IT1304687B1 - Contenitore richiudibile per conservare e trasportare fette disemiconduttore - Google Patents
Contenitore richiudibile per conservare e trasportare fette disemiconduttoreInfo
- Publication number
- IT1304687B1 IT1304687B1 IT1998TO000585A ITTO980585A IT1304687B1 IT 1304687 B1 IT1304687 B1 IT 1304687B1 IT 1998TO000585 A IT1998TO000585 A IT 1998TO000585A IT TO980585 A ITTO980585 A IT TO980585A IT 1304687 B1 IT1304687 B1 IT 1304687B1
- Authority
- IT
- Italy
- Prior art keywords
- disemiconductor
- slices
- transport
- store
- foldable container
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Saccharide Compounds (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/891,644 US6010008A (en) | 1997-07-11 | 1997-07-11 | Transport module |
Publications (3)
Publication Number | Publication Date |
---|---|
ITTO980585A0 ITTO980585A0 (it) | 1998-07-03 |
ITTO980585A1 ITTO980585A1 (it) | 2000-01-03 |
IT1304687B1 true IT1304687B1 (it) | 2001-03-28 |
Family
ID=25398582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT1998TO000585A IT1304687B1 (it) | 1997-07-11 | 1998-07-03 | Contenitore richiudibile per conservare e trasportare fette disemiconduttore |
Country Status (10)
Country | Link |
---|---|
US (2) | US6010008A (it) |
JP (4) | JP4206149B2 (it) |
KR (1) | KR100507952B1 (it) |
CN (3) | CN1285492C (it) |
DE (1) | DE19830640A1 (it) |
FR (1) | FR2768135B1 (it) |
GB (1) | GB2327298B (it) |
IT (1) | IT1304687B1 (it) |
NL (2) | NL1009466C2 (it) |
SG (1) | SG72840A1 (it) |
Families Citing this family (84)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8028978B2 (en) * | 1996-07-15 | 2011-10-04 | Semitool, Inc. | Wafer handling system |
US6390754B2 (en) * | 1997-05-21 | 2002-05-21 | Tokyo Electron Limited | Wafer processing apparatus, method of operating the same and wafer detecting system |
US6736268B2 (en) * | 1997-07-11 | 2004-05-18 | Entegris, Inc. | Transport module |
US6010008A (en) * | 1997-07-11 | 2000-01-04 | Fluoroware, Inc. | Transport module |
US6428729B1 (en) * | 1998-05-28 | 2002-08-06 | Entegris, Inc. | Composite substrate carrier |
US6871741B2 (en) * | 1998-05-28 | 2005-03-29 | Entegris, Inc. | Composite substrate carrier |
US6216874B1 (en) * | 1998-07-10 | 2001-04-17 | Fluoroware, Inc. | Wafer carrier having a low tolerance build-up |
US6082540A (en) * | 1999-01-06 | 2000-07-04 | Fluoroware, Inc. | Cushion system for wafer carriers |
US6193430B1 (en) * | 1999-03-18 | 2001-02-27 | Aesop, Inc. | Quasi-kinematic coupling and method for use in assembling and locating mechanical components and the like |
JP3916342B2 (ja) * | 1999-04-20 | 2007-05-16 | 信越ポリマー株式会社 | 基板収納容器 |
US6389706B1 (en) | 2000-08-17 | 2002-05-21 | Motorola, Inc. | Wafer container having electrically conductive kinematic coupling groove, support surface with electrically conductive kinematic coupling pin, transportation system, and method |
US6389707B1 (en) | 2000-08-17 | 2002-05-21 | Motorola, Inc. | Wafer container having electrically conductive kinematic coupling groove to detect the presence of the wafer container on a support surface, the support surface, and method |
US6632068B2 (en) * | 2000-09-27 | 2003-10-14 | Asm International N.V. | Wafer handling system |
JP3955724B2 (ja) * | 2000-10-12 | 2007-08-08 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法 |
AU2002237697A1 (en) * | 2000-12-04 | 2002-06-18 | Entegris, Inc. | Wafer carrier with stacking adaptor plate |
WO2002055392A2 (en) * | 2001-01-09 | 2002-07-18 | Microtome Precision, Inc. | Apparatus and method for transporting a container |
KR100694601B1 (ko) * | 2001-01-17 | 2007-03-13 | 삼성전자주식회사 | 웨이퍼 적재 장치 |
US6923325B2 (en) | 2001-07-12 | 2005-08-02 | Entegris, Inc. | Horizontal cassette |
WO2003018434A1 (en) * | 2001-08-27 | 2003-03-06 | Entegris, Inc. | Modular carrier for semiconductor wafer disks and similar inventory |
EP1453741A1 (en) * | 2001-11-14 | 2004-09-08 | Entegris, Inc. | Wafer enclosure sealing arrangement for wafer containers |
CN1298599C (zh) * | 2001-11-14 | 2007-02-07 | 诚实公司 | 用于半导体晶片输送容器的晶片支承件连接 |
US20030188990A1 (en) * | 2001-11-14 | 2003-10-09 | Bhatt Sanjiv M. | Composite kinematic coupling |
WO2003046952A2 (en) * | 2001-11-27 | 2003-06-05 | Entegris, Inc | Semiconductor component handling device having an electrostatic dissipating film |
EP1458634A1 (en) * | 2001-11-27 | 2004-09-22 | Entegris, Inc. | Front opening wafer carrier with path to ground effectuated by door |
US7121414B2 (en) * | 2001-12-28 | 2006-10-17 | Brooks Automation, Inc. | Semiconductor cassette reducer |
CN100429133C (zh) * | 2002-01-15 | 2008-10-29 | 诚实公司 | 晶片运载器上的门和带有沙漏型槽的闭锁装置 |
US7175026B2 (en) | 2002-05-03 | 2007-02-13 | Maxtor Corporation | Memory disk shipping container with improved contaminant control |
US20040074808A1 (en) * | 2002-07-05 | 2004-04-22 | Entegris, Inc. | Fire retardant wafer carrier |
JP4146718B2 (ja) * | 2002-12-27 | 2008-09-10 | ミライアル株式会社 | 薄板支持容器 |
US7677394B2 (en) * | 2003-01-09 | 2010-03-16 | Brooks Automation, Inc. | Wafer shipping container |
JP2004235516A (ja) | 2003-01-31 | 2004-08-19 | Trecenti Technologies Inc | ウエハ収納治具のパージ方法、ロードポートおよび半導体装置の製造方法 |
TW581096U (en) * | 2003-03-05 | 2004-03-21 | Power Geode Technology Co Ltd | Wafer carrier and grip lever apparatus thereof |
US7347329B2 (en) * | 2003-10-24 | 2008-03-25 | Entegris, Inc. | Substrate carrier |
US7316325B2 (en) * | 2003-11-07 | 2008-01-08 | Entegris, Inc. | Substrate container |
US7182203B2 (en) * | 2003-11-07 | 2007-02-27 | Entegris, Inc. | Wafer container and door with vibration dampening latching mechanism |
TWI276580B (en) * | 2003-12-18 | 2007-03-21 | Miraial Co Ltd | Lid unit for thin-plate supporting container |
US20050155874A1 (en) * | 2004-01-21 | 2005-07-21 | Noah Chen | SMIF box and loading system of reticle |
US7328727B2 (en) * | 2004-04-18 | 2008-02-12 | Entegris, Inc. | Substrate container with fluid-sealing flow passageway |
JP4573566B2 (ja) * | 2004-04-20 | 2010-11-04 | 信越ポリマー株式会社 | 収納容器 |
TWI267483B (en) * | 2004-08-16 | 2006-12-01 | Ind Tech Res Inst | Clean container module |
US7720558B2 (en) | 2004-09-04 | 2010-05-18 | Applied Materials, Inc. | Methods and apparatus for mapping carrier contents |
JP4509713B2 (ja) * | 2004-09-13 | 2010-07-21 | 大日商事株式会社 | ウエハキャリア |
JP2006173331A (ja) * | 2004-12-15 | 2006-06-29 | Miraial Kk | 収納容器 |
KR100929471B1 (ko) * | 2005-02-03 | 2009-12-02 | 신에츠 폴리머 가부시키가이샤 | 고정 캐리어, 고정 캐리어의 제조 방법, 고정 캐리어의 사용 방법, 및 기판 수납 용기 |
JP4584023B2 (ja) * | 2005-05-17 | 2010-11-17 | 信越ポリマー株式会社 | 基板収納容器及びその製造方法 |
CN102130033B (zh) * | 2005-07-08 | 2014-05-14 | 交叉自动控制公司 | 工件支撑结构及其使用设备 |
US20100310351A1 (en) * | 2006-03-30 | 2010-12-09 | Tokyo Electron Limited | Method for handling and transferring a wafer case, and holding part used therefor |
JP4681485B2 (ja) | 2006-03-30 | 2011-05-11 | 東京エレクトロン株式会社 | ウエハケースの運用方法、ウエハケースの搬送方法及びウエハケース搬送用保持部品 |
JP4716928B2 (ja) * | 2006-06-07 | 2011-07-06 | 信越ポリマー株式会社 | ウェーハ収納容器 |
KR100772845B1 (ko) * | 2006-06-21 | 2007-11-02 | 삼성전자주식회사 | 반도체 디바이스 제조설비에서의 웨이퍼 수납장치 |
US20090194456A1 (en) * | 2006-07-07 | 2009-08-06 | Entegris, Inc. | Wafer cassette |
US20080006559A1 (en) * | 2006-07-07 | 2008-01-10 | Entegris, Inc. | Substrate carrier and handle |
JP4841383B2 (ja) * | 2006-10-06 | 2011-12-21 | 信越ポリマー株式会社 | 蓋体及び基板収納容器 |
CN101219720B (zh) * | 2007-01-10 | 2010-11-03 | 财团法人工业技术研究院 | 具弹性定位结构的洁净容器 |
JP5674314B2 (ja) * | 2007-02-28 | 2015-02-25 | インテグリス・インコーポレーテッド | レチクルsmifポッド又は基板コンテナ及びそのパージ方法 |
JP4842879B2 (ja) * | 2007-04-16 | 2011-12-21 | 信越ポリマー株式会社 | 基板収納容器及びそのハンドル |
JP2009087972A (ja) * | 2007-09-27 | 2009-04-23 | Tokyo Electron Ltd | 基板収容機構及び半導体製造装置 |
WO2010090276A1 (ja) * | 2009-02-06 | 2010-08-12 | シャープ株式会社 | カセット |
TWI363030B (en) * | 2009-07-10 | 2012-05-01 | Gudeng Prec Industral Co Ltd | Wafer container with top flange structure |
US8109390B2 (en) | 2009-08-26 | 2012-02-07 | Texchem Advanced Products Incorporated Sdn Bhd | Wafer container with overlapping wall structure |
US8813964B2 (en) * | 2009-08-26 | 2014-08-26 | Texchem Advanced Products Incorporated Sdn. Bhd. | Wafer container with recessed latch |
US8556079B2 (en) * | 2009-08-26 | 2013-10-15 | Texchem Advanced Products Incorporated Sdn Bhd | Wafer container with adjustable inside diameter |
JP5318800B2 (ja) * | 2010-03-04 | 2013-10-16 | 信越ポリマー株式会社 | 基板収納容器 |
KR101851250B1 (ko) | 2010-10-19 | 2018-04-24 | 엔테그리스, 아이엔씨. | 로봇식 플랜지를 구비한 전면 개방형 웨이퍼 컨테이너 |
EP2705528A4 (en) * | 2011-05-03 | 2014-11-26 | Entegris Inc | WAFER CONTAINER HAVING A PARTICLE PROTECTION SCREEN |
CN106941087B (zh) | 2011-08-12 | 2020-03-10 | 恩特格里斯公司 | 晶片载具 |
TWI431712B (zh) * | 2011-09-20 | 2014-03-21 | Gudeng Prec Ind Co Ltd | 大型前開式晶圓盒 |
US9117863B1 (en) * | 2013-05-16 | 2015-08-25 | Seagate Technology Llc | Cassette configurations to support platters having different diameters |
US9741631B2 (en) * | 2013-05-29 | 2017-08-22 | Miraial Co., Ltd. | Substrate storage container with handling members |
US10566226B2 (en) | 2014-11-11 | 2020-02-18 | Applied Materials, Inc. | Multi-cassette carrying case |
KR20170088411A (ko) | 2014-12-01 | 2017-08-01 | 엔테그리스, 아이엔씨. | 기재 수용기 밸브 조립체 |
TWI690468B (zh) | 2015-07-13 | 2020-04-11 | 美商恩特葛瑞斯股份有限公司 | 具有強化圍阻的基板容器 |
US10062599B2 (en) | 2015-10-22 | 2018-08-28 | Lam Research Corporation | Automated replacement of consumable parts using interfacing chambers |
US9881820B2 (en) | 2015-10-22 | 2018-01-30 | Lam Research Corporation | Front opening ring pod |
US20170115657A1 (en) | 2015-10-22 | 2017-04-27 | Lam Research Corporation | Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in Situ |
US10124492B2 (en) | 2015-10-22 | 2018-11-13 | Lam Research Corporation | Automated replacement of consumable parts using end effectors interfacing with plasma processing system |
US10361108B2 (en) * | 2015-12-14 | 2019-07-23 | Solarcity Corporation | Ambidextrous cassette and methods of using same |
TWI633619B (zh) * | 2016-03-29 | 2018-08-21 | 辛耘企業股份有限公司 | 晶圓轉向裝置 |
US10388554B2 (en) | 2016-04-06 | 2019-08-20 | Entegris, Inc. | Wafer shipper with purge capability |
DE102016113925A1 (de) | 2016-07-28 | 2018-02-01 | Infineon Technologies Ag | Waferbox, Wafer-Stapelhilfe, Waferträger, Wafer-Transportsystem, Verfahren zum Beladen einer Waferbox mit Wafern und Verfahren zum Entnehmen von Wafern aus einer Waferbox |
CN111348300A (zh) * | 2020-01-14 | 2020-06-30 | 河南省银丰生物工程技术有限公司 | 一种用于细胞培养的实验样本存放盒 |
TWI746045B (zh) * | 2020-07-07 | 2021-11-11 | 家登精密工業股份有限公司 | 基板載具鎖扣結構 |
US20230020975A1 (en) * | 2021-07-19 | 2023-01-19 | Changxin Memory Technologies, Inc. | Mask pod and semiconductor device |
WO2023026485A1 (ja) * | 2021-08-27 | 2023-03-02 | ミライアル株式会社 | 基板収納容器、その製造方法、及び蓋体側基板支持部 |
Family Cites Families (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US324671A (en) * | 1885-08-18 | Frying-pan | ||
US2936189A (en) * | 1959-02-27 | 1960-05-10 | Peter Begelman | Receptacle safety latch means |
US4534389A (en) * | 1984-03-29 | 1985-08-13 | Hewlett-Packard Company | Interlocking door latch for dockable interface for integrated circuit processing |
US4532970A (en) * | 1983-09-28 | 1985-08-06 | Hewlett-Packard Company | Particle-free dockable interface for integrated circuit processing |
DE3413837A1 (de) * | 1984-04-12 | 1985-10-17 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verpackung fuer halbleiterscheiben |
US4815912A (en) * | 1984-12-24 | 1989-03-28 | Asyst Technologies, Inc. | Box door actuated retainer |
US4676709A (en) * | 1985-08-26 | 1987-06-30 | Asyst Technologies | Long arm manipulator for standard mechanical interface apparatus |
US4739882A (en) * | 1986-02-13 | 1988-04-26 | Asyst Technologies | Container having disposable liners |
US5024329A (en) * | 1988-04-22 | 1991-06-18 | Siemens Aktiengesellschaft | Lockable container for transporting and for storing semiconductor wafers |
US4949848A (en) * | 1988-04-29 | 1990-08-21 | Fluoroware, Inc. | Wafer carrier |
US4995430A (en) * | 1989-05-19 | 1991-02-26 | Asyst Technologies, Inc. | Sealable transportable container having improved latch mechanism |
ES2042907T3 (es) * | 1989-08-19 | 1993-12-16 | Mauser Werke Gmbh | Fijacion para empu\adura de transporte. |
US5253755A (en) * | 1991-03-20 | 1993-10-19 | Fluoroware, Inc. | Cushioned cover for disk container |
US5469963A (en) * | 1992-04-08 | 1995-11-28 | Asyst Technologies, Inc. | Sealable transportable container having improved liner |
US5555981A (en) * | 1992-05-26 | 1996-09-17 | Empak, Inc. | Wafer suspension box |
US5351836A (en) * | 1992-07-08 | 1994-10-04 | Daifuku Co., Ltd. | Container for plate-like objects |
US5445271A (en) * | 1992-11-17 | 1995-08-29 | Kabushiki Kaisha Kakizaki Seisakusho | Resin-made basket for thin sheets |
CA2097138A1 (en) * | 1993-05-27 | 1994-11-28 | Gerald Brodrecht | Bale bagging apparatus |
US5441344A (en) * | 1993-10-22 | 1995-08-15 | Cook, Iii; Walter R. | Temperature measurement and display of a cooking surface |
US5570987A (en) * | 1993-12-14 | 1996-11-05 | W. L. Gore & Associates, Inc. | Semiconductor wafer transport container |
US5472086A (en) * | 1994-03-11 | 1995-12-05 | Holliday; James E. | Enclosed sealable purgible semiconductor wafer holder |
JP3331746B2 (ja) * | 1994-05-17 | 2002-10-07 | 神鋼電機株式会社 | 搬送システム |
US5482161A (en) * | 1994-05-24 | 1996-01-09 | Fluoroware, Inc. | Mechanical interface wafer container |
US5575394A (en) * | 1994-07-15 | 1996-11-19 | Fluoroware, Inc. | Wafer shipper and package |
US5452795A (en) * | 1994-11-07 | 1995-09-26 | Gallagher; Gary M. | Actuated rotary retainer for silicone wafer box |
US5713711A (en) * | 1995-01-17 | 1998-02-03 | Bye/Oasis | Multiple interface door for wafer storage and handling container |
EP0744765A1 (en) * | 1995-05-22 | 1996-11-27 | Symbios Logic Inc. | Apparatus for storing and carrying semiconductor wafers |
DE19535178C2 (de) * | 1995-09-22 | 2001-07-19 | Jenoptik Jena Gmbh | Einrichtung zum Ver- und Entriegeln einer Tür eines Behälters |
USD378873S (en) * | 1995-10-13 | 1997-04-22 | Empak, Inc. | 300 mm microenvironment pod with door on side |
US5944194A (en) * | 1995-10-13 | 1999-08-31 | Empak, Inc. | 300 mm microenvironment pod with door on side |
US5806574A (en) * | 1995-12-01 | 1998-09-15 | Shinko Electric Co., Ltd. | Portable closed container |
US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
US5788082A (en) * | 1996-07-12 | 1998-08-04 | Fluoroware, Inc. | Wafer carrier |
US5915562A (en) * | 1996-07-12 | 1999-06-29 | Fluoroware, Inc. | Transport module with latching door |
US6010008A (en) * | 1997-07-11 | 2000-01-04 | Fluoroware, Inc. | Transport module |
US6736268B2 (en) * | 1997-07-11 | 2004-05-18 | Entegris, Inc. | Transport module |
JP3838786B2 (ja) * | 1997-09-30 | 2006-10-25 | 信越ポリマー株式会社 | 精密基板収納容器及びその位置決め構造並びに精密基板収納容器の位置決め方法 |
TWI237305B (en) * | 1998-02-04 | 2005-08-01 | Nikon Corp | Exposure apparatus and positioning apparatus of substrate receiving cassette |
US6428729B1 (en) * | 1998-05-28 | 2002-08-06 | Entegris, Inc. | Composite substrate carrier |
US6267245B1 (en) * | 1998-07-10 | 2001-07-31 | Fluoroware, Inc. | Cushioned wafer container |
US6082540A (en) * | 1999-01-06 | 2000-07-04 | Fluoroware, Inc. | Cushion system for wafer carriers |
US6389032B1 (en) * | 1999-02-11 | 2002-05-14 | International Business Machines Corporation | Internet voice transmission |
JP3916342B2 (ja) * | 1999-04-20 | 2007-05-16 | 信越ポリマー株式会社 | 基板収納容器 |
JP3556519B2 (ja) * | 1999-04-30 | 2004-08-18 | 信越ポリマー株式会社 | 基板収納容器の識別構造及び基板収納容器の識別方法 |
TW511649U (en) * | 2001-09-12 | 2002-11-21 | Ind Tech Res Inst | Wafer retainer |
-
1997
- 1997-07-11 US US08/891,644 patent/US6010008A/en not_active Expired - Lifetime
-
1998
- 1998-06-15 KR KR10-1998-0022242A patent/KR100507952B1/ko not_active IP Right Cessation
- 1998-06-22 NL NL1009466A patent/NL1009466C2/nl not_active IP Right Cessation
- 1998-07-03 IT IT1998TO000585A patent/IT1304687B1/it active
- 1998-07-06 SG SG1998001595A patent/SG72840A1/en unknown
- 1998-07-09 DE DE19830640A patent/DE19830640A1/de not_active Withdrawn
- 1998-07-10 FR FR9808899A patent/FR2768135B1/fr not_active Expired - Lifetime
- 1998-07-10 CN CNB2004100040611A patent/CN1285492C/zh not_active Expired - Lifetime
- 1998-07-10 CN CNB021506906A patent/CN1308194C/zh not_active Expired - Fee Related
- 1998-07-10 GB GB9815090A patent/GB2327298B/en not_active Expired - Fee Related
- 1998-07-10 JP JP19603598A patent/JP4206149B2/ja not_active Expired - Lifetime
- 1998-07-10 CN CN98115700A patent/CN1107005C/zh not_active Expired - Lifetime
-
1999
- 1999-04-19 NL NL1011828A patent/NL1011828C2/nl not_active IP Right Cessation
-
2005
- 2005-07-15 JP JP2005207380A patent/JP2005320071A/ja active Pending
- 2005-10-11 JP JP2005296445A patent/JP4324585B2/ja not_active Expired - Lifetime
- 2005-10-11 JP JP2005296446A patent/JP4324586B2/ja not_active Expired - Lifetime
-
2008
- 2008-05-12 US US12/119,240 patent/US20080302700A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
GB2327298A (en) | 1999-01-20 |
CN1515475A (zh) | 2004-07-28 |
JP4206149B2 (ja) | 2009-01-07 |
GB9815090D0 (en) | 1998-09-09 |
CN1541913A (zh) | 2004-11-03 |
JPH1191864A (ja) | 1999-04-06 |
KR100507952B1 (ko) | 2005-11-25 |
US20080302700A1 (en) | 2008-12-11 |
NL1011828A1 (nl) | 1999-05-31 |
US6010008A (en) | 2000-01-04 |
ITTO980585A1 (it) | 2000-01-03 |
SG72840A1 (en) | 2000-05-23 |
NL1011828C2 (nl) | 1999-11-04 |
ITTO980585A0 (it) | 1998-07-03 |
FR2768135B1 (fr) | 2005-08-05 |
CN1107005C (zh) | 2003-04-30 |
CN1285492C (zh) | 2006-11-22 |
FR2768135A1 (fr) | 1999-03-12 |
CN1205297A (zh) | 1999-01-20 |
JP4324585B2 (ja) | 2009-09-02 |
JP4324586B2 (ja) | 2009-09-02 |
KR19990013418A (ko) | 1999-02-25 |
GB2327298B (en) | 2002-12-11 |
JP2006100837A (ja) | 2006-04-13 |
NL1009466C2 (nl) | 1999-04-29 |
JP2006080546A (ja) | 2006-03-23 |
JP2005320071A (ja) | 2005-11-17 |
DE19830640A1 (de) | 1999-01-14 |
CN1308194C (zh) | 2007-04-04 |
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