TWI821452B - 導電性組成物及其製造方法以及導電體及其製造方法 - Google Patents
導電性組成物及其製造方法以及導電體及其製造方法 Download PDFInfo
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- TWI821452B TWI821452B TW108141106A TW108141106A TWI821452B TW I821452 B TWI821452 B TW I821452B TW 108141106 A TW108141106 A TW 108141106A TW 108141106 A TW108141106 A TW 108141106A TW I821452 B TWI821452 B TW I821452B
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
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- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/12—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances organic substances
- H01B1/124—Intrinsically conductive polymers
- H01B1/127—Intrinsically conductive polymers comprising five-membered aromatic rings in the main chain, e.g. polypyrroles, polythiophenes
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- H—ELECTRICITY
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- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/12—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances organic substances
- H01B1/124—Intrinsically conductive polymers
- H01B1/128—Intrinsically conductive polymers comprising six-membered aromatic rings in the main chain, e.g. polyanilines, polyphenylenes
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
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- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
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- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/281—Sorbents specially adapted for preparative, analytical or investigative chromatography
- B01J20/291—Gel sorbents
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/17—Amines; Quaternary ammonium compounds
- C08K5/19—Quaternary ammonium compounds
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N2021/6417—Spectrofluorimetric devices
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- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
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| JPH089662B2 (ja) | 1985-02-26 | 1996-01-31 | 日東電工株式会社 | 導電性材料 |
| DE3688615T2 (de) | 1986-03-24 | 1993-10-07 | Univ California | Selbstdopierte polymere. |
| GB8717458D0 (en) | 1987-07-23 | 1987-08-26 | Cookson Group Plc | Electroconductive polymers |
| US5137991A (en) | 1988-05-13 | 1992-08-11 | The Ohio State University Research Foundation | Polyaniline compositions, processes for their preparation and uses thereof |
| US5164465A (en) | 1988-05-13 | 1992-11-17 | Ohio State University Research Foundation | Sulfonated polyaniline salt compositions, processes for their preparation and uses thereof |
| US4935163A (en) * | 1988-08-01 | 1990-06-19 | Lockheed Corporation | High service temperature conductive polymers and method of producing same |
| JP2902727B2 (ja) | 1990-05-30 | 1999-06-07 | 株式会社日立製作所 | 荷電粒子線照射方法及び観察方法 |
| JPH04268331A (ja) | 1991-02-25 | 1992-09-24 | Fuji Xerox Co Ltd | 自己ドーピング機能を有する導電性重合体の製造方法 |
| JP3147407B2 (ja) | 1991-04-26 | 2001-03-19 | 昭和電工株式会社 | 導電性高分子複合材料およびその製造方法 |
| JPH05226238A (ja) | 1991-10-31 | 1993-09-03 | Internatl Business Mach Corp <Ibm> | E−ビームレジスト用の塩基現像可能な放電トップ層 |
| JP3051244B2 (ja) | 1991-12-27 | 2000-06-12 | 三菱レイヨン株式会社 | アニリン系共重合体スルホン化物とその製法 |
| JP3186328B2 (ja) | 1992-07-20 | 2001-07-11 | 昭和電工株式会社 | 導電性複合物及びその製造法 |
| JP3066431B2 (ja) | 1992-07-20 | 2000-07-17 | 昭和電工株式会社 | 導電性高分子複合物の製造方法 |
| JPH0656987A (ja) | 1992-08-11 | 1994-03-01 | Bridgestone Corp | 導電性高分子の製造方法 |
| JP3184642B2 (ja) | 1992-11-09 | 2001-07-09 | 昭和電工株式会社 | 導電性複合材料およびその製造方法 |
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| JP3149290B2 (ja) | 1993-03-08 | 2001-03-26 | 昭和電工株式会社 | 導電性重合体の製造方法 |
| JP3814830B2 (ja) | 1993-05-28 | 2006-08-30 | 昭和電工株式会社 | 帯電防止材料、それを用いる帯電防止方法及び観察または検査方法、及び帯電が防止された物品 |
| JP3413956B2 (ja) | 1993-05-31 | 2003-06-09 | 昭和電工株式会社 | 導電性重合体の製造方法 |
| JP3037547B2 (ja) | 1993-09-03 | 2000-04-24 | 三菱レイヨン株式会社 | 導電性組成物、導電体及びその形成方法 |
| JP3154460B2 (ja) | 1993-12-29 | 2001-04-09 | 三菱レイヨン株式会社 | 水溶性アニリン系導電性ポリマーとその製造方法 |
| JP2959968B2 (ja) | 1994-04-04 | 1999-10-06 | 三菱レイヨン株式会社 | 可溶性アニリン系導電性ポリマーの製造方法 |
| JP3051308B2 (ja) * | 1994-08-01 | 2000-06-12 | 三菱レイヨン株式会社 | 導電性組成物、導電体及びその形成方法 |
| JP3056655B2 (ja) * | 1994-11-16 | 2000-06-26 | 三菱レイヨン株式会社 | アニリン系導電性高分子膜およびその製造方法 |
| CA2430934C (en) | 2000-12-01 | 2011-06-21 | Takeda Chemical Industries, Ltd. | A method of producing sustained-release preparations of a bioactive substance using high-pressure gas |
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| TWI509633B (zh) | 2011-04-20 | 2015-11-21 | Mitsubishi Rayon Co | 導電性組成物以及使用前述導電性組成物的導電體與固體電解電容器 |
| JP2014015550A (ja) * | 2012-07-10 | 2014-01-30 | Mitsubishi Rayon Co Ltd | 導電性組成物及び前記導電性組成物を用いた導電体 |
| JP6131780B2 (ja) | 2012-09-06 | 2017-05-24 | 東ソー株式会社 | ポリチオフェン及びその水溶液、並びにそのチオフェンモノマー |
| JP2014065870A (ja) * | 2012-09-27 | 2014-04-17 | Mitsubishi Rayon Co Ltd | ナノカーボン含有導電性組成物及び前記組成物からなる導電体 |
| JP2016124889A (ja) * | 2014-12-26 | 2016-07-11 | 三菱レイヨン株式会社 | 導電性複合材料およびそれを用いた固体電解コンデンサ |
| JP6383337B2 (ja) * | 2015-01-30 | 2018-08-29 | 信越化学工業株式会社 | 導電性高分子組成物、被覆品、パターン形成方法、及び基板 |
| US9778570B2 (en) | 2015-01-30 | 2017-10-03 | Shin-Etsu Chemical Co., Ltd. | Conductive polymer composition, coated article, patterning process and substrate |
| JP6919192B2 (ja) * | 2016-03-31 | 2021-08-18 | 東ソー株式会社 | 導電性高分子水溶液及びその用途 |
| JP2018021490A (ja) | 2016-08-02 | 2018-02-08 | いすゞ自動車株式会社 | アイドルギヤ支持装置 |
| KR102772000B1 (ko) * | 2018-04-10 | 2025-02-26 | 미쯔비시 케미컬 주식회사 | 도전성 조성물, 도전막 및 적층체 |
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| TW201413748A (zh) * | 2012-07-24 | 2014-04-01 | Mitsubishi Rayon Co | 導電體、導電性組成物及積層體 |
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| TW202024183A (zh) | 2020-07-01 |
| JP2023073265A (ja) | 2023-05-25 |
| KR20210068100A (ko) | 2021-06-08 |
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