TW200605261A - Container of substrate - Google Patents

Container of substrate

Info

Publication number
TW200605261A
TW200605261A TW094118820A TW94118820A TW200605261A TW 200605261 A TW200605261 A TW 200605261A TW 094118820 A TW094118820 A TW 094118820A TW 94118820 A TW94118820 A TW 94118820A TW 200605261 A TW200605261 A TW 200605261A
Authority
TW
Taiwan
Prior art keywords
substrate
supporting
cover
elastomer
allocated
Prior art date
Application number
TW094118820A
Other languages
English (en)
Other versions
TWI347648B (zh
Inventor
Akihiro Hasegawa
Hiroshi Mimura
Original Assignee
Shinetsu Polymer Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Polymer Co filed Critical Shinetsu Polymer Co
Publication of TW200605261A publication Critical patent/TW200605261A/zh
Application granted granted Critical
Publication of TWI347648B publication Critical patent/TWI347648B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
TW094118820A 2004-06-11 2005-06-07 Container of substrate TW200605261A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004174035A JP4667769B2 (ja) 2004-06-11 2004-06-11 基板収納容器

Publications (2)

Publication Number Publication Date
TW200605261A true TW200605261A (en) 2006-02-01
TWI347648B TWI347648B (zh) 2011-08-21

Family

ID=34941644

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094118820A TW200605261A (en) 2004-06-11 2005-06-07 Container of substrate

Country Status (5)

Country Link
US (1) US7344031B2 (zh)
EP (1) EP1605496B1 (zh)
JP (1) JP4667769B2 (zh)
KR (1) KR101008867B1 (zh)
TW (1) TW200605261A (zh)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI400766B (zh) * 2008-08-27 2013-07-01 Gudeng Prec Industral Co Ltd 具一體成形晶圓限制件模組之前開式晶圓盒
TWI409903B (zh) * 2006-09-04 2013-09-21 Shinetsu Polymer Co A substrate storage container and a check valve
TWI418456B (zh) * 2006-12-01 2013-12-11 Shinetsu Handotai Kk Substrate storage container
TWI447055B (zh) * 2010-05-24 2014-08-01 Miraial Co Ltd 基板收納容器
TWI466221B (zh) * 2006-11-07 2014-12-21 Shinetsu Polymer Co Substrate storage container
CN110021542A (zh) * 2018-01-08 2019-07-16 家登精密工业股份有限公司 容器门板抵持结构
CN111247632A (zh) * 2017-11-15 2020-06-05 信越聚合物株式会社 基板收纳容器

Families Citing this family (50)

* Cited by examiner, † Cited by third party
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US20060042998A1 (en) * 2004-08-24 2006-03-02 Haggard Clifton C Cushion for packing disks such as semiconductor wafers
JP4584023B2 (ja) * 2005-05-17 2010-11-17 信越ポリマー株式会社 基板収納容器及びその製造方法
US20070175792A1 (en) * 2006-02-02 2007-08-02 Barry Gregerson Magnetic seal for wafer containers
JP5025962B2 (ja) * 2006-02-15 2012-09-12 ミライアル株式会社 薄板収納容器
WO2007138913A1 (ja) * 2006-05-29 2007-12-06 Shin-Etsu Polymer Co., Ltd. 基板収納容器
JP5385130B2 (ja) * 2006-06-13 2014-01-08 インテグリス・インコーポレーテッド ウェハ収納容器用の再利用可能な弾性クッション
TWI303618B (en) * 2006-08-10 2008-12-01 Gudeng Prec Industral Co Ltd Metal photomask box
DE202007003416U1 (de) * 2007-03-04 2007-05-31 Jonas & Redmann Automationstechnik Gmbh Automatisierungscarrier für Substrate, insbesondere für Wafer zur Herstellung siliziumbasierter Solarzellen
US8356713B2 (en) 2007-11-09 2013-01-22 Shin-Etsu Polymer Co., Ltd. Retainer and substrate storage container
JP4764865B2 (ja) * 2007-11-13 2011-09-07 信越ポリマー株式会社 リテーナ及び基板収納容器
TWI562940B (en) * 2008-01-13 2016-12-21 Entegris Inc Wafer container and method of manufacture
JP4980252B2 (ja) * 2008-01-15 2012-07-18 信越ポリマー株式会社 基板収納容器及びそのシールガスケットの取り付け方法
JP5084573B2 (ja) * 2008-03-18 2012-11-28 信越ポリマー株式会社 基板収納容器
JP5184198B2 (ja) * 2008-05-01 2013-04-17 信越ポリマー株式会社 基板収納容器
TWI337162B (en) * 2008-07-31 2011-02-11 Gudeng Prec Industral Co Ltd A wafer container with constraints
US7971722B2 (en) * 2008-08-08 2011-07-05 Gudeng Precision Industral Co, Ltd Wafer container with restrainer
TWI343353B (en) * 2008-11-04 2011-06-11 Gudeng Prec Industral Co Ltd A wafer container having the snap-fitting constraint module
JP5186596B2 (ja) * 2009-05-13 2013-04-17 ミライアル株式会社 半導体ウエハ収納容器
JPWO2011102318A1 (ja) * 2010-02-19 2013-06-17 信越ポリマー株式会社 基板収納容器
KR20130054246A (ko) 2010-03-11 2013-05-24 인티그리스, 인코포레이티드 얇은 웨이퍼 운송장치
CN102844249B (zh) * 2010-04-20 2014-09-10 未来儿株式会社 基板收纳容器
KR101708087B1 (ko) * 2010-04-22 2017-02-17 신에츠 폴리머 가부시키가이샤 기판 수납 용기
JP5459787B2 (ja) * 2010-06-17 2014-04-02 信越ポリマー株式会社 基板収納容器
USD740031S1 (en) * 2010-10-19 2015-10-06 Entegris, Inc. Substrate container
USD668865S1 (en) * 2010-10-19 2012-10-16 Entegris, Inc. Substrate container
KR101899614B1 (ko) * 2010-10-20 2018-09-17 엔테그리스, 아이엔씨. 도어 가이드 및 밀봉부를 갖는 웨이퍼 컨테이너
JP5583058B2 (ja) * 2011-03-09 2014-09-03 信越ポリマー株式会社 基板収納容器
WO2013166512A1 (en) 2012-05-04 2013-11-07 Entergris, Inc. Replaceable wafer support backstop
TWI568653B (zh) * 2012-05-04 2017-02-01 恩特葛瑞斯股份有限公司 具有安裝在門上的運輸緩衝墊的晶圓容器
JP6166275B2 (ja) * 2012-11-20 2017-07-19 ミライアル株式会社 基板収納容器
JP5988854B2 (ja) * 2012-12-11 2016-09-07 信越ポリマー株式会社 基板収納容器
KR102098306B1 (ko) * 2013-02-20 2020-04-08 삼성디스플레이 주식회사 기판 수납 장치
CN105993067B (zh) 2013-04-26 2019-04-16 恩特格里斯公司 用于大直径晶片的具有锁止机构的晶片容器
KR102098722B1 (ko) * 2013-05-29 2020-04-09 미라이얼 가부시키가이샤 기판수납용기
KR102113139B1 (ko) * 2013-09-11 2020-05-20 미라이얼 가부시키가이샤 기판수납용기
US9184077B2 (en) 2013-09-30 2015-11-10 Taiwan Semiconductor Manufacturing Co., Ltd Wafer pod and wafer positioning mechanism thereof
US8857619B1 (en) 2013-09-30 2014-10-14 Taiwan Semiconductor Manufacturing Co., Ltd Mechanisms for wafer pod and pod door
TWM491030U (zh) * 2014-03-14 2014-12-01 Gudeng Prec Ind Co Ltd 晶圓收納盒及其氣密構件
JP6326330B2 (ja) * 2014-09-05 2018-05-16 株式会社Ｓｃｒｅｅｎホールディングス 基板収納容器、ロードポート装置および基板処理装置
WO2016046985A1 (ja) * 2014-09-26 2016-03-31 ミライアル株式会社 基板収納容器
JP6430195B2 (ja) * 2014-09-29 2018-11-28 株式会社Ｓｃｒｅｅｎホールディングス 基板収納容器
US10566226B2 (en) * 2014-11-11 2020-02-18 Applied Materials, Inc. Multi-cassette carrying case
JP6413943B2 (ja) * 2015-06-15 2018-10-31 信越半導体株式会社 シリコンエピタキシャルウェーハの抵抗率測定方法
KR102208275B1 (ko) * 2016-02-05 2021-01-27 엔테그리스, 아이엔씨. 기판 용기용 쿠션 리테이너
KR20190117502A (ko) * 2017-02-27 2019-10-16 미라이얼 가부시키가이샤 기판 수납 용기
JP6854341B2 (ja) * 2017-04-05 2021-04-07 ミライアル株式会社 基板収納容器
KR102325657B1 (ko) * 2017-08-09 2021-11-12 미라이얼 가부시키가이샤 기판 수납 용기
US11756816B2 (en) * 2019-07-26 2023-09-12 Applied Materials, Inc. Carrier FOUP and a method of placing a carrier
TWI803860B (zh) * 2020-04-30 2023-06-01 美商恩特葛瑞斯股份有限公司 光罩盒密封
CN115605412A (zh) * 2020-05-19 2023-01-13 未来儿股份有限公司（Jp） 基板收纳容器

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JP3556519B2 (ja) * 1999-04-30 2004-08-18 信越ポリマー株式会社 基板収納容器の識別構造及び基板収納容器の識別方法
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CN1298595C (zh) * 2001-11-14 2007-02-07 诚实公司 晶片封闭件密封结构、密封部件以及晶片密封件
KR100964047B1 (ko) * 2001-11-14 2010-06-16 엔테그리스, 아이엔씨. 웨이퍼 보유 시스템을 구비한 웨이퍼 캐리어
JP4073206B2 (ja) 2001-12-05 2008-04-09 信越ポリマー株式会社 収納容器の蓋体
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JP4218260B2 (ja) * 2002-06-06 2009-02-04 東京エレクトロン株式会社 被処理体の収納容器体及びこれを用いた処理システム
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI409903B (zh) * 2006-09-04 2013-09-21 Shinetsu Polymer Co A substrate storage container and a check valve
TWI466221B (zh) * 2006-11-07 2014-12-21 Shinetsu Polymer Co Substrate storage container
TWI418456B (zh) * 2006-12-01 2013-12-11 Shinetsu Handotai Kk Substrate storage container
TWI400766B (zh) * 2008-08-27 2013-07-01 Gudeng Prec Industral Co Ltd 具一體成形晶圓限制件模組之前開式晶圓盒
TWI447055B (zh) * 2010-05-24 2014-08-01 Miraial Co Ltd 基板收納容器
CN111247632A (zh) * 2017-11-15 2020-06-05 信越聚合物株式会社 基板收纳容器
CN111247632B (zh) * 2017-11-15 2023-11-14 信越聚合物株式会社 基板收纳容器
CN110021542A (zh) * 2018-01-08 2019-07-16 家登精密工业股份有限公司 容器门板抵持结构
CN110021542B (zh) * 2018-01-08 2023-10-03 家登精密工业股份有限公司 容器门板抵持结构

Also Published As

Publication number Publication date
TWI347648B (zh) 2011-08-21
EP1605496A2 (en) 2005-12-14
EP1605496B1 (en) 2018-12-26
EP1605496A3 (en) 2011-01-19
JP2005353898A (ja) 2005-12-22
KR101008867B1 (ko) 2011-01-20
US7344031B2 (en) 2008-03-18
US20050274645A1 (en) 2005-12-15
JP4667769B2 (ja) 2011-04-13
KR20060046409A (ko) 2006-05-17

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