TWI569111B - 顯影處理裝置 - Google Patents

顯影處理裝置 Download PDF

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Publication number
TWI569111B
TWI569111B TW102132435A TW102132435A TWI569111B TW I569111 B TWI569111 B TW I569111B TW 102132435 A TW102132435 A TW 102132435A TW 102132435 A TW102132435 A TW 102132435A TW I569111 B TWI569111 B TW I569111B
Authority
TW
Taiwan
Prior art keywords
developer
cup
substrate
negative
positive
Prior art date
Application number
TW102132435A
Other languages
English (en)
Chinese (zh)
Other versions
TW201418909A (zh
Inventor
瀧口靖史
山本太郎
池田義謙
吉村好貴
岡本芳樹
福田昌弘
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TW201418909A publication Critical patent/TW201418909A/zh
Application granted granted Critical
Publication of TWI569111B publication Critical patent/TWI569111B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3092—Recovery of material; Waste processing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
TW102132435A 2012-09-13 2013-09-09 顯影處理裝置 TWI569111B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012201117 2012-09-13
JP2013162536A JP6005604B2 (ja) 2012-09-13 2013-08-05 現像処理装置

Publications (2)

Publication Number Publication Date
TW201418909A TW201418909A (zh) 2014-05-16
TWI569111B true TWI569111B (zh) 2017-02-01

Family

ID=50232978

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102132435A TWI569111B (zh) 2012-09-13 2013-09-09 顯影處理裝置

Country Status (4)

Country Link
US (2) US9304398B2 (https=)
JP (1) JP6005604B2 (https=)
KR (1) KR101835904B1 (https=)
TW (1) TWI569111B (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI747060B (zh) * 2018-11-07 2021-11-21 日商斯庫林集團股份有限公司 處理杯單元及基板處理裝置
TWI751432B (zh) * 2018-09-07 2022-01-01 日商芝浦機械電子裝置股份有限公司 基板處理裝置及基板處理方法

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9694545B2 (en) 2014-12-18 2017-07-04 Stratasys, Inc. Remotely-adjustable purge station for use in additive manufacturing systems
JP6473357B2 (ja) * 2015-03-18 2019-02-20 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
WO2016194285A1 (ja) 2015-06-03 2016-12-08 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、膜形成ユニット、基板処理方法および膜形成方法
JP6618334B2 (ja) 2015-06-03 2019-12-11 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、膜形成ユニット、基板処理方法および膜形成方法
JP6603487B2 (ja) * 2015-06-22 2019-11-06 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6742748B2 (ja) 2016-02-17 2020-08-19 株式会社Ｓｃｒｅｅｎホールディングス 現像ユニット、基板処理装置、現像方法および基板処理方法
TWI638394B (zh) 2016-07-25 2018-10-11 斯庫林集團股份有限公司 基板處理裝置
JP6920524B2 (ja) * 2016-08-24 2021-08-18 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP6778548B2 (ja) * 2016-08-24 2020-11-04 東京エレクトロン株式会社 基板処理装置及び基板処理方法
KR102042362B1 (ko) * 2018-11-05 2019-11-07 세메스 주식회사 기판처리장치
CN109445255A (zh) * 2018-11-22 2019-03-08 武汉华星光电半导体显示技术有限公司 显影装置及其清洗方法
JP6648248B2 (ja) * 2018-12-21 2020-02-14 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法
JP6831889B2 (ja) * 2019-10-11 2021-02-17 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP7360973B2 (ja) * 2020-02-27 2023-10-13 東京エレクトロン株式会社 現像処理装置及び現像処理方法
JP7585745B2 (ja) * 2020-11-30 2024-11-19 新東工業株式会社 ノズル、現像装置及び被処理体の加工方法
JP7682690B2 (ja) * 2021-05-11 2025-05-26 東京エレクトロン株式会社 基板処理装置および基板処理方法
KR102836407B1 (ko) 2021-07-27 2025-07-21 삼성전자주식회사 기판 처리 장치 및 기판 처리 방법
JP7780381B2 (ja) * 2022-04-14 2025-12-04 東京エレクトロン株式会社 カップ及び基板処理装置
JP2024022955A (ja) * 2022-08-08 2024-02-21 東京エレクトロン株式会社 液処理装置及び液処理方法
KR102627076B1 (ko) * 2022-08-30 2024-01-23 주식회사 포톤 기판 세정용 고정식 바울장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6223044A (ja) * 1985-07-22 1987-01-31 Konishiroku Photo Ind Co Ltd 感光性平版印刷版の処理方法
JP2005183709A (ja) * 2003-12-19 2005-07-07 Tokyo Electron Ltd 現像装置及び現像方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
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JPH0271273A (ja) * 1988-09-07 1990-03-09 Oki Electric Ind Co Ltd フォトレジスト現像装置
JPH03286517A (ja) * 1990-04-03 1991-12-17 Tokyo Electron Ltd 処理方法
JP3943741B2 (ja) * 1999-01-07 2007-07-11 株式会社東芝 パターン形成方法
JP2003297801A (ja) * 2002-03-28 2003-10-17 Shibaura Mechatronics Corp スピン処理装置
JP4369325B2 (ja) * 2003-12-26 2009-11-18 東京エレクトロン株式会社 現像装置及び現像処理方法
JP4862902B2 (ja) * 2009-03-04 2012-01-25 東京エレクトロン株式会社 液処理装置、液処理方法及び記憶媒体
JP5348083B2 (ja) * 2010-07-16 2013-11-20 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及び記憶媒体
JP5338777B2 (ja) * 2010-09-02 2013-11-13 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及び記憶媒体
TWI497226B (zh) * 2011-01-05 2015-08-21 東京威力科創股份有限公司 Coating, developing device, coating, developing method and memory medium
JP6007155B2 (ja) * 2013-07-30 2016-10-12 東京エレクトロン株式会社 現像処理方法、プログラム、コンピュータ記憶媒体及び現像処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6223044A (ja) * 1985-07-22 1987-01-31 Konishiroku Photo Ind Co Ltd 感光性平版印刷版の処理方法
JP2005183709A (ja) * 2003-12-19 2005-07-07 Tokyo Electron Ltd 現像装置及び現像方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI751432B (zh) * 2018-09-07 2022-01-01 日商芝浦機械電子裝置股份有限公司 基板處理裝置及基板處理方法
TWI747060B (zh) * 2018-11-07 2021-11-21 日商斯庫林集團股份有限公司 處理杯單元及基板處理裝置

Also Published As

Publication number Publication date
US20140071411A1 (en) 2014-03-13
TW201418909A (zh) 2014-05-16
KR20140035281A (ko) 2014-03-21
US9304398B2 (en) 2016-04-05
US20160202609A1 (en) 2016-07-14
JP6005604B2 (ja) 2016-10-12
US9470979B2 (en) 2016-10-18
KR101835904B1 (ko) 2018-03-07
JP2014075575A (ja) 2014-04-24

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