WO1997003468A1 - Condensateurs dielectriques et leur procede de fabrication - Google Patents
Condensateurs dielectriques et leur procede de fabrication Download PDFInfo
- Publication number
- WO1997003468A1 WO1997003468A1 PCT/JP1996/001883 JP9601883W WO9703468A1 WO 1997003468 A1 WO1997003468 A1 WO 1997003468A1 JP 9601883 W JP9601883 W JP 9601883W WO 9703468 A1 WO9703468 A1 WO 9703468A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- dielectric
- lower electrode
- forming
- ferroelectric
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 55
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 239000010408 film Substances 0.000 claims description 47
- 210000004709 eyebrow Anatomy 0.000 claims description 38
- 229910052763 palladium Inorganic materials 0.000 claims description 21
- 229910052697 platinum Inorganic materials 0.000 claims description 21
- 239000004020 conductor Substances 0.000 claims description 17
- 229910003070 TaOx Inorganic materials 0.000 claims description 15
- 238000004544 sputter deposition Methods 0.000 claims description 13
- 229910019897 RuOx Inorganic materials 0.000 claims description 11
- 229910003087 TiOx Inorganic materials 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 claims description 11
- 230000001590 oxidative effect Effects 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 229910002673 PdOx Inorganic materials 0.000 claims 6
- 229910052741 iridium Inorganic materials 0.000 claims 2
- 229910052762 osmium Inorganic materials 0.000 claims 2
- 229910052702 rhenium Inorganic materials 0.000 claims 2
- 229910052707 ruthenium Inorganic materials 0.000 claims 2
- 229910052715 tantalum Inorganic materials 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 239000000428 dust Substances 0.000 claims 1
- 230000001939 inductive effect Effects 0.000 claims 1
- 238000003307 slaughter Methods 0.000 claims 1
- 229910003445 palladium oxide Inorganic materials 0.000 abstract description 35
- JQPTYAILLJKUCY-UHFFFAOYSA-N palladium(ii) oxide Chemical compound [O-2].[Pd+2] JQPTYAILLJKUCY-UHFFFAOYSA-N 0.000 abstract description 35
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 17
- 239000001301 oxygen Substances 0.000 abstract description 17
- 229910052760 oxygen Inorganic materials 0.000 abstract description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- 239000010703 silicon Substances 0.000 abstract description 8
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 48
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 48
- 239000010936 titanium Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 10
- 239000013078 crystal Substances 0.000 description 5
- 230000005621 ferroelectricity Effects 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910020684 PbZr Inorganic materials 0.000 description 3
- 230000032683 aging Effects 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 239000012466 permeate Substances 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 206010021143 Hypoxia Diseases 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 101150107341 RERE gene Proteins 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors with potential-jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/32051—Deposition of metallic or metal-silicide layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0805—Capacitors only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
- H01L28/56—Capacitors with a dielectric comprising a perovskite structure material the dielectric comprising two or more layers, e.g. comprising buffer layers, seed layers, gradient layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/65—Electrodes comprising a noble metal or a noble metal oxide, e.g. platinum (Pt), ruthenium (Ru), ruthenium dioxide (RuO2), iridium (Ir), iridium dioxide (IrO2)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/75—Electrodes comprising two or more layers, e.g. comprising a barrier layer and a metal layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
Claims
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA002197491A CA2197491C (en) | 1995-07-07 | 1996-07-05 | Ferroelectric capacitor and method for manufacturing thereof |
DE69633554T DE69633554T2 (de) | 1995-07-07 | 1996-07-05 | Festdielektrikumkondensator und verfahren zu seiner herstellung |
EP96922252A EP0785579B1 (en) | 1995-07-07 | 1996-07-05 | Dielectric capacitor and process for preparing the same |
US08/812,059 US6454914B1 (en) | 1995-07-07 | 1997-02-20 | Ferroelectric capacitor and a method for manufacturing thereof |
US10/651,435 US6873517B2 (en) | 1995-07-07 | 2003-08-29 | Ferroelectric capacitor |
US11/015,082 US7057874B2 (en) | 1995-07-07 | 2004-12-16 | Ferroelectric capacitor |
US11/279,495 US7443649B2 (en) | 1995-07-07 | 2006-04-12 | Ferroelectric capacitor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7/172142 | 1995-07-07 | ||
JP17214295A JP3929513B2 (ja) | 1995-07-07 | 1995-07-07 | 誘電体キャパシタおよびその製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/812,059 Continuation US6454914B1 (en) | 1995-07-07 | 1997-02-20 | Ferroelectric capacitor and a method for manufacturing thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997003468A1 true WO1997003468A1 (fr) | 1997-01-30 |
Family
ID=15936351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1996/001883 WO1997003468A1 (fr) | 1995-07-07 | 1996-07-05 | Condensateurs dielectriques et leur procede de fabrication |
Country Status (8)
Country | Link |
---|---|
US (5) | US6454914B1 (ja) |
EP (2) | EP0785579B1 (ja) |
JP (1) | JP3929513B2 (ja) |
KR (1) | KR100385446B1 (ja) |
CN (1) | CN1085411C (ja) |
CA (1) | CA2197491C (ja) |
DE (1) | DE69633554T2 (ja) |
WO (1) | WO1997003468A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100434479B1 (ko) * | 1997-07-10 | 2004-09-18 | 삼성전자주식회사 | 고집적 페로일렉트릭 플로팅게이트 램 및 그 제조방법 |
KR100600261B1 (ko) * | 1999-12-29 | 2006-07-13 | 주식회사 하이닉스반도체 | 반도체 소자의 캐패시터 형성방법 |
CN102157262A (zh) * | 2011-03-10 | 2011-08-17 | 苏州大学 | 一种以Ta2O5薄膜为电介质膜的电容器制备方法 |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3929513B2 (ja) * | 1995-07-07 | 2007-06-13 | ローム株式会社 | 誘電体キャパシタおよびその製造方法 |
US6699304B1 (en) * | 1997-02-24 | 2004-03-02 | Superior Micropowders, Llc | Palladium-containing particles, method and apparatus of manufacture, palladium-containing devices made therefrom |
JP3517876B2 (ja) * | 1998-10-14 | 2004-04-12 | セイコーエプソン株式会社 | 強誘電体薄膜素子の製造方法、インクジェット式記録ヘッド及びインクジェットプリンタ |
DE19929307C1 (de) * | 1999-06-25 | 2000-11-09 | Siemens Ag | Verfahren zur Herstellung einer strukturierten Schicht und dadurch hergestellte Elektrode |
US6214661B1 (en) * | 2000-01-21 | 2001-04-10 | Infineon Technologoies North America Corp. | Method to prevent oxygen out-diffusion from BSTO containing micro-electronic device |
JP4228560B2 (ja) * | 2000-11-01 | 2009-02-25 | ソニー株式会社 | キャパシタ素子及びその製造方法 |
US7378719B2 (en) * | 2000-12-20 | 2008-05-27 | Micron Technology, Inc. | Low leakage MIM capacitor |
JP4428500B2 (ja) | 2001-07-13 | 2010-03-10 | 富士通マイクロエレクトロニクス株式会社 | 容量素子及びその製造方法 |
US7335552B2 (en) * | 2002-05-15 | 2008-02-26 | Raytheon Company | Electrode for thin film capacitor devices |
JP2003332539A (ja) * | 2002-05-17 | 2003-11-21 | Nec Electronics Corp | 強誘電体キャパシタ及びその製造方法並びに半導体記憶装置 |
KR100487528B1 (ko) * | 2002-06-26 | 2005-05-03 | 삼성전자주식회사 | 피로 현상을 억제하기 위한 금속산화막을 갖는 강유전체캐패시터 및 그 제조방법 |
JP2004296929A (ja) * | 2003-03-27 | 2004-10-21 | Seiko Epson Corp | 強誘電体キャパシタの製造方法、強誘電体キャパシタ、記憶素子、電子素子、メモリ装置及び電子機器 |
US7030463B1 (en) * | 2003-10-01 | 2006-04-18 | University Of Dayton | Tuneable electromagnetic bandgap structures based on high resistivity silicon substrates |
US20070069264A1 (en) * | 2003-10-20 | 2007-03-29 | Guru Subramanyam | Ferroelectric varactors suitable for capacitive shunt switching and wireless sensing |
US7719392B2 (en) * | 2003-10-20 | 2010-05-18 | University Of Dayton | Ferroelectric varactors suitable for capacitive shunt switching |
EP1678780A1 (en) * | 2003-10-20 | 2006-07-12 | University Of Dayton | Ferroelectric varactors suitable for capacitive shunt switching |
US7268643B2 (en) * | 2004-01-28 | 2007-09-11 | Paratek Microwave, Inc. | Apparatus, system and method capable of radio frequency switching using tunable dielectric capacitors |
JP4220459B2 (ja) * | 2004-11-22 | 2009-02-04 | 株式会社東芝 | 半導体装置 |
CN101199053B (zh) | 2005-06-09 | 2011-11-02 | 富士通半导体股份有限公司 | 半导体器件及其制造方法 |
US7345331B1 (en) | 2005-09-23 | 2008-03-18 | United States Of America As Represented By The Secretary Of The Navy | Ferroelectric capacitor circuit for sensing hydrogen gas |
US8454804B2 (en) * | 2005-10-28 | 2013-06-04 | Applied Materials Inc. | Protective offset sputtering |
US8460519B2 (en) * | 2005-10-28 | 2013-06-11 | Applied Materials Inc. | Protective offset sputtering |
US7389675B1 (en) | 2006-05-12 | 2008-06-24 | The United States Of America As Represented By The National Aeronautics And Space Administration | Miniaturized metal (metal alloy)/ PdOx/SiC hydrogen and hydrocarbon gas sensors |
US8247855B2 (en) * | 2006-09-12 | 2012-08-21 | Texas Instruments Incorporated | Enhanced local interconnects employing ferroelectric electrodes |
JP2007184623A (ja) * | 2007-01-22 | 2007-07-19 | Rohm Co Ltd | 誘電体キャパシタ |
WO2008126365A1 (ja) * | 2007-03-29 | 2008-10-23 | Panasonic Corporation | 不揮発性記憶装置、不揮発性記憶素子および不揮発性記憶素子アレイ |
US7971171B2 (en) * | 2007-07-03 | 2011-06-28 | International Business Machines Corporation | Method and system for electromigration analysis on signal wiring |
US7922975B2 (en) * | 2008-07-14 | 2011-04-12 | University Of Dayton | Resonant sensor capable of wireless interrogation |
JP5347381B2 (ja) * | 2008-08-28 | 2013-11-20 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
US20100096678A1 (en) * | 2008-10-20 | 2010-04-22 | University Of Dayton | Nanostructured barium strontium titanate (bst) thin-film varactors on sapphire |
US9000866B2 (en) | 2012-06-26 | 2015-04-07 | University Of Dayton | Varactor shunt switches with parallel capacitor architecture |
RU2550090C2 (ru) * | 2013-03-06 | 2015-05-10 | Открытое Акционерное общество "Научно-исследовательский институт "Гириконд" | Тонкопленочный вариконд |
CN113278935B (zh) * | 2021-05-07 | 2022-12-09 | 昆明贵研新材料科技有限公司 | 一种氧化铂电极及其制备方法和用途 |
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JPH08162619A (ja) * | 1994-12-09 | 1996-06-21 | Hitachi Ltd | 半導体装置及びその製造方法 |
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-
1995
- 1995-07-07 JP JP17214295A patent/JP3929513B2/ja not_active Expired - Fee Related
-
1996
- 1996-07-05 EP EP96922252A patent/EP0785579B1/en not_active Expired - Lifetime
- 1996-07-05 DE DE69633554T patent/DE69633554T2/de not_active Expired - Fee Related
- 1996-07-05 CA CA002197491A patent/CA2197491C/en not_active Expired - Fee Related
- 1996-07-05 EP EP04076904A patent/EP1467400A3/en not_active Withdrawn
- 1996-07-05 WO PCT/JP1996/001883 patent/WO1997003468A1/ja active IP Right Grant
- 1996-07-05 KR KR1019960706383A patent/KR100385446B1/ko not_active IP Right Cessation
- 1996-07-05 CN CN96190228A patent/CN1085411C/zh not_active Expired - Fee Related
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1997
- 1997-02-20 US US08/812,059 patent/US6454914B1/en not_active Expired - Lifetime
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2002
- 2002-08-08 US US10/215,844 patent/US6693791B2/en not_active Expired - Lifetime
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2003
- 2003-08-29 US US10/651,435 patent/US6873517B2/en not_active Expired - Fee Related
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2004
- 2004-12-16 US US11/015,082 patent/US7057874B2/en not_active Expired - Fee Related
-
2006
- 2006-04-12 US US11/279,495 patent/US7443649B2/en not_active Expired - Fee Related
Patent Citations (4)
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JPH07169854A (ja) * | 1993-12-16 | 1995-07-04 | Nec Corp | 半導体デバイスおよびその製造方法 |
JPH088403A (ja) * | 1994-06-17 | 1996-01-12 | Sharp Corp | 強誘電体結晶薄膜被覆基板及び該基板を含む強誘電体薄膜素子及び該強誘電体薄膜素子の製造方法 |
JPH088407A (ja) * | 1994-06-21 | 1996-01-12 | Nec Corp | 強誘電体容量とその製造方法及びメモリセル |
JPH08162619A (ja) * | 1994-12-09 | 1996-06-21 | Hitachi Ltd | 半導体装置及びその製造方法 |
Non-Patent Citations (1)
Title |
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See also references of EP0785579A4 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100434479B1 (ko) * | 1997-07-10 | 2004-09-18 | 삼성전자주식회사 | 고집적 페로일렉트릭 플로팅게이트 램 및 그 제조방법 |
KR100600261B1 (ko) * | 1999-12-29 | 2006-07-13 | 주식회사 하이닉스반도체 | 반도체 소자의 캐패시터 형성방법 |
CN102157262A (zh) * | 2011-03-10 | 2011-08-17 | 苏州大学 | 一种以Ta2O5薄膜为电介质膜的电容器制备方法 |
Also Published As
Publication number | Publication date |
---|---|
KR970703049A (ko) | 1997-06-10 |
US20050098819A1 (en) | 2005-05-12 |
US7057874B2 (en) | 2006-06-06 |
CN1155943A (zh) | 1997-07-30 |
US20060170021A1 (en) | 2006-08-03 |
JPH0922829A (ja) | 1997-01-21 |
CA2197491C (en) | 2002-01-01 |
US20020189933A1 (en) | 2002-12-19 |
US20040036105A1 (en) | 2004-02-26 |
EP0785579A1 (en) | 1997-07-23 |
KR100385446B1 (ko) | 2004-09-08 |
EP1467400A2 (en) | 2004-10-13 |
CN1085411C (zh) | 2002-05-22 |
US7443649B2 (en) | 2008-10-28 |
CA2197491A1 (en) | 1997-01-30 |
US6693791B2 (en) | 2004-02-17 |
DE69633554T2 (de) | 2005-10-13 |
JP3929513B2 (ja) | 2007-06-13 |
US6454914B1 (en) | 2002-09-24 |
EP0785579B1 (en) | 2004-10-06 |
US6873517B2 (en) | 2005-03-29 |
EP1467400A3 (en) | 2004-10-20 |
DE69633554D1 (de) | 2004-11-11 |
EP0785579A4 (en) | 1998-10-14 |
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