JP4504479B2 - Microscope for immersion objective lens - Google Patents

Microscope for immersion objective lens Download PDF

Info

Publication number
JP4504479B2
JP4504479B2 JP26668399A JP26668399A JP4504479B2 JP 4504479 B2 JP4504479 B2 JP 4504479B2 JP 26668399 A JP26668399 A JP 26668399A JP 26668399 A JP26668399 A JP 26668399A JP 4504479 B2 JP4504479 B2 JP 4504479B2
Authority
JP
Grant status
Grant
Patent type
Prior art keywords
objective lens
liquid
specimen
microscope
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26668399A
Other languages
Japanese (ja)
Other versions
JP2001091849A (en )
Inventor
紳一郎 合▲崎▼
富男 遠藤
Original Assignee
オリンパス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Images

Description

【0001】 [0001]
【発明の属する技術分野】 BACKGROUND OF THE INVENTION
本発明は、液体中の標本観察に用いられる顕微鏡用液浸対物レンズに関するものである。 The present invention relates to a microscope for immersion objective lens used in sample observation in the liquid.
【0002】 [0002]
【従来の技術】 BACKGROUND OF THE INVENTION
例えば、顕微鏡により液体中の標本を観察しようとした場合、浸液層にある程度の厚みがあると、標本が浸液中のどの位置に存在するかによって、対物レンズと標本との間に存在する浸液の厚みが様々に変化することが知られている。 For example, if you try to observe the specimen in the liquid by a microscope, if there is a certain thickness in immersion layer, depending on whether the sample is present at any position in the immersion liquid is present between the objective lens and the specimen the thickness of the immersion liquid are known to change variously.
【0003】 [0003]
このため、このような標本観察に、通常の対物レンズを使用すると、標本が浸液中のどの深さに位置するかによって、対物レンズの球面収差が変化してしまい、全ての標本について良好な観察像を得るのが困難となる。 Therefore, such a specimen observation, using the normal objective lens, depending specimen located which depth in the immersion liquid, the spherical aberration of the objective lens ends up changing, good for all samples to obtain an observation image becomes difficult.
【0004】 [0004]
そこで、従来では、液体中の標本を観察する場合には、標本を液体で満した容器中に収容するとともに、容器中の液体に対物レンズの先端を直接浸して観察を行なうような方法がとられている。 Therefore, conventionally, when observing the sample in the liquid, as well as accommodating the specimen in a container which is filled with liquid, such a way as to observe dipped the tip of the objective lens in the liquid in the container directly DOO It is.
【0005】 [0005]
一方、顕微鏡やレーザ走査型顕微鏡により3次元的な構造を有する標本を観察する場合、対物レンズまたは標本を載置するステージを光軸方向に移動させながらピント調整や3次元的なレーザ走査などが行なわれている。 On the other hand, when observing a specimen having a three-dimensional structure by microscopy or laser scanning microscope, such as focus adjustment and three-dimensional laser scanning while moving the stage for placing the objective lens or specimen in the optical axis direction It has been carried out.
【0006】 [0006]
しかしながら、このような顕微鏡やレーザ走査型顕微鏡において、上述したように対物レンズの先端を容器中の液体に直接浸した状態で、対物レンズを移動させるようにすると、対物レンズの動きに起因して振動が発生し、この振動が液体を伝わって標本に達することがある。 However, in such a microscope or a laser scanning microscope, in a state immersed directly the tip of the objective lens in the liquid in the container as described above, when to move the objective lens, due to the movement of the objective lens vibration occurs, sometimes this vibration reaches the specimen transmitted liquids. この場合、液体中に浸して観察される標本は、液体中を移動しやすかったり、非常に柔らかいものが多いことから、振動による影響を標本は、受けやすかった。 In this case, the sample to be observed by immersing in the liquid, or likely to move in the liquid, since very soft there are many, specimens the influence of vibration, it was susceptible. 特に、電気生理学やパッチクランプなどのマイクロマニピュレーションを行なう標本の場合は、対物レンズからの振動の影響を受けやすく、精度の高い標本観察ができなくなるという問題があった。 Particularly, in the case of specimens for performing micromanipulation such as electrophysiology and patch clamp, easily affected by vibrations from the objective lens, there is a problem that can not be accurate specimen viewing.
【0007】 [0007]
そこで、従来、特開平7−333511号公報に開示されるように観察部を対物レンズに対して移動可能に支持し、観察部の位置を変化させることで標本上の焦点面の位置を移動できるようにしたものや、特開平6−39220号公報、特開平10−39222号公報に開示されるように、液体で満され密封された特殊容器内に標本を収容し、この特殊容器を特殊容器内の液体と屈折率の等しい液体を収容した液体中に収容するとともに、このような特殊容器と対物レンズとの間に、特殊容器内の液体と屈折率の等しい液体を滞留させたり、このような液体を変形可能な特殊容器に収容したものを介在させるようにすることが考えられている。 Therefore, conventionally, the observation unit as disclosed in JP-A-7-333511 movably supports the objective lens can move the position of the focal plane on the specimen by changing the position of the observation portion as and those in, JP-a 6-39220 discloses, as disclosed in JP-a-10-39222, and houses the specimen fully been sealed special container with liquid, this special container special containers accommodates in a liquid containing the same liquid in the liquid and the refractive index of the inner, between such special containers and the objective lens, or allowed to stay equal liquid in the liquid and the refractive index of the special container, such It has been considered so as to interpose those housed in the deformable special container a liquid.
【0008】 [0008]
【発明が解決しようとする課題】 [Problems that the Invention is to Solve
ところが、特開平7−333511号公報のものは、対物レンズの倍率をMとすると、標本面の移動量に対して観察部ではM 倍の移動量が必要になることから、実際には、観察部を10mmも移動させることになり、その分、観察部の移動機構が大型し、新たな振動の発生源になってしまうという問題があり、また、特開平6−39220号公報、特開平10−39222号公報のものは、標本を収容する特殊容器の構造が限定されるため、観察できる標本が制限されてしまうという問題があった。 However, those of JP-A-7-333511 discloses, when a magnification of the objective lens is M, since it would require the amount of movement of the double M is the observation unit with respect to the amount of movement of the sample surface, in fact, becomes an observation unit that 10mm also moved, correspondingly, the movement mechanism of the observation portion is large, there is a problem that becomes a source of new vibration, also JP-a-6-39220, JP-a No. of JP 10-39222 things, since the structure of the special container containing a specimen is limited, there is a problem that the specimen can be observed is limited.
【0009】 [0009]
本発明は上記事情に鑑みてなされたもので、観察標本の制限を受けることなく精度の高い標本観察を実現でき、しかも、適用顕微鏡の大型化を招くことのない顕微鏡用液浸対物レンズを提供することを目的とする。 The present invention has been made in view of the above circumstances, the restriction of the observation specimen can achieve highly accurate specimen viewing without receiving, moreover, provides a microscope immersion objective lens without increasing the size of the application microscope an object of the present invention is to.
【0010】 [0010]
【課題を解決するための手段】 In order to solve the problems]
請求項1記載の発明は、液体に浸された標本を観察する顕微鏡に適用される顕微鏡用液浸対物レンズにおいて、 複数のレンズからなる対物レンズ本体と、この対物レンズ本体を収容した内筒と、この内筒を中空部に沿って収容する外筒と、前記外筒の前記標本側の先端に対向させて窓部を有するカバーを配置し、このカバーと前記対物レンズ本体との間に前記標本の浸される液体と同じ屈折率を有する液体を充填し、前記窓部の前記標本に対する相対位置を固定したまま、前記対物レンズ本体を光軸方向で移動可能にしたことを特徴としている。 First aspect of the present invention, the microscope immersion objective lens to be applied to a microscope for observing a specimen immersed in liquid, and an objective lens body comprising a plurality of lenses, and an inner cylinder that accommodates the objective lens body , said the inner tube and the outer tube for accommodating along the hollow portion, the outer cylinder is opposed to the tip of the specimen side by placing a cover having a window portion, between this cover the objective lens body the liquid having the same refractive index as the liquid in which is immersed the specimens were filled, while fixing the relative position with respect to the specimen of the window, is characterized in that to allow moving the objective lens body at the optical axis direction.
【0011】 [0011]
請求項2記載の発明は、液体に浸された標本を観察する顕微鏡に適用される顕微鏡用液浸対物レンズにおいて、 According to a second aspect of the invention, the microscope immersion objective lens to be applied to a microscope for observing a specimen immersed in liquid,
複数のレンズからなる対物レンズ本体と、この対物レンズ本体を収容した内筒と、この内筒を中空部に沿って収容する外筒と、この外筒の内部に設けられ、前記外筒に対して前記内筒を前記対物レンズ本体の光軸方向で移動させる駆動手段と、前記外筒に設けられるとともに、前記対物レンズの光路を遮らない位置に窓部を有するカバーと、このカバーの窓部と前記対物レンズ本体との間に充填され、前記標本の浸される液体と同じ屈折率を有する液体とを具備し、前記窓部の前記標本に対する相対位置を固定したまま、前記駆動手段により前記対物レンズ本体を光軸方向に移動可能にしたことを特徴としている。 An objective lens body comprising a plurality of lenses, and an inner cylinder that accommodates the objective lens main body, an outer cylinder that houses along the inner tube in the hollow portion is provided inside the outer cylinder, the outer cylinder relative to a driving means for moving the inner cylinder in the direction of the optical axis of the objective lens body Te, with is provided in the outer cylinder, a cover having a window portion at a position not blocking the optical path of the objective lens, the window portion of the cover the filled between the objective lens main body, while comprising a liquid having the same refractive index as the liquid to be immersed with the specimen was fixed relative position with respect to the specimen of the window portion, said by the driving means and is characterized in that the movable objective lens body in the optical axis direction.
【0012】 [0012]
請求項3記載の発明は、請求項2記載の発明において、前記カバーは、前記外筒に対して着脱可能であることを特徴としている。 According to a third aspect, the invention of claim 2, wherein said cover is characterized in that it is detachably attached to the outer cylinder.
請求項4記載の発明は、請求項1乃至3のいずれかに記載の発明において、さらに、前記外筒と前記内筒との間に変形可能な保持部材を備え、前記液体は、前記窓部を有する前記カバーと前記対物レンズ本体と前記保持部材の間に充填されていることを特徴としている。 Invention of claim 4, in the invention of any one of claims 1 to 3, further comprising a deformable retaining member between said inner cylinder and said outer cylinder, said liquid, said window portion It is characterized in that it is filled between the cover and the objective lens body and the holding member having a.
【0013】 [0013]
この結果、請求項1または2記載の本発明によれば、標本に対する相対位置を固定した窓部により、対物レンズ本体と標本が浸される液体とを分離することにより、対物レンズ本体の移動に伴う振動が標本に伝わるのをなくし、また、対物レンズと標本の間が常に液体で満されているので、対物レンズの移動による球面収差の変化の発生を防止できる。 As a result, according to the present invention of claim 1, wherein the window portion is fixed relative position with respect to the specimen, by separating the liquid objective lens body and the specimen is immersed, the movement of the objective lens body vibration eliminating from being transferred to the sample with, also, since between the objective lens and the specimen is always topped with liquid, can be prevented from occurring variation of the spherical aberration due to the movement of the objective lens.
【0014】 [0014]
請求項3記載の発明によれば、窓部と対物レンズ本体との間に充填される液体を標本の浸される液体の種類に応じて変更できる。 According to the third aspect of the present invention can be changed depending on the type of liquid immersed the specimens liquid to be filled between the window and the objective lens body.
【0015】 [0015]
【発明の実施の形態】 DETAILED DESCRIPTION OF THE INVENTION
以下、本発明の実施の形態を図面に従い説明する。 Hereinafter, an embodiment of the present invention in accordance with the accompanying drawings.
【0016】 [0016]
(第1の実施の形態) (First Embodiment)
図1は、本発明が適用される顕微鏡用液浸対物レンズの概略構成を示している。 Figure 1 shows a schematic configuration of a microscope immersion objective lens to which the present invention is applied. 図において、1は内筒で、この内筒1の中空部には、5枚のレンズ2〜6を光軸方向に沿って配置し対物レンズ本体100を構成している。 In the figure, 1 is the inner cylinder, the hollow portion of the inner cylinder 1, and the five lenses 2-6 constitute the objective lens main body 100 is disposed along the optical axis direction. この場合、これらレンズ2〜6は、それぞれリング状の保持部材7〜11により各別に内筒1の内周面に沿って保持されるとともに、固定枠12により一括して固定されている。 In this case, the lenses 2-6 is held along the inner peripheral surface of the inner cylinder 1 to the respective other by a ring-like holding member 7 to 11, are fixed together by the fixing frame 12.
【0017】 [0017]
一方、13は外筒で、この外筒13は、基端部側の開口端に固定部15を嵌合している。 Meanwhile, 13 in the outer tube, the outer tube 13 is fitted to the fixing portion 15 to the opening end of the base end portion side. この固定部15は、図示しない顕微鏡本体に取付けるためのものである。 The fixing portion 15 is for attaching to a microscope main body (not shown). そして、このような外筒13の中空部に所定の隙間14を介して内筒1を挿装している。 Then, and 挿装 the inner cylinder 1 via a predetermined gap 14 into the hollow portion of such outer cylinder 13. この場合、内筒1は、駆動体16を介して外筒13の固定部15に固定されている。 In this case, the inner cylinder 1 is fixed to the fixing portion 15 of the outer tube 13 via a driver 16. 駆動体16は、対物レンズ本体100を有する内筒1全体を光軸方向に移動させるもので、ここでは、対物レンズ本体100の光路を遮らないような中空部を有するもの、例えばチューブ型の圧電素子、ボイスコイル、リニアモータなどが用いられる。 Driver 16 is intended to move the entire inner cylinder 1 having an objective lens body 100 in the optical axis direction, here, those having a hollow portion so as not to block the optical path of the objective lens main body 100, for example, a tube-type piezoelectric of elements, voice coil, such as a linear motor is used. この場合、対物レンズ本体100の光路を遮らないような中空部を有し、且つ内筒1を光軸方向に移動させるものであれば、これら以外の駆動源を用いてもよい。 In this case, a hollow portion so as not to block the optical path of the objective lens main body 100, if the inner cylinder 1 as it moves in the optical axis direction and may be used other than these drive sources.
【0018】 [0018]
外筒13の先端部には、内筒1先端部との間に、変形可能な保持部材17を介在させている。 The distal end of the outer tube 13, and between the inner cylinder 1 tip is interposed a deformable holding member 17. この保持部材17は、外筒13の中空部における内筒1の光軸方向の妨げないとともに、後述する液体19が外部に漏れ出すのを阻止するもので、ここでは、シリコンゴムやOリングが用いられている。 The holding member 17, along with not interfere with the optical axis direction of the inner cylinder 1 in the hollow portion of the outer tube 13, intended to prevent the liquid 19 to be described later from leaking to the outside, where the silicone rubber or O-ring It has been used. この場合、内筒1の光軸方向の移動を保障するとともに、液漏れを防止できるものであれば、これら以外のものを用いてもよい。 In this case, as to guarantee the movement of the inner cylinder 1 in the optical axis direction, as long as it can prevent liquid leakage, it may also be used other than the above.
【0019】 [0019]
外筒13の先端部側の開口端に先端カバー18をねじ込みなどにより着脱可能に設けている。 Etc. are provided detachably by screwing the distal end cover 18 to the front end portion of the open end of the outer tube 13. この先端カバー18は、対物レンズ本体100の光路、つまり、対物レンズ本体100の先端に位置されるレンズ2の光路を遮らない位置に光学ガラスや光学プラスチックなどの平行平板を有する窓部181を設けている。 The distal end cover 18, the optical path of the objective lens main body 100, i.e., a window portion 181 having parallel flat plate such as optical glass or optical plastic in a position that does not block the light path of the lens 2 to be positioned at the tip of the objective lens main body 100 ing. そして、先端カバー18の窓部181内側のレンズ2との間に液体19を充填している。 Then, filling the liquid 19 between the window portion 181 inside of the lens 2 of the distal end cover 18. この液体19は、後述する標本20が浸される液体22と同じ屈折率を有するもので、この液体19中に、常に、窓部181とレンズ2の間が浸される状態になっている。 The liquid 19, those having the same refractive index as the liquid 22 to be described later specimen 20 is immersed, into the liquid 19, at all times, in a state in which are immersed the between the window 181 and the lens 2.
【0020】 [0020]
そして、このように構成した符号200で示す液浸対物レンズを用いて標本20を観察するには、標本20を浸した液体22の入った容器21の液体22中に先端カバー18の窓部181を浸すようにする。 The window portion 181 of the thus to observe the specimen 20 with an immersion objective lens is indicated by reference numeral 200 configured, the distal end cover 18 into the liquid 22 in container 21 containing the liquid 22 soaked specimens 20 so that immersing the.
【0021】 [0021]
次に、以上のように構成した実施の形態の作用を説明する。 Next, the operation of the embodiment constructed as described above.
【0022】 [0022]
まず、図示しない顕微鏡本体に、外筒13の基端部側に設けられた固定部15を取付ける。 First, the microscope body (not shown), attaching the fixing portion 15 provided at the base end of the outer cylinder 13. そして、標本20を浸した容器21の液体22中に先端カバー18の窓部181を浸すように配置するとともに、窓部181の標本20に対する相対位置を固定する。 Then, the arranged to immerse the window portion 181 of the distal end cover 18 into the liquid 22 in container 21 soaked with sample 20, to fix the relative position with respect to the specimen 20 of the window 181.
【0023】 [0023]
この状態から、駆動体16を付勢して内筒1全体を光軸方向で移動させるとともに、標本20面に対し対物レンズ本体100を移動させ、対物レンズ本体100の焦点面を標本20上で変化させながら、液体22中に浸された標本20の観察が行なわれる。 From this state, moves the entire inner cylinder 1 and biases the driven member 16 in the optical axis direction, to move the objective lens main body 100 with respect to the sample 20 surface, the focal plane of the objective lens body 100 on the sample 20 while changing the observation of the specimen 20 is immersed in the liquid 22 is performed.
【0024】 [0024]
この場合、先端カバー18の窓部181内側とレンズ2との間には、標本20の浸された液体22と同じ屈折率を有する液体19が充填され、しかも、標本20を浸した容器21の液体22中に先端カバー18の窓部181が浸されるとともに、窓部181の標本20に対する相対位置が固定されているので、対物レンズ本体100を動かしても、このときの対物レンズ本体100は、常に、窓部181により容器21内の液体22と分離されることになり、この移動に伴う振動が液体22を介し標本20に伝わることがなくなる。 In this case, between the window 181 inside the lenses 2 of the distal end cover 18, a liquid 19 having the same refractive index as the liquid 22 immersed the sample 20 is filled, moreover, the container was immersed sample 20 21 with window 181 of the distal end cover 18 into the liquid 22 is immersed in, the relative position is fixed relative to the sample 20 of the window portion 181, even by moving the objective lens main body 100, an objective lens body 100 at this time always will be separated from the liquid 22 in the container 21 by the window portion 181, the vibration caused by the movement is eliminated from being transmitted to the sample 20 through the liquid 22. また、対物レンズ100と標本20の間が常に液体22で満されているので、対物レンズ100の移動による球面収差の変化の発生を防止できる。 Furthermore, since between the objective lens 100 and the specimen 20 is always filled with liquid 22, it can prevent the occurrence of change of the spherical aberration due to the movement of the objective lens 100. これにより、常に良好な観察像が得られるとともに、非常に柔らかく、しかも移動しやすい液体22中の標本20であっても振動による悪影響を与えることなく、精度の高い標本観察を行なうことができる。 Thus, the always good observation image is obtained, very soft, yet even the sample 20 moving easily in the liquid 22 without giving the adverse effect of the vibration, it is possible to perform highly accurate specimen viewing.
【0025】 [0025]
また、従来の観察部を対物レンズに対して移動可能に支持し、対物レンズの倍率Mに対し、観察部でM 倍の移動量が必要になるものと比べ、対物レンズ本体100での移動量は、極めて微小にできるので、かかる液浸対物レンズを適用した顕微鏡の大型化を確実に防止できる。 Further, to movably support the previous observations portion with respect to the objective lens, with respect to the magnification M of the objective lens, compared to those required amount of movement of the double M in the observation unit, the movement of the objective lens body 100 the amount is extremely so small can be made, it can be reliably prevented enlargement of the microscope applying such immersion objective.
【0026】 [0026]
さらに、従来の密封された特殊容器を用いるものと比べ、標本20を収容する容器21が制限を受けることがないので、特殊容器に収容するのが難しい標本には適用できないなど観察できる標本が制限されるような不都合を解消できる。 Furthermore, compared to those using the conventional sealed special containers, the container 21 for accommodating the sample 20 is not subject to limitations, it specimens can be observed, such as can not be applied to the specimen it is difficult to accommodate the special containers limit the disadvantage, as can be eliminated.
【0027】 [0027]
また、先端カバー18は、外筒13に対して着脱可能にしているので、先端カバー18内部の液体19は、標本20の浸される液体22の種類に応じて変更することができる。 The tip cover 18, since the detachable from the outer cylinder 13, distal end cover 18 inside the liquid 19 can be changed depending on the type of liquid 22 to be immersed the sample 20. また、外筒13先端部と内筒1との間には、保持部材17が介在され、先端カバー18の窓部181内側のレンズ2との間の液体19が外筒13内部上方に進入するのを阻止しているので、液体22の交換も、簡単な洗浄を行なう程度で、前に使用していた液体22を完全に取り除くことができる。 Between the inner cylinder 1 and the outer tube 13 distal portion, the holding member 17 is interposed, the liquid 19 between the window portion 181 inside of the lens 2 of the distal end cover 18 enters the cylinder 13 inside the upper since prevents the exchange of fluid 22, to the extent that perform simple washing can remove liquid 22 that was used before complete.
【0028】 [0028]
なお、上述した実施の形態では、窓部181の平行平板の屈折率については言及しなかったが、この平行平板の屈折率を、液体22の屈折率と同じにしておいたほうが、さらに望ましい。 In the embodiment described above, but did not mention the refractive index of the parallel plate of the window portion 181, the refractive index of the parallel plate, is better to leave the same as the refractive index of the liquid 22, further desirable. また、上述した構成の液浸対物レンズ200は、図2に示すようにスライドガラス23上に載置された標本20についても、スライドガラス23上で標本20を浸すように置かれた液体22の表面張力を利用し、液体22中に先端カバー18の窓部181を浸すようにして使用することもできる。 Furthermore, the immersion objective lens 200 of the above-described configuration, for the placed on the specimen 20 on the slide glass 23 as shown in FIG. 2, the liquid 22 placed so as to immerse the sample 20 on the slide glass 23 using surface tension, into the liquid 22 so as to immerse the window portion 181 of the distal end cover 18 can also be used.
【0029】 [0029]
(第2の実施の形態) (Second Embodiment)
図3は、本発明の第2の実施の形態の概略構成を示すもので、第1の実施の形態で述べた液浸対物レンズを光学顕微鏡に適用し、このような光学顕微鏡により、パッチクランプなどのマイクロマニピュレーションを行なう例を示している。 Figure 3 shows a schematic configuration of a second embodiment of the present invention, the immersion objective lens described in the first embodiment is applied to an optical microscope, by such an optical microscope, patch clamp It shows an example in which the micromanipulation such.
なお、図3は、図1と同一部分には、同符号を付している。 Incidentally, FIG. 3, the same parts as FIG. 1 are designated by the same reference numerals.
【0030】 [0030]
この場合、図示しない顕微鏡本体に、図1で述べた液浸対物レンズ200の外筒13の基端部側に設けられた固定部15を取付け、液体22の入った容器21中の標本20および、この標本20を操作するマイクロマニピュレータ31先端を観察するようにしている。 In this case, the microscope body (not shown), attaching the fixing portion 15 provided at the base end of the outer tube 13 of the immersion objective lens 200 described in FIG. 1, the sample 20 and the container 21 containing the liquid 22 , and so as to observe the micromanipulator 31 tip to operate this specimen 20.
【0031】 [0031]
従って、このようにしても、第1の実施の形態で述べたように、駆動体16を付勢して、内筒1全体を光軸方向に移動し、標本20に対し対物レンズ本体100を移動させても、対物レンズ本体100は、先端カバー18の窓部181により容器21内の液体22と分離されているため、移動による振動が液体22を介し標本20に伝わることがなくなり、また、対物レンズ100と標本20の間が常に液体22で満されているので、対物レンズ100の移動による球面収差の変化の発生を防止でき、常に良好な観察像が得られ、電気的生理学やパッチクランプなどのマイクロマニピュレーションを容易に精度よく行なうことができる。 Therefore, even in this way, as described in the first embodiment, to bias the drive member 16 to move the entire inner cylinder 1 in the optical axis direction, the objective lens main body 100 with respect to sample 20 even if moved, the objective lens body 100, the window portion 181 of the distal end cover 18 because it is separated from the liquid 22 in the container 21, prevents the vibration due to the movement is transmitted to the sample 20 through the liquid 22 and, since between the objective lens 100 and the specimen 20 is always filled with liquid 22, it is possible to prevent the occurrence of change of the spherical aberration due to the movement of the objective lens 100, always a good observation image is obtained, the electrical physiology and patch clamp it can be performed easily and accurately micromanipulation such.
【0032】 [0032]
(第3の実施の形態) (Third Embodiment)
図4は、本発明の第3の実施の形態の概略構成を示すもので、第1の実施の形態で述べた液浸対物レンズをレーザ走査型顕微鏡に適用した例を示している。 Figure 4 shows a schematic configuration of a third embodiment of the present invention, shows an example of applying the immersion objective lens described in the first embodiment in the laser scanning microscope. なお、図4も、図1と同一部分には、同符号を付している。 Incidentally, FIG. 4 also, the same parts as in FIG. 1 are denoted by the same reference numerals.
【0033】 [0033]
この場合、レーザ光源40からのレーザ光49は、ビームエクスパンダ41によりビーム径を広げられ、ビームスプリッタ42を透過した後、第1のガルバノミラー43および第2のガルバノミラー44で反射され、図1で述べた液浸対物レンズ200を介して液体22の入った容器中21の標本20上に照射される。 In this case, the laser beam 49 from the laser light source 40 is widened beam diameter by the beam expander 41, passes through the beam splitter 42 is reflected by the first galvanometer mirror 43 and the second galvanometer mirror 44, FIG. through the immersion objective lens 200 described in 1 is irradiated onto the sample 20 of the vessel containing in 21 of the liquid 22.
また、標本20からの光、例えば蛍光、反射光あるいは散乱光は、液浸対物レンズ200、第2のガルバノミラー44および第1のガルバノミラー43を通ってビームスプリッタ42で反射され、共焦点光学系45を通過してフォトマルチプライヤーチューブ46により検出される。 Also, light from the sample 20, for example a fluorescent, reflected light or scattered light, the immersion objective lens 200, passes through the second galvanometer mirror 44 and the first galvanometer mirror 43 is reflected by the beam splitter 42, a confocal optical It is detected by the photomultiplier tube 46 through the system 45. この場合、第1のガルバノミラー43、第2のガルバノミラー44によるレーザ光のx、y方向および液浸対物レンズ200の対物レンズ本体100のz方向の移動は、コントローラ47により制御され、標本20上でのレーザ光が3次元的に走査され、また、フォトマルチプライヤーチューブ46からの検出信号は、コントローラ47によりレーザ光の走査信号と同期して記録され画像が処理された後、モニター48に観察像として表示される。 In this case, the first galvanometer mirror 43, the laser beam of x by the second galvanometer mirror 44, the movement of the z direction of the objective lens main body 100 in the y-direction and the immersion objective lens 200 is controlled by the controller 47, the specimen 20 laser beam on is scanned in three dimensions, also, the detection signal from the photomultiplier tube 46, after the image is recorded in synchronism with the scanning signal of the laser light is processed by the controller 47, the monitor 48 It is displayed as an observation image.
【0034】 [0034]
従って、このようにすれば、液浸対物レンズ200の対物レンズ本体100は、レーザ光49が平行光として入射されると、対物レンズ本体100の焦点位置にレーザ光49を集光するようになるが、この場合も、駆動体16を付勢し内筒1全体を光軸方向に移動させることで、対物レンズ本体100を動かしても、対物レンズ本体100は、先端カバー18の窓部181により容器21内の液体22と分離されているため、このときの振動が液体22を介し標本20に伝わることがなくなり、また、対物レンズ100と標本20の間が常に液体22で満されているので、対物レンズ100の移動による球面収差の変化の発生を防止でき、常に良好な観察像が得られる。 Thus, in this manner, the objective lens main body 100 of the immersion objective lens 200, the laser beam 49 is incident as parallel light, so that focusing the laser beam 49 at the focal position of the objective lens main body 100 but even in this case, the driver 16 and moving the entire inner cylinder 1 biased in the optical axis direction, or moving the objective lens main body 100, an objective lens body 100, the window portion 181 of the distal end cover 18 because it is separated from the liquid 22 in the container 21, it prevents the vibration of this time is transmitted to the sample 20 through the liquid 22, and since between the objective lens 100 and the specimen 20 is always filled with the liquid 22 , it is possible to prevent the occurrence of change of the spherical aberration due to the movement of the objective lens 100, always a good observation image can be obtained. これにより、非常に柔らかく、しかも移動しやすい液体22中の標本20であっても振動による悪影響を与えることなく、精度の高い標本観察を行なうことができる。 Thus, very soft, yet even the sample 20 moving easily in the liquid 22 without giving the adverse effect of the vibration, it is possible to perform highly accurate specimen viewing.
【0035】 [0035]
本発明は、上記実施の形態に記載されているものに限定されず、発明の趣旨を逸脱しない範囲で種々変更可能であり、例えば、内筒1を光軸方向で駆動する駆動体16も中空状のものでなくてもよく、また、内筒1が外筒13に対して光軸方向で駆動可能であれば、どのような形状であってもよい。 The present invention is not limited to those described in the above embodiments, and various modifications can be made without departing from the scope of the invention, for example, the driver 16 for driving the inner cylinder 1 in the optical axis direction hollow it may not be of Jo, also the inner cylinder 1 is driven if the optical axis direction relative to the outer tube 13 may be any shape.
【0036】 [0036]
【発明の効果】 【Effect of the invention】
以上述べたように本発明によれば、観察標本の制限を受けることなく精度の高い標本観察を実現でき、しかも、適用顕微鏡の大型化を招くことのない顕微鏡用液浸対物レンズを提供できる。 According to the present invention as mentioned above, the limits of the observation specimen can achieve highly accurate specimen viewing without receiving, moreover, possible to provide a microscope for immersion objective lens without increasing the size of the application microscope.
【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS
【図1】本発明の第1の実施の形態の概略構成を示す図。 FIG. 1 shows a schematic configuration of a first embodiment of the present invention.
【図2】第1の実施の形態の変形例を説明するための図。 Figure 2 is a diagram for explaining a modification of the first embodiment.
【図3】本発明の第2の実施の形態の概略構成を示す図。 FIG. 3 is a diagram showing a schematic configuration of a second embodiment of the present invention.
【図4】本発明の第3の実施の形態の概略構成を示す図。 3 shows a schematic configuration of an embodiment of the present invention; FIG.
【符号の説明】 DESCRIPTION OF SYMBOLS
1…内筒2〜6…レンズ7〜11…保持部材12…固定枠13…外筒14…隙間15…固定部16…駆動体17…保持部材18…先端カバー181…窓部19…液体20…標本21…容器22…液体23…スライドガラス31…マイクロマニピュレータ40…レーザ光源41…ビームエクスパンダ42…ビームスプリッタ43…第1のガルバノミラー44…第2のガルバノミラー45…共焦点光学系46…フォトマルチプライヤーチューブ47…コントローラ48…モニター49…レーザ光100…対物レンズ本体200…液浸対物レンズ 1 ... inner cylinder 2-6 ... lens 7-11 ... holding member 12 ... fixed frame 13 ... outer cylinder 14 ... gap 15 ... fixing portion 16 ... driver 17 ... holding member 18 ... front cover 181 ... window section 19 ... liquid 20 ... specimen 21 ... container 22 ... liquid 23 ... slide glass 31 ... micromanipulator 40 ... laser light source 41 ... beam expander 42 ... beam splitter 43 ... first galvanometer mirror 44 ... second galvanometer mirror 45 ... confocal optical system 46 ... photomultiplier tube 47 ... controller 48 ... monitor 49 ... laser beam 100 ... objective lens main body 200 ... immersion objective

Claims (4)

  1. 液体に浸された標本を観察する顕微鏡に適用される顕微鏡用液浸対物レンズにおいて、 The microscope immersion objective lens to be applied to a microscope for observing the soaked specimen liquid,
    複数のレンズからなる対物レンズ本体と、 An objective lens body comprising a plurality of lenses,
    この対物レンズ本体を収容した内筒と、 Inner cylinder that houses the objective lens main body,
    この内筒を中空部に沿って収容する外筒と、 An outer cylinder that houses along the inner tube in the hollow portion,
    前記外筒の前記標本側の先端に対向させて窓部を有するカバーを配置し、このカバーと前記対物レンズ本体との間に前記標本の浸される液体と同じ屈折率を有する液体を充填し、 So as to face the specimen side tip of the outer cylinder is arranged a cover with a window portion, filled with a liquid having the same refractive index as the liquid to be soaked of said specimen between this cover the objective lens body ,
    前記窓部の前記標本に対する相対位置を固定したまま、前記対物レンズ本体を光軸方向で移動可能にしたことを特徴とする顕微鏡用液浸対物レンズ。 Wherein while fixing the relative position with respect to the specimen of the window, microscope immersion objective lens, characterized in that to allow moving the objective lens body at the optical axis direction.
  2. 液体に浸された標本を観察する顕微鏡に適用される顕微鏡用液浸対物レンズにおいて、 The microscope immersion objective lens to be applied to a microscope for observing the soaked specimen liquid,
    複数のレンズからなる対物レンズ本体と、 An objective lens body comprising a plurality of lenses,
    この対物レンズ本体を収容した内筒と、 Inner cylinder that houses the objective lens main body,
    この内筒を中空部に沿って収容する外筒と、 An outer cylinder that houses along the inner tube in the hollow portion,
    この外筒の内部に設けられ、前記外筒に対して前記内筒を前記対物レンズ本体の光軸方向で移動させる駆動手段と、 Arranged inside the outer cylinder, and driving means for moving the inner cylinder relative to said outer tube in the direction of the optical axis of the objective lens main body,
    前記外筒に設けられるとともに、前記対物レンズの光路を遮らない位置に窓部を有するカバーと、 Together provided in the outer cylinder, a cover having a window portion at a position not blocking the optical path of the objective lens,
    このカバーの窓部と前記対物レンズ本体の間に充填され、且つ前記標本の浸される液体と同じ屈折率を有する液体と を具備し、 Wherein a window part of the cover is filled between the objective lens body, and comprising a liquid having the same refractive index as the liquid to be soaked of said specimen,
    前記窓部の前記標本に対する相対位置を固定したまま、前記駆動手段により前記対物レンズ本体を光軸方向に移動可能にしたことを特徴とする顕微鏡用液浸対物レンズ。 While fixing the relative position with respect to the specimen of the window, microscope immersion objective lens, characterized in that to allow moving the objective lens body in the optical axis direction by the driving means.
  3. 前記カバーは、前記外筒に対して着脱可能であることを特徴とする請求項2記載の顕微鏡用液浸対物レンズ。 The cover, microscope immersion objective lens according to claim 2, wherein the detachable from the said barrel.
  4. さらに、前記外筒と前記内筒との間に変形可能な保持部材を備え、前記液体は、前記窓部を有する前記カバーと前記対物レンズ本体と前記保持部材の間に充填されていることを特徴とする請求項1乃至3のいずれかに記載の顕微鏡用液浸対物レンズ。 Further comprising a deformable retaining member between said inner cylinder and said outer cylinder, the liquid that is filled between the cover and the objective lens body and the holding member having the window portion microscope immersion objective lens according to any one of claims 1 to 3, characterized.
JP26668399A 1999-09-21 1999-09-21 Microscope for immersion objective lens Expired - Fee Related JP4504479B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26668399A JP4504479B2 (en) 1999-09-21 1999-09-21 Microscope for immersion objective lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26668399A JP4504479B2 (en) 1999-09-21 1999-09-21 Microscope for immersion objective lens

Publications (2)

Publication Number Publication Date
JP2001091849A true JP2001091849A (en) 2001-04-06
JP4504479B2 true JP4504479B2 (en) 2010-07-14

Family

ID=17434254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26668399A Expired - Fee Related JP4504479B2 (en) 1999-09-21 1999-09-21 Microscope for immersion objective lens

Country Status (1)

Country Link
JP (1) JP4504479B2 (en)

Families Citing this family (131)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3953460B2 (en) 2002-11-12 2007-08-08 エーエスエムエル ネザーランズ ビー.ブイ. Lithographic projection apparatus
US7213963B2 (en) 2003-06-09 2007-05-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
DE60335595D1 (en) 2002-11-12 2011-02-17 Asml Netherlands Bv Lithographic apparatus with immersion and method for manufacturing a device
CN101349876B (en) 2002-11-12 2010-12-01 Asml荷兰有限公司 Immersion lithographic apparatus and device manufacturing method
KR100588123B1 (en) 2002-11-12 2006-06-09 에이에스엠엘 네델란즈 비.브이. Lithographic Apparatus and Device Manufacturing Method
US9482966B2 (en) 2002-11-12 2016-11-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7110081B2 (en) 2002-11-12 2006-09-19 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
CN100470367C (en) 2002-11-12 2009-03-18 Asml荷兰有限公司 Lithographic apparatus and device manufacturing method
KR100588125B1 (en) 2002-11-18 2006-06-09 에이에스엠엘 네델란즈 비.브이. Lithographic Apparatus and Device Manufacturing Method
DE60319658T2 (en) 2002-11-29 2009-04-02 Asml Netherlands B.V. A lithographic apparatus and method for manufacturing a device
WO2004053959A1 (en) * 2002-12-10 2004-06-24 Nikon Corporation Optical device and projection exposure apparatus using such optical device
EP2613194B1 (en) 2003-04-11 2015-09-16 Nikon Corporation Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
JP4115964B2 (en) 2003-05-13 2008-07-09 エーエスエムエル ネザーランズ ビー.ブイ. Lithographic apparatus and device manufacturing method
US7804574B2 (en) 2003-05-30 2010-09-28 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using acidic liquid
DE10324477A1 (en) * 2003-05-30 2004-12-30 Carl Zeiss Smt Ag Microlithographic projection exposure system
EP2261742A3 (en) 2003-06-11 2011-05-25 ASML Netherlands BV Lithographic apparatus and device manufacturing method.
KR101674329B1 (en) 2003-06-19 2016-11-08 가부시키가이샤 니콘 Exposure device and device producing method
US6867844B2 (en) 2003-06-19 2005-03-15 Asml Holding N.V. Immersion photolithography system and method using microchannel nozzles
US6809794B1 (en) * 2003-06-27 2004-10-26 Asml Holding N.V. Immersion photolithography system and method using inverted wafer-projection optics interface
EP1498778A1 (en) 2003-06-27 2005-01-19 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
DE60308161T2 (en) 2003-06-27 2007-08-09 Asml Netherlands B.V. A lithographic apparatus and method for producing an article
EP1975721A1 (en) 2003-06-30 2008-10-01 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
EP1494074A1 (en) 2003-06-30 2005-01-05 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
US7738074B2 (en) 2003-07-16 2010-06-15 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
EP1500982A1 (en) 2003-07-24 2005-01-26 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
EP1503244A1 (en) 2003-07-28 2005-02-02 ASML Netherlands B.V. Lithographic projection apparatus and device manufacturing method
US7175968B2 (en) 2003-07-28 2007-02-13 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and a substrate
US7779781B2 (en) 2003-07-31 2010-08-24 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US6954256B2 (en) 2003-08-29 2005-10-11 Asml Netherlands B.V. Gradient immersion lithography
US7907255B2 (en) 2003-08-29 2011-03-15 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
EP2261740B1 (en) 2003-08-29 2014-07-09 ASML Netherlands BV Lithographic apparatus
KR100659257B1 (en) 2003-08-29 2006-12-19 에이에스엠엘 네델란즈 비.브이. Lithographic Apparatus and Device Manufacturing Method
US7113259B2 (en) 2003-10-31 2006-09-26 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7158211B2 (en) 2003-09-29 2007-01-02 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
DE60302897T2 (en) 2003-09-29 2006-08-03 Asml Netherlands B.V. A lithographic apparatus and method for manufacturing a device
EP1519230A1 (en) 2003-09-29 2005-03-30 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
EP1524557A1 (en) 2003-10-15 2005-04-20 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
EP1524558A1 (en) 2003-10-15 2005-04-20 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
US7411653B2 (en) 2003-10-28 2008-08-12 Asml Netherlands B.V. Lithographic apparatus
US7352433B2 (en) 2003-10-28 2008-04-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7528929B2 (en) 2003-11-14 2009-05-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7545481B2 (en) 2003-11-24 2009-06-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7589818B2 (en) 2003-12-23 2009-09-15 Asml Netherlands B.V. Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus
US7589822B2 (en) 2004-02-02 2009-09-15 Nikon Corporation Stage drive method and stage unit, exposure apparatus, and device manufacturing method
US7050146B2 (en) 2004-02-09 2006-05-23 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7227619B2 (en) 2004-04-01 2007-06-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7034917B2 (en) 2004-04-01 2006-04-25 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
US7295283B2 (en) 2004-04-02 2007-11-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7898642B2 (en) 2004-04-14 2011-03-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7379159B2 (en) 2004-05-03 2008-05-27 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7616383B2 (en) 2004-05-18 2009-11-10 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7486381B2 (en) 2004-05-21 2009-02-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7481867B2 (en) 2004-06-16 2009-01-27 Edwards Limited Vacuum system for immersion photolithography
US7463330B2 (en) 2004-07-07 2008-12-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7161663B2 (en) 2004-07-22 2007-01-09 Asml Netherlands B.V. Lithographic apparatus
US7304715B2 (en) 2004-08-13 2007-12-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7701550B2 (en) 2004-08-19 2010-04-20 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7133114B2 (en) 2004-09-20 2006-11-07 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7522261B2 (en) 2004-09-24 2009-04-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7355674B2 (en) 2004-09-28 2008-04-08 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and computer program product
US7894040B2 (en) 2004-10-05 2011-02-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7209213B2 (en) 2004-10-07 2007-04-24 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7379155B2 (en) 2004-10-18 2008-05-27 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7414699B2 (en) 2004-11-12 2008-08-19 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7583357B2 (en) 2004-11-12 2009-09-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7423720B2 (en) 2004-11-12 2008-09-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7251013B2 (en) 2004-11-12 2007-07-31 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7411657B2 (en) 2004-11-17 2008-08-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7145630B2 (en) 2004-11-23 2006-12-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7161654B2 (en) 2004-12-02 2007-01-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7446850B2 (en) 2004-12-03 2008-11-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7196770B2 (en) 2004-12-07 2007-03-27 Asml Netherlands B.V. Prewetting of substrate before immersion exposure
US7248334B2 (en) 2004-12-07 2007-07-24 Asml Netherlands B.V. Sensor shield
US7365827B2 (en) 2004-12-08 2008-04-29 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7352440B2 (en) 2004-12-10 2008-04-01 Asml Netherlands B.V. Substrate placement in immersion lithography
US7403261B2 (en) 2004-12-15 2008-07-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7880860B2 (en) 2004-12-20 2011-02-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7528931B2 (en) 2004-12-20 2009-05-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7405805B2 (en) 2004-12-28 2008-07-29 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7491661B2 (en) 2004-12-28 2009-02-17 Asml Netherlands B.V. Device manufacturing method, top coat material and substrate
US20060147821A1 (en) 2004-12-30 2006-07-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
EP1681597B1 (en) 2005-01-14 2010-03-10 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
KR20150004890A (en) 2005-01-31 2015-01-13 가부시키가이샤 니콘 Exposure apparatus and method for manufacturing device
KR101140755B1 (en) 2005-02-10 2012-05-03 에이에스엠엘 네델란즈 비.브이. Immersion liquid, exposure apparatus, and exposure process
US7224431B2 (en) 2005-02-22 2007-05-29 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8018573B2 (en) 2005-02-22 2011-09-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7378025B2 (en) 2005-02-22 2008-05-27 Asml Netherlands B.V. Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
JP4669302B2 (en) * 2005-02-24 2011-04-13 富士通株式会社 Lens cover
US7428038B2 (en) 2005-02-28 2008-09-23 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid
US7324185B2 (en) 2005-03-04 2008-01-29 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7684010B2 (en) 2005-03-09 2010-03-23 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing
US7330238B2 (en) 2005-03-28 2008-02-12 Asml Netherlands, B.V. Lithographic apparatus, immersion projection apparatus and device manufacturing method
JP2006278795A (en) * 2005-03-30 2006-10-12 Nikon Corp Detector, exposure apparatus, and device-manufacturing method
JP2006276561A (en) * 2005-03-30 2006-10-12 Hamamatsu Univ School Of Medicine Objective lens for living bodies for fiber confocal microscope
US7411654B2 (en) 2005-04-05 2008-08-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7291850B2 (en) 2005-04-08 2007-11-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US20060232753A1 (en) 2005-04-19 2006-10-19 Asml Holding N.V. Liquid immersion lithography system with tilted liquid flow
US7433016B2 (en) 2005-05-03 2008-10-07 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8248577B2 (en) 2005-05-03 2012-08-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7317507B2 (en) 2005-05-03 2008-01-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4823576B2 (en) * 2005-06-10 2011-11-24 オリンパス株式会社 The objective protector
US7652746B2 (en) 2005-06-21 2010-01-26 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7751027B2 (en) 2005-06-21 2010-07-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7474379B2 (en) 2005-06-28 2009-01-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7834974B2 (en) 2005-06-28 2010-11-16 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7468779B2 (en) 2005-06-28 2008-12-23 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7535644B2 (en) 2005-08-12 2009-05-19 Asml Netherlands B.V. Lens element, lithographic apparatus, device manufacturing method, and device manufactured thereby
US8054445B2 (en) 2005-08-16 2011-11-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7411658B2 (en) 2005-10-06 2008-08-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7804577B2 (en) 2005-11-16 2010-09-28 Asml Netherlands B.V. Lithographic apparatus
US7864292B2 (en) 2005-11-16 2011-01-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7656501B2 (en) 2005-11-16 2010-02-02 Asml Netherlands B.V. Lithographic apparatus
US7633073B2 (en) * 2005-11-23 2009-12-15 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7773195B2 (en) 2005-11-29 2010-08-10 Asml Holding N.V. System and method to increase surface tension and contact angle in immersion lithography
US7420194B2 (en) 2005-12-27 2008-09-02 Asml Netherlands B.V. Lithographic apparatus and substrate edge seal
US7839483B2 (en) 2005-12-28 2010-11-23 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and a control system
US7649611B2 (en) 2005-12-30 2010-01-19 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8045134B2 (en) 2006-03-13 2011-10-25 Asml Netherlands B.V. Lithographic apparatus, control system and device manufacturing method
US9477158B2 (en) 2006-04-14 2016-10-25 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8045135B2 (en) 2006-11-22 2011-10-25 Asml Netherlands B.V. Lithographic apparatus with a fluid combining unit and related device manufacturing method
US8634053B2 (en) 2006-12-07 2014-01-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US9632425B2 (en) 2006-12-07 2017-04-25 Asml Holding N.V. Lithographic apparatus, a dryer and a method of removing liquid from a surface
US7791709B2 (en) 2006-12-08 2010-09-07 Asml Netherlands B.V. Substrate support and lithographic process
US9013672B2 (en) 2007-05-04 2015-04-21 Asml Netherlands B.V. Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
US8947629B2 (en) 2007-05-04 2015-02-03 Asml Netherlands B.V. Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
NL1036579A1 (en) * 2008-02-19 2009-08-20 Asml Netherlands Bv Lithographic apparatus and methods.
DE102010007728A1 (en) * 2010-02-12 2011-09-29 Leica Microsystems Cms Gmbh Apparatus and method for scanning an object and microscope
EP2381310B1 (en) 2010-04-22 2015-05-06 ASML Netherlands BV Fluid handling structure and lithographic apparatus
JP5839897B2 (en) * 2011-09-02 2016-01-06 オリンパス株式会社 Nonlinear optical microscope
JP6176053B2 (en) * 2013-10-18 2017-08-09 株式会社ニコン Cover member, microscopic observation method and viewing instrument
US9500861B2 (en) 2014-07-30 2016-11-22 Panasonic Intellectual Property Management Co., Ltd. Protective member and method for using protective member

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62121417A (en) * 1985-11-22 1987-06-02 Hitachi Ltd Liquid-immersion objective lens device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2682490B1 (en) * 1991-10-11 1993-12-17 Oreal Apparatus for in vivo observation of the microscopic structure of the skin or a similar fabric.

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62121417A (en) * 1985-11-22 1987-06-02 Hitachi Ltd Liquid-immersion objective lens device

Also Published As

Publication number Publication date Type
JP2001091849A (en) 2001-04-06 application

Similar Documents

Publication Publication Date Title
Keller Objective lenses for confocal microscopy
US7184610B2 (en) Miniaturized microscope array digital slide scanner
Booth Adaptive optics in microscopy
US7738945B2 (en) Method and apparatus for pseudo-projection formation for optical tomography
US6548796B1 (en) Confocal macroscope
US7345814B2 (en) Microscope system and microscope focus maintaining device for the same
Murphy Fundamentals of light microscopy and electronic imaging
US20060033987A1 (en) Microscope with a viewing direction perpendicular to the illumination direction
US20030058530A1 (en) Microscope switchable between observation modes
US20070002435A1 (en) Double-clad fiber scanning microscope
US5870223A (en) Microscope system for liquid immersion observation
US5764408A (en) Lens-barrel optical system and microscope apparatus
US5677525A (en) Ancillary module for making a spatially-resolved measurement of a focus volume
Greger et al. Basic building units and properties of a fluorescence single plane illumination microscope
US6414805B1 (en) Reflected-light type fluorescence microscope and filter cassette used therefor
US20030063379A1 (en) Scanning optical microscope
US8284484B2 (en) Relating to scanning confocal microscopy
JP2005121947A (en) Object lens insertion fixture, microscope and microscope system
Nagorni et al. 4Pi-confocal microscopy provides three-dimensional images of the microtubule network with 100-to 150-nm resolution
US20080247038A1 (en) Scanning confocal microscope
US20030086163A1 (en) Total internal reflection illumination apparatus and microscope using this total internal reflection illumination apparatus
US20020020800A1 (en) Device and method for examining and manipulating microscopic objects
Centonze et al. Tutorial on practical confocal microscopy and use of the confocal test specimen
US6381074B2 (en) Light collecting optical system
US20040263959A1 (en) Scanning beam optical imaging system for macroscopic imaging of an object

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060914

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20091118

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100105

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100301

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100413

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100423

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130430

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140430

Year of fee payment: 4

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees