TWI622172B - Ｉｅ溝渠式閘極ｉｇｂｔ - Google Patents

Ｉｅ溝渠式閘極ｉｇｂｔ Download PDF

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Publication number
TWI622172B
TWI622172B TW106109371A TW106109371A TWI622172B TW I622172 B TWI622172 B TW I622172B TW 106109371 A TW106109371 A TW 106109371A TW 106109371 A TW106109371 A TW 106109371A TW I622172 B TWI622172 B TW I622172B
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Taiwan
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linear
region
cell
field
unit
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TW106109371A
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Chinese (zh)
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TW201727904A (zh
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松浦仁
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瑞薩電子股份有限公司
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395—Vertical transistors, e.g. vertical IGBT
    • H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
    • H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H—ELECTRICITY
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    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/402—Field plates
    • H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H—ELECTRICITY
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    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0804—Emitter regions of bipolar transistors
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    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0821—Collector regions of bipolar transistors
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    • H01L29/0843—Source or drain regions of field-effect devices
    • H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
    • H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
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    • H01L29/0843—Source or drain regions of field-effect devices
    • H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
    • H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
    • H01L29/0873—Drain regions
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    • H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
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    • H01L29/42312—Gate electrodes for field effect devices
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    • H01L29/42356—Disposition, e.g. buried gate electrode
    • H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
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    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66234—Bipolar junction transistors [BJT]
    • H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
    • H01L29/66333—Vertical insulated gate bipolar transistors
    • H01L29/66348—Vertical insulated gate bipolar transistors with a recessed gate
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    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395—Vertical transistors, e.g. vertical IGBT
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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
TW106109371A 2012-01-05 2012-12-13 Ｉｅ溝渠式閘極ｉｇｂｔ TWI622172B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-000577 2012-01-05
JP2012000577A JP5973730B2 (ja) 2012-01-05 2012-01-05 Ｉｅ型トレンチゲートｉｇｂｔ

Publications (2)

Publication Number Publication Date
TW201727904A TW201727904A (zh) 2017-08-01
TWI622172B true TWI622172B (zh) 2018-04-21

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Family Applications (3)

Application Number Title Priority Date Filing Date
TW106109371A TWI622172B (zh) 2012-01-05 2012-12-13 Ｉｅ溝渠式閘極ｉｇｂｔ
TW107103298A TWI646688B (zh) 2012-01-05 2012-12-13 Ｉｅ溝渠式閘極ｉｇｂｔ
TW101147144A TWI587509B (zh) 2012-01-05 2012-12-13 Ｉｅ溝渠式閘極ｉｇｂｔ

Family Applications After (2)

Application Number Title Priority Date Filing Date
TW107103298A TWI646688B (zh) 2012-01-05 2012-12-13 Ｉｅ溝渠式閘極ｉｇｂｔ
TW101147144A TWI587509B (zh) 2012-01-05 2012-12-13 Ｉｅ溝渠式閘極ｉｇｂｔ

Country Status (6)

Country Link
US (4) US9041050B2 (ja)
EP (1) EP2613356B1 (ja)
JP (1) JP5973730B2 (ja)
KR (1) KR102024939B1 (ja)
CN (3) CN103199108B (ja)
TW (3) TWI622172B (ja)

Families Citing this family (57)

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JP5973730B2 (ja) 2012-01-05 2016-08-23 ルネサスエレクトロニクス株式会社 Ｉｅ型トレンチゲートｉｇｂｔ
JP5979993B2 (ja) * 2012-06-11 2016-08-31 ルネサスエレクトロニクス株式会社 狭アクティブセルｉｅ型トレンチゲートｉｇｂｔの製造方法
JP5932623B2 (ja) * 2012-12-05 2016-06-08 株式会社 日立パワーデバイス 半導体装置およびそれを用いた電力変換装置
JP6061023B2 (ja) * 2013-04-11 2017-01-18 富士電機株式会社 半導体装置および半導体装置の製造方法
EP2942816B1 (en) * 2013-08-15 2020-10-28 Fuji Electric Co., Ltd. Semiconductor device
DE112013007278B4 (de) * 2013-08-29 2020-01-30 Hitachi, Ltd. Halbleitervorrichtung und Verfahren zu ihrer Herstellung
KR102004768B1 (ko) * 2013-08-30 2019-07-29 삼성전기주식회사 전력 반도체 소자
DE112014006158T5 (de) * 2014-01-14 2016-11-03 Mitsubishi Electric Corporation Leistungshalbleitervorrichtung
KR102114501B1 (ko) * 2014-03-11 2020-05-25 매그나칩 반도체 유한회사 반도체 소자
JP6420175B2 (ja) 2014-05-22 2018-11-07 ルネサスエレクトロニクス株式会社 半導体装置
JP6261494B2 (ja) * 2014-12-03 2018-01-17 三菱電機株式会社 電力用半導体装置
WO2016114043A1 (ja) * 2015-01-13 2016-07-21 富士電機株式会社 半導体装置及びその製造方法
JP6448434B2 (ja) * 2015-03-25 2019-01-09 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
KR101745776B1 (ko) 2015-05-12 2017-06-28 매그나칩 반도체 유한회사 전력용 반도체 소자
JP6472714B2 (ja) 2015-06-03 2019-02-20 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
JP6495751B2 (ja) 2015-06-10 2019-04-03 ルネサスエレクトロニクス株式会社 半導体装置および半導体装置の製造方法
JP6606364B2 (ja) 2015-07-02 2019-11-13 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
JP2017022798A (ja) * 2015-07-07 2017-01-26 ルネサスエレクトロニクス株式会社 電力変換装置および駆動装置
JP2017022311A (ja) 2015-07-14 2017-01-26 ルネサスエレクトロニクス株式会社 半導体装置
JP6605870B2 (ja) * 2015-07-30 2019-11-13 ルネサスエレクトロニクス株式会社 半導体装置
JP6560059B2 (ja) 2015-08-20 2019-08-14 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
JP6633867B2 (ja) 2015-08-21 2020-01-22 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
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