DD242880A1 - Means for photolithographic strukturuebertragung - Google Patents

Means for photolithographic strukturuebertragung Download PDF

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Publication number
DD242880A1
DD242880A1 DD24757183A DD24757183A DD242880A1 DD 242880 A1 DD242880 A1 DD 242880A1 DD 24757183 A DD24757183 A DD 24757183A DD 24757183 A DD24757183 A DD 24757183A DD 242880 A1 DD242880 A1 DD 242880A1
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DD
German Democratic Republic
Prior art keywords
image carrier
optical medium
invention
immersion liquid
device
Prior art date
Application number
DD24757183A
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German (de)
Inventor
Karl-Heinz Kuch
Original Assignee
Kuch Karl Heinz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Kuch Karl Heinz filed Critical Kuch Karl Heinz
Priority to DD24757183A priority Critical patent/DD242880A1/en
Publication of DD242880A1 publication Critical patent/DD242880A1/en

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Abstract

Bei einer Einrichtung zur fotolithografischen Strukturuebertragung soll die Aufloesung des optischen Systems durch Anwendung einer Immersionsfluessigkeit erhoeht werden. In a photolithographic device for Strukturuebertragung the resolution of the optical system is to be increased by applying a Immersionsfluessigkeit. Aufgabengemaess ist fuer die besonderen Anwendungsbedingungen in der Lithografie, speziell Transport und Wechsel des Bildtraegers, eine Moeglichkeit zur Abdichtung der Immersionsfluessigkeit zu schaffen, welche die erforderliche Handhabung des Bildtraegers nicht beeintraechtigt und den Bildtraeger nicht beschaedigt. Aufgabengemaess is to provide for the particular conditions of use in lithography, especially transport and exchange of Bildtraegers, one way to seal the Immersionsfluessigkeit which does not affect the required handling of the Bildtraegers and does not damage the Bildtraeger. Erfindungsgemaess ist der Raum fuer die Immersionsfluessigkeit gegenueber dem Bildtraeger durch ein bewegliches, festes, transparentes optisches Medium abgeschlossen, das durch Druckaenderung der Immersionsfluessigkeit nur waehrend der fotolithografischen Strukturuebertragung mit dem Bildtraeger in Kontakt gebracht und waehrend der Bewegung und des Wechsels des Bildtraegers von diesem abgehoben wird. Erfindungsgemaess the space for the Immersionsfluessigkeit opposite the Bildtraeger by a movable solid transparent optical medium is completed, the accommodated by Druckaenderung the Immersionsfluessigkeit only during the photolithographic Strukturuebertragung with the Bildtraeger in contact and while lifted off the movement and the change of the Bildtraegers of this is , Fig. 2 ab Fig. 2 from

Description

Δ — £.·*£. - Δ -. · * £ £. OOU OOU

Im ersten Ausführungsbeispiel (Fig. 1 a und 1 b) befindet sich vor der Frontlinse 1 eines Projektionsobjektivs 2 eine Immersionsflüssigkeit 3. Diese ist gegenüber der auf dem Koordinatentisch 4 befestigten Halbleiterscheibe 5 durch eine in einer ringförmigen Membran 6 elastisch aufgehängten Glasplatte 7 abgegrenzt. In the first embodiment (Fig. 1 a and 1 b) is located in front of the front lens 1 of a projection lens 2, an immersion liquid 3. This is delimited with respect to the mounted on the coordinate table 4 semiconductor wafer 5 by a resiliently suspended in an annular membrane 6 glass plate 7.

Über das Rohr 8 ist die Immersionsflüssigkeit 3 mit einer nicht dargestellten Einrichtung zur Druckregelung verbunden. Via the tube 8, the immersion liquid 3 is connected to a not shown device for pressure control. Während des Belichtungsprozesses wird die Glasplatte 7 durch einen erhöhten Druck gegen die Halbleiterscheibe 5 gedrückt (Fig. 1 a). During the exposure process, the glass plate 7 is pressed by an increased pressure against the semiconductor wafer 5 (Fig. 1 a).

Während der Bewegung des Koordinatentisches 4 mit der Halbleiterscheibe 5 wird die Glasplatte 7 durch Druckminderung der Immersionsflüssigkeit 3 von der Halbleiterscheibe 5 abgehoben (Fig. 1 b). During the movement of the coordinate table 4 with the semiconductor wafer 5, the glass plate (Fig. 1 b) is lifted from the semiconductor wafer 5 by pressure reduction of the immersion liquid 3 7.

Beim zweiten Ausführungsbeispiel (Fig.2) ist gegenüber dem ersten Ausführungsbeispiel die in der ringförmigen Membran 6 elastisch aufgehängten Glasplatte 7 durch eine durchgehende transparente Membran 9 ersetzt. In the second embodiment (Figure 2) is elastically suspended in the annular membrane 6 glass plate 7 is replaced compared with the first embodiment by a solid transparent membrane. 9

Analog zum ersten Ausführungsbeispiel zeigt Fig.2a das Ausführungsbeispiel 2 mit angedrückter Membran 9 und Fig.2b während der Bewegung des Koordinatentisches 4 mit abgehobener Membran 9 durch Druckverminderung der Immersionsflüssigkeit 3. Analogously to the first embodiment of Figure 2a showing the embodiment 2 is suppressed with the membrane 9 and 2b during the movement of the coordinate table 4 with lifted membrane 9 by reducing the pressure of the immersion liquid. 3

Claims (4)

  1. — "I — £t£ OOU - "I - £ t £ OOU
    Erfindungsanspruch: Invention claim:
    1. Einrichtung zur fotolithografischen Strukturübertragung mittels eines optischen Projektionsobjektivs auf einen parallel zur Bildebene schrittweise bewegten und in kurzen Zeitabständen vorzugsweise automatisch auswechselbaren Bildträger, gekennzeichnet dadurch, daß sich in einem zwischen Projektionsobjektiv und Bildträger abgegrenzten Raum, der zum Bildträger durch ein bewegliches, transparentes optisches Medium dicht abgeschlossen ist, eine an sich bekannte Immersionsflüssigkeit annähernd gleichen Brechwertes befindet, deren Flüssigkeitsdruck auf das optische Medium für einen ungehinderten Transport bzw. Wechsel des Bildträgers veränderbar ist. 1. Device for photolithographic pattern transfer by means of an optical projection lens to a parallel to the image plane moved stepwise and preferably automatically interchangeable in short time intervals image carrier, characterized in that in a confined between projection lens and image volume space of the image carrier by a movable, transparent optical medium is sealed, an approximately same in a known immersion liquid refractive value is, the fluid pressure is variable on the optical medium for unhindered transport or exchange of the image carrier.
  2. 2. Einrichtung nach Punkt 1, gekennzeichnet durch eine elastische Folie als optisches Medium. 2. Device according to item 1, characterized by an elastic film as an optical medium.
  3. 3. Einrichtung nach Punkt 1 gekennzeichnet durch eine elastisch gelagerte Platte als optisches Medium. 3. The device of item 1 characterized by a resiliently mounted plate as an optical medium.
  4. 4. Einrichtung nach Punkt 1, gekennzeichnet dadurch, daß sich zur Vermeidung von Stern- und Interferenzeffekten ein dünner Flüssigkeitsfilm gleichen Brechwertes wie das optische Medium zwischen dem Bildträger und dem optischen Medium befindet. 4. The device of item 1, characterized in that, to avoid interference effects of star and a thin liquid film of the same refractive power as the optical medium between the image carrier and the optical medium is located. · ·
    Hierzu 2 Seiten Zeichnungen : To this end, two sides of drawings:
    Anwendungsgebiet der Erfindung Field of the Invention
    Die Erfindung betrifft eine Einrichtung zur fotolithografischen Strukturübertragung mittels eines optischen Projektionsobjektivs auf einen parallel zur Bildebene schrittweise bewegten und in kurzen Zeitabständen vorzugsweise automatisch auswechselbaren Bildträger, insbesondere zur Herstellung mikroelektronischer Bauelemente. The invention relates to a device for photolithographic pattern transfer by means of a projection optical lens to an image plane to gradually moved parallel and preferably automatically interchangeable in short time intervals image carrier, in particular for the production of microelectronic components.
    Charakteristik der bekannten technischen Lösungen Characteristic of the known technical solutions
    Die projektionsoptische Strukturierung mikroelektronischer Schaltkreise erfordert mit zunehmender Erhöhung des Integrationsgrades eine immer höhere optische Auflösung, die wiederum von der Apertur der Projektionsoptik abhängt. The projection optical patterning of microelectronic circuits requires increase with increasing degree of integration of an ever higher optical resolution, which in turn depends on the aperture of the projection optics. Die Erhöhung der Apertur verringert die Schärfentiefe und führt in Zusammenhang mit der Unebenheit der Bildträger zu technologischen Problemen. Increasing the aperture reduces the depth of field and leads in connection with the unevenness of the image carrier to technological problems.
    Durch das Einbringen einer hochbrechenden Immersionsflüssigkeit zwischen der Frontlinse des Objektivs und dem Bildträger läßt sich die Auflösung der Projektionsobtik erhöhen, ohne die Schärfentiefe zu verringern. By introducing a high-index immersion fluid between the front lens and the image carrier, the dissolution of the Projektionsobtik can be increased without reducing the depth of field. Das aus der Mikroskopie bekannte Verfahren (Brockhaus, „ABC der Optik", Brockhaus Verlag Leipzig, 1961 S. 565ff.) ist auf die Mikrolithografie nicht übertragbar, da die durch Adhäsionskräfte zwischen Bildträger und der Frontlinse gehaltene Immersionsflüssigkeit bei der üblichen . schrittweisen Bewegung des Bildträgers oder dessen automatischen Wechsel abreißen würde. Eine schleifende mechanische Dichtung scheidet wegen der Gefahr der Beschädigung des Bildträgers und wegen der hohen Reibkräfte, die ein exaktes Positionieren des Bildträgers behindern, aus. The well-known from microscopy method (Brockhaus, "ABC of optics," Brockhaus publishing house Leipzig, 1961 S. 565ff.) Is not transferable to microlithography, as the immersion fluid held by adhesion forces between image carrier and the front lens of the in usual. Stepwise movement would tear down the image carrier or the automatic switching. an abrasive mechanical seal separates due to the risk of damage to the image carrier and because of the high frictional forces that impede an exact positioning of the image carrier, from.
    Ziel der Erfindung OBJECT OF THE INVENTION
    Ziel der Erfindung ist die Erhöhung der Auflösung des optischen Systems bei fotolithografischen Einrichtungen mit einer an sich bekannten Immersionsflüssigkeit. The aim of the invention is to increase the resolution of the optical system in photolithography equipment with a known immersion liquid.
    Darlegung des Wesens der Erfindung Principle of the invention
    Der Erfindung liegt die Aufgabe zugrunde, bei einer fotolithografischen Einrichtung eine Möglichkeit zur Abdichtung der Immersionsflüssigkeit zu schaffen, die zu keiner schleifenden Berührung der Dichtung mit dem Bildträger führt und die Bildträgertransport und -wechsel nicht beeinträchtigt. The invention has for its object to provide a way to seal the immersion liquid in a photolithographic device which does not lead to rubbing contact of the seal with the image carrier and changing does not affect the image carrier and transport.
    Erfindungsgemäß wird diese Aufgabe gelöst, indem sich bei einer Einrichtung zur fotolithografischen Strukturübertragung mittels eines optischen Projektionsobjektivs durch eine Immersionsflüssigkeit hindurch auf einem Bildträger, ζ. According to the invention this object is achieved by therethrough on an image carrier, ζ in a device for photolithographic pattern transfer by means of an optical projection lens through an immersion liquid. Β. Β. eine Fotoplatte oder eine Halbleiterscheibe, die Immersionsflüssigkeit in einem abgeschlossenen Raum befindet; a photographic plate or a semiconductor wafer, the immersion liquid is in a closed space; der gegenüber dem Bildträger durch ein bewegliches, festes, transparentes optisches Medium mit gleichem Brechwert abgedichtet wird, das während der Belichtung durch den Druck der Immersionsflüssigkeit auf den Bildträger gedrückt und während der schrittweisen Bewegung des Bildträgers oder bei dessen Wechsel durch Unterdruck der Immersionsflüssigkeit abgehoben wird. which is pressed during the exposure by the pressure of the immersion liquid on the image carrier and lifted during the stepwise movement of the image carrier or the exchange by negative pressure of the immersion liquid which is sealed with respect to the image carrier by a movable solid transparent optical medium having the same refractive index. Das transparente optische Medium kann eine elastische Membran, z. The transparent optical medium may be an elastic membrane, z. B. eine Folie oder eine elastisch gelagerte Platte sein. For example, be a film or a resiliently mounted plate. Zur Vermeidung von Streu- und Interferenzerscheinungen ist es zweckmäßig, zwischen dem festen optischen Medium und dem Bildträger, das feste optische Medium oder den Bildträger mit einem dünnen Film einer Immersionsflüssigkeit gleichen Brechwertes zu benetzen. In order to avoid scattering and interference phenomena it is convenient to wet between the solid optical medium and the image carrier, the solid optical medium or image carrier with a thin film of an immersion liquid refractive same value.
    Ausführungsbeispiel embodiment
    Die Erfindung soll nachstehend anhand zweier in der Zeichnung dargestellter Ausführungsbeispiel erläutert werden. The invention will be explained below with reference to two shown in the drawings embodiment. In der Zeichnung zeigen: In the drawing:
    Fig. 1 (1a, 1b): Einrichtung mit einer ebenen elastisch gelagerten Platte als Abdichtmedium Fig.2 (2a, 2b): Einrichtung mit einer elastischen Folie als Abdichtmedium Fig. 1 (1a, 1b) device having a flat plate as resiliently mounted sealing medium Figure 2 (2a, 2b) with means of an elastic film as a sealing medium
DD24757183A 1983-01-31 1983-01-31 Means for photolithographic strukturuebertragung DD242880A1 (en)

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