application work to the defective part of the liquid material cannot be performed efficiently.
  • the present invention has been made in view of the above circumstances, and a plurality of different liquid materials can be quickly exchanged and efficiently supplied to the required portions to be applied to perform the operation of applying the liquid material. It is an object of the present invention to provide a liquid material supply device that can be efficiently performed. Means for solving the problem
  • the present invention provides:
  • Dispensing tip of the dispenser by applying gas pressure to the liquid material in each dispenser, and the liquid material discharge part supported by the support with multiple dispensers filled with different liquid materials individually
  • the liquid application unit is configured to move the liquid material discharge unit relative to the discharge target liquid by relatively moving a pressure application mechanism for discharging the liquid material and a table on which the support and the discharge target to which the liquid material is discharged are fixed.
  • a liquid material supply device equipped with a drive device for moving to the material application position
  • the liquid material discharge unit is provided with a dispenser mechanism that selects one of the plurality of dispensers and moves and positions the tip of the dispenser to a predetermined liquid material discharge position on the discharge target body.
  • a liquid material supply apparatus is provided.
  • the dispenser mechanism With respect to an axis that passes through the liquid material discharge position and is orthogonal to the surface of the table on which the discharge target is fixed, the dispenser mechanism has a swiveling member that is rotated by a rotary drive device about an axis that intersects the axis.
  • the plurality of dispensers may be supported by the swivel member such that tips of the plurality of dispensers are arranged at predetermined intervals on an arc line centered on the rotation center of the swivel member.
  • Dispenser that arranges and fixes the plurality of dispensers along the arc.
  • the dispenser holder to which the plurality of dispensers are fixed may be detachably fixed to the turning member as a dispenser cartridge.
  • each dispenser has a cylindrical portion
  • the dispenser holder has a plurality of mounting grooves corresponding to the plurality of dispensers, the mounting grooves are formed at predetermined intervals, and have a rectangular cross-sectional shape,
  • the cylindrical portion of each dispenser is mounted in each mounting groove of the dispenser holder, and the cylindrical portion is pressed and fixed to the corner of the mounting groove by an elastic member. .
  • the present invention also provides a defect correcting device for a color filter, comprising the above-described liquid material supply device.
  • the laser processing and laser curing are performed using a single laser irradiation system.
  • a required dispenser is selected from a plurality of dispensers prepared by being filled with different liquid materials by a dispenser replacement mechanism provided in the liquid material discharge unit.
  • the liquid material can be moved to the liquid material application position of the discharged object, so that the required type of liquid material can be quickly and easily applied to the color filter circuit board that needs to apply multiple different liquid materials.
  • the liquid material can be supplied and applied to a predetermined application location, and the liquid material can be efficiently applied.
  • the dispenser by using the swivel member, it is possible to move the dispenser to the liquid material application position with high accuracy in a short time, and to apply with one dispenser among a plurality of dispensers in the dispenser assembly. During the operation, work on the application of other liquid materials!
  • the dispenser has its tip part completely separated from the application surface of the discharged object. Therefore, it is possible to reliably prevent the discharged object from being damaged by the tip of the other dispenser.
  • the dispenser cartridge can be replaced with a new dispenser cartridge, so that the liquid material can be replenished quickly and easily to the liquid material supply unit. it can.
  • the dispenser cartridge can be assembled by positioning and fixing the dispenser easily and accurately by the mounting groove provided in the dispenser holder.
  • the defect correction of the color filter can be efficiently performed with a simple configuration.
  • FIG. 1 is a front view showing an example of a color filter defect correcting apparatus equipped with a liquid material supply apparatus according to an embodiment of the present invention.
  • FIG. 2 is a plan view showing the main part of the liquid material supply device.
  • FIG. 3 is a front view showing the main part.
  • FIG. 4 is a side view showing the main part.
  • FIG. 5 is an enlarged view taken along the arrow Q in FIG.
  • FIG. 6 is an exploded perspective view showing a main part of the liquid material supply device.
  • FIG. 7 is a block diagram of a control system of the liquid material supply device.
  • FIG. 8 is a flowchart for explaining the operation of the liquid material supply apparatus.
  • FIG. 9 is an explanatory diagram showing a color filter defect correcting step in the liquid material supply apparatus.
  • Liquid material application position Liquid material discharge position
  • M is a defect correcting device for a power error filter equipped with a liquid material supply device according to an embodiment of the present invention.
  • the color filter defect correcting device M is a color filter.
  • Filter (Subject to which liquid material is discharged) has a table 1 on which w is placed. This table 1 is placed on a gantry (not shown) and a Y-axis servo motor 51 (in FIG. 1) It is configured to move in the Y-axis direction (direction perpendicular to the paper surface in FIG. 1) y according to FIG. 7 (not shown).
  • the defect correcting apparatus M is further supported by an X-axis beam 2 disposed above the table 1 and is supported by an X-axis servo motor 50 (not shown in FIG.
  • the microscope unit 4 includes a laser oscillator 8, a laser optical axis adjustment mirror 9 having a pair of reflecting mirror forces, and a laser beam output from the laser oscillator 8 and adjusted in the optical axis L by the laser optical axis adjustment mirror 9.
  • An aperture mechanism 10 that shapes the beam shape of the light R, an optical system that has an imaging lens 11 and an objective lens 12, and forms an image of the laser light R that has passed through the aperture mechanism 10 on the color filter W It is equipped with system 13.
  • the imaging unit 5 includes a first half mirror 14 provided between the aperture mechanism 10 and the imaging lens 11 in the optical system 13, and a second half mirror provided to face the half mirror 14. 15 and a CCD camera (imaging means) 16 disposed above the second half mirror 15, and a color filter W on the table 1 illuminated by the illumination projector 6 is connected to the optical system 13 and the optical system 13 Images are taken by the CCD camera 16 through the first and second half mirrors 14 and 15.
  • the illumination projector 6 includes a third half mirror 17 provided between the imaging lens 11 and the objective lens 12 of the optical system 13 disposed on the laser optical axis L, and a lens 18.
  • it includes a reflection mirror 19 facing the third half mirror 17, a lens 20, and an illumination optical fiber 21 connected to an illumination projector (not shown), and the illumination emitted from the illumination optical fiber 21 Light is incident on the third half mirror 17 through the lens 20, the reflection mirror 19 and the lens 18, and the upper surface of the color filter W on the table 1 is illuminated through the objective lens 12! /,
  • the illumination projector 6 includes a third half mirror 17 provided between the imaging lens 11 and the objective lens 12 of the optical system 13 disposed on the laser optical axis L, and a lens 18.
  • it includes a reflection mirror 19 facing the third half mirror 17, a lens 20, and an illumination optical fiber 21 connected to an illumination projector (not shown), and the illumination emitted from the illumination optical fiber 21 Light is incident on the third half mirror 17 through the lens 20, the reflection mirror 19 and the lens 18, and the upper
  • an elevating plate (support) 22 is attached to a Z-axis servomotor 52 (in FIG. (Not shown, see FIG. 7) is supported in the Z-axis direction (vertical direction in FIG. 1) z so as to move integrally with the portion below the imaging lens 11, and the lift plate 22 has a movable plate (Support) 23 Force Supported by the lens replacement servomotor 24 along the guide rail 22a so as to move in the X-axis direction X.
  • a support plate (support) 25 is supported by the drive motor 25a along the guide rail 23a so as to move a small distance in the Y-axis direction y.
  • a plurality of objective lenses 12 having an optical axis along the Z-axis direction z are provided.
  • the right end shown in FIG. 1 is provided with a coating lens 12a having an optimum magnification for coating, and objective lenses 12b to 12e having higher magnification are arranged in order along the X-axis direction X. .
  • the X, ⁇ , Z-axis servo motors 50, 51, 52, etc. are arranged in the X, ⁇ , Z-axis direction with the table 1 and the saddle 3, the ascending / descending plate 22, the movable plate 23, the support plate 25, etc.
  • a drive device that moves the liquid material discharge section 7 to the liquid material application position of the color filter W by moving the liquid material relative to the liquid material is formed.
  • the liquid material discharge unit 7 includes a plurality of individually filled with a plurality of different liquid materials.
  • dispenser mechanism 27 which has four dispensers 26 (in the example shown in the figure) and moves one of them to a predetermined liquid material discharge position P.
  • a pressure applying mechanism 28 Connected to the dispenser exchanging mechanism 27 is a pressure applying mechanism 28 that applies a pulsed gas pressure to each dispenser 26 and discharges a liquid material to the color filter W on the table 1 by applying the tip force of each dispenser 26. Yes.
  • the pressure application mechanism 28 has a conventionally known configuration and is attached to the front surface of the saddle 3.
  • the dispenser exchanging mechanism 27 includes a bracket 29 fixed to a support plate 25 to which the objective lens 12 is attached by a bolt, and a manual adjustment screw 30 attached to the bracket 29.
  • the support member 31 is supported by the Z-axis direction z so as to be adjustable up and down, and is attached to the support member 31 and includes the optical axis L of the optical system 13 of the microscope unit 4 in the Y-axis plane.
  • An indexing pulse motor (rotary drive device) 32 that rotates around the rotation axis S inclined with respect to the vertical axis 32 and the plurality of dispensers 26 are held, and the output pulse motor 32 has an output shaft.
  • Dispenser cartridge 34 attached to connected swivel member 33 It is.
  • the support member 31 may be adjusted up and down by a servo motor or the like.
  • the dispenser cartridge 34 includes a dispenser holder 35 made of a rectangular plate-like member having a thick central portion and thin sides, and the dispenser holder 35 has a rectangular cross section and a plurality of ( In the example shown, four mounting grooves 35a are formed at predetermined intervals in the X-axis direction X. The plurality of dispensers 26 are held in the mounting grooves 35 a of the dispenser holder 35.
  • Each dispenser 26 is formed of a hollow glass pipette having a distal end portion 26a tapered and a proximal end formed into a large-diameter cylindrical portion 26b.
  • the distal end portion 26a protrudes forward from the dispenser holder 35 (lower right in FIG. 4 and toward the front side in FIG. 5), and the cylindrical portion 26b has one corner (leftward in FIG. 5) in the mounting groove 35a. And are pressed against the groove wall by adhesion or the urging force of a pair of elastic members 35b provided in each mounting groove 35a and held in the mounting groove 35a.
  • a holder cover 36 is detachably attached to the dispenser holder 35 in order to prevent the dispenser 26 from slipping out of the mounting groove 35a.
  • the dispenser cartridge 34 is positioned by fitting a pin hole 35c to a pair of pins 37 (only one is shown) fixed to the swivel member 33 and passing through the bolt holes 35d.
  • the lock bolt 38 By screwing the lock bolt 38 into the screw hole 33a of the swivel member 33, the mounting plate 33b on the lower side (upper side in FIG. 6) of the swivel member 33 in the direction along the rotation axis S is placed on the mounting surface 33c.
  • the attachment surface 35e opposite to the opening side of the mounting groove 35a is abutted and fixed.
  • the dispensers 26 held by the dispenser holder 35 have their centers equally spaced on the arc r of a predetermined radius E centered on the rotational center C of the rotational axis S (space of equal angle ⁇ ). (See FIG. 5), and the leading ends (the lower ends in FIGS. 3 and 4) of the tip end portions 26a are positioned at the lowest end position by turning around the rotation axis S of the turning member 33 (see FIG. 5).
  • the liquid material application position P When moved to the liquid material application position P), it is set so as to be in the state closest to the upper surface of the color filter W on the table 1 so as to coincide with the optical axis L !.
  • the dispenser cartridge 34 normally stops at a position (standby position) where the two dispensers 26, 26 on the center side are equidistant from each other on both sides of the liquid material application position P !.
  • the swivel member 33 is provided with a disc 39 having a protrusion 39a on the outer periphery of the swivel plate 33d, and when the swivel member 33 is swung to a swivel limit position in both directions.
  • the pair of limit switches 40a and 40b detects the protrusion 39a and stops the indexing pulse motor 32, thereby preventing damage due to collision with the objective lens 12 due to excessive turning of the turning member 33.
  • each dispenser 26 is connected to a flexible air tube 41 force by inserting the base end side of the cylindrical portion 26b in an airtight manner into the inner hole of the connector 41a having elasticity.
  • Each connector 41a is sandwiched between an upper connector holder 42a (the lower one in FIG. 6) and a lower connector holder 42b (the upper one in FIG. 6), and the upper connector holder 42a, 42b
  • the air tube 41 is supported by the dispenser holder 35 through the dispensers 26 so that the air tubes 41 are not detached from the dispensers 26.
  • the upper and lower connector holders 42a, 42b are detachably engaged with hooks 42al, 42bl provided on the upper and lower connector holders 42a, 42b in engagement grooves 35f, 35g provided on the dispenser holder 35, respectively. Now that it can be attached!
  • each air tube 41 opposite to the dispenser holder 35 is connected to a pressure applying mechanism 28 attached to the saddle 3, and a predetermined pulsed gas pressure acts on each dispenser 26 from the pressure applying mechanism 28. It comes to be.
  • the control device 43 includes a control computer 44 that controls the overall operation of the device including the operations of the microscope unit 4 and the imaging unit 5.
  • the control computer 44 is connected to a control unit 46 connected to a motor driver 45, an image processing unit 48 connected to an autofocus device 47, and a control pneumatic controller 49 connected to the pressure application mechanism 28. It has been done.
  • the image processing unit 48 passes the CCD camera through the optical system 13 and the half mirrors 14 and 15 of the microscope unit 4 based on the reflected light from the color filter W on the table illuminated by the illumination projector 6.
  • the image on the color filter W picked up by the image 16 is taken in via the autofocus device 47, and the required calculation processing is performed to send the image data to the control computer 44.
  • the motor driver 45 operates the X and Y axis servo motors 50 and 51 in response to a command from the control unit 46, and the table 1 (color filter W) and the saddle 3 (liquid material supply unit 7). Are moved relative to each other in the X and Y axis directions, or the servo motor 24 for moving the objective lens 12 is operated to place one of the required objective lenses 12 at the position of the optical axis L of the optical system 13.
  • the Z-axis servo motor 52 is operated based on a command from the autofocus device 47 to raise and lower the liquid material discharge unit 7 together with the objective lens 12. Focusing on the color filter W, and further operating the indexing pulse motor 32 of the dispenser exchange mechanism 27 to select one of the plurality of dispensers 26 to the liquid material application position P. To move It has become.
  • the control unit 46 moves the swivel member 33 to its standby position (for example, a center line H passing through the rotation center C of the swivel member 33 has a center line H). Forward and reverse rotation directions of the pulse motor 32 for rotation from the liquid material application position P) and the number of command pulses (determined by teaching) and force Dispenser 26 (26A, 26B, 26C, 26D).
  • control pneumatic controller 49 operates in response to a command from the control computer 44 to operate the pressure application mechanism 28, so that pressures set according to different types of liquid materials filled in the dispensers 26 are set. Due to the attachment time, each gas dispenser 26 is applied with a gas pressure in the form of a nozzle.
  • the color filter W having each of the green G, red R, and blue B filter layers and the black matrix layer BM coloring layer on the substrate 53 is preliminarily removed from the green G filter layer by an inspection apparatus.
  • a defective portion 54 is detected (see FIG. 9A)
  • the defective portion 54 of the color filter W placed on the table 1 is operated by operating the X, ⁇ , and Z driving devices.
  • the optical axis L of the optical system 13 of the microscope unit 4 is aligned with the position of, and the laser beam scale of pulse oscillation is irradiated to the defect unit 54 through one of the objective lenses 12b to 12e for laser carriage,
  • the notch 54 is shaped into a predetermined shape (see Fig. 9 (b)).
  • the servo motor 24 is operated by a command from the control unit 46, and the coating objective lens 12a is moved to the position of the optical axis L in place of the laser processing objective lenses 12b to 12e (Step S1).
  • the Z-axis servo motor 52 is operated via the motor driver 45 in response to a command from the autofocus device 47, and the support plate 22 is moved up and down to focus the coating objective lens 12a on the color filter W.
  • Step S2 the servo motor 24 is finely moved, and the coating region 55 of the liquid material shaped by the laser light from the laser oscillation 8 shaped by the aperture mechanism 10 is applied to the coating objective.
  • the position of the optical axis of the lens 12a (liquid material application position) P can be accurately adjusted (step S3).
  • the selection command (rotation direction and number of pulses) of the dispenser for example, the dispenser 26A, filled with the green correction ink corresponding to the green G filter layer having the defective portion 54 is sent from the control unit 46 to the motor driver 45.
  • the indexing pulse motor 32 is actuated by the motor driver 45, and the waiting time shown in FIG.
  • the dispenser 26 A is rotationally moved from the position to the position reaching the liquid material application position P (step S5).
  • the Z-axis servo motor 52 is operated via the motor dryer 45 in response to a command from the control unit 45, and is selected.
  • the dispenser 26A is slightly lowered and comes into contact with the application surface of the color filter W (step S6).
  • the control pneumatic controller 49 operates to activate the pressure application mechanism 28, and the liquid material (green G correction ink) filled in the dispenser 26A through the air tube 41 into the dispenser 26A.
  • the tip 2 of the dispenser 26A is applied.
  • the liquid material 56 is discharged from 6a to the processed portion 55 of the green G color layer which is the application surface (step S7).
  • the Z-axis servo motor 52 is actuated to retract the dispenser 26A upward (step S8).
  • the dispensing pulse motor 32 is actuated and the swiveling member 33 rotates to return to the standby position (the position shown in FIG. 5) (step S9), and the application operation of the liquid material 56 to the application surface of the color filter W is performed. finish.
  • the microscope unit 4 is operated, and the continuous wave laser beam R is irradiated on the liquid material 56 applied to the application surface through one of the objective lenses 12b to 12e, so that the liquid material 56 is cured and corrected.
  • the green G filter layer 57 is formed (see FIG. 9D).
  • the motor dryer 5 is similarly activated by the command of the control unit 46.
  • the X, ⁇ , and Z-axis servo motors 50, 51, and 52 are actuated as appropriate to move the liquid material discharge portion to the liquid material application region, which is a defective portion of the color filter W, and the indexing pulse motor.
  • the dispenser 26 (26A to 26D) filled with the liquid material (correction ink) corresponding to the color of the filter layer having the defective portion is activated and sequentially selected and positioned at the liquid material application position P.
  • a required liquid material is applied to the application surface by the action of the pressure application mechanism 28 according to the command of the control computer 49. Then, when the liquid material is no longer in any of the dispensers 26 by continuing the application operation of the liquid material, the dispenser cartridge 34 is replaced with a new dispenser cartridge to discharge the liquid material. Refill part 7 with liquid material. In that case, the dispenser cartridge 34 can be easily replaced by detaching the bolt 38 from the turning member 33.
  • the liquid material supply device has a plurality of dispensers 26 individually filled with correction inks of different colors and is supported by the support bodies 3, 22, 23, 25.
  • the liquid material discharge section 7, the pressure application mechanism 28 that applies a gas pressure to the correction ink in each dispenser 26 and discharges a small amount of correction ink with the tip force of the dispenser 26, and the support bodies 3, 22. , 23, 25 and table 1 with color filter fixed relative to X, ⁇ , Z axis
  • a drive device that moves the liquid material discharge unit 7 to the liquid material application position P of the color filter W, and the liquid material discharge unit 7 includes one of a plurality of dispensers 26.
  • a dispenser mechanism 27 is provided to select one and move and position the tip 26a to a predetermined liquid material discharge position (liquid material application position P) on the color filter W.
  • the dispenser replacement mechanism provided in the liquid material discharge unit 7 from the plurality of dispensers 26 prepared by individually filling correction inks of different colors. 27 allows the dispenser 26 filled with the required correction ink to be selected and moved to the liquid material application position P of the color filter W, so that it is necessary to apply correction inks of different colors.
  • a required type of correction ink can be quickly and easily supplied to a predetermined application site and applied to the filter W, so that the correction ink can be efficiently applied.
  • the dispenser exchanging mechanism 27 includes a turning member 33 that is rotated by an indexing pulse motor 32 about an axis (S) intersecting the Z-axis, and the plurality of dispensers 26 are provided with their tip portions 26a. Since the rotation member 33 is arranged at a predetermined interval on an arc r centered on the rotation center C of the swivel member 33 and supported by the swivel member 33, the dispenser 26 can be replaced with a liquid material with high accuracy in a short time.
  • Each dispenser 26 is configured as a dispenser cartridge 34 that is disposed and fixed to the dispenser holder 35 along the arc r, and the dispenser cartridge 34 is detachably attached to the swivel member 33. Therefore, when the correction ink is exhausted in the dispenser 26, the dispenser cartridge 34 can be replaced with a new dispenser cartridge 34. The correction ink can be easily supplied to the liquid material supply unit 7.
  • each dispenser 26 is mounted in a plurality of mounting grooves 35a each having a rectangular cross section in which the cylindrical portion 26b is formed in the dispenser holder 35 at a predetermined interval, and the elastic member 35b Since the cylindrical portion 26b is pressed and fixed to the corner of the mounting groove 35a, the dispenser cartridge 35 is easily and accurately positioned and fixed to the dispenser holder 35. 34 can be assembled.
  • the liquid material supply device when correcting a defect portion (54, etc.) of the color filter, the correction corresponding to the filter layers of a plurality of colors is used as the liquid material.
  • the present invention is not limited to this.
  • a masking agent or a conductive material is used in repairing a disconnection portion of a wiring formed on an electronic circuit board (object to be ejected). After filling the dispenser cassette with a conductive solution, apply a masking agent to the disconnection part of the wiring, shape the disconnection part with a laser cutter, and then apply the conductive solution to the shaping part. It can also be applied to.
  • a required type of liquid material can be quickly and easily supplied to a predetermined application location and applied.
  • the liquid material can be applied efficiently.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)
  • Nozzles (AREA)

Abstract

Appareil fournissant un matériau liquide comportant une partie d’éjection de matériau liquide (7), qui présente une pluralité de distributeurs (26) remplis respectivement de différents matériaux liquides et est soutenue par un corps de soutien ; un mécanisme pressurisateur qui applique une pression de gaz au matériau liquide dans chaque distributeur (26) pour éjecter une très petite quantité du matériau liquide à partir d’un bord d’attaque du distributeur (26) ; et un appareil moteur qui déplace une table relativement dans le sens des axes X, Y et Z sur laquelle le corps d’appui et un filtre couleur (corps sur lequel le liquide est éjecté) (W) sont fixés de façon à déplacer la partie d’éjection du matériau liquide (7) vers une position d’application de matériau liquide (P) sur le filtre couleur (W). La partie d’éjection de matériau liquide (7) comporte un mécanisme de remplacement de distributeurs (27) qui sélectionne un des distributeurs (26) et déplace la partie de bord d’attaque du distributeur sélectionné pour la mettre à une position d’éjection de matériau liquide prescrite (la position d’application de matériau liquide) (P) sur le filtre couleur (W).
PCT/JP2005/019572 2004-11-15 2005-10-25 Appareil fournissant un matériau liquide WO2006051687A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020077007765A KR101200690B1 (ko) 2004-11-15 2005-10-25 액체재료 공급장치
CN2005800353784A CN101039758B (zh) 2004-11-15 2005-10-25 液体材料供给装置和彩色滤光片的缺陷修正装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004330995A JP4675611B2 (ja) 2004-11-15 2004-11-15 液体材料供給装置
JP2004-330995 2004-11-15

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WO2006051687A1 true WO2006051687A1 (fr) 2006-05-18

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JP2006136864A (ja) * 2004-11-15 2006-06-01 V Technology Co Ltd 液体材料供給装置
JP2006145786A (ja) * 2004-11-18 2006-06-08 V Technology Co Ltd カラーフィルタの欠陥修正方法
JP2007316277A (ja) * 2006-05-25 2007-12-06 Toppan Printing Co Ltd マイクロディスペンサ方式色修正装置
JP2012236128A (ja) * 2011-05-10 2012-12-06 V Technology Co Ltd インクカートリッジ

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TW200925704A (en) * 2007-12-10 2009-06-16 Contrel Technology Co Ltd Pixel-repairing device and applications thereof
JP5254627B2 (ja) * 2008-01-31 2013-08-07 株式会社ジャパンディスプレイイースト 電子回路のパターン欠損修復方法およびその装置
KR101631527B1 (ko) * 2009-06-30 2016-06-20 주식회사 탑 엔지니어링 페이스트 패턴의 리페어방법 및 그 방법에 의하여 리페어된 페이스트 패턴을 가지는 기판
CN102049366B (zh) * 2009-11-06 2015-11-25 Ntn株式会社 涂布单元以及使用该涂布单元的图案修正装置
JP5861166B2 (ja) * 2011-06-09 2016-02-16 株式会社ブイ・テクノロジー ディスペンサ装置、パターン欠陥修正装置、ディスペンサの詰まり解消方法
KR101338884B1 (ko) * 2011-10-06 2013-12-09 참엔지니어링(주) 카트리지 및 그 구동 장치 및 방법
CN102734291A (zh) * 2012-06-25 2012-10-17 张家港市光学仪器有限公司 用于显微镜镜筒支架安装的工装
JP5488850B2 (ja) * 2012-07-07 2014-05-14 Ｔｄｋ株式会社 液体材料吐出装置及び方法
KR101225669B1 (ko) 2012-09-06 2013-01-23 함상민 에어를 이용한 카트리지형 비접촉식 디스펜서
KR101952199B1 (ko) * 2012-12-07 2019-02-27 삼성디스플레이 주식회사 마킹시스템
CN104301597B (zh) * 2013-07-16 2019-11-22 深圳富泰宏精密工业有限公司 拍照控制系统及方法
CN107520099B (zh) 2017-09-11 2019-11-05 京东方科技集团股份有限公司 一种涂覆装置
KR102420993B1 (ko) * 2020-06-30 2022-07-15 참엔지니어링(주) 리페어 장치

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JPS6431186A (en) * 1987-07-27 1989-02-01 Sharp Kk Correction of color filter defect
JPH0945683A (ja) * 1995-07-27 1997-02-14 Hitachi Ltd 配線修正方法
JP2003230861A (ja) * 2002-02-08 2003-08-19 Ntn Corp 欠陥修正方法および欠陥修正装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006136864A (ja) * 2004-11-15 2006-06-01 V Technology Co Ltd 液体材料供給装置
JP2006145786A (ja) * 2004-11-18 2006-06-08 V Technology Co Ltd カラーフィルタの欠陥修正方法
JP2007316277A (ja) * 2006-05-25 2007-12-06 Toppan Printing Co Ltd マイクロディスペンサ方式色修正装置
JP2012236128A (ja) * 2011-05-10 2012-12-06 V Technology Co Ltd インクカートリッジ

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TW200626251A (en) 2006-08-01
KR20070110481A (ko) 2007-11-19
JP4675611B2 (ja) 2011-04-27
CN101039758A (zh) 2007-09-19
KR101200690B1 (ko) 2012-11-12
TWI337900B (en) 2011-03-01
CN101039758B (zh) 2010-08-25

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