WO2005124464A3 - Vacuum system for immersion photolithography - Google Patents

Vacuum system for immersion photolithography Download PDF

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Publication number
WO2005124464A3
WO2005124464A3 PCT/GB2005/002205 GB2005002205W WO2005124464A3 WO 2005124464 A3 WO2005124464 A3 WO 2005124464A3 GB 2005002205 W GB2005002205 W GB 2005002205W WO 2005124464 A3 WO2005124464 A3 WO 2005124464A3
Authority
WO
WIPO (PCT)
Prior art keywords
tank
tool
vacuum system
fluid
gas
Prior art date
Application number
PCT/GB2005/002205
Other languages
French (fr)
Other versions
WO2005124464A2 (en
Inventor
Andrew John Harpham
Paul John Shechter
Paul Alan Stockman
Original Assignee
Boc Group Plc
Andrew John Harpham
Paul John Shechter
Paul Alan Stockman
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc, Andrew John Harpham, Paul John Shechter, Paul Alan Stockman filed Critical Boc Group Plc
Priority to CN2005800199796A priority Critical patent/CN1997943B/en
Priority to JP2007516020A priority patent/JP4772787B2/en
Priority to KR1020067026392A priority patent/KR101151767B1/en
Priority to DE602005020619T priority patent/DE602005020619D1/en
Priority to EP05747245A priority patent/EP1756672B1/en
Priority to KR1020117011954A priority patent/KR101341923B1/en
Priority to AT05747245T priority patent/ATE464589T1/en
Publication of WO2005124464A2 publication Critical patent/WO2005124464A2/en
Publication of WO2005124464A3 publication Critical patent/WO2005124464A3/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D57/00—Separation, other than separation of solids, not fully covered by a single other group or subclass, e.g. B03C
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Toxicology (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Degasification And Air Bubble Elimination (AREA)

Abstract

A vacuum system (30) for extracting a stream of a multi-phase fluid from a photo­lithography tool comprises a pumping arrangement (36, 38) for drawing the fluid from the tool, and an extraction tank (32) located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phases. The pumping arrangement comprises a first pump (36) for extracting gas from the tank, and a second pump (38) for extracting liquid from the tank (32). In order to minimise any pressure fluctuations transmitted from the vacuum system back to the fluid within the tool, a pressure control system (54, 56) maintains a substantially constant pressure in the tank (32) by regulating the amounts of liquid and gas within the tank (32).
PCT/GB2005/002205 2004-06-16 2005-06-06 Vacuum system for immersion photolithography WO2005124464A2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CN2005800199796A CN1997943B (en) 2004-06-16 2005-06-06 Vacuum system for immersion photolithography
JP2007516020A JP4772787B2 (en) 2004-06-16 2005-06-06 Vacuum system for immersion photolithography
KR1020067026392A KR101151767B1 (en) 2004-06-16 2005-06-06 Vacuum system for immersion photolithography
DE602005020619T DE602005020619D1 (en) 2004-06-16 2005-06-06 UNDERPRESSURE SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY
EP05747245A EP1756672B1 (en) 2004-06-16 2005-06-06 Vacuum system for immersion photolithography
KR1020117011954A KR101341923B1 (en) 2004-06-16 2005-06-06 Vacuum system for immersion photolithography
AT05747245T ATE464589T1 (en) 2004-06-16 2005-06-06 VACUUM PRESSURE SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/869,191 2004-06-16
US10/869,191 US7481867B2 (en) 2004-06-16 2004-06-16 Vacuum system for immersion photolithography

Publications (2)

Publication Number Publication Date
WO2005124464A2 WO2005124464A2 (en) 2005-12-29
WO2005124464A3 true WO2005124464A3 (en) 2006-06-08

Family

ID=32851367

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2005/002205 WO2005124464A2 (en) 2004-06-16 2005-06-06 Vacuum system for immersion photolithography

Country Status (10)

Country Link
US (7) US7481867B2 (en)
EP (1) EP1756672B1 (en)
JP (3) JP4772787B2 (en)
KR (2) KR101341923B1 (en)
CN (2) CN1997943B (en)
AT (1) ATE464589T1 (en)
DE (1) DE602005020619D1 (en)
GB (1) GB0414967D0 (en)
TW (1) TWI339131B (en)
WO (1) WO2005124464A2 (en)

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CN104035288A (en) * 2014-06-05 2014-09-10 浙江大学 Continuous gas-liquid separation device used for immersion type photoetching machine under negative-pressure environment
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JP6535649B2 (en) * 2016-12-12 2019-06-26 株式会社荏原製作所 Substrate processing apparatus, discharge method and program
CN112684675B (en) * 2020-12-30 2023-02-21 浙江启尔机电技术有限公司 Vacuum system and immersion lithography machine using same

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