SG72840A1 - Transport module - Google Patents

Transport module

Info

Publication number
SG72840A1
SG72840A1 SG1998001595A SG1998001595A SG72840A1 SG 72840 A1 SG72840 A1 SG 72840A1 SG 1998001595 A SG1998001595 A SG 1998001595A SG 1998001595 A SG1998001595 A SG 1998001595A SG 72840 A1 SG72840 A1 SG 72840A1
Authority
SG
Singapore
Prior art keywords
transport module
transport
module
Prior art date
Application number
SG1998001595A
Other languages
English (en)
Inventor
David L Nyseth
Dennis J Krampotich
Todd M Ulschmid
Gregory W Bores
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of SG72840A1 publication Critical patent/SG72840A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Saccharide Compounds (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
SG1998001595A 1997-07-11 1998-07-06 Transport module SG72840A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/891,644 US6010008A (en) 1997-07-11 1997-07-11 Transport module

Publications (1)

Publication Number Publication Date
SG72840A1 true SG72840A1 (en) 2000-05-23

Family

ID=25398582

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998001595A SG72840A1 (en) 1997-07-11 1998-07-06 Transport module

Country Status (10)

Country Link
US (2) US6010008A (ja)
JP (4) JP4206149B2 (ja)
KR (1) KR100507952B1 (ja)
CN (3) CN1285492C (ja)
DE (1) DE19830640A1 (ja)
FR (1) FR2768135B1 (ja)
GB (1) GB2327298B (ja)
IT (1) IT1304687B1 (ja)
NL (2) NL1009466C2 (ja)
SG (1) SG72840A1 (ja)

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Also Published As

Publication number Publication date
GB2327298A (en) 1999-01-20
CN1515475A (zh) 2004-07-28
JP4206149B2 (ja) 2009-01-07
GB9815090D0 (en) 1998-09-09
IT1304687B1 (it) 2001-03-28
CN1541913A (zh) 2004-11-03
JPH1191864A (ja) 1999-04-06
KR100507952B1 (ko) 2005-11-25
US20080302700A1 (en) 2008-12-11
NL1011828A1 (nl) 1999-05-31
US6010008A (en) 2000-01-04
ITTO980585A1 (it) 2000-01-03
NL1011828C2 (nl) 1999-11-04
ITTO980585A0 (it) 1998-07-03
FR2768135B1 (fr) 2005-08-05
CN1107005C (zh) 2003-04-30
CN1285492C (zh) 2006-11-22
FR2768135A1 (fr) 1999-03-12
CN1205297A (zh) 1999-01-20
JP4324585B2 (ja) 2009-09-02
JP4324586B2 (ja) 2009-09-02
KR19990013418A (ko) 1999-02-25
GB2327298B (en) 2002-12-11
JP2006100837A (ja) 2006-04-13
NL1009466C2 (nl) 1999-04-29
JP2006080546A (ja) 2006-03-23
JP2005320071A (ja) 2005-11-17
DE19830640A1 (de) 1999-01-14
CN1308194C (zh) 2007-04-04

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