JPS5919912A - Immersion distance holding device - Google Patents

Immersion distance holding device

Info

Publication number
JPS5919912A
JPS5919912A JP12906582A JP12906582A JPS5919912A JP S5919912 A JPS5919912 A JP S5919912A JP 12906582 A JP12906582 A JP 12906582A JP 12906582 A JP12906582 A JP 12906582A JP S5919912 A JPS5919912 A JP S5919912A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
pressure
suction
detector
system
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12906582A
Inventor
Sumio Hosaka
Yoshio Kawamura
Shinji Kuniyoshi
Toshishige Kurosaki
Akihiro Takanashi
Tsuneo Terasawa
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70216Systems for imaging mask onto workpiece
    • G03F7/70341Immersion
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/33Immersion oils, or microscope systems or objectives for use with immersion fluids

Abstract

PURPOSE:To prevent the resolving power of an optical system from decreasing by equipping a control system with a reference device which has flow rate resistance similar to that of the opening part of a detector and a suction path with flow rate resistance similar to that of a suction path for liquid from the detector. CONSTITUTION:An amplification control circuit 10 drives a sample table 8 so that the output of a piezoelectric transducer 9, i.e. pressure in the detector 3 is constant. When the suction pressure of a suction source 11 fluctuates, the detected pressure in the detector 3 also varies to cause malfunction apparently as if an interval (h) were varied. For this purpose, the reference device which has a restrictor 14 with flow rate resistance similar to flow rate resistance depending upon the interval between the detector opening part 19 and a sample 17 and a restrictor 13 similar to a restrictor 12 is coupled with the suction source 11. Consequently, the variation with the pressure difference between the detected pressure and reference pressure is eliminated and the piezoelectric transducer 9 transduces this pressure difference into an electric signal; and the amplification control circuit 10 drives the sample table so that its output value is constant. Therefore, the malfunction of the control system is eliminated and a decrease in the resolving power of the optical system is prevented.
JP12906582A 1982-07-26 1982-07-26 Immersion distance holding device Pending JPS5919912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12906582A JPS5919912A (en) 1982-07-26 1982-07-26 Immersion distance holding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12906582A JPS5919912A (en) 1982-07-26 1982-07-26 Immersion distance holding device

Publications (1)

Publication Number Publication Date
JPS5919912A true true JPS5919912A (en) 1984-02-01

Family

ID=15000212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12906582A Pending JPS5919912A (en) 1982-07-26 1982-07-26 Immersion distance holding device

Country Status (1)

Country Link
JP (1) JPS5919912A (en)

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