JP6817788B2 - Simple table - Google Patents

Description

The present invention relates to a simple table used in at least a wafer processing apparatus provided with a cassette mount.

In the semiconductor manufacturing process, a plurality of workpieces such as semiconductor wafers are stored in a cassette in which a plurality of storage shelves are formed. The cutting equipment, grinding equipment, laser processing equipment, tool cutting equipment, and other processing equipment used in the semiconductor manufacturing process are provided with at least a cassette mounting table on which the cassette is placed, and the workpiece is , It is supplied to the processing apparatus from the cassette placed on the cassette mounting table.

In order to process the workpiece with these processing devices, for example, the chuck table that sucks and holds the workpiece is replaced with a table of a size that matches the size of the workpiece (for example, a patent). Various operations such as adjusting a processing unit (for example, a cutting means provided with a cutting blade) are required.

Japanese Unexamined Patent Publication No. 2013-239497

In the above-mentioned advance preparation before machining, a workbench for placing parts such as a chuck table and tools such as a screwdriver used in the adjustment work is desired, but in some cases, a workbench is placed around the machining device. There was no space to put it, which was inconvenient for workers.

Therefore, even when there is no space for placing the workbench around the processing apparatus, there is a problem that it is possible to secure a work space on which parts and tools used for adjustment work and the like can be placed, and to improve workability.

The present invention for solving the above problems is a processing apparatus including at least a cassette mounting table having a mounting surface on which a cassette capable of accommodating a work piece is placed , and a chuck table for holding the work piece. A simple table used in the above, the lower surface having an engaging portion engaged with and fixed to a positioning portion protruding or depressed from the mounting surface, and a chuck table mounting on which the chuck table is mounted. It has a table surface which is an upper surface having a region, and has a table surface for inserting a worker's hand into a part of the chuck table mounting area when the chuck table is mounted, from the table surface to the lower surface. It is a simple table that is provided with a table body in which a notch portion is formed and is removable from the cassette mounting table.

When the simple table is directly mounted on the previously described mounting surface of the cassette mounting table , the engaging portion is engaged with and fixed to the positioning portion of the mounting surface of the cassette mounting table . When the simple table is placed on the cassette placed on the mounting surface , it is preferable that the simple table is engaged with and fixed to the cassette on the upper end side of the cassette.

The simple table according to the present invention has a lower surface having an engaging portion that engages and is fixed to a positioning portion that protrudes or sinks from the mounting surface, and a chuck table mounting area on which the chuck table is mounted. It has a table surface which is an upper surface , and a notch portion extending from the table surface to the lower surface for inserting an operator's hand inside when the chuck table is mounted is formed in a part of the chuck table mounting area . Since it is equipped with a table body and can be attached to and detached from the cassette mounting table, by attaching a simple table to the cassette mounting table, it is possible to secure a work space on which parts and tools used for adjustment work can be placed. Therefore, it is possible to improve workability in adjustment work and the like. Further, for example, the chuck table mounted on the chuck table mounting area can be reliably gripped by the operator through the notch, and an accident such as dropping the chuck table may occur. Can be prevented.

When the simple table is directly mounted on the mounting surface of the cassette mounting table , the engaging portion of the simple table is engaged with and fixed to the positioning portion of the mounting surface, and the mounting of the cassette mounting table is also performed. When the simple table is placed on the cassette mounted on the surface, the simple table is directly mounted on the mounting surface of the cassette mounting table by engaging and fixing the cassette on the upper end side of the cassette. It becomes possible to secure a stable work space in which parts, tools, etc. used for adjustment work can be placed, not only in the state where the cassette is placed but also in the state where the cassette is placed on the cassette table.

It is a perspective view which shows an example of a processing apparatus, a cassette, a wafer supported by an annular frame, and a simple table. It is an exploded perspective view of a simple table. It is a perspective view which shows an example of the simple table in the state which the chuck table is placed. It is a perspective view which shows an example of the simple table in the state which the lower surface faces the upper side. It is a perspective view which shows the state which the simple table is placed directly on a cassette mounting table. It is explanatory drawing which shows the state when the simple table directly mounted on the cassette mounting table is viewed from the mounting surface upward. It is a perspective view which shows the state which fixed the simple table on the upper surface side of the cassette mounted on the cassette mounting table partially. It is explanatory drawing which shows the state which the simple table fixed on a cassette is seen from above. It is a perspective view which shows an example of the simple table which a spacer can be laminated on a mounting plate.

The workpiece W to be machined (cut in the present embodiment) by the machining apparatus 1 shown in FIG. 1 is, for example, a silicon semiconductor wafer, and a line to be divided is planned on the surface Wa of the workpiece W. A device D such as an IC or an LSI is formed in a grid-like region partitioned by S. For example, the back surface Wb of the work piece W is attached to the attachment surface of the dicing tape T, and the outer peripheral portion of the dicing tape T is attached to the annular frame F. As a result, the workpiece W to be cut is supported by the annular frame F via the dicing tape T, and can be handled using the annular frame F.

The cassette 2 shown in FIG. 1 capable of accommodating a plurality of workpieces W supported by the annular frame F is a first side plate 21 and a second side plate 21 arranged in parallel in the X-axis direction at predetermined intervals. A side plate 22, an upper plate 23 connecting the upper side of the first side plate 21 and the second side plate 22, and a bottom plate 24 connecting the central portion of the first side plate 21 and the lower end side of the second side plate 22. At least I have.

The upper plate 23 having a rectangular outer shape has a vertical side (side in the Y-axis direction) length shorter than the upper end side lengths of the first side plate 21 and the second side plate 22. With the upper side of the first side plate 21 and the second side plate 22 connected to each other, the accommodation state of the workpiece W supported by the annular frame F inside the cassette 2 can be confirmed from above. Further, a handle portion 230 that can be gripped by an operator, a transport arm, or the like when transporting the cassette 2 is mounted on the upper surface of the upper plate 23. The handle portion 230 has a base portion that can rotate about the X-axis direction, and can be switched between a state in which the handle portion 230 is folded on the upper surface of the upper plate 23 and a state in which the handle portion 230 is erected from the upper surface of the upper plate 23. it can.

The front side (-Y direction side) of the cassette 2 is a wafer loading / unloading port 2a for loading / unloading the workpiece W supported by the annular frame F. A plurality of shelf boards 25 extending horizontally in the Y-axis direction are fixed to the inner side surfaces of the first side plate 21 and the second side plate 22 at predetermined intervals in the Z-axis direction, and the plurality of shelf boards are fixed. 25 forms a plurality of storage shelves for supporting the annular frame F on the first side plate 21 and the second side plate 22. Stoppers 26 (only one is shown in FIG. 1) are attached to the back side (+ Y direction side) of the cassette 2, that is, the rear portion of the inner surface of the first side plate 21 and the second side plate 22. In the stopper 26, when the workpiece W supported by the annular frame F is horizontally inserted into the cassette 2 from the carry-out port 2a along the shelf plate 25, the annular frame F is inserted from the back side of the cassette 2. It plays a role in preventing it from popping out.

For example, a pin-shaped protrusion 211 and a pin-shaped protrusion 221 are projected toward the + Z direction on both sides of the upper end surface of the first side plate 21 and the upper end surface of the second side plate 22 in the Y-axis direction. ing. The protrusions 211 and 221 are used, for example, when stacking another cassette 2 on one cassette 2. That is, the first side plate 21 and the second side plate 22 are provided with fitting holes 212 and fitting holes 222 corresponding to the protrusions 211 and the protrusions 221 on the lower end surfaces thereof, and one cassette 2 is provided. When another cassette 2 is stacked on top of the other cassette 2, the protrusions 211 and 221 of one cassette 2 in the folded state of the handle 230 are the first side plate 21 and the second side plate of the other cassette 2. By fitting each of the fitting holes 212 and the fitting holes 222 of 22, the cassettes 2 can be stacked in a predetermined state.

The processing device 1 shown in FIG. 1 is a cutting device that cuts a workpiece W held on the chuck table 30 by a cutting means 6. A housing 11 of the processing device 1 is arranged on the base 10 of the processing device 1, and a processing chamber 12 is defined in the housing 11.

A chuck table 30 and a cutting means 6 are arranged in the processing chamber 12, and the chuck table 30 is surrounded by a waterproof cover 31 from the surroundings and is surrounded by a rotating means (not shown) arranged below the waterproof cover 31. It is rotatably supported around the axis in the Z-axis direction. A bellows cover 311 that expands and contracts in the X-axis direction is connected to the waterproof cover 31, and the chuck table 30 is reciprocated in the cutting feed direction (X-axis direction) below the waterproof cover 31 and the bellows cover 311. No cutting feed means are provided. The cutting feed means is composed of a ball screw mechanism or the like that translates the chuck table 30 by rotating the ball screw with a motor.

The chuck table 30 shown in FIG. 1 has, for example, a disk-shaped outer shape, and includes a suction portion 300 that sucks the workpiece W and a frame body 301 that supports the suction portion 300. The suction unit 300 communicates with a suction source (not shown) and sucks and holds the workpiece W on the holding surface 300a which is the exposed surface of the suction unit 300. Further, around the chuck table 30, for example, four fixed clamps 32 for fixing the annular frame F are evenly arranged.

The cutting means 6 arranged above the moving path in the X-axis direction of the chuck table 30 can be moved in the Y-axis direction by the indexing feeding means 14, and can be moved in the Z-axis direction by the cutting feeding means (not shown). It has become. The cutting means 6 includes a spindle 61 whose axial direction is orthogonal to the moving direction (X-axis direction) of the chuck table 30 in the horizontal direction (Y-axis direction), and a spindle housing 62 that rotatably supports the spindle 61. A motor (not shown) for rotating the spindle 61 and a cutting blade 63 fixed to the spindle 61 are provided, and the cutting blade 63 also rotates at high speed as the motor rotationally drives the spindle 61.

For example, on the side surface of the spindle housing 62 on the −X direction side, an alignment means 17 for detecting a planned division line S to be cut of the workpiece W is provided. The alignment means 17 includes an image pickup means for imaging the surface Wa of the workpiece W, and can detect the scheduled division line S to be cut based on the image acquired by the image pickup means. The cutting means 6 is integrally formed with the alignment means 17, and both move in the Y-axis direction and the Z-axis direction in conjunction with each other.

On the front side (-X direction side) of the housing 11, a viewing window made of a transparent member such as glass for confirming the state of the workpiece W being machined from the outside of the housing 11. 110 is provided.

On the side surface of the housing 11 on the + Y direction side, an operating means 19 including a touch panel 190 or the like for displaying an operation screen for an operator to input processing conditions and the like to the processing device 1 is arranged.

The processing apparatus 1 includes, for example, a transfer unit (not shown) that holds the annular frame F and transfers the wafer W onto the chuck table 30 in the processing chamber 12. For example, a carry-in / out port (not shown) through which the transport unit can pass is formed in a part of the side wall 11c shown in FIG. 1 of the housing 11.

A corner on the base 10 of the processing apparatus 1 on the + Y direction side is not covered by the housing 11, and a cassette mounting table 16 is installed in this corner, and the cassette mounting table 16 is a cassette mounting table 16. An elevating mechanism (not shown) arranged below enables reciprocating movement in the Z-axis direction. By raising and lowering the cassette mounting table 16 by the elevating mechanism while the cassette 2 is mounted on the cassette mounting table 16, the position of the wafer W in and out height in the cassette 2 is adjusted. The elevating operation of the cassette mounting table 16 by the elevating mechanism (not shown) is started by, for example, pressing the operation button 169 arranged in the vicinity of the operating means 19 to move the elevating mechanism (not shown).

The upper surface of the cassette mounting table 16 is a mounting surface 16a on which the cassette 2 is mounted, and the mounting surface 16a is formed with, for example, a positioning portion 160 projecting from the mounting surface 16a in the + Z direction. The positioning unit 160 has, for example, a substantially L-shaped outer shape in a plan view, and corresponds to the width (length in the X-axis direction) of the cassette 2 in the front side region (+ Y direction side region) of the mounting surface 16a. For example, two are formed at a predetermined interval. The positioning unit 160 serves to fix the cassette 2 mounted on the mounting surface 16a so as not to move in the horizontal direction.

The positioning portion protruding from the mounting surface 16a in the + Z direction is not limited to the positioning portion 160 having a substantially L-shaped outer shape in a plan view, for example, the mounting surface 16a. A protrusion pin protruding in the + Z direction is formed as a positioning portion, and the protrusion pin is provided in each fitting hole 212 provided on the lower end surfaces of the first side plate 21 and the second side plate 22 constituting the cassette unit 2. By fitting with the fitting hole 222, the cassette 2 may be positioned so as not to move on the mounting surface 16a. Further, a positioning portion may be formed on the mounting surface 16a so as to be depressed from the mounting surface 16a in the −Z direction. The positioning portion that sinks from the mounting surface 16a in the −Z direction is, for example, a positioning groove, and the lower end surface side of the first side plate 21 of the cassette 2 and the lower end surface side of the second side plate 22 are the positioning grooves. The cassette 2 is positioned so as not to move on the mounting surface 16a by fitting to.

For example, a diffuse reflection type photoelectric sensor 15 is arranged near a corner of the cassette mounting table 16 on the −Y direction side. In the photoelectric sensor 15, the annular frame F that supports the workpiece W inside the cassette 2 in the state of being mounted on the cassette mounting table 16 is displaced from an appropriate position of the storage shelf in the cassette 2, and the wafer loading / unloading port 2a It plays a role in detecting whether or not it has jumped out from the outside. That is, the photoelectric sensor 15 includes a light projecting / receiving device including a light projecting unit and a light receiving unit, and the light projecting unit projects the measurement light in the + Z direction. The light receiving unit receives, for example, the measurement light reflected by the lower surface of the annular frame F in a state where it has protruded from the wafer loading / unloading port 2a. Then, the photoelectric sensor 15 receives the measured light received by the light receiving portion, and the annular frame F supporting the workpiece W deviates from an appropriate position in the cassette 2 and protrudes outward from the wafer carry-in / out port 2a. Determine if it is closed or not.

The simple table 4 shown in FIG. 1 is removable from the cassette mounting table 16, and includes, for example, a table body 4A whose outer shape is formed in a flat plate shape. As shown in FIG. 2, the table body 4A has, for example, a base 40 having an opening 40c and an outer shape formed in a square ring shape, and a rectangular plate-shaped mounting plate 41 formed to have substantially the same size as the base 40. And have. By superimposing the four sides of the base 40 and the four sides of the mounting plate 41 and adhering the outer peripheral region portion of the lower surface of the mounting plate 41 to the upper surface of the square ring of the base 40 with an appropriate bonding agent or the like, the mounting plate 41 is fixed to the base 40. In addition, screw holes or the like may be formed in the base 40 and the mounting plate 41 so that the mounting plate 41 can be fixed to the base 40 with screws or the like.

As shown in FIG. 3, the lower surface 40b of the base 40 is the lower surface of the table body 4A, and the upper surface of the mounting plate 41 is the table surface 41a which is the upper surface of the table body 4A. The table surface 41a is finished to be smooth, and when the chuck table 30 comes into contact with the corners or ridges of the mounting plate 41, the end portion of the table surface 41a is not damaged so as not to damage the chuck table 30. (Ridge line) may be chamfered. For example, the central region of the table surface 41a of the mounting plate 41 is the chuck table mounting region 411 on which the chuck table 30 is mounted. The operator's hand is inserted into the mounting plate 41 when the chuck table 30 is mounted on the chuck table mounting area 411 or when the chuck table 30 is carried out from the chuck table mounting area 411. A notch 412 for the purpose is formed. The cutout portion 412 is formed so as to penetrate the mounting plate 41 in the thickness direction (Z-axis direction) so as to extend from the table surface 41a to the lower surface 40b of the table body 4A. Its outer shape is a pentagonal shape in a plan view. As shown in FIG. 3, the size of the notch 412 is set so that a part of the chuck table 30 mounted on the chuck table mounting area 411 protrudes above the notch 412. .. Then, the operator's hand inserted through the notch 412 can reliably grip the chuck table 30 from below. The outer shape of the cutout portion 412 is not limited to the pentagonal shape.

As shown in FIGS. 1 and 4, an engaging portion 40A is formed on the lower surface 40b of the square ring of the base portion 40 so as to engage and be fixed to the protruding positioning portion 160 or the like of the cassette mounting table 16 shown in FIG. ing. The engaging portion 40A is, for example, a locking projection 400 formed so as to protrude from the square annular lower surface 40b of the base portion 40 and having a substantially L-shaped outer shape in a plan view, and a groove-shaped locking on the lower surface 40b. It is provided with a groove 401.

The locking projection 400 has, for example, a substantially L-shaped shape in a plan view larger than the positioning portion 160 whose outer shape is substantially L-shaped in a plan view, and has a square shape at each of the four corners of the lower surface 40b. It is formed along the annular lower surface 40b. The locking projection 400 engages with the positioning portion 160 when its inner side surface 400d abuts on the outer surface 160d of the positioning portion 160.

The locking groove 401 has a depth of, for example, from the lower surface 40b to the intermediate portion in the thickness direction of the base 40, and is formed so as to extend in parallel with the Y-axis direction on the lower surface 40b. .. For example, when a protruding pin protruding in the + Z direction is formed as a positioning portion on the mounting surface 16a of the cassette mounting table 16 shown in FIG. 1, the protruding pin is fitted into each locking groove 401. The locking groove 401 engages the protrusion pin.

For example, on the outer surface of the base 40 shown in FIG. 4, a slit hole (not shown) formed so as to pierce the inner surface of the base 40 is formed, and the outer shape of the slit hole is viewed from the Y-axis direction. A housing hook 403 having a substantially L shape is attached. In FIG. 4, the accommodating hook 403 is movable in the X-axis direction and can be taken in and out from the base 40. For example, a non-slip rubber or the like is attached to the inner side surface. The accommodating hook 403 is used when accommodating the simple table 4 in the processing apparatus 1 shown in FIG. As shown in FIG. 1, by hooking the accommodating hook 403 pulled out from the base 40 on the upper surface of the housing 11 of the processing device 1, the simple table 4 is aligned with the side surface of the housing 11. It is housed in 1.

The usage of the simple table 4 will be described below. First, a case where the simple table 4 is directly mounted on the mounting surface 16a of the cassette mounting table 16 and used will be described.

In order to mount the simple table 4 at an appropriate position on the mounting surface 16a of the cassette mounting table 16, for example, as shown in FIGS. 5 and 6, the locking groove 401 of the lower surface 40b of the simple table 4 is oriented in the Y-axis direction. As shown in FIG. 6, the inner side surface 400d of the locking projection 400 is brought into contact with the outer surface 160d of the positioning portion 160.

For example, the photoelectric sensor 15 shown in FIG. 5 is connected to a lock mechanism 150 that regulates the elevating operation of the cassette mounting table 16 by an elevating mechanism (not shown) based on the detection result of the photoelectric sensor 15. When the lock mechanism 150 is locked, even if the operator presses the operation button 169, the elevating operation of the cassette mounting table 16 by the elevating mechanism (not shown) is not started. When the cassette 2 is mounted on the cassette mounting table 16, the photoelectric sensor 15 plays a role of detecting the protrusion of the annular frame F from the inside of the cassette 2, but directly on the cassette mounting table 16. When the simple table 4 is mounted, the lock mechanism 150 plays a role of restricting the start of the lifting operation of the cassette mounting table 16 by the lifting mechanism, which may occur when the operator accidentally presses the operation button 169. ..

For example, when the simple table 4 is placed directly on the mounting surface 16a of the cassette mounting table 16, the end side portion of the simple table 4 (the end side portion on the −Y direction side in FIG. 5) is placed. By slightly protruding from the surface 16a toward the −Y direction side by a predetermined area, the upper side of the photoelectric sensor 15 is blocked by the simple table 4. The measurement light projected from the light projecting portion of the photoelectric sensor 15 in the + Z direction is reflected by the lower surface 40b of the simple table 4 and received by the light receiving portion. As a result, the photoelectric sensor 15 detects that the simple table 4 is directly mounted on the mounting surface 16a of the cassette mounting table 16. When the photoelectric sensor 15 detects that the simple table 4 is directly mounted on the mounting surface 16a, the lock mechanism 150 automatically locks the elevating mechanism (not shown), and the operator mistakenly presses the operation button 169. The start of the elevating operation of the cassette mounting table 16 by the elevating mechanism that may occur by pushing is restricted. A convex portion or the like positioned above the photoelectric sensor 15 is formed at a predetermined location such as the outer surface of the simple table 4 when the simple table 4 is directly mounted on the mounting surface 16a of the cassette mounting table 16. However, it may interfere with the photoelectric sensor 15.

As described above, the simple table 4 according to the present invention has a lower surface 40b provided with an engaging portion 40A which is engaged and fixed to the positioning portion 160 formed on the mounting surface 16a of the cassette mounting table 16 and an upper surface thereof. A table body 4A having a table surface 41a and a table body 4A is provided and can be attached to and detached from the cassette mounting table 16. Therefore, by attaching the simple table 4 to the cassette mounting table 16, a chuck used for adjustment work or the like on the processing apparatus 1 It becomes possible to secure a work space on which parts such as a table 30 and tools such as a screwdriver can be placed. Therefore, it is possible to improve workability during adjustment work of the processing apparatus 1.

Next, a case where the cassette 2 is placed on the mounting surface 16a of the cassette mounting table 16 and the simple table 4 is fixed and used on the cassette 2 will be described.

In order to mount the cassette 2 at an appropriate position on the mounting surface 16a of the cassette mounting table 16, the cassette 2 is first formed with a wafer loading / unloading port 2a formed on the side wall 11c of the housing 11, as shown in FIG. It is positioned above the mounting surface 16a so as to face the carry-in / out port (not shown). Next, the cassette 2 is mounted on the mounting surface 16a, and the cassette 2 is positioned by the positioning unit 160 so as not to move on the mounting surface 16a. That is, as shown in FIG. 6, for example, the lower part of the rear end surface and the lower part of the inner side surface of the first side plate 21 and the second side plate 22 on the + Y direction side, which are virtually shown by the alternate long and short dash line, are connected to the positioning portion 160. It will be in contact.

Further, in order to place the simple table 4 at an appropriate position on the cassette 2 in which the handle portion 230 is folded, first, the simple table 4 is set on the simple table 4 as shown in FIGS. The locking groove 401 of the lower surface 40b is positioned above the cassette 2 so that it is parallel to the first side plate 21 and the second side plate 22 of the cassette 2, and the table surface 41a faces upward. .. Next, the simple table 4 is placed on the upper end surface of the first side plate 21 and the upper end surface of the second side plate 22, and the protrusions 211 and 221 of the cassette 2 are immersed in the locking grooves 401, respectively. ..

Further, the engaging portion 40A is engaged with and fixed to the cassette 2, so that the simple table 4 is positioned so as not to move on the cassette 2. That is, for example, the simple table 4 is positioned so that each corner portion on the upper end side of the first side plate 21 and the second side plate 22 corresponds to the four corners of the simple table 4, and the inner side surface 400d of the locking projection 400 Is brought into contact with the outer surfaces of the corner portions of the first side plate 21 and the second side plate 22, so that the simple table 4 is fixed to the upper surface side of the cassette 2 so as not to move in the horizontal direction.

As described above, the engaging portion 40A of the simple table 4 is engaged with and fixed to the cassette 2 on the upper surface side of the cassette 2 mounted on the cassette mounting table 16, so that the cassette 2 is mounted on the cassette mounting table 16. Even in the mounted state, it is possible to secure a stable work space on which parts such as the chuck table 30 and tools used for adjustment work can be placed.

As shown in FIG. 9, for example, the simple table 4 may be configured such that the spacer 45 can be laminated on the mounting plate 41. In this case, pin-shaped protrusions 415 protruding toward the + Z direction for engaging the spacer 45 on the mounting surface 41a are formed at the four corners of the table mounting surface 41a of the mounting plate 41. The spacer 45 includes a rectangular plate-shaped flat plate portion 450 formed to have substantially the same size as the mounting plate 41, and leg portions 451 vertically hung from the four corners of the lower surface of the flat plate portion 450 toward the + Z direction, respectively. It has. A fitting hole (not shown) that fits into the protrusion 415 is formed on the lower surface of each leg portion 451. When the protrusion 415 fits into the fitting hole, the protrusion 415 fits on the mounting plate 41 due to vibration or the like. The spacer 45 is laminated on the mounting plate 41 so as not to be displaced from the mounting plate 41. In the simple table 4 in which the spacer 45 can be laminated on the mounting plate 41 in this way, a tool such as a bolt driver is mounted on the upper surface of the flat plate portion 450 with the chuck table 30 mounted on the mounting plate 41. It becomes possible to place the tool, reduce the risk of the tool hitting the chuck table 30 placed on the chuck table 30 during the adjustment work, and improve the workability in the adjustment work.

The simple table according to the present invention is not limited to the configuration in the above embodiment, and the configuration of the processing apparatus 1 shown in the attached drawings is not limited to this, and the effect of the present invention is not limited to this. It can be changed as appropriate within the range where can be exhibited. For example, the machining apparatus 1 shown in the present embodiment is an apparatus for cutting a workpiece, but the simple table according to the present invention is a machining apparatus for grinding a workpiece and a workpiece. It is also possible to mount it on a processing device or the like that performs laser processing.

1: Processing device 10: Base 11: Housing 110: Peep window 11c: Side wall of housing 12: Processing room 14: Indexing feeding means 15: Photoelectric sensor 150: Lock mechanism 19: Operating means 190: Touch panel 16: Cassette mounting Stand 16a: Mounting surface of cassette mounting stand 160: Positioning unit 169: Operation button 17: Alignment means
2: Cassette 2a: Carry-in / out port 21: First side plate 22: Second side plate 211, 221: Projection 23: Top plate 230: Handle part 24: Bottom plate 25: Shelf plate 26: Stopper 30: Chuck table 300: Adsorption Part 300a: Holding surface 301: Frame
31: Waterproof cover 311: Bellows cover 32: Fixed clamp 4: Simple table 4A: Table body 40: Base 40b: Bottom surface of table body 40c: Base opening 40A: Engagement part 400: Locking protrusion 401: Locking groove 403 : Accommodating hook 41: Mounting plate 411: Chuck table mounting area 412: Notch 45: Spacer 450: Flat plate 451: Leg 6: Cutting means 61: Spindle 62: Spindle housing 63: Cutting blade W: Cover Work piece Wa: Front surface of work piece Wb: Back side of work piece S: Scheduled division line D: Device F: Circular frame T: Dicing tape

Claims (2)

A simple table used in a processing apparatus having at least a cassette mounting table having a mounting surface on which a cassette capable of accommodating a work piece is placed and a chuck table for holding the work piece .
A lower surface having an engaging portion that engages and is fixed to a positioning portion that protrudes or sinks from the mounting surface , and a table surface that is an upper surface having a chuck table mounting area on which the chuck table is mounted. , And a notch portion extending from the table surface to the lower surface for inserting the operator's hand inside when the chuck table is mounted is formed in a part of the chuck table mounting area. A simple table that can be attached to and detached from the cassette mounting table. The engaging portion is
When the simple table is directly mounted on the previously described mounting surface of the cassette mounting table, the simple table is engaged with and fixed to the positioning portion of the mounting surface.
The first aspect of the present invention , wherein when the simple table is placed on the cassette mounted on the mounting surface of the cassette mounting table, the simple table is engaged with and fixed to the cassette on the upper end side of the cassette. Simple table.

Images