US20110123389A1 - High Purity Copper and Method of Producing High Purity Copper Based on Electrolysis - Google Patents

High Purity Copper and Method of Producing High Purity Copper Based on Electrolysis Download PDF

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Publication number
US20110123389A1
US20110123389A1 US12/996,949 US99694909A US2011123389A1 US 20110123389 A1 US20110123389 A1 US 20110123389A1 US 99694909 A US99694909 A US 99694909A US 2011123389 A1 US2011123389 A1 US 2011123389A1
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US
United States
Prior art keywords
inclusions
high purity
copper
less
purity copper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/996,949
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English (en)
Inventor
Yuichiro Shindo
Susumu Shimamoto
Atsushi Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JX Nippon Mining and Metals Corp
Original Assignee
JX Nippon Mining and Metals Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JX Nippon Mining and Metals Corp filed Critical JX Nippon Mining and Metals Corp
Assigned to JX NIPPON MINING & METALS CORPORATION reassignment JX NIPPON MINING & METALS CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHIMAMOTO, SUSUMU, FUKUSHIMA, ATSUSHI, SHINDO, YUICHIRO
Publication of US20110123389A1 publication Critical patent/US20110123389A1/en
Abandoned legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25CPROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
    • C25C1/00Electrolytic production, recovery or refining of metals by electrolysis of solutions
    • C25C1/12Electrolytic production, recovery or refining of metals by electrolysis of solutions of copper
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25CPROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
    • C25C7/00Constructional parts, or assemblies thereof, of cells; Servicing or operating of cells
    • C25C7/06Operating or servicing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Electrochemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Wire Bonding (AREA)
US12/996,949 2008-09-30 2009-09-24 High Purity Copper and Method of Producing High Purity Copper Based on Electrolysis Abandoned US20110123389A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008-253038 2008-09-30
JP2008253038 2008-09-30
PCT/JP2009/066479 WO2010038641A1 (ja) 2008-09-30 2009-09-24 高純度銅及び電解による高純度銅の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2009/066479 A-371-Of-International WO2010038641A1 (ja) 2008-09-30 2009-09-24 高純度銅及び電解による高純度銅の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/945,115 Division US9476134B2 (en) 2008-09-30 2013-07-18 High purity copper and method of producing high purity copper based on electrolysis

Publications (1)

Publication Number Publication Date
US20110123389A1 true US20110123389A1 (en) 2011-05-26

Family

ID=42073406

Family Applications (2)

Application Number Title Priority Date Filing Date
US12/996,949 Abandoned US20110123389A1 (en) 2008-09-30 2009-09-24 High Purity Copper and Method of Producing High Purity Copper Based on Electrolysis
US13/945,115 Active 2031-04-21 US9476134B2 (en) 2008-09-30 2013-07-18 High purity copper and method of producing high purity copper based on electrolysis

Family Applications After (1)

Application Number Title Priority Date Filing Date
US13/945,115 Active 2031-04-21 US9476134B2 (en) 2008-09-30 2013-07-18 High purity copper and method of producing high purity copper based on electrolysis

Country Status (7)

Country Link
US (2) US20110123389A1 (ko)
EP (1) EP2330224B1 (ko)
JP (1) JP4620185B2 (ko)
KR (1) KR101058765B1 (ko)
CN (1) CN102016088B (ko)
TW (1) TW201026863A (ko)
WO (1) WO2010038641A1 (ko)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100163425A1 (en) * 2004-01-29 2010-07-01 Nippon Mining & Metals Co., Ltd. Ultrahigh-Purity Copper and Process for Producing the Same
US20110163447A1 (en) * 2008-09-30 2011-07-07 Jx Nippon Mining & Metals Corporation High-Purity Copper or High-Purity Copper Alloy Sputtering Target, Process for Manufacturing the Sputtering Target, and High-Purity Copper or High-Purity Copper Alloy Sputtered Film
US20140353278A1 (en) * 2011-11-15 2014-12-04 Jx Nippon Mining & Metals Corporation Copper foil for producing graphene and method of producing graphene using the same
US20140360869A1 (en) * 2012-01-25 2014-12-11 Jx Nippon Mining & Metals Corporation High-purity copper-chromium alloy sputtering target
US9260310B2 (en) 2011-02-18 2016-02-16 Jx Nippon Mining & Metals Corporation Copper foil for producing graphene and method of producing graphene using the same
US20160047017A1 (en) * 2013-04-08 2016-02-18 Mitsubishi Materials Corporation Hot-rolled copper plate
US9487404B2 (en) 2011-06-02 2016-11-08 Jx Nippon Mining & Metals Corporation Copper foil for producing graphene and method of producing graphene using the same
US20160361760A1 (en) * 2014-03-14 2016-12-15 Mitisubishi Materials Corporation Copper ingot, copper wire material, and method for producing copper ingot
US9597754B2 (en) 2011-03-07 2017-03-21 Jx Nippon Mining & Metals Corporation Copper or copper alloy, bonding wire, method of producing the copper, method of producing the copper alloy, and method of producing the bonding wire
US9840757B2 (en) 2014-06-13 2017-12-12 Jx Nippon Mining & Metals Corporation Rolled copper foil for producing two-dimensional hexagonal lattice compound and method of producing two-dimensional hexagonal lattice compound
US10266952B2 (en) * 2014-06-05 2019-04-23 Jx Nippon Mining & Metals Corporation Copper chloride, CVD raw material, copper wiring film, and method for producing copper chloride
US10494712B2 (en) 2015-05-21 2019-12-03 Jx Nippon Mining & Metals Corporation Copper alloy sputtering target and method for manufacturing same
US10597790B2 (en) 2016-05-10 2020-03-24 Hitachi Metals, Ltd. Refined copper, method of producing refined copper, electric wire and method of manufacturing electric wire
US10889889B2 (en) 2015-08-24 2021-01-12 Mitsubishi Materials Corporation High purity copper sputtering target material

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103160854A (zh) * 2011-12-15 2013-06-19 广东先导稀材股份有限公司 高纯铜的制备方法
KR101553739B1 (ko) * 2012-12-10 2015-09-30 한국과학기술원 우라늄 회수용 전기화학적 장치
CN104047021A (zh) * 2013-03-13 2014-09-17 江苏瑞崚新材料科技有限公司 一种用电解方法制备出6N-Cu的方法
JP6662088B2 (ja) * 2016-02-22 2020-03-11 三菱マテリアル株式会社 高純度銅スパッタリングターゲット材
JP6661951B2 (ja) * 2015-10-08 2020-03-11 三菱マテリアル株式会社 高純度銅スパッタリングターゲット材
JP6662087B2 (ja) * 2016-02-22 2020-03-11 三菱マテリアル株式会社 高純度銅スパッタリングターゲット材
JP6661953B2 (ja) * 2015-10-08 2020-03-11 三菱マテリアル株式会社 高純度銅スパッタリングターゲット材
JP6661952B2 (ja) * 2015-10-08 2020-03-11 三菱マテリアル株式会社 高純度銅スパッタリングターゲット材
JP6651737B2 (ja) * 2015-08-24 2020-02-19 三菱マテリアル株式会社 高純度銅スパッタリングターゲット材
JP6066010B1 (ja) * 2016-06-28 2017-01-25 日立金属株式会社 精製銅並びに電線の製造方法
CN110678582B (zh) 2017-06-01 2021-10-29 三菱综合材料株式会社 高纯度电解铜的制造方法
WO2018221734A1 (ja) 2017-06-01 2018-12-06 三菱マテリアル株式会社 高純度電気銅の製造方法
JP6341330B1 (ja) 2017-12-06 2018-06-13 千住金属工業株式会社 Cuボール、OSP処理Cuボール、Cu核ボール、はんだ継手、はんだペースト、フォームはんだ及びCuボールの製造方法
TWI727586B (zh) * 2019-02-28 2021-05-11 日商Jx金屬股份有限公司 銅電極材料

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792369A (en) * 1987-02-19 1988-12-20 Nippon Mining Co., Ltd. Copper wires used for transmitting sounds or images
US5206430A (en) * 1990-10-31 1993-04-27 Mitsui Toatsu Chemicals, Incorporated Method for obtaining high-purity cinnamic acid
JP2000239836A (ja) * 1999-02-23 2000-09-05 Japan Energy Corp 高純度銅または銅合金スパッタリングターゲットおよびその製造方法
US20010004856A1 (en) * 1998-02-23 2001-06-28 Kabushiki Kaisha Kobe Seiko Sho (Aka Kobe Steel, Ltd.) Aluminum or aluminum alloy sputtering target and method for manufacturing the same
US6451135B1 (en) * 1997-06-02 2002-09-17 Japan Energy Corporation High-purity copper sputtering targets and thin films
US6896788B2 (en) * 2000-05-22 2005-05-24 Nikko Materials Company, Limited Method of producing a higher-purity metal
US6908517B2 (en) * 2000-11-02 2005-06-21 Honeywell International Inc. Methods of fabricating metallic materials
US20080223728A1 (en) * 2004-01-29 2008-09-18 Nippon Mining & Metals Co., Ltd. Ultrahigh-Purity Copper and Process for Producing the Same
US7435325B2 (en) * 2001-08-01 2008-10-14 Nippon Mining & Metals Co., Ltd Method for producing high purity nickle, high purity nickle, sputtering target comprising the high purity nickel, and thin film formed by using said spattering target
US20090272466A1 (en) * 2005-06-15 2009-11-05 Nippon Mining & Metals Co., Ltd. Ultrahigh-Purity Copper and Process for Producing the Same, and Bonding Wire Comprising Ultrahigh-Purity Copper
US7740721B2 (en) * 2003-03-17 2010-06-22 Nippon Mining & Metals Co., Ltd Copper alloy sputtering target process for producing the same and semiconductor element wiring
US20110163447A1 (en) * 2008-09-30 2011-07-07 Jx Nippon Mining & Metals Corporation High-Purity Copper or High-Purity Copper Alloy Sputtering Target, Process for Manufacturing the Sputtering Target, and High-Purity Copper or High-Purity Copper Alloy Sputtered Film

Family Cites Families (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3253910A (en) 1964-08-31 1966-05-31 Chase Brass & Copper Co Copper base alloys and the method of treating the same to improve their machinability
US3778318A (en) 1969-02-24 1973-12-11 Cooper Range Co Copper base composition
DE3303170A1 (de) 1983-01-31 1984-08-02 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von kupfer-chrom-schmelzlegierungen als kontaktwerkstoff fuer vakuum-leistungsschalter
JPS60223149A (ja) 1984-04-19 1985-11-07 Hitachi Ltd 半導体装置
JPS6184389A (ja) 1984-09-28 1986-04-28 Sumitomo Metal Mining Co Ltd 高純度電気銅の製造方法
JPS63153291A (ja) 1986-12-17 1988-06-25 Nippon Mining Co Ltd 銅の電解精製方法
JPS648289A (en) 1986-12-19 1989-01-12 Nippon Mining Co Method for electrolyzing copper
JPS63297583A (ja) 1987-05-29 1988-12-05 Nippon Mining Co Ltd 高純度電気銅製造方法
JPS6455394A (en) 1987-08-26 1989-03-02 Nippon Mining Co Production of high-purity electrolytic copper
JP2622559B2 (ja) 1987-12-10 1997-06-18 株式会社ジャパンエナジー 高純度銅の製造方法
JPH01156441A (ja) * 1987-12-11 1989-06-20 Fujikura Ltd 極細線用銅線材
JPH0222489A (ja) * 1988-07-08 1990-01-25 Furukawa Electric Co Ltd:The 高純度銅の電解精製方法
JPH08990B2 (ja) 1989-01-11 1996-01-10 同和鉱業株式会社 超高純度銅の製造方法
JP3974945B2 (ja) 1992-01-30 2007-09-12 東ソー株式会社 チタンスパッタリングターゲット
JPH0648289A (ja) 1992-08-04 1994-02-22 Tokico Ltd マスタシリンダ
JP2785908B2 (ja) * 1995-05-08 1998-08-13 日鉱金属株式会社 超電導用の銅管材の製造方法
JP3560393B2 (ja) 1995-07-06 2004-09-02 株式会社日鉱マテリアルズ アルミニウム合金スパッタリングターゲットの製造方法
JP3713332B2 (ja) 1996-06-21 2005-11-09 同和鉱業株式会社 単結晶銅ターゲット及びその製造方法
US6254702B1 (en) 1997-02-18 2001-07-03 Dowa Mining Co., Ltd. Copper base alloys and terminals using the same
JPH11106842A (ja) 1997-09-30 1999-04-20 Nippon Mining & Metals Co Ltd 溶媒抽出法を用いた銅電解液の浄液方法
JP3189767B2 (ja) 1997-10-31 2001-07-16 日本電気株式会社 銅配線の製造方法
JPH11229172A (ja) 1998-02-16 1999-08-24 Permelec Electrode Ltd 高純度銅の製造方法及び製造装置
JP3081602B2 (ja) 1998-02-23 2000-08-28 株式会社神戸製鋼所 スパッタリングターゲット材料及びその製造方法
US6764735B2 (en) 1998-06-22 2004-07-20 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
JP3539878B2 (ja) 1998-10-06 2004-07-07 大陽東洋酸素株式会社 無機物質成形物からなる充填物の製造方法
JP3856581B2 (ja) 1999-01-18 2006-12-13 日鉱金属株式会社 フレキシブルプリント回路基板用圧延銅箔およびその製造方法
JP3383615B2 (ja) 1999-08-05 2003-03-04 日鉱金属株式会社 電子材料用銅合金及びその製造方法
JP3878407B2 (ja) * 2000-11-10 2007-02-07 日鉱金属株式会社 金属の高純度化方法
WO2001094659A2 (en) 2000-06-02 2001-12-13 Honeywell International Inc. Sputtering target
TW541350B (en) 2000-12-29 2003-07-11 Solar Applied Material Technol Method for producing metal target for sputtering
CN1370853A (zh) 2001-02-23 2002-09-25 光洋应用材料科技股份有限公司 金属溅镀靶材的制造方法
EP1247872A1 (en) 2001-03-13 2002-10-09 Solar Applied Material Technology Corp. Method for producing metal sputtering target
EP1471164B1 (en) 2002-01-30 2013-01-23 JX Nippon Mining & Metals Corporation Copper alloy sputtering target and method for manufacturing the target
JP4794802B2 (ja) 2002-11-21 2011-10-19 Jx日鉱日石金属株式会社 銅合金スパッタリングターゲット及び半導体素子配線
EP1715077A4 (en) 2003-12-25 2010-09-29 Nippon Mining Co ARRANGEMENT OF COPPER OR COPPER ALLOY STARGET AND COPPER ALLOY CARRIER PLATE
JP4041803B2 (ja) 2004-01-23 2008-02-06 株式会社神戸製鋼所 高強度高導電率銅合金
KR100861152B1 (ko) 2004-02-27 2008-09-30 후루카와 덴키 고교 가부시키가이샤 구리합금
JP4518262B2 (ja) 2004-03-23 2010-08-04 三菱マテリアル株式会社 高純度電気銅とその製造方法
EP1803829B1 (en) 2004-08-17 2013-05-22 Kabushiki Kaisha Kobe Seiko Sho Copper alloy plate for electric and electronic parts having bendability
WO2006093140A1 (ja) 2005-02-28 2006-09-08 The Furukawa Electric Co., Ltd. 銅合金
CN101151398B (zh) 2005-03-28 2012-06-27 Jx日矿日石金属株式会社 深锅状铜溅射靶及其制造方法
JP4680765B2 (ja) 2005-12-22 2011-05-11 株式会社神戸製鋼所 耐応力緩和特性に優れた銅合金
KR101049655B1 (ko) 2006-05-26 2011-07-14 가부시키가이샤 고베 세이코쇼 고강도, 고도전율 및 굽힘 가공성이 뛰어난 구리 합금
WO2007145164A1 (ja) 2006-06-12 2007-12-21 Nippon Mining & Metals Co., Ltd. 粗化処理面を備えた圧延銅又は銅合金箔及び圧延銅又は銅合金箔の粗化方法
JP4950584B2 (ja) 2006-07-28 2012-06-13 株式会社神戸製鋼所 高強度および耐熱性を備えた銅合金
WO2008041535A1 (en) 2006-10-03 2008-04-10 Nippon Mining & Metals Co., Ltd. Cu-Mn ALLOY SPUTTERING TARGET AND SEMICONDUCTOR WIRING
CN101199988B (zh) 2007-11-13 2011-06-22 北京有色金属研究总院 一种制备超高纯铜铸锭的方法
JP5092939B2 (ja) 2008-07-01 2012-12-05 日立電線株式会社 Tft用平板型銅スパッタリングターゲット材及びスパッタリング方法
CN103459654B (zh) 2011-03-01 2016-02-24 吉坤日矿日石金属株式会社 铜钛合金制溅射靶、使用该溅射靶形成的半导体布线以及具备该半导体布线的半导体元件和器件
WO2012120982A1 (ja) 2011-03-07 2012-09-13 Jx日鉱日石金属株式会社 α線量が少ない銅又は銅合金及び銅又は銅合金を原料とするボンディングワイヤ
WO2013038983A1 (ja) 2011-09-14 2013-03-21 Jx日鉱日石金属株式会社 高純度銅マンガン合金スパッタリングターゲット
KR20140016996A (ko) 2011-09-14 2014-02-10 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 고순도 구리망간 합금 스퍼터링 타깃

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792369A (en) * 1987-02-19 1988-12-20 Nippon Mining Co., Ltd. Copper wires used for transmitting sounds or images
US5206430A (en) * 1990-10-31 1993-04-27 Mitsui Toatsu Chemicals, Incorporated Method for obtaining high-purity cinnamic acid
US6451135B1 (en) * 1997-06-02 2002-09-17 Japan Energy Corporation High-purity copper sputtering targets and thin films
US20010004856A1 (en) * 1998-02-23 2001-06-28 Kabushiki Kaisha Kobe Seiko Sho (Aka Kobe Steel, Ltd.) Aluminum or aluminum alloy sputtering target and method for manufacturing the same
JP2000239836A (ja) * 1999-02-23 2000-09-05 Japan Energy Corp 高純度銅または銅合金スパッタリングターゲットおよびその製造方法
US6896788B2 (en) * 2000-05-22 2005-05-24 Nikko Materials Company, Limited Method of producing a higher-purity metal
US6908517B2 (en) * 2000-11-02 2005-06-21 Honeywell International Inc. Methods of fabricating metallic materials
US6946039B1 (en) * 2000-11-02 2005-09-20 Honeywell International Inc. Physical vapor deposition targets, and methods of fabricating metallic materials
US20090004498A1 (en) * 2001-08-01 2009-01-01 Nippon Mining & Metals Co., Ltd. Manufacturing Method of High Purity Nickel, High Purity Nickel, Sputtering Target formed from said High Purity Nickel, and Thin Film formed with said Sputtering Target
US7435325B2 (en) * 2001-08-01 2008-10-14 Nippon Mining & Metals Co., Ltd Method for producing high purity nickle, high purity nickle, sputtering target comprising the high purity nickel, and thin film formed by using said spattering target
US7740721B2 (en) * 2003-03-17 2010-06-22 Nippon Mining & Metals Co., Ltd Copper alloy sputtering target process for producing the same and semiconductor element wiring
US20100219070A1 (en) * 2003-03-17 2010-09-02 Nippon Mining & Metals Co., Ltd. Copper Alloy Sputtering Target, Process for Producing the Same and Semiconductor Element Wiring
US20080223728A1 (en) * 2004-01-29 2008-09-18 Nippon Mining & Metals Co., Ltd. Ultrahigh-Purity Copper and Process for Producing the Same
US20100163425A1 (en) * 2004-01-29 2010-07-01 Nippon Mining & Metals Co., Ltd. Ultrahigh-Purity Copper and Process for Producing the Same
US8192596B2 (en) * 2004-01-29 2012-06-05 Jx Nippon Mining & Metals Corporation Ultrahigh-purity copper and process for producing the same
US8216442B2 (en) * 2004-01-29 2012-07-10 Jx Nippon Mining & Metals Corporation Ultrahigh-purity copper and process for producing the same
US20090272466A1 (en) * 2005-06-15 2009-11-05 Nippon Mining & Metals Co., Ltd. Ultrahigh-Purity Copper and Process for Producing the Same, and Bonding Wire Comprising Ultrahigh-Purity Copper
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KR20100108457A (ko) 2010-10-06
US20130302205A1 (en) 2013-11-14
EP2330224A4 (en) 2012-01-25
WO2010038641A1 (ja) 2010-04-08
CN102016088B (zh) 2014-07-30
TWI349713B (ko) 2011-10-01
EP2330224B1 (en) 2013-05-29
KR101058765B1 (ko) 2011-08-24
EP2330224A1 (en) 2011-06-08
CN102016088A (zh) 2011-04-13
US9476134B2 (en) 2016-10-25
JP4620185B2 (ja) 2011-01-26
JPWO2010038641A1 (ja) 2012-03-01

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