TWI303618B - Metal photomask box - Google Patents

Metal photomask box Download PDF

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Publication number
TWI303618B
TWI303618B TW095129396A TW95129396A TWI303618B TW I303618 B TWI303618 B TW I303618B TW 095129396 A TW095129396 A TW 095129396A TW 95129396 A TW95129396 A TW 95129396A TW I303618 B TWI303618 B TW I303618B
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TW
Taiwan
Prior art keywords
metal
photomask
cover body
upper cover
disposed
Prior art date
Application number
TW095129396A
Other languages
Chinese (zh)
Other versions
TW200808622A (en
Inventor
Ming Lung Chiu
Jian-Feng Wang
Original Assignee
Gudeng Prec Industral Co Ltd
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Publication date
Application filed by Gudeng Prec Industral Co Ltd filed Critical Gudeng Prec Industral Co Ltd
Priority to TW095129396A priority Critical patent/TWI303618B/en
Priority to US11/640,887 priority patent/US20080035514A1/en
Publication of TW200808622A publication Critical patent/TW200808622A/en
Application granted granted Critical
Publication of TWI303618B publication Critical patent/TWI303618B/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67396—Closed carriers characterised by the presence of antistatic elements

Description

-1303618 八、發明說明： 【發明所屬之技術領域】 本發明係有關於一種光罩盒，特別是有關於一種金屬光罩盒的結構。 【先前技術】 ， 在現代的先進晶圓代工廠（Foundry)或半導體製造廠（Fab·)，在製造晶 • 圓的過程中，已經邁向90奈米以下的製程，因此，用來進行曝光製程的光罩則 φ 是首當其衝的進行線寬的縮小。由於光罩的成本非常高，故為降低製造的成本， 都希望增加光罩的使用壽命〇見在已有許多的技術集中在光罩盒中的固定件或 疋疋位件上’希望_這些’件或是定位件的設置，能有效降低光罩在運輸 或儲存時所造成的傷害；此外，也有一些技術在光罩盒中加入消除靜電效應 (ESD)的裝置，以避免靜電對光罩產生損傷。 由於製程的進步，當半導體舰人更高_製㈣，除了靜較應外，半 導體廠中的電磁脈衝（EMI)也會對光罩產生危害，尤其在光罩處於儲存狀態時， _更無法預_遭環境的變化’因此在考慮防止靜電效應（ESD)以及電磁脈衝 (EMI)對光罩產生損害的前提下，本發明提供一種金屬光罩盒之結構，除可有 效地固U私及隔絕光罩與域的接_舰外，還可以個金屬光罩盒來 防止靜電效應（ESD)以及電磁軸⑽丨）對光罩產生損害。 【發明内容】 本lx明主要目的在提供—種金屬光罩盒之結構，金屬光罩盒來防止靜 電效應（ESD)以及電磁脈衝（EM|)對光軍產生的損害。 ^月之另主要目的在提供—種具有氣密效果之金屬光罩盒之結構，以 5 •1303618 使置放於金屬光罩盒之中的光罩能與大氣_，以避免因霧化崎低了光罩的 使用壽命。 本發明還有-主要目的，係在提供一種具有充氣功能的金屬光罩盒之結 構，除可降減罩霧化關題外，還可増加光罩儲存的時間。 “本發明之再-主要目的，係在提供—種可摘測振動的金屬光罩盒之結構， 精由振動偵測裝置來監督金屬光罩盒之儲存狀態。 一本發明接著再提供—主要目的，係在提供—種金屬光罩盒之—蓋體上配置 一微波元件識顧，可以祕朗金屬解盒之儲存位置。 基於上述之目的，本發明首先提供—種金屬光罩±，其係由一個金屬 上蓋體及-個金屬下蓋體組合而成，其中於金屬光罩盒之—側邊上配 置至少-活動接合機構用以連接金屬上蓋體及金屬下蓋體，且於活動 接合機構之-相對側面上配置至少_鎖扣件，用以扣合金屬上蓋體及 金屬下蓋體。-1303618 VIII. Description of the Invention: [Technical Field] The present invention relates to a photomask case, and more particularly to a structure of a metal photomask case. [Previous technology] In the modern advanced foundry or semiconductor manufacturing plant (Fab·), in the process of manufacturing crystals and circles, it has already moved to a process below 90 nm, so it is used for exposure. The reticle of the process is the first to narrow the line width. Since the cost of the reticle is very high, in order to reduce the cost of manufacturing, it is desirable to increase the service life of the reticle. 已有 Many techniques have been concentrated on the fixtures or clamps in the reticle case. 'The setting of the piece or the positioning piece can effectively reduce the damage caused by the reticle during transportation or storage; in addition, some technologies add an anti-static effect (ESD) device to the reticle box to avoid static electricity to the reticle Causes damage. Due to the progress of the process, when the semiconductor shipman is higher, the electromagnetic pulse (EMI) in the semiconductor factory will also harm the reticle, especially when the reticle is in storage state, especially when the reticle is in storage. The present invention provides a structure of a metal photomask box, in addition to effectively preventing the electrostatic effect (ESD) and the electromagnetic pulse (EMI) from causing damage to the mask. Insulation of the reticle and the domain _ outside the ship, a metal reticle can also be used to prevent electrostatic effects (ESD) and electromagnetic shaft (10) 丨) damage to the reticle. SUMMARY OF THE INVENTION The main purpose of the present invention is to provide a metal photomask box structure, a metal photomask box to prevent electrostatic damage (ESD) and electromagnetic pulse (EM|) damage to the light army. ^The other main purpose of the month is to provide a metal hood with a gas-tight effect. The hood can be placed in the metal reticle with 5·1303618 to avoid the atomization. The life of the reticle is reduced. Still another object of the present invention is to provide a structure of a metal photomask having an inflation function, which can also reduce the time required for the photomask to be stored, in addition to reducing the fogging of the mask. "The re-maintenance of the present invention is to provide a structure of a metal photomask box capable of picking and measuring vibration, and to supervise the storage state of the metal photomask box by a vibration detecting device. One invention is further provided - mainly The purpose is to provide a microwave component on the cover body of the metal photomask box, and the storage position of the metal solution box can be secreted. Based on the above purpose, the present invention first provides a metal mask ± The utility model is composed of a metal upper cover body and a metal lower cover body, wherein at least a movable engagement mechanism is arranged on the side of the metal photomask case for connecting the metal upper cover body and the metal lower cover body, and is engaged with the movable joint. At least the _locking member is disposed on the opposite side of the mechanism for engaging the metal upper cover body and the metal lower cover body.

本發明接著提供-種金屬光罩盒，其係由—個金屬上蓋體及一個金 =下蓋體組合而成，其中於金屬光罩盒之—側邊上配置至少—活動接 合機構用以連接金屬上蓋體及金屬下蓋體，且於活動接合機構之一相 :彳面上配置至少-鎖扣件’用以扣合金屬上蓋體及金屬下蓋體，且 進-步於金屬上蓋體及金屬下蓋體之間更配置—環狀氣密塾圈。 體；此 本發明進-步提供一種金屬光罩盒，其係由一個金屬±蓋體及一個金 打蓋體組合而成，其中於金屬光罩盒之一側邊上配置至少—活動二 合機構用以連接金屬上蓋體及金屬下蓋體，且於活動接合機構之一相 對側面上配置至少一鎖扣件’用以扣合金屬上蓋體及金屬下蓋 6 1303618 外’金屬光罩盒除了在金屬上蓋體及金屬下蓋體之間配置—環狀氣穷 塾圈外，還進-何金屬上蓋體或金屬下蓋體上配置有複數個氣間:The invention further provides a metal photomask box which is composed of a metal upper cover body and a gold=lower cover body, wherein at least one side of the metal photomask case is disposed with a movable engaging mechanism for connecting. a metal upper cover body and a metal lower cover body, and at least one of the movable engagement mechanisms: the top surface is provided with a locking member for engaging the metal upper cover body and the metal lower cover body, and stepping on the metal upper cover body and The metal lower cover is further arranged with a ring-shaped airtight ring. The present invention further provides a metal photomask case which is composed of a metal ± cover body and a gold cover body, wherein at least one side of the metal photomask case is disposed at least one side The mechanism is used for connecting the metal upper cover body and the metal lower cover body, and at least one locking member is disposed on one side of the movable engagement mechanism for engaging the metal upper cover body and the metal lower cover 6 1303618. In addition to the annular gas-poor ring disposed between the metal upper cover and the metal lower cover, a plurality of air spaces are disposed on the metal upper cover or the metal lower cover:

本發明更進—步提供—種金屬光罩盒，其係'由—個金屬上蓋體及一個 金屬下蓋體組合而成’其中於金屬光罩盒之一側邊上配置至少一活動 接合機構用以連接金屬上蓋體及金屬下蓋體，且於活動接合機構之一 相對側面上配置至少—鎖扣件，用以扣合金屬上蓋體及金屬下蓋體； 此外，金屬光罩盒除了在金屬上蓋體及金屬下蓋體之間配置—環狀氣 密墊圈以及於金屬上蓋體或金屬下蓋體上配置有複數個氣閥元件之 外更於金屬下蓋體上配置有一振動感應裝置。The present invention further provides a metal photomask box which is 'combined by a metal upper cover body and a metal lower cover body' wherein at least one movable engagement mechanism is disposed on one side of the metal photomask case The utility model is characterized in that the metal upper cover body and the metal lower cover body are connected, and at least one locking member is arranged on one side of the movable engaging mechanism for fastening the metal upper cover body and the metal lower cover body; A ring-shaped airtight gasket is disposed between the metal upper cover and the metal lower cover, and a plurality of gas valve elements are disposed on the metal upper cover or the metal lower cover, and a vibration sensing device is disposed on the metal lower cover.

本發明接著再提供-種金屬光罩盒結構，包括一個金屬下蓋體，其二 側各，又有一個固持裝置，且於固持裝置之一相鄰側設有一個限制裝 置’以形成-近似门型之結構，且固持裝置包括有限位片及抵持件； 一個金屬上蓋體，係由—個活動接合機構與金屬下蓋體結合；複數個 扣壓件，此扣壓件以複數個支撐點固接於金屬上蓋體内各角落；還有 導持疋位件，其係以可拆卸之方式配置於金屬上蓋體内相對近似 门型結構開口之一側邊上；一個環狀氣密墊圈，配置於金屬上蓋體及 金屬下蓋體之間；至少一鎖扣件，配置於活動接合機構之一相對側面 上’複數個氣閥元件，配置於金屬上蓋體或金屬下蓋體之上；以及一 個振動感應裝置配置金屬下蓋體之上。 經由本發明所提供之設計，除了可使光罩平順容易導入光罩盒中以及有效 地固定光罩外，觀―步提供防止靜電效應 (ESD)以及電磁脈衝（EMI)的功 7 1303618 月b可使仔光罩哥命得以提高，此外，本發明之具有充氣功能的金屬光罩盒， 還可提供一乳密的空間’以保護光罩及避免光罩霧化之功效。 【實施方式】 由於本發明係揭露—種金屬光罩盒之結構，其情_到的—些光罩或光 罩皿之抽製造或處理過程’係現有技術來達成，故在下述說明中，並不 作πΑ仏述。而且下述内文中之圖式’亦並未依據實際之相關尺寸完整絡努， 其作用僅在表軸本發日㈣財社*賴。 — 、月多考第®及第二圖’係本發明之-種金屬光罩盒之示意圖。本 發明之金屬光罩盒1Q包括—個上金屬蓋體彳彳、—個下金屬蓋體Ο、一個配置 ;上孟屬讀11與-個下金屬蓋體12之_環狀氣密墊圈13以及—鎖扣裝置 m屬光罩A 1Q可經由上金屬蓋體彳1、下金屬蓋體12及環狀氣密塾 圈^3之蓋合，在配合鎖扣裝置14之壓扣，使得金屬継1〇内能保編的 L故孟屬光罩盒1()之内部與外部是隔絕的。故當—片光罩扣置放入金屬 光罩盒10内時’即可達到將光罩20與外界大氣隔絕目的。 本發明之金梅盒彳〇可由—種金屬材質所構成，此金_可以是鐵、 銅、紹 '不鏽鋼妓前者之合金材料所形成，而在本實施例中，以獨鋼材質 為較佳的選擇。同時，在金屬光罩盒1G之内部部份，係經過表面處理，故可將 t屬光罩盒1Q本身所可能產生的雜質降至最低。另外，本實施例中的環狀氣密 13，可為，高㈣轉‘魏㈣_y) 成之具有彈 _氣_。因此’可藉由鎖扣裝置14的扣合，來將此具有彈性的氣密塾圈 壓合，以便能達到確實氣密的效果。更由於環狀氣密麵13具有—定之厚度， 因此，本發明實施例中的鎖扣裝置14係使用—種具有活動轴之鎖扣件來達到壓 8 1303618 扣金屬光罩盒1〇。 卜為了加強金屬光罩盒1〇之抗電磁脈衝干擾⑽^白勺能力，本實施 例中的環狀氣密塾圈13也可以是一種導電膠所形成之氣密墊圈。因此，當金屬 衫盒1〇麟酬形峨咖蓋外可㈣編嫩1〇形成 -個類似金屬遮蔽⑽elding)之外殼，故可有效的對置放於金屬光罩盒1〇 中的光罩20產生保護的作用。同時，也可藉由此導電膠所形成的氣密墊圈來達 成消除金屬光罩盒10上的靜電。 1為了使金屬光罩盒能夠具有長時間的健存能力時，需要將—些惰性氣體充 i屬光罩i之内’此外’為了保持金屬光罩盒内的潔淨度，也需要將已緩存 -在金屬光罩盒内的氣體抽離或排除，這些氣體包括大氣、金屬光罩盒本身所 釋出的氣體（_assing)或是源自於殘留在光罩表面的微量化學容 液所產生的揮發氣體等。因此需要在金屬光罩盒上配置至少—個充氣裝置 及至少-個排氣裝置，如此，方可使金屬光罩盒具有絲之功能。 接著，請參加第三圖及第四圖所示，係本發明之具有充氣功能之金屬光罩 盒示意圖。在本實施例中的金屬光罩盒，除了具有前述金屬光罩盒10之结構外， 還更蝴光罩盒10之下金屬蓋體12之—側邊上配置—細裝置15及一排 氣閥裝置16’而此充氣閥裝置15及排_裝置16在金屬光罩盒的内部端上均 配置具有彈性之充氣閥檔板151及排_當板161。因此當一部氣體充填設備 (未顯示）將惰性氣體充人金屬光罩盒1Q時，氣體充填設備上的充氣嘴裝置及 排氣嘴裝置會經由金屬光軍盒10上的充氣間裝置15及排氣閥裝置㈣具有彈 性之充氣閥播板151及排氣閥權板161頂開，故可順利的將氣體抽出並充入惰 性氣體，使得金屬光罩盒1〇内夯滿荽條从々 円死屬料14氣體。當充氣完成後，氣體充填設備 1303618 的充氣鮮置及排氣嘴裝置脫離金屬光罩盒1G，而具有彈性之充氣_板151 及排氣閥檔板161就會立即恢復至原來的位置並將充氣置15及排氣間裝置 16封閉，使彳f充滿在金屬光罩盒1〇中的惰性氣體不會麟，故可使储存於金 屬光罩益10中的光罩20保持在與大氣隔離的狀態，故可使本發明之金屬光罩 盒1〇具長時間的儲存光罩功能。 接著，再請參考帛五®，縣發明之具有統魏之金屬光罩盒示意 圖在本貫施例中的金屬光罩盒在結構與上一實施例相同，僅僅只有將前述 瞻金屬光罩盒10中的複數個充氣閥裝置15及複數個排氣閥裝置16更改配置於金 •屬光罩盒之一金屬蓋體上，此蓋體可以是金屬上蓋體11或是金屬下蓋體12。如 第五圖所示，當複數個充氣閥裝置15及複數個排氣閥裝置16配置於一個金屬 蓋上時，也可使用前述之具有彈性之充氣閥檔板151及排氣閥檔板161來做為 金屬光罩盒10在充氣前及充氣後的氣密開關。此外，在本發明中的充氣閥檔板 151及排氣閥檔板161並未限制何種形態或結構，例如使用兩段式的彈性閥也 可使用在本貫施例中。如圖所示，在複數個充氣閥裝置15及複數個排氣閥裝置 ® 16的排列上形成一較長邊”S”及一較短邊’’X”，其中較長邊”s”的距離為16〇〜18〇 宅米（mm) ’在一較佳的’’S”距離為170mm，而較短邊”χ”的距離為iqq〜12〇 毫米（mm)，在一較佳的”S”距離為110mm。此一較長邊”s”及一較短邊，，χ”之距 離係與氣體充填設備上的充氣嘴裝置及排氣嘴裝置相對應。當複數個充氣閥裝 置15及複數個排氣閥裝置16配置在金屬上蓋體11或是金屬不蓋體12之一側 邊時，如第二圖所示，其複數個充氣閥裝置15及複數個排氣閥裝置16也可形 成一較長距離”S”及一較距離”Χ” ’而此較長距離”S”及一較距離”χ，，與較長邊”s” 及一較短邊’’X”相同。 1303618 由於嫩t蝴賴俺fe_，撕蝴 先罩益的取放、運送及儲存，都是經由 故Am炉士日 丁牙_〇υ及運輸裳置來執行， 因Γ為了二 罩盒中的光罩可能受到損壞時，往往無法得知。 2 了 4鮮盒在在運送過財是砰生過—些料的衝擊 孟屬光罩盒中的金屬上蓋體或是金屬下蓋體上的適當位置上，均配置有一個振 動=益19來做為監控，特別是一種具有方向性的振動感應器 2所示1鮮盒在運送中發生過斜的衝擊時，配-金屬光罩= 中==19會_色上概餐發__二9 _、 解後振19的觀會變成紅色，因此當製程 幾。或是操作人員偵測到或看到振動 、 屬繼㈣输㈣是吻，就知道此金 。當_實施例中的振動感應器伯 可u可《細_軸咖，初队 振動感應器。 人哪予式 罩::罩益來組合成—新的製程時，就需要能力迅速的找到每一金屬光 罩盒的所在位置。為此，請參考 屬上蓋體«糾下細__當位置上：；^侧在的料盒中的金 1罝上均配置有一個電子識別裝置17， 例如微波識職置_)’當需要尋求某一金屬光軍盒時，自動化設備也即可 透過此電子識職置17來_此金屬光罩盒。 此外，為了能將光罩有效的峡在金屬光罩盒中，本發明再提出另一實施 1303618 例，凊參考第六圖，其係發明之_具有扣壓件之金屬光罩盒之示意圖。如第六 圖戶林’在金屬光罩盒1Q的金屬上蓋體μ或金屬下蓋體12的四则落上，配 置有稷數個扣壓件18，此扣壓件的型狀如第六晒示，包括—座體181，並在 座體181上設置單或複數個地185，可贿座魏固接於金屬光罩盒 之金屬上蓋體11或金屬下蓋體12之各㈣上；同時，還有—個彎曲彈性元件 似與座⑽相連接，其中f曲彈性元件182之一端自座體181上整體延伸 而出而弓曲祕讀182之另一個端部則呈彈性懸浮狀態於此單或複數個支 撐點185之間；此彎曲彈性元件182進一步具有一扣壓面183及一頂持請 ㈣汁，以便當金屬群盒1Q之金屬上蓋體彳彳、金屬下蓋體Ο及氣密塾圈a 蓋合一光罩時，藉此彎曲彈性元件似之扣壓面183及頂持面184與光罩2〇 接觸並且扣合固定。此外，扣壓件18可為一高分子材料所形成，並且扣壓件18 可使用拆卸之方式與金屬光罩盒之金属上蓋體^或金屬下蓋體η結合。 、上所述僅為本發明之較佳實關而已，並義以限定本發日月之巾請專利 孩>!同扣上的^述’對於熟知本麟領域之專門人士應可明瞭及實施，因 春此其他未脫離本發明所揭示之精神下所完成的等效改變或修飾，均應包含在下 述之申請專利範圍中。 【圖式簡單說明】 第-圖係-側視圖，顯示本發明之金屬光罩盒,· 第二圖係-正視圖，顯示本發明之充氣式金屬光罩盒，· 第三圖係—立體51，顯示本發明之充氣式金屬光罩盒結構； 第四圖係—立體圖，顯示本發明之具有充«及排氣閥之充氣式金屬光罩盒结 構； 12 1303618 — 第五圖係一立體圖，顯示本發明之另一具有充氣閥及排氣闊之充氣式金屬光罩 盒結構； 第六圖係一立體圖，顯示本發明之扣壓件結構； 【主要元件符號說明】The invention further provides a metal photomask box structure comprising a metal lower cover body, each of which has a holding device on both sides, and a limiting device is provided on an adjacent side of the holding device to form an approximation The structure of the door type, and the holding device comprises a limiting piece and a resisting piece; a metal upper cover body is combined with a metal lower cover body by a movable engaging mechanism; a plurality of pressing parts are fixed by a plurality of supporting points Connected to the corners of the metal upper cover; and a guiding clamp member detachably disposed on the side of one of the openings of the metal upper cover relative to the door structure; an annular hermetic gasket, configured Between the metal upper cover and the metal lower cover; at least one locking member disposed on one of the opposite sides of the movable engagement mechanism; a plurality of valve components disposed on the metal upper cover or the metal lower cover; and a The vibration sensing device is disposed above the metal lower cover. Through the design provided by the present invention, in addition to making the reticle smooth and easy to be introduced into the reticle box and effectively fixing the reticle, the observation provides the function of preventing electrostatic effect (ESD) and electromagnetic pulse (EMI) 7 1303618 b In addition, the inflatable metal mask case of the present invention can also provide a nipple space to protect the reticle and prevent the blister from atomizing. [Embodiment] Since the present invention discloses a structure of a metal photomask case, the process of manufacturing or processing the photomask or the photomask is obtained by the prior art, and therefore, in the following description, Do not make π statement. Moreover, the drawings in the following texts are not completely based on the actual relevant dimensions, and their functions are only on the front of the table axis (4). —, 多多考第®和第二图' is a schematic view of a metal photomask of the present invention. The metal photomask case 1Q of the present invention comprises an upper metal cover body, a lower metal cover body, a configuration, and an upper airtight gasket 13 of the upper metal read 11 and the lower metal cover 12. And the locking device m is a photomask A 1Q which can be covered by the upper metal cover 彳1, the lower metal cover 12 and the annular airtight cymbal ring 3, and is engaged with the buckle of the locking device 14 to make the metal The inner and outer parts of the L-Meng reticle box 1 () that can be protected by 継1〇 can be isolated. Therefore, when the reticle is placed in the metal photomask case 10, the purpose of isolating the reticle 20 from the outside atmosphere can be achieved. The golden plum box of the present invention may be composed of a metal material, and the gold may be formed of an alloy material of iron, copper, and stainless steel, and in the present embodiment, a single steel material is preferred. s Choice. At the same time, the inner portion of the metal photomask case 1G is subjected to surface treatment, so that impurities which may be generated by the t-mask case 1Q itself can be minimized. In addition, the annular airtightness 13 in this embodiment may be such that the high (four) turns "wei (four)_y) into a bomb _ _. Therefore, the elastic airtight ring can be pressed by the fastening of the locking device 14, so that the effect of the airtightness can be achieved. Further, since the annular airtight surface 13 has a constant thickness, the locking device 14 in the embodiment of the present invention uses a locking member having a movable shaft to reach the metal buckle housing 1 压131303618. In order to enhance the ability of the metal reticle to resist electromagnetic pulse interference (10), the annular airtight ferrule 13 in this embodiment may also be a hermetic gasket formed by a conductive adhesive. Therefore, when the metal shirt case 1 is unicorned, the quilt cover can be formed (4) to form a shell similar to a metal shade (10), so that the mask can be effectively placed in the metal mask case. 20 produces a protective effect. At the same time, the static electricity on the metal photomask case 10 can be eliminated by the hermetic gasket formed by the conductive paste. 1 In order to enable the metal reticle to have a long-term storage capacity, it is necessary to fill some of the inert gas into the reticle i. In addition, in order to maintain the cleanliness in the metal reticle, it is also necessary to cache - the gas in the metal reticle is removed or removed. These gases include the atmosphere, the gas released by the metal mask itself (_assing) or the trace amount of chemical liquid remaining on the surface of the reticle. Volatile gases, etc. Therefore, it is necessary to dispose at least one inflator and at least one exhaust device on the metal mask case, so that the metal mask box can have the function of silk. Next, please refer to the third and fourth figures, which are schematic views of the metal photomask of the present invention having an inflation function. In the metal photomask box of the present embodiment, in addition to the structure of the metal photomask case 10, the metal cover 12 under the mask cover 10 is disposed on the side of the metal cover 12 and has a fine device 15 and an exhaust gas. The valve device 16' and the inflation valve device 15 and the row device 16 are provided with an elastic inflation valve flap 151 and a row plate 161 on the inner end of the metal reticle. Therefore, when a gas filling device (not shown) fills the metal mask case 1Q with the inert gas, the inflation nozzle device and the nozzle device on the gas filling device pass through the inflator device 15 on the metal light box 10 and The exhaust valve device (4) has an elastic inflation valve board 151 and an exhaust valve weight plate 161, so that the gas can be smoothly extracted and filled with an inert gas, so that the metal mask box is filled with a purlin. Suddenly, it is 14 gases. When the inflation is completed, the gas filling device 103618 is inflated and the venting device is disengaged from the metal reticle 1G, and the elastic venting plate 151 and the exhaust valve baffle 161 are immediately restored to their original positions and The inflator 15 and the exhaust unit 16 are closed so that the inert gas filled in the metal mask case 1 is not lining, so that the mask 20 stored in the metal mask 10 can be kept isolated from the atmosphere. In the state of the metal mask case 1 of the present invention, the reticle function can be stored for a long time. Next, please refer to the 帛五®, the invention of the metal reticle box with the Wei Wei in the present embodiment. The metal reticle box in the present embodiment has the same structure as the previous embodiment, and only the aforementioned metal mask box is used. The plurality of inflation valve devices 15 and the plurality of exhaust valve devices 16 of 10 are modified to be disposed on a metal cover of a gold reticle housing, and the cover may be a metal upper cover 11 or a metal lower cover 12. As shown in the fifth figure, when a plurality of inflation valve devices 15 and a plurality of exhaust valve devices 16 are disposed on a metal cover, the aforementioned inflatable valve flap 151 and exhaust valve flap 161 may be used. As a gas-tight switch of the metal reticle box 10 before and after inflation. Further, the inflation valve flap 151 and the exhaust valve flap 161 in the present invention are not limited in any form or configuration, and for example, a two-stage elastic valve can be used in the present embodiment. As shown, a longer side "S" and a shorter side 'X" are formed in the arrangement of the plurality of inflation valve means 15 and the plurality of exhaust valve means ® 16, wherein the longer side "s" The distance is 16〇~18〇House meters (mm) 'The distance between a preferred 'S' is 170mm, and the distance of the shorter side "χ" is iqq~12〇mm (mm), in a better The "S" distance is 110mm. The distance between the longer side "s" and the shorter side, "χ" corresponds to the inflation nozzle device and the exhaust nozzle device on the gas filling device. When a plurality of inflation valve devices 15 and a plurality of exhaust valves When the device 16 is disposed on one side of the metal upper cover 11 or the metal cover 12, as shown in the second figure, the plurality of inflation valve devices 15 and the plurality of exhaust valve devices 16 may also form a longer distance. "S" and a longer distance "Χ" and the longer distance "S" and a longer distance "χ" are the same as the longer side "s" and a shorter side ''X". 1303618 Lai Wei fe_, the picking, transporting and storing of the tearing shutters are all carried out by the Am Furnace Dingya _ 〇υ and the transport slings, because the hood in the second hood may be damaged. At the time, it is often impossible to know. 2 The 4 fresh boxes are arranged in the appropriate position on the metal upper cover or the metal lower cover in the impact mask of the Mengzi mask. There is a vibration = Yi 19 as a monitor, especially a directional filter 2 shown in the fresh box in transit When an oblique shock occurs, the matching-metal mask = medium == 19 will be _ color on the meal __ two 9 _, the solution after the vibration 19 will turn red, so when the process is a few. Or the operator detect Measured or seen vibration, continuation (four) loss (four) is a kiss, you know this gold. When the vibration sensor in the embossing method can be "fine _ axis coffee, the first team vibration sensor. :: Covers are combined into a new process, you need to quickly find the location of each metal mask box. For this, please refer to the upper cover «replace the thin __ when the position:; ^ side An electronic identification device 17 is arranged on the gold 1 in the magazine, for example, the microwave affiliation _)', when it is necessary to seek a certain metal light box, the automation device can also use the electronic affiliation 17 In addition, in order to enable the effective gorge of the reticle in the metal reticle, the present invention further proposes another embodiment of 1 361 186, which is referred to as a sixth figure, which is a method of the invention. Schematic diagram of the metal reticle box. As shown in the sixth figure, Hulin's metal cover body or metal lower cover 1 in the metal reticle box 1Q The four of the two are dropped, and a plurality of crimping members 18 are disposed. The shape of the crimping member is as shown in the sixth display, including the seat body 181, and a single or a plurality of grounds 185 are disposed on the seat body 181. It is fixed to each of the metal upper cover 11 or the metal lower cover 12 of the metal reticle; at the same time, a curved elastic member is connected to the seat (10), wherein the one end of the elastic element 182 is a self-supporting body. The other end of the 181 is extended and the other end of the bow 182 is elastically suspended between the single or plurality of support points 185; the curved elastic member 182 further has a pressing surface 183 and a top holding (4) juice, so that when the metal upper cover 彳彳, the metal lower cover Ο and the airtight a a of the metal group box 1Q are covered with a reticle, the elastic member is bent like the pressing surface 183 and the top surface 184 The mask 2 is in contact and fastened. In addition, the crimping member 18 can be formed of a polymer material, and the crimping member 18 can be combined with the metal upper cover body or the metal lower cover body n of the metal photomask case. The above description is only a preferred embodiment of the present invention, and is intended to limit the scope of the present day and the moon, please refer to the patent child> The equivalent changes or modifications made by the present invention without departing from the spirit of the invention are intended to be included in the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a side view showing a metal photomask case of the present invention, and a second view showing a gas-filled metal photomask case of the present invention. 51, showing the structure of the inflatable metal photomask box of the present invention; the fourth figure is a perspective view showing the structure of the inflatable metal photomask box with the charging valve and the exhaust valve of the present invention; 12 1303618 - the fifth figure is a perspective view The utility model relates to another inflatable metal photomask box structure with an inflation valve and an exhaust valve according to the present invention; and a sixth perspective view showing the structure of the buckle member of the invention; [Description of main component symbols]

10 金屬光罩盒 11 上蓋體 12 下蓋體 13 環狀氣密墊圈 14 鎖扣裝置 15 充氣閥裝置 16 排氣閥裝置 17 微波識別裝置 18 扣壓件 181 座體 182 彎曲彈性元件 183 扣壓面 184 頂持面 185 支樓點 19 振動感應器 20 光罩 1310 Metal mask box 11 Upper cover 12 Lower cover 13 Annular airtight gasket 14 Locking device 15 Inflator valve device 16 Exhaust valve device 17 Microwave identification device 18 Buckle 181 Seat 182 Curved elastic element 183 Buckle surface 184 Top Holding 185 branch point 19 vibration sensor 20 mask 13

Claims (1)

13036181303618 九、申請專利範圍： 1· 一種金屬光罩盒，係由一金屬上蓋體及一金屬下蓋體組合而成，其中於該金 屬光罩盒之一側邊上配置至少一活動接合機構用以連接該金屬上蓋體及該金屬 下蓋體，且於該活動接合機構之一相對侧面上配置至少一鎖扣件，用以扣合該 金屬上蓋體及該金屬下蓋體。 2_如申请專利範圍第1項所述之金屬光罩盒，其中該金屬光罩盒之材質為不錄 鋼系列或紹合金、鎮合金。 # 3·如申請專利範圍第1項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 4· 一種金屬光罩盒，係由一金屬上蓋體及一金屬下蓋體組合而成，其中於該金 屬光罩盒之一侧邊上配置至少一活動接合機構用以連接該金屬上蓋體及該金屬 下蓋體，且於該活動接合機構之一相對侧面上配置至少一鎖扣件，用以扣合該 金屬上蓋體及該金屬下蓋體，且進一步於該金屬上蓋體及該金屬下蓋體之間更 配置一環狀氣密墊圈。 5_如申請專利範圍第4項所述之金屬光罩盒，其中該金屬光罩盒之材質為不銹 鋼系列或銘合金、鎮合金。 6·如申請專利範圍第4項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 7_如申請專利範圍第4項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為一 種高分子樹脂。 8·如申請專利範圍第4項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為一 導電膠。 9. 一種可充氣式金屬光罩盒，係由一金屬上蓋體及一金屬下蓋體組合而成，其 中於該金屬光罩盒之一側邊上配置至少一活動接合機構用以連接該金屬上蓋體 1303618 及該金屬下蓋體，且於該活動接合機構之一相對側面上配置至少一鎖扣件，用 以扣合該金屬上蓋體及該金屬下蓋體，此金屬光罩盒之特徵在於： 該金屬上蓋體及該金屬下蓋體之間配置一環狀氣密墊圈且於該金屬上蓋體或該 金屬下蓋體上配置有複數個氣閥裝置。 1〇·如申請專利範圍第9項所述之金屬光罩盒，其中該金屬光罩盒之材質為不銹 鋼系列或鋁合金、鎂合金。 11·如申請專利範圍第9項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 ® 12·如申請專利範圍第9項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為一 種1¾分子樹脂。 13·如申請專利範圍第9項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為一 導電膠。 14. 如申請專利範圍第9項所述之金屬光罩盒，其中該氣閥裝置包括至少一個充 氣閥裝置及至少一個排氣閥裝置。 15. 如申請專利範圍第14項所述之金屬光罩盒，其中該充氣閥裝置及排氣閥裝 ®置進一步包括有一具有彈性之充氣閥檔板及排氣閥檔板。 16_如申請專利範圍第9項所述之金屬光罩盒，其中該氣閥裝置可形成一較長邊 且該較長邊之距離為170mm。 17.如申請專利範圍第9項所述之金屬光罩盒，其中該氣閥裝置可形成一較短邊 且該較短邊之距離為11〇mm。 18·種金屬光罩盒’係由一金屬上蓋體及一金屬下蓋體組合而成，其中於該金 屬光罩盒之-側邊上配置至少-活動接合機構用以連接該金屬上蓋體及該金屬 下蓋體，且於該活動接合機構之一相對側面上配置至少一鎖扣件，用以扣合該 15 1303618 金屬上蓋體及該金屬下蓋體，再於該金屬上麵及該金屬下鐘之間配置一環 狀氣密墊圈以及於該金屬上蓋體或該金屬下蓋體上配置有複數個具有氣間裝 置，此金屬光罩盒之特徵在於： «亥金屬上蓋體金屬或该下蓋體上配置一振動感應裝置。 19.如申請專利範圍第18項所述之金屬光罩盒，其中該金屬光罩盒之材質為不 銹鋼系列或I呂合金、鎮合金。 2α如申請專利範圍第18項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 • 21如申請專利範圍第18項所述之金屬光罩盒，其中該環狀氣密塾圈之材質為 一種高分子樹脂。 22. 如申請專利範圍第18項所述之金屬光罩盒，其中該環狀氣密塾圈之材質為 一導電膠。 23. 如申請專利範圍第18項所述之金屬光罩盒，其中該振動感應裝置為一具有 方向性感應之振動感應裝置。 24. 如申請專利範圍第23項所述之金屬光罩盒，其中該振動感應裝置為一種可 響ί複使肖之振動感應裝置。 25·如申請專利範圍第23項所述之金屬光罩盒，其中該振動感應裝置為一種化 學式之振動感應裝置。 如申咕專利fen第18項所述之金屬光罩盒，其巾該氣職置可形成一較長 邊且該較長邊之距離為 170mm 〇 如申明專利fc®第18柄述之金屬鮮盒，其巾該朗裝置可形成一較短 邊且該較短邊之距離為11〇mm。 28·種金屬光罩盒，係由一金屬上蓋體及一金屬下蓋體組合而成，其中於該金 1303618 屬光罩盒之-侧邊上配置至少-活動接合機構用以連接該金屬上蓋體及該金屬 下蓋體，且於該活動接合機構之一相對側面上配置至少一鎖扣件，用以扣合該 金屬上蓋體及该金屬下蓋體，再於該金屬上蓋體及該金屬下蓋體之間配置一環 狀氣密墊圈以及於該金屬上蓋體或該金屬下蓋體上配置有複數個氣閥裝置，此 金屬光罩盒之特徵在於： 该金屬上蓋體或金屬下蓋體之任一側邊上配置一微波識別元件（RF丨D)。 29·如申請專利範圍第28項所述之金屬光罩盒，其中該金屬光罩盒之材質為不 φ 銹鋼系列或鋁合金、鎂合金。 30.如申請專利範圍第28項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 31·如申請專利範圍第28項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為 一種高分子樹脂。 32.如申請專利範圍第28項所述之金屬光罩盒，其中該環狀氣密塾圈之材質為 一導電膠。 33_如申請專利範圍第28項所述之金屬光罩盒，其進一步包括於該金屬上蓋體 鲁或金屬下蓋體上配置一振動感應裝置。 34.如申請專利範圍第33項所述之金屬光罩盒，其中該振動感應裝置為—種可 重複使用之振動感應裝置。 35·如申請專利範圍第33項所述之金屬光罩盒，其中該振動感應裝置為—種化 學式之振動感應裝置。 36·如申明專利範圍第28項所述之金屬光罩盒，其中該氣閥裝置可形成一較長 邊且該較長邊之距離為170mm。 37·如申印專利細帛28項所述之金屬光罩盒，其中該氣閥裝置可形成一較短 17 1303618 邊且該較短邊之距離為11〇mm。 38. —種金屬光罩盒，係由一金屬上蓋體及一金屬下蓋體組合而成，其中於該金 屬光罩盒之一側邊上配置至少一活動接合機構用以連接該金屬上蓋體及該金屬 下蓋體’且於該活動接合機構之一相對側面上配置至少一鎖扣件，用以扣合該 金屬上蓋體及該金屬下蓋體，再於该金屬上蓋體及該金屬下蓋體之間配置一環 狀氣密墊圈以及於該金屬上蓋體或該金屬下蓋體上配置有複數個氣閥裝置，此 金屬光罩盒之特徵在於： Φ該金屬上蓋體及該金屬下蓋體内各角落配置有複數個扣壓件。 39·如申請專利麵第38項所述之金屬光罩盒，其中該金屬光罩盒之材質為不 銹鋼系列或鋁合金、鎂合金。 40. 如申請專利範圍帛38項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 41. 如申請專利細第38項所述之金屬光罩盒，其中該扣壓件結構之特徵包括： 一座體，係以複數個支撐點固接於該光罩傳送盒上蓋體内各角落之位置； 一彎曲彈性元件，其-彎曲之端部結合於該座體上，另—f曲之端部則呈 鲁彈性懸浮狀態於該單或複數個支樓點之間，且進一步包括一頂持面及一扣壓面； 其中，當該光罩傳送盒之蓋合-光罩時，該.彎曲彈性元件之該頂持面及該 扣壓面與該光罩接觸並固定之。 • 42·如中請專利細第38項所述之金屬光罩盒，料該環狀氣麵圈之材質為 一種高分子樹脂。 43. 如申請糊範圍第38項所述之金屬光罩盒，其中該環狀氣密塾圈之材質為 一導電膠。 44. 如申請專利範圍第41項所述之金屬光罩盒，其中該彎曲彈性元件為一高分 1303618 子材料所形成。 45· —種金屬光罩盒，係由一金屬上蓋體及一金屬下蓋體組合而成，其中於該金 屬光罩盒之一側邊上配置至少一活動接合機構用以連接該金屬上蓋體及該金屬 下蓋體，且於該活動接合機構之一相對侧面上配置至少一鎖扣件，用以扣合該 金屬上蓋體及該金屬下蓋體，此金屬光罩盒之特徵在於： 該金屬上蓋體及該金屬下蓋體之間配置一環狀氣密墊圈且於該金屬上 蓋體或該金屬下蓋體之一側邊上配置有複數個氣閥震置。 _ 46·如申請專利範圍帛45項所述之金屬光罩盒，其中該金屬光罩盒之材質為不 銹鋼系列或銘合金、鎂合金。 47·如申請專利範圍第45項所述之金屬光罩盒，其巾該鎖扣件為金屬材質。 48_如申請專利範圍第45項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為 一種高分子樹脂。 49_如申請專利範圍第45項所述之金屬光罩盒，其中該環狀氣密塾圈之材質為 一導電膠。 鲁5〇_如申請專利範圍第45項所述之金屬光罩盒，其中該氣閱裝置包括至少一個 充氣閥裝置及至少一個排氣閥裝置。 51如申請專利範圍第5Q項所述之金屬光罩盒，其中該充氣閥她該排氣閱 裝置進一步包括有一具有彈性之充氣閥檔板及排氣閥檔板。 其中該_裝置可形成一較長 52_如申請專利範圍第45項所述之金屬光罩盒， 邊且該較長邊之距離為17〇mm。 19 1303618 54_ —種金屬光罩盒結構，包括 一金屬下蓋體及一金屬上蓋體，係由一活動接合機構與該金屬下蓋體結合； 複數個扣壓件，配置於該金屬上蓋體及該金屬下蓋體内各角落； 一環狀氣密墊圈，配置於該金屬上蓋體及該金屬下蓋體之間； 至少一鎖扣件，配置於該活動接合機構之一相對側面上；以及 複數個氣閥裝置，配置於該金屬上蓋體或該金屬下蓋體之一側邊上。 55. 如申請專利範圍第54項所述之金屬光罩盒結構，其中該金屬光罩盒之材質 Φ 為不銹鋼系列或鋁合金、鎂合金。 56. 如申請專利麵帛54項所述之金屬光罩盒結構，其中該鎖扣件為金屬材質。 57·如中請專利範圍第54項所述之金屬光罩盒結構，其中該環狀氣密墊圈之材 貝為一種兩分子樹脂。 58.如申請專利細第54項所述之金屬光罩盒結構，其中該環狀氣密塾圈之材 質為一導電膠。 趿如申請專利細第54項所述之金屬光罩盒結構，其中該扣壓件結構之特徵 ⑩包括： 座體’係以複數個支撐點固接於該光罩傳送盒上蓋體内各角落之位置；及 一幫曲彈性元件，其-料之端部結合於該座體上，曲之端部則呈彈性 懸浮狀態於該單或複數個支撐點之間，且進—步包括—麟面及—扣壓面； 其中，當該光罩傳送盒之蓋合—光罩時，細彈性元件之該頂持面及該扣壓 面與該光罩接觸並固定之。 ㈤如申請專利範圍第54項所述之金屬光罩盒結構，其中該扣壓 材料所形忐。 卞 20 1303618 61 _如申請專利範圍第54述之金屬光罩盒結構，其中更進—步於該金屬上蓋體 或金屬下蓋體之任一側邊上配置一微波識別元件（rf丨d)。 62·如申請專利範圍第54項所述之金屬光罩盒結構，其中該氣閱裝置包括至少 一個充氣閥裝置及至少一個排氣閥裝置。 防如申請專利範圍第62項所述之金屬光罩盒結構，其中該充氣閱裝置及該排 氣閥裝置進一步包括有一具有彈性之充氣閥檔板及排氣閥檀板。 64.如申請專利範圍第54項所述之金屬光罩盒結構，其中該氣閱裝置可形成一 Φ較長邊且該較長邊之距離為170mm。 65.如申請專利範圍第54項所述之金屬光罩盒結構，其中該氣閱裝置可形成一 較短邊且該較短邊之距離為11〇mm。 66_ —種金屬光罩盒結構，包括： 金屬下盍體及-金屬上蓋體，係由—活動接合機構與該金屬下蓋體結合； 複數個扣壓件，配置於該金屬上蓋體與該金屬下蓋體内各角落； -壤狀氣密墊圈，置於該金屬上蓋體及該金屬下蓋體之間； 至少一鎖扣件，配置於該活動接合機構之一相對側面上； 複數個氣閥裝置，配置於該金屬上蓋體或該金屬下蓋體之一側邊上；以及 振動感應裝置配置該與該金屬上蓋體或該金屬下蓋體之上。 67. 如中請專利細第66項所述之金屬光罩盒結構，其中該振動感絲置為— 有方向性感應之振動感應裝置。 68. 如申請專利範圍第66項所述之金屬光罩盒結構，丨中該振動感應裝置為— 種可重複使用之振動感應裝置。 的·如申請專利範圍第66項所述之金屬光罩盒結構，其中該振動感應裝置為一 21 1303618 種化學式之振誠應裝置。 70.如申請專利範圍第66項所述之金屬光罩盒結構，其中更進一步於該金屬上 蓋體或金屬下蓋體之任一侧邊上配置一微波識別元件（RFID)。 71·如申請專利範圍第66項所述之金屬光罩盒結構，其中該氣閥裝置包括至少 一個充氣閥裝置及至少一個排氣閥裝置。 72_如申明專利圍第71項所述之金屬光罩盒結構，其中該充氣闕裝置及該排 氣閥裝置進一步包括有一具有彈性之充氣閥檔板及排氣閥槽板。 • 73_如中請專利範圍第66項所述之金屬光罩盒結構，其中該氣閥裝置可形成一 較長邊且該較長邊之距離為170mm。 74_如申請專利範圍第66項所述之金屬光罩盒結構，其中該氣閥裝置可形成一 較短邊且該較短邊之距離為 110mm。IX. Patent application scope: 1. A metal photomask box is composed of a metal upper cover body and a metal lower cover body, wherein at least one movable joint mechanism is disposed on one side of the metal photomask case for The metal upper cover body and the metal lower cover body are connected, and at least one locking member is disposed on one side of the movable engagement mechanism for engaging the metal upper cover body and the metal lower cover body. 2 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 #3. The metal photomask case according to claim 1, wherein the locking member is made of metal. A metal photomask box is a combination of a metal upper cover body and a metal lower cover body, wherein at least one movable engaging mechanism is disposed on one side of the metal photomask case for connecting the metal upper cover body and The metal lower cover body is provided with at least one locking member on the opposite side of the movable engaging mechanism for engaging the metal upper cover body and the metal lower cover body, and further under the metal upper cover body and the metal An annular hermetic gasket is further disposed between the cover bodies. 5* The metal photomask case according to claim 4, wherein the metal photomask case is made of a stainless steel series or an alloy or a town alloy. 6. The metal photomask case of claim 4, wherein the locking member is made of metal. The metal photomask casing of claim 4, wherein the annular airtight gasket is made of a polymer resin. 8. The metal photomask of claim 4, wherein the annular hermetic gasket is made of a conductive adhesive. 9. An inflatable metal photomask case, which is composed of a metal upper cover body and a metal lower cover body, wherein at least one movable engaging mechanism is disposed on one side of the metal photomask case for connecting the metal And a metal lower cover body, and at least one locking member is disposed on an opposite side of the movable engaging mechanism for engaging the metal upper cover body and the metal lower cover body, and the metal light cover box is characterized An annular airtight gasket is disposed between the metal upper cover and the metal lower cover, and a plurality of air valve devices are disposed on the metal upper cover or the metal lower cover. The metal photomask case according to claim 9, wherein the metal photomask case is made of stainless steel or aluminum alloy or magnesium alloy. The metal photomask case according to claim 9, wherein the locking member is made of metal. The metal photomask of the invention of claim 9, wherein the annular hermetic gasket is made of a 13⁄4 molecular resin. 13. The metal photomask of claim 9, wherein the annular airtight gasket is made of a conductive adhesive. 14. The metal photomask of claim 9, wherein the gas valve device comprises at least one gas filling valve device and at least one gas valve device. 15. The metal photomask of claim 14, wherein the inflation valve device and the exhaust valve assembly further comprise a resilient inflation valve flap and an exhaust valve flap. The metal photomask cartridge of claim 9, wherein the gas valve device can form a longer side and the longer side has a distance of 170 mm. 17. The metal photomask of claim 9, wherein the valve device forms a shorter side and the shorter side has a distance of 11 mm. The metal mask case is formed by combining a metal upper cover body and a metal lower cover body, wherein at least a movable engagement mechanism is disposed on the side of the metal photomask case for connecting the metal upper cover body and a metal lower cover body, and at least one locking member is disposed on an opposite side of the movable engaging mechanism for engaging the 15 1303618 metal upper cover body and the metal lower cover body, and the metal and the metal An annular airtight gasket is disposed between the lower clocks, and a plurality of air gap devices are disposed on the metal upper cover body or the metal lower cover body. The metal photomask box is characterized by: A vibration sensing device is disposed on the lower cover body. 19. The metal photomask of claim 18, wherein the metal mask is made of stainless steel or Ilu alloy. 2α The metal photomask case according to claim 18, wherein the locking member is made of metal. The metal photomask case according to claim 18, wherein the material of the annular airtight ring is a polymer resin. 22. The metal photomask of claim 18, wherein the annular airtight loop is made of a conductive adhesive. 23. The metal photomask of claim 18, wherein the vibration sensing device is a vibration sensing device having directional sensing. 24. The metal photomask of claim 23, wherein the vibration sensing device is a vibration sensing device that can oscillate. The metal photomask of claim 23, wherein the vibration sensing device is a chemical vibration sensing device. The metal photomask case according to claim 18, wherein the air position of the towel can form a longer side and the distance of the longer side is 170 mm, such as the metal of the patented fc® 18th handle. The box, the towel device, can form a shorter side and the shorter side has a distance of 11 mm. The metal mask case is a combination of a metal upper cover body and a metal lower cover body, wherein at least a movable engagement mechanism is disposed on the side of the gold 1036618 genre of the photomask case for connecting the metal upper cover And the metal lower cover body, and at least one locking member is disposed on an opposite side of the movable engaging mechanism for engaging the metal upper cover body and the metal lower cover body, and the metal upper cover body and the metal An annular airtight gasket is disposed between the lower cover body, and a plurality of air valve devices are disposed on the metal upper cover body or the metal lower cover body, and the metal photomask case is characterized by: the metal upper cover body or the metal lower cover A microwave identification component (RF丨D) is disposed on either side of the body. The metal photomask case according to claim 28, wherein the metal photomask box is made of a material other than φ rust steel or aluminum alloy or magnesium alloy. 30. The metal photomask of claim 28, wherein the fastener is made of metal. The metal photomask case according to claim 28, wherein the annular airtight gasket is made of a polymer resin. 32. The metal photomask of claim 28, wherein the annular airtight loop is made of a conductive adhesive. 33. The metal photomask of claim 28, further comprising a vibration sensing device disposed on the metal upper cover or the metal lower cover. 34. The metal photomask of claim 33, wherein the vibration sensing device is a reusable vibration sensing device. 35. The metal photomask of claim 33, wherein the vibration sensing device is a chemical vibration sensing device. 36. The metal photomask of claim 28, wherein the valve assembly is formed with a longer side and the longer side has a distance of 170 mm. 37. The metal photomask of claim 28, wherein the valve assembly forms a shorter 17 1303618 side and the shorter side has a distance of 11 mm. 38. A metal photomask box, which is composed of a metal upper cover body and a metal lower cover body, wherein at least one movable engaging mechanism is disposed on one side of the metal photomask case for connecting the metal upper cover body And the metal lower cover body ′ and at least one locking member disposed on an opposite side of the movable engagement mechanism for engaging the metal upper cover body and the metal lower cover body, and then the metal upper cover body and the metal An annular airtight gasket is disposed between the cover body, and a plurality of air valve devices are disposed on the metal upper cover body or the metal lower cover body. The metal photomask case is characterized by: Φ the metal upper cover body and the metal under the cover A plurality of crimping members are arranged at various corners of the cover body. 39. The metal photomask case according to claim 38, wherein the metal photomask case is made of a stainless steel series or an aluminum alloy or a magnesium alloy. 40. The metal photomask of claim 38, wherein the fastener is made of metal. 41. The metal photomask of claim 38, wherein the buckle structure comprises: a body fixed by a plurality of support points at each corner of the cover of the reticle transfer box; a curved elastic member, the bent end portion is coupled to the base body, and the other end portion of the curved portion is in a state of being elastically suspended between the single or plurality of branch points, and further includes a top holding And a pressing surface; wherein, when the photomask transfer box is covered by the photomask, the top surface of the curved elastic member and the pressing surface are in contact with and fixed to the photomask. • 42. The metal photomask case described in the patent item No. 38, the material of the annular gas ring is a polymer resin. 43. The metal photomask according to claim 38, wherein the annular airtight ring is made of a conductive adhesive. 44. The metal photomask of claim 41, wherein the curved elastic member is formed of a high score 1303618 sub-material. A metal photomask box is a combination of a metal upper cover body and a metal lower cover body, wherein at least one movable engaging mechanism is disposed on one side of the metal photomask case for connecting the metal upper cover body And the metal lower cover body, and at least one locking member is disposed on an opposite side of the movable engaging mechanism for engaging the metal upper cover body and the metal lower cover body, wherein the metal photomask case is characterized by: An annular airtight gasket is disposed between the metal upper cover and the metal lower cover, and a plurality of air valves are disposed on one side of the metal upper cover or the metal lower cover. _ 46. The metal photomask case according to claim 45, wherein the metal photomask case is made of a stainless steel series or an alloy or a magnesium alloy. 47. The metal photomask case according to claim 45, wherein the locking member is made of metal. The metal photomask case of claim 45, wherein the annular airtight gasket is made of a polymer resin. The metal photomask case of claim 45, wherein the annular airtight ring is made of a conductive adhesive. The metal photomask of claim 45, wherein the gas viewing device comprises at least one inflation valve device and at least one exhaust valve device. 51. The metal photomask of claim 5, wherein the inflator further comprises a resilient inflation valve flap and an exhaust valve flap. Wherein the device can form a metal photomask case as described in claim 45, and the distance between the longer sides is 17 mm. 19 1303618 54_—a metal photomask box structure comprising a metal lower cover body and a metal upper cover body coupled to the metal lower cover body by a movable engagement mechanism; a plurality of buckle members disposed on the metal upper cover body and the a metal airtight gasket disposed between the metal upper cover and the metal lower cover; at least one locking member disposed on an opposite side of the movable engagement mechanism; and plural The gas valve device is disposed on one side of the metal upper cover or the metal lower cover. 55. The metal photomask box structure according to claim 54, wherein the metal photomask box material Φ is a stainless steel series or an aluminum alloy or a magnesium alloy. 56. The metal reticle structure of claim 54, wherein the locking member is made of metal. The metal photomask box structure of claim 54, wherein the material of the annular airtight gasket is a two-molecular resin. 58. The metal reticle structure of claim 54, wherein the material of the annular airtight ferrule is a conductive paste. For example, the metal reticle structure described in claim 54 is characterized in that: the feature 10 of the buckle structure comprises: the base body is fixed to each corner of the cover body of the reticle transfer box by a plurality of support points. Positioning; and a set of elastic members, wherein the end of the material is coupled to the seat body, and the end portion of the curved piece is elastically suspended between the single or plurality of support points, and the step comprises: And a crimping surface; wherein, when the photomask transfer box is covered by the photomask, the top surface of the thin elastic member and the pressing surface are in contact with and fixed to the photomask. (5) The metal photomask box structure according to claim 54, wherein the crimping material is shaped.卞20 1303618 61_ The metal photomask box structure of claim 54, wherein a microwave identification element (rf丨d) is further disposed on either side of the metal upper cover or the metal lower cover . The metal photomask casing structure of claim 54, wherein the gas viewing device comprises at least one inflation valve device and at least one exhaust valve device. The metal photomask casing structure of claim 62, wherein the inflating device and the exhaust valve device further comprise a resilient inflation valve flap and an exhaust valve panel. 64. The metal reticle structure of claim 54, wherein the gas viewing device forms a Φ longer side and the longer side has a distance of 170 mm. The metal photomask casing structure of claim 54, wherein the gas viewing device forms a shorter side and the shorter side has a distance of 11 mm. 66_—a metal photomask box structure, comprising: a metal lower body and a metal upper cover body, wherein the movable joint mechanism is combined with the metal lower cover body; a plurality of buckle members are disposed under the metal upper cover body and the metal a corner airtight gasket disposed between the metal upper cover and the metal lower cover; at least one locking member disposed on an opposite side of the movable engagement mechanism; a plurality of air valves The device is disposed on a side of the metal upper cover or the metal lower cover; and the vibration sensing device is disposed on the metal upper cover or the metal lower cover. 67. The metal reticle structure of claim 66, wherein the vibrating wire is disposed as a directional sensing vibration sensing device. 68. The metal reticle structure of claim 66, wherein the vibration sensing device is a reusable vibration sensing device. The metal photomask box structure according to claim 66, wherein the vibration sensing device is a 211303618 chemical type vibration device. 70. The metal photomask box structure of claim 66, wherein a microwave identification element (RFID) is further disposed on either side of the metal upper cover or the metal lower cover. The metal photomask casing structure of claim 66, wherein the gas valve device comprises at least one inflation valve device and at least one exhaust valve device. The metal reticle structure of claim 71, wherein the inflatable dam device and the venting valve device further comprise a resilient inflation valve flap and an exhaust valve slot plate. The metal photomask casing structure of claim 66, wherein the gas valve device can form a longer side and the longer side has a distance of 170 mm. The metal photomask casing structure of claim 66, wherein the valve device is formed with a shorter side and the shorter side has a distance of 110 mm. 22twenty two
TW095129396A 2006-08-10 2006-08-10 Metal photomask box TWI303618B (en)

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TW095129396A TWI303618B (en) 2006-08-10 2006-08-10 Metal photomask box
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