TW224538B - - Google Patents

Info

Publication number
TW224538B
TW224538B TW082103870A TW82103870A TW224538B TW 224538 B TW224538 B TW 224538B TW 082103870 A TW082103870 A TW 082103870A TW 82103870 A TW82103870 A TW 82103870A TW 224538 B TW224538 B TW 224538B
Authority
TW
Taiwan
Application number
TW082103870A
Other languages
Chinese (zh)
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of TW224538B publication Critical patent/TW224538B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/601Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/603Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended drain IGFETs [EDMOS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/213Channel regions of field-effect devices
    • H10D62/221Channel regions of field-effect devices of FETs
    • H10D62/235Channel regions of field-effect devices of FETs of IGFETs
    • H10D62/299Channel regions of field-effect devices of FETs of IGFETs having lateral doping variations
    • H10D62/307Channel regions of field-effect devices of FETs of IGFETs having lateral doping variations the doping variations being parallel to the channel lengths
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149Source or drain regions of field-effect devices
    • H10D62/151Source or drain regions of field-effect devices of IGFETs 
    • H10D62/152Source regions of DMOS transistors
    • H10D62/153Impurity concentrations or distributions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/514Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
    • H10D64/516Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers the thicknesses being non-uniform
TW082103870A 1991-10-15 1993-05-18 TW224538B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77610291A 1991-10-15 1991-10-15

Publications (1)

Publication Number Publication Date
TW224538B true TW224538B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1994-06-01

Family

ID=25106461

Family Applications (1)

Application Number Title Priority Date Filing Date
TW082103870A TW224538B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-15 1993-05-18

Country Status (6)

Country Link
US (2) US5304827A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0537684B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP3187980B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR100232369B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE69225552T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW224538B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2445469A (en) * 2007-01-05 2008-07-09 Snap On Tools Corp Adjustable tool extender
TWI476923B (zh) * 2012-05-04 2015-03-11 Richtek Technology Corp 雙擴散汲極金屬氧化物半導體元件及其製造方法

Families Citing this family (84)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5306652A (en) * 1991-12-30 1994-04-26 Texas Instruments Incorporated Lateral double diffused insulated gate field effect transistor fabrication process
JP3221766B2 (ja) * 1993-04-23 2001-10-22 三菱電機株式会社 電界効果トランジスタの製造方法
US5439831A (en) * 1994-03-09 1995-08-08 Siemens Aktiengesellschaft Low junction leakage MOSFETs
US5466616A (en) * 1994-04-06 1995-11-14 United Microelectronics Corp. Method of producing an LDMOS transistor having reduced dimensions, reduced leakage, and a reduced propensity to latch-up
US5512495A (en) * 1994-04-08 1996-04-30 Texas Instruments Incorporated Method of manufacturing extended drain resurf lateral DMOS devices
JP3275569B2 (ja) * 1994-10-03 2002-04-15 富士電機株式会社 横型高耐圧電界効果トランジスタおよびその製造方法
US5585294A (en) * 1994-10-14 1996-12-17 Texas Instruments Incorporated Method of fabricating lateral double diffused MOS (LDMOS) transistors
US5534721A (en) * 1994-11-30 1996-07-09 At&T Corp. Area-efficient layout for high voltage lateral devices
US5753958A (en) * 1995-10-16 1998-05-19 Sun Microsystems, Inc. Back-biasing in asymmetric MOS devices
US6831331B2 (en) 1995-11-15 2004-12-14 Denso Corporation Power MOS transistor for absorbing surge current
US6242787B1 (en) 1995-11-15 2001-06-05 Denso Corporation Semiconductor device and manufacturing method thereof
JP3528420B2 (ja) * 1996-04-26 2004-05-17 株式会社デンソー 半導体装置およびその製造方法
SE513284C2 (sv) * 1996-07-26 2000-08-14 Ericsson Telefon Ab L M Halvledarkomponent med linjär ström-till-spänningskarasterik
US6160290A (en) * 1997-11-25 2000-12-12 Texas Instruments Incorporated Reduced surface field device having an extended field plate and method for forming the same
US5900663A (en) * 1998-02-07 1999-05-04 Xemod, Inc. Quasi-mesh gate structure for lateral RF MOS devices
US6340826B1 (en) * 1998-03-30 2002-01-22 Agisilaos Iliadis Infra-red light emitting Si-MOSFET
US6252278B1 (en) * 1998-05-18 2001-06-26 Monolithic Power Systems, Inc. Self-aligned lateral DMOS with spacer drift region
JP2000022142A (ja) * 1998-06-29 2000-01-21 Denso Corp 半導体装置及び半導体装置の製造方法
US6117738A (en) * 1998-11-20 2000-09-12 United Microelectronics Corp. Method for fabricating a high-bias semiconductor device
US6424005B1 (en) * 1998-12-03 2002-07-23 Texas Instruments Incorporated LDMOS power device with oversized dwell
US6084277A (en) * 1999-02-18 2000-07-04 Power Integrations, Inc. Lateral power MOSFET with improved gate design
JP3374099B2 (ja) * 1999-03-12 2003-02-04 三洋電機株式会社 半導体装置の製造方法
US6211552B1 (en) * 1999-05-27 2001-04-03 Texas Instruments Incorporated Resurf LDMOS device with deep drain region
US6365932B1 (en) 1999-08-20 2002-04-02 Denso Corporation Power MOS transistor
DE60040798D1 (de) * 1999-10-27 2008-12-24 Kansai Electric Power Co Halbleiteranordnung mit Driftbereichen mit entgegengesetzten Leitungstypen
US6599782B1 (en) * 2000-01-20 2003-07-29 Sanyo Electric Co., Ltd. Semiconductor device and method of fabricating thereof
IL134701A0 (en) * 2000-02-23 2001-04-30 J P M E D Ltd Homogeneous solid matrix containing vegetable proteins
EP1158583A1 (en) 2000-05-23 2001-11-28 STMicroelectronics S.r.l. Low on-resistance LDMOS
TW521437B (en) 2000-10-19 2003-02-21 Sanyo Electric Co Semiconductor device and process thereof
GB0107408D0 (en) * 2001-03-23 2001-05-16 Koninkl Philips Electronics Nv Field effect transistor structure and method of manufacture
JP3431909B2 (ja) * 2001-08-21 2003-07-28 沖電気工業株式会社 Ldmosトランジスタの製造方法
US6730962B2 (en) * 2001-12-07 2004-05-04 Texas Instruments Incorporated Method of manufacturing and structure of semiconductor device with field oxide structure
EP1321985B1 (en) * 2001-12-20 2007-10-24 STMicroelectronics S.r.l. Method of integrating metal oxide semiconductor field effect transistors
KR100867574B1 (ko) * 2002-05-09 2008-11-10 페어차일드코리아반도체 주식회사 고전압 디바이스 및 그 제조방법
US7825488B2 (en) 2006-05-31 2010-11-02 Advanced Analogic Technologies, Inc. Isolation structures for integrated circuits and modular methods of forming the same
US7667268B2 (en) * 2002-08-14 2010-02-23 Advanced Analogic Technologies, Inc. Isolated transistor
JP4825688B2 (ja) * 2002-09-11 2011-11-30 株式会社東芝 半導体装置の製造方法
US7719054B2 (en) * 2006-05-31 2010-05-18 Advanced Analogic Technologies, Inc. High-voltage lateral DMOS device
US6921946B2 (en) * 2002-12-16 2005-07-26 Koninklijke Philips Electronics N.V. Test structure for electrical well-to-well overlay
US20040201078A1 (en) * 2003-04-11 2004-10-14 Liping Ren Field plate structure for high voltage devices
DE102004009521B4 (de) * 2004-02-27 2020-06-10 Austriamicrosystems Ag Hochvolt-PMOS-Transistor, Maske zur Herstellung einer Wanne und Verfahren zur Herstellung eines Hochvolt-PMOS-Transistors
KR100540371B1 (ko) * 2004-03-02 2006-01-11 이태복 고 내압용 반도체 소자 및 그 제조방법
US20080164537A1 (en) * 2007-01-04 2008-07-10 Jun Cai Integrated complementary low voltage rf-ldmos
US7125777B2 (en) * 2004-07-15 2006-10-24 Fairchild Semiconductor Corporation Asymmetric hetero-doped high-voltage MOSFET (AH2MOS)
US7312481B2 (en) * 2004-10-01 2007-12-25 Texas Instruments Incorporated Reliable high-voltage junction field effect transistor and method of manufacture therefor
US20060097292A1 (en) * 2004-10-29 2006-05-11 Kabushiki Kaisha Toshiba Semiconductor device
JP4387291B2 (ja) * 2004-12-06 2009-12-16 パナソニック株式会社 横型半導体デバイスおよびその製造方法
KR100629605B1 (ko) * 2004-12-31 2006-09-27 동부일렉트로닉스 주식회사 엘디모스 채널 형성 방법
US7109562B2 (en) * 2005-02-07 2006-09-19 Leadtrend Technology Corp. High voltage laterally double-diffused metal oxide semiconductor
US7381603B2 (en) * 2005-08-01 2008-06-03 Semiconductor Components Industries, L.L.C. Semiconductor structure with improved on resistance and breakdown voltage performance
JP4904776B2 (ja) * 2005-11-01 2012-03-28 株式会社デンソー 半導体装置およびその製造方法
US7671411B2 (en) 2006-03-02 2010-03-02 Volterra Semiconductor Corporation Lateral double-diffused MOSFET transistor with a lightly doped source
JP5061538B2 (ja) * 2006-09-01 2012-10-31 株式会社デンソー 半導体装置
CN100446275C (zh) * 2006-09-14 2008-12-24 电子科技大学 高压SensorFET器件
JP2008263136A (ja) * 2007-04-13 2008-10-30 Denso Corp 半導体装置
US7807555B2 (en) * 2007-07-31 2010-10-05 Intersil Americas, Inc. Method of forming the NDMOS device body with the reduced number of masks
US7999318B2 (en) * 2007-12-28 2011-08-16 Volterra Semiconductor Corporation Heavily doped region in double-diffused source MOSFET (LDMOS) transistor and a method of fabricating the same
JP5272410B2 (ja) * 2008-01-11 2013-08-28 富士電機株式会社 半導体装置およびその製造方法
JP5329118B2 (ja) * 2008-04-21 2013-10-30 セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー Dmosトランジスタ
US8097930B2 (en) * 2008-08-08 2012-01-17 Infineon Technologies Ag Semiconductor devices with trench isolations
JP5487852B2 (ja) * 2008-09-30 2014-05-14 サンケン電気株式会社 半導体装置
JP5349885B2 (ja) 2008-09-30 2013-11-20 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
JP5280142B2 (ja) * 2008-09-30 2013-09-04 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
US7745294B2 (en) * 2008-11-10 2010-06-29 Texas Instruments Incorporated Methods of manufacturing trench isolated drain extended MOS (demos) transistors and integrated circuits therefrom
US8643090B2 (en) * 2009-03-23 2014-02-04 Infineon Technologies Ag Semiconductor devices and methods for manufacturing a semiconductor device
US9385241B2 (en) * 2009-07-08 2016-07-05 Taiwan Semiconductor Manufacturing Company, Ltd. Electrostatic discharge (ESD) protection circuits, integrated circuits, systems, and methods for forming the ESD protection circuits
CN101964361B (zh) * 2009-07-24 2012-08-29 新唐科技股份有限公司 金属氧化半导体晶体管与其制造方法
JP5434501B2 (ja) * 2009-11-13 2014-03-05 富士通セミコンダクター株式会社 Mosトランジスタおよび半導体集積回路装置、半導体装置
US20120037989A1 (en) * 2010-08-16 2012-02-16 Macronix International Co., Ltd. Ldmos having single-strip source contact and method for manufacturing same
CN102386227B (zh) * 2010-08-31 2015-04-08 上海华虹宏力半导体制造有限公司 双向表面电场减弱的漏极隔离dddmos晶体管及方法
US8754469B2 (en) * 2010-10-26 2014-06-17 Texas Instruments Incorporated Hybrid active-field gap extended drain MOS transistor
US8963199B2 (en) 2011-03-18 2015-02-24 Renesas Electronics Corporation Semiconductor device and method for manufacturing same
US8685824B2 (en) * 2012-06-21 2014-04-01 Richtek Technology Corporation, R.O.C. Hybrid high voltage device and manufacturing method thereof
JP2014138091A (ja) * 2013-01-17 2014-07-28 Fuji Electric Co Ltd 半導体装置およびその製造方法
EP3024018B1 (en) * 2013-07-19 2018-08-08 Nissan Motor Co., Ltd Semiconductor device
JP2015023208A (ja) * 2013-07-22 2015-02-02 旭化成エレクトロニクス株式会社 電界効果トランジスタ及び半導体装置、電界効果トランジスタの製造方法
US9245996B2 (en) 2014-01-02 2016-01-26 United Microelectronics Corp. Lateral double-diffused metal-oxide-semiconudctor transistor device and layout pattern for LDMOS transistor device
JP6339404B2 (ja) * 2014-04-10 2018-06-06 旭化成エレクトロニクス株式会社 半導体装置の製造方法及び半導体装置
CN105720099A (zh) * 2014-12-02 2016-06-29 无锡华润上华半导体有限公司 N型横向双扩散金属氧化物半导体场效应管
KR102177431B1 (ko) * 2014-12-23 2020-11-11 주식회사 키 파운드리 반도체 소자
JP6740831B2 (ja) * 2016-09-14 2020-08-19 富士電機株式会社 半導体装置
CN110120423B (zh) * 2019-05-05 2022-03-22 南京邮电大学 一种ldmos器件及其制备方法
US11658184B2 (en) * 2020-12-02 2023-05-23 Texas Instruments Incorporated Fin field effect transistor with merged drift region
CN114823340A (zh) * 2021-01-29 2022-07-29 中芯国际集成电路制造(上海)有限公司 半导体结构及半导体结构的形成方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654071A (en) * 1979-10-09 1981-05-13 Nec Corp Insulated gate field-effect transistor
JPS5670662A (en) * 1979-11-13 1981-06-12 Nec Corp Insulated gate type field effect transistor
US4394674A (en) * 1979-10-09 1983-07-19 Nippon Electric Co., Ltd. Insulated gate field effect transistor
DE3046749C2 (de) * 1979-12-10 1986-01-16 Sharp K.K., Osaka MOS-Transistor für hohe Betriebsspannungen
US4947232A (en) * 1980-03-22 1990-08-07 Sharp Kabushiki Kaisha High voltage MOS transistor
JPS56160072A (en) * 1980-04-23 1981-12-09 Nec Corp Manufacture of insulated gate type field effect transistor
JPS56169369A (en) * 1980-05-30 1981-12-26 Sharp Corp High withstand voltage mos field effect semiconductor device
JPS5759383A (en) * 1980-09-29 1982-04-09 Hitachi Ltd Mos semiconductor device
JPS57106165A (en) * 1980-12-24 1982-07-01 Hitachi Ltd Insulating gate type field-effect transistor
JPS5889866A (ja) * 1981-11-24 1983-05-28 Hitachi Ltd 絶縁ゲ−ト半導体装置
EP0114435B1 (en) * 1982-12-21 1987-03-18 Koninklijke Philips Electronics N.V. Lateral dmos transistor devices suitable for sourcefollower applications
JPS6179260A (ja) * 1984-09-26 1986-04-22 Nec Corp 高電圧絶縁ゲ−ト型電界効果トランジスタ
JPS61171165A (ja) * 1985-01-25 1986-08-01 Nissan Motor Co Ltd Mosトランジスタ
US4912053A (en) * 1988-02-01 1990-03-27 Harris Corporation Ion implanted JFET with self-aligned source and drain
JPH02102575A (ja) * 1988-10-11 1990-04-16 Nec Corp 半導体装置
JP2730088B2 (ja) * 1988-10-12 1998-03-25 日本電気株式会社 高耐圧半導体装置
US5055896A (en) * 1988-12-15 1991-10-08 Siliconix Incorporated Self-aligned LDD lateral DMOS transistor with high-voltage interconnect capability
US4966858A (en) * 1989-11-02 1990-10-30 Motorola, Inc. Method of fabricating a lateral semiconductor structure including field plates for self-alignment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2445469A (en) * 2007-01-05 2008-07-09 Snap On Tools Corp Adjustable tool extender
GB2445469B (en) * 2007-01-05 2011-07-27 Snap On Tools Corp Adjustable tool extender
US8534165B2 (en) 2007-01-05 2013-09-17 Snap-On Incorporated Adjustable tool extender
TWI476923B (zh) * 2012-05-04 2015-03-11 Richtek Technology Corp 雙擴散汲極金屬氧化物半導體元件及其製造方法

Also Published As

Publication number Publication date
DE69225552D1 (de) 1998-06-25
KR100232369B1 (ko) 1999-12-01
US5382535A (en) 1995-01-17
EP0537684B1 (en) 1998-05-20
EP0537684A1 (en) 1993-04-21
JP3187980B2 (ja) 2001-07-16
DE69225552T2 (de) 1999-01-07
US5304827A (en) 1994-04-19
KR930009101A (ko) 1993-05-22
JPH05267652A (ja) 1993-10-15

Similar Documents

Publication Publication Date Title
TW224538B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE4290581T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE4291719T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DK0498143T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE4291050T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP0501508A3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DK0549891T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE4291721T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DK0549782T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DK0545490T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE4292011T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IN184610B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0496530U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0489705U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0498674U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0499763U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU7834891A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IN169996B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN3009757S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP0534524A3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN3009796S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN3009787S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN3009785S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN3009777S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU8882691A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees