M336219 八、新型說明： 【新型所屬之技術領域】 u 本創作係有關於一種充氣設備與入氣埠裝置，特別是有關於一種用以將氣 .體導入至少一個用以存放半導體元件或光罩之存放裝置中的充氣設備。 . 【先前技術】 • 近代半導體科技發展迅速，其中光學微影技術扮演重要的角色，只要是關 於圖形疋義，皆需仰賴光學微影技術。光學微影技術在半導體的應用上，是將 設計好的線路製作成具有特定形狀可透光之光罩。利用曝光原理，則光源通過 光罩投影至矽晶圓可曝光顯示特定圖案。由於任何附著於光罩上的塵埃顆粒(如 微粒、粉塵或有機物)都會造成投影成像的品質劣化，用於產生圖形的光罩必須 保持絕對潔淨，而被投射的矽晶圓或者其他半導體投射體亦必須保持絕對清 •靜，因此在一般的晶圓製程中，都提供無塵室的環境以避免空氣中的顆粒污染。 - 然而，目前的無塵室也無法達到絕對無塵的狀態。 因此，現代的半導體製程皆利用抗污染的存放裝置進行光罩與半導體元件 的保存與運輸，以使光罩與半導體元件保持潔淨。存放裝置係在半導體製程中 春用於存放光罩或半導體元件，以利光罩與半導體元件在機台之間的搬運與傳 送，並隔絕光罩與半導體元件與大氣的接觸，避免光罩或半導體元件被雜質汙 -染而產生變化。因此，在先進的半導體廠中，通常會要求該等存放裝置的潔淨 度要符合機械標準介面(Standard Mechanical Interface ; SMIF)，也就是說保持潔 淨度在Class 1以下。故，在該等存放裝置中充入氣體便是目前解決的手段之一。 因此，以往的技術乃將該等存放裝置外接一個充氣設備，使氣體藉由充氣設備 導入該等存放裝置。 充氣没備，不論係使用何種充氣方式或手段，均需在入氣埠裝置，也就是 將氣體充填進入存放裝置之部分，增設氣密裝置，多半是一種「軟塑膠零件」 (o-ringseal)。以往的充氣設備增設氣密裝置，如美國專利公告第5879458號專 M336219 利、美國專利公告第6042651號專利、美國專利公告第6221163號專利、美國 專利公告第6368411號專利所示，其增設方法多半是直接將該軟塑膠零件嵌設 ,於入氣埠裝置上，其目的在於防止充氣時氣體之流失，然而此種方法，容易隨 著軟塑膠零件之耗損，而影響整個入氣埠裝置之效果，甚至需汰換整個入氣埠 裝置，造成成本之增加。雖然氣密裝置為了達到使入氣埠裝置與存放裝置密合 之效果，使用軟塑膠零件是最好的選擇，因其具有彈性，可輕易調整；然而氣 密裝置若只單純嵌設於入氣埠裝置，亦會因沒有固定而造成浪費，是一種額外 增加之成本。 有鑒於此，本創作所提供之充氣設備，乃針對先前技術加以改良者。 【新型内容】 為解決先前技術之問題，本創作提供一種充氣設備，由承座與入氣埠裝置 、、且口而成。其中，入氣埠裝置包含有基座、彈性件與固定件，基座上具有一通 孔貫穿’以供乳體通過；彈性件，設於該基座上，用以保持氣密性；以及固定 件，设於該基座上，用以固定該彈性件。M336219 VIII. New description: [New technical field] u This creation department relates to an inflatable device and an air inlet device, in particular to a method for introducing a gas body into at least one for storing a semiconductor component or a mask. The inflator in the storage device. [Prior Art] • Modern semiconductor technology is developing rapidly, and optical lithography plays an important role. As long as it is about graphic ambiguity, it depends on optical lithography. In the application of semiconductors, optical lithography is to make a designed circuit into a permeable mask with a specific shape. Using the exposure principle, the light source is projected onto the wafer by the mask to expose a specific pattern. Since any dust particles (such as particles, dust, or organic matter) attached to the reticle will degrade the quality of the projected image, the reticle used to create the pattern must remain absolutely clean, and the projected ruthenium wafer or other semiconductor projectile It must also be kept absolutely clean, so in a normal wafer process, a clean room environment is provided to avoid particle contamination in the air. - However, the current clean room cannot reach an absolutely dust-free state. Therefore, modern semiconductor processes use a contamination-resistant storage device to store and transport the reticle and semiconductor components to keep the reticle and semiconductor components clean. The storage device is used for storing the photomask or the semiconductor component in the semiconductor process, so as to facilitate the handling and transfer of the photomask and the semiconductor component between the machine, and to isolate the contact between the photomask and the semiconductor component and the atmosphere, and avoid the photomask or the semiconductor. The component is contaminated by impurities and changes. Therefore, in advanced semiconductor plants, the cleanliness of these storage devices is usually required to comply with the Standard Mechanical Interface (SMIF), which means that the cleanliness is below Class 1. Therefore, filling the storage devices with gas is one of the means currently solved. Therefore, the prior art has attached an external inflating device to the storage device so that the gas is introduced into the storage device by the inflator. Inflatable is not prepared, no matter what kind of inflation method or means is used, it is necessary to add air-tight device to the air inlet device, that is, to fill the gas into the storage device, which is mostly a kind of "soft plastic parts" (o-ringseal) ). In the past, the air-filling device has been provided with a gas-tight device, such as the U.S. Patent No. 5,879,458, the entire disclosure of which is incorporated herein by reference. U.S. Patent No. 5, 879, 458, U.S. Patent No. 6, 624, 651, U.S. Patent No. 6,211, 163, and U.S. Patent No. 6,386,141, The soft plastic part is directly embedded in the air inlet device, and the purpose is to prevent the loss of gas during inflation. However, this method is easy to affect the effect of the entire air inlet device with the loss of the soft plastic part. It is even necessary to replace the entire gas inlet device, resulting in an increase in cost. Although the airtight device is used to achieve the effect of bringing the air inlet device into close contact with the storage device, the use of soft plastic parts is the best choice because it has elasticity and can be easily adjusted; however, the airtight device is simply embedded in the air. The sputum device is also wasted because it is not fixed, which is an additional cost. In view of this, the inflatable device provided by the present invention is improved for the prior art. [New content] In order to solve the problems of the prior art, the present invention provides an inflatable device which is formed by a socket and an air inlet device. Wherein, the air inlet device comprises a base, an elastic member and a fixing member, the base has a through hole through the 'for the passage of the milk body; the elastic member is disposed on the base for maintaining the airtightness; and fixing And is disposed on the base for fixing the elastic member.
因此’本創作之主要目的在於提供一種設有彈性件可汰換之入氣琿裝 可直接汰換件，不需更換脑人氣職置，以節省成本。、 再目的，在於提供一種設有固定件之入氣埠裝置，可固定彈 件，以達到伽方便之效果。 晉一目的’在於提供一種具有圓弧接觸部分之彈性件之入氣埠裝 置，使接觸面更加密合，減少氣體外权風險。 本J乍之再目的’在於提供一種具有平面接觸 置，讎面更加密合，減少崎_&。 鱗裝 【實施方式】 ;彳作係揭路-種人氣埠裝置之充氣設備，其中所利_的—些關於 M336219 =依據嫩_以樹t，編財嫩她 首先，本創作係揭露一種充氣設備，係與 目的在於將瓣人存放峨彻元件之存放置連接’其 少-個入氣部分，氣體自此部分進贿放裝置存放裝置此種存放裝置具有至 請參閱第-圖，此為本創作充氣設傷之示意圖。充氣設備⑼包含一 承座⑴與至少-入氣槔裝置(2)，承座⑴係用以承載存放裝置(5)，入氣埠裝置⑺ 係用以與該存放裝置(5)之人氣部分⑻相接，並將氣體充填進人該存放裝置 (5)。本創顧揭祝技娜徵在於獻鱗裝置(2)。人祕輯2)設於 上’且相對應霞存放裝置(5)之入氣部分⑻，其包含有基座⑼、彈性 以及固定件(23)。基座㈤具有一通孔(24)貫穿之，用以供氣體通過，而彈性件㈤ 係與存放裝置(5)之入氣部分⑼相接觸，其目的在於保持氣密性，當入氣璋裝置 (2)將氣體導入存放裝置⑶，彈性件(22)可防止氣體茂出；固定件⑼係用以固定 彈性件(22)，以使彈性件(22)保持固定位置，另一方面，雜件(22)並未嵌設於 基座(21)上，因此可隨時汰換，只要取下固定件(23)即可取下雜件⑽，以增 進使用上之便利性。除此之外，可在基座(21)上設置—突緣⑼，明加彈性件 (22)之固定。 接著，請參閱第二A圖與第二B圖，此係彈性件(22)之示意圖。彈性件(22) 通常為一種軟塑膠零件(O-ring seal)，為一種環狀物體，其與存放裝置⑺入氣部 分(51)接觸部分(221)，可為圓弧狀(如第二A圖所示），或為平面狀(如第二8圖 所不），當設置成平面狀時，其可接觸之範圍較廣，可達較佳之氣密效果。 請參閱第三A圖至第三F，此為固定件(23)設置方式之示意圖。固定件(23) 係設置於基座(21)上，用以固定該彈性件(22)，其方法有許多種，可以卡勾方式 設置於該基座上或以螺旋方式設置，第三A圖係固定件(23)以卡勾方式固定圓弧 M336219 狀彈f生件(22)於基座(21)上，第三B圖係固定件(23)以卡勾方式固定平面狀彈性 件(22)於基座㈤上，第三〇圖為固定件(Μ)與基座⑼卡勾方式結合之拆解圖。 w第二D圖為固定件(23)以螺旋方式固定圓弧狀彈性件(22)於基座⑼上，而第三 • E圖係固定件(23)以職方式蚊平面狀彈性件(22)於基座⑼上，第三f圖為: 疋件(23)與基座(21)螺旋方式結合之拆解圖。其不同端視使用之需要而有所不同。 接著’请參閱第四八圖，為了使入氣埠裝置(2)設置於承座⑴上，入氣蜂裝 置(21)之基座(21)可再設置鎖固部分(25)，再以鎖固件(况)將該基座⑼接合於承 ’座⑴上。其中鎖固件(251)具有一鎖固頭(252)，請參閱第四B ®，入氣埠裝置(2) _上可再增設-個彈性裝置(253)，設於該鎖固件(251)之鎖固頭(252)與該基座⑼ 間’用以使該入氣埠裝置(2)與該承座⑴之相對位置可彈性調整，冑承座⑴或是 存放裝置(5)傾斜或不正時，該入氣埠裝置⑼可隨之酿，不會造成因為傾斜或 不正而導致氣體外洩。 為了達到需求，若需調整承座⑴與基座(21)之間隙，可再增設調整件⑽以 調整承座⑴與基座(21)之間隙，如第五A圖與第五B圖所示。調整件(26)可再設 置至少-孔(261) ’用以與基座(21)或承座⑴接合；調整件(26)亦可設置至少一孔 (262)，用以減輕調整件(26)本身重量，如第五c圖所示。 以上所述僅為本創作之較佳實施例而已，並非用以限定本創作之申請專利 籲權利；同時以上的描述’對於熟知本技術領域之相人士射明瞭及實施，因 此其他未脫離本創作新型所揭示之精神下所完成的等效改變或修飾，均應包含 ' 在下述之申請專利範圍中。 【圖式簡單說明】 第一圖，係本創作充氣設備之示意圖。 弟一A圖與弟二B圖，係本創作彈性件之示意圖。 第三A圖至第SF ®，係本創伽定件設置方式之示意圖。 第四A圖與第四B圖，係本創作基座之鎖固部分示意圖。 M336219 第五A圖至第五C圖，係本創作調整件之示意圖。 【主要元件符號說明】 充氣設備(0) 承座(1) 入氣埠裝置(2) 基座(21) 彈性件(22) 接觸部分(221) 固定件(23) 通孔(24) 鎖固部分(25) 鎖固件(251) 鎖固頭(252) 彈性裝置(253) 調整件(26) 孔(261)(262) 突緣(27) 存放裝置(5) 入氣部分(51)Therefore, the main purpose of this creation is to provide an air inlet and armor that can be replaced with elastic parts, which can be replaced directly, without the need to replace the brain's popular position, in order to save costs. A further object is to provide an air inlet device with a fixing member, which can fix the elastic member to achieve a convenient effect. The purpose of Jinyi is to provide an air inlet device with an elastic member having a circular arc contact portion, which makes the contact surface more encrypted and reduces the risk of external gas. A further object of the present invention is to provide a planar contact which is more concentric and reduces the smear. Scales [Implementation]; 彳 系 揭 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - The equipment is designed to connect the valve to the storage element of the valve. The lesser part of the air inlet part, the gas from which the part of the storage device is stored in the device. Please refer to the figure - this is This creation is a schematic diagram of the inflatable injury. The inflatable device (9) comprises a socket (1) and at least an air inlet device (2), the socket (1) is for carrying the storage device (5), and the air inlet device (7) is used for the popular part of the storage device (5) (8) Connect and fill the gas into the storage device (5). This creation Gu Jie said that the technique is to levy the scale device (2). The human secret 2) is located above and corresponds to the air inlet portion (8) of the Xia storage device (5), which comprises a base (9), an elastic body and a fixing member (23). The base (5) has a through hole (24) penetrating therethrough for gas passage, and the elastic member (5) is in contact with the inlet portion (9) of the storage device (5) for the purpose of maintaining airtightness when the air inlet device is installed (2) introducing the gas into the storage device (3), the elastic member (22) prevents the gas from being ejected; the fixing member (9) is used to fix the elastic member (22) to keep the elastic member (22) in a fixed position, and on the other hand, The piece (22) is not embedded in the base (21), so it can be replaced at any time, and the miscellaneous piece (10) can be removed by removing the fixing member (23) to improve the convenience of use. In addition to this, a flange (9) can be provided on the base (21) to fix the elastic member (22). Next, please refer to the second A diagram and the second B diagram, which is a schematic diagram of the elastic member (22). The elastic member (22) is usually an O-ring seal, which is an annular object which is in contact with the inlet portion (221) of the inlet portion (51) of the storage device (7) and may be arc-shaped (such as the second A (shown in Figure A), or planar (as shown in Figure 8), when set in a planar shape, it can be contacted in a wide range to achieve a better airtight effect. Please refer to the third A to the third F, which is a schematic diagram of the arrangement of the fixing member (23). The fixing member (23) is disposed on the base (21) for fixing the elastic member (22). The method has a plurality of methods, and can be arranged on the base or in a spiral manner, the third A The figure fixing member (23) fixes the circular arc M336219 in the form of a hook, the living piece (22) on the base (21), and the third B-shaped fixing member (23) fixes the flat elastic member in a hook manner. (22) On the base (5), the third drawing is a disassembled view in which the fixing member (Μ) and the base (9) are hooked. w The second D picture shows a fixing member (23) for fixing the arc-shaped elastic member (22) on the base (9) in a spiral manner, and the third E-frame fixing member (23) for the positional mosquito-like elastic member ( 22) On the pedestal (9), the third f-figure is: a disassembled view in which the cymbal (23) and the pedestal (21) are combined in a spiral manner. The different ends are different depending on the needs of use. Then, please refer to the fourth figure. In order to set the air inlet device (2) on the socket (1), the base (21) of the air inlet device (21) can be further provided with a locking portion (25). The lock (condition) engages the base (9) to the socket (1). The locking member (251) has a locking head (252), please refer to the fourth B®, and an additional elastic device (253) can be added to the air inlet device (2), and the locking device (251) is provided. The locking head (252) and the base (9) are configured to elastically adjust the relative position of the air inlet device (2) and the socket (1), and the bearing seat (1) or the storage device (5) is inclined or In case of irregularity, the air inlet device (9) can be brewed without causing gas leakage due to tilting or irregularity. In order to meet the demand, if the gap between the seat (1) and the base (21) needs to be adjusted, an adjustment member (10) may be added to adjust the gap between the seat (1) and the base (21), as shown in the fifth and fifth panels. Show. The adjusting member (26) may be further provided with at least a hole (261) for engaging with the base (21) or the socket (1); and the adjusting member (26) may also be provided with at least one hole (262) for relieving the adjusting member ( 26) Its own weight, as shown in Figure c. The above description is only for the preferred embodiment of the present invention, and is not intended to limit the patent application rights of the present invention; at the same time, the above description 'is well-known and implemented for those skilled in the art, so the other is not divorced from the creation. Equivalent changes or modifications made in the spirit of the novel disclosures should be included in the scope of the claims below. [Simple description of the diagram] The first picture is a schematic diagram of the original inflatable device. The brother A picture and the second picture B are the schematic diagram of the elastic part of the creation. The third A to SF ® are schematic diagrams of the way in which the galvanic components are set. The fourth A picture and the fourth B picture are schematic diagrams of the locking part of the creation base. M336219 The fifth to fifth C drawings are schematic diagrams of the creation adjustments. [Main component symbol description] Inflator (0) Seat (1) Air inlet device (2) Base (21) Elastic member (22) Contact portion (221) Fixing member (23) Through hole (24) Locking Part (25) Locking Firmware (251) Locking Head (252) Elastic Device (253) Adjusting Member (26) Hole (261) (262) Flange (27) Storage Device (5) Intake Section (51)