AU2002237697A1 - Wafer carrier with stacking adaptor plate - Google Patents

Wafer carrier with stacking adaptor plate

Info

Publication number
AU2002237697A1
AU2002237697A1 AU2002237697A AU3769702A AU2002237697A1 AU 2002237697 A1 AU2002237697 A1 AU 2002237697A1 AU 2002237697 A AU2002237697 A AU 2002237697A AU 3769702 A AU3769702 A AU 3769702A AU 2002237697 A1 AU2002237697 A1 AU 2002237697A1
Authority
AU
Australia
Prior art keywords
wafer carrier
adaptor plate
stacking adaptor
stacking
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002237697A
Inventor
Phil Glynn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of AU2002237697A1 publication Critical patent/AU2002237697A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
AU2002237697A 2000-12-04 2001-12-04 Wafer carrier with stacking adaptor plate Abandoned AU2002237697A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25102500P 2000-12-04 2000-12-04
US60/251,025 2000-12-04
PCT/US2001/046538 WO2002047118A2 (en) 2000-12-04 2001-12-04 Wafer carrier with stacking adaptor plate

Publications (1)

Publication Number Publication Date
AU2002237697A1 true AU2002237697A1 (en) 2002-06-18

Family

ID=22950160

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002237697A Abandoned AU2002237697A1 (en) 2000-12-04 2001-12-04 Wafer carrier with stacking adaptor plate

Country Status (7)

Country Link
US (1) US20020114686A1 (en)
EP (1) EP1339622A4 (en)
JP (1) JP2004515916A (en)
KR (1) KR20040019264A (en)
CN (1) CN1218364C (en)
AU (1) AU2002237697A1 (en)
WO (1) WO2002047118A2 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4146718B2 (en) 2002-12-27 2008-09-10 ミライアル株式会社 Thin plate support container
JP2006351604A (en) * 2005-06-13 2006-12-28 Miraial Kk Sheet supporting vessel
CN100431930C (en) * 2005-08-04 2008-11-12 北京市塑料研究所 Packaging container for large diameter silicon wafer storage and transport
TWI363030B (en) * 2009-07-10 2012-05-01 Gudeng Prec Industral Co Ltd Wafer container with top flange structure
KR102000025B1 (en) * 2012-10-29 2019-07-17 세메스 주식회사 Substrate treating apparatus
KR102143884B1 (en) 2013-09-11 2020-08-12 삼성전자주식회사 Wafer loaders having buffer regions
US20150214084A1 (en) * 2014-01-30 2015-07-30 Infineon Technologies Ag Frame cassette
US9852934B2 (en) * 2014-02-14 2017-12-26 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor wafer transportation
SG11201701526QA (en) * 2014-08-28 2017-03-30 Entegris Inc Substrate container
JP6675257B2 (en) * 2016-04-14 2020-04-01 株式会社荏原製作所 Plating apparatus and plating method
AU201711337S (en) * 2016-09-08 2017-03-29 Battlemax Pty Ltd Adaptor Plate
AU201711335S (en) * 2016-09-08 2017-03-29 Battlemax Pty Ltd Suction Cover
CN106586180A (en) * 2017-01-06 2017-04-26 佛山市南海区广工大数控装备协同创新研究院 Silicon wafer splicing material box and automatic feeding device thereof

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4557382A (en) * 1983-08-17 1985-12-10 Empak Inc. Disk package
EP0857150B1 (en) * 1995-10-13 2002-03-27 Empak, Inc. 300 mm microenvironment pod with door on side and grounding electrical path
US6010008A (en) * 1997-07-11 2000-01-04 Fluoroware, Inc. Transport module
JP3838786B2 (en) * 1997-09-30 2006-10-25 信越ポリマー株式会社 Precision substrate storage container, positioning structure thereof, and positioning method of precision substrate storage container
US6216874B1 (en) * 1998-07-10 2001-04-17 Fluoroware, Inc. Wafer carrier having a low tolerance build-up
JP3916342B2 (en) * 1999-04-20 2007-05-16 信越ポリマー株式会社 Substrate storage container
JP3556519B2 (en) * 1999-04-30 2004-08-18 信越ポリマー株式会社 Substrate storage container identification structure and substrate storage container identification method

Also Published As

Publication number Publication date
EP1339622A2 (en) 2003-09-03
EP1339622A4 (en) 2006-03-08
WO2002047118A3 (en) 2002-10-17
JP2004515916A (en) 2004-05-27
US20020114686A1 (en) 2002-08-22
WO2002047118A2 (en) 2002-06-13
WO2002047118B1 (en) 2003-03-06
CN1478293A (en) 2004-02-25
KR20040019264A (en) 2004-03-05
CN1218364C (en) 2005-09-07

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