WO2002047118A3 - Wafer carrier with stacking adaptor plate - Google Patents

Wafer carrier with stacking adaptor plate Download PDF

Info

Publication number
WO2002047118A3
WO2002047118A3 PCT/US2001/046538 US0146538W WO0247118A3 WO 2002047118 A3 WO2002047118 A3 WO 2002047118A3 US 0146538 W US0146538 W US 0146538W WO 0247118 A3 WO0247118 A3 WO 0247118A3
Authority
WO
WIPO (PCT)
Prior art keywords
adaptor plate
shell
container portion
wafer carrier
accessories
Prior art date
Application number
PCT/US2001/046538
Other languages
French (fr)
Other versions
WO2002047118B1 (en
WO2002047118A2 (en
Inventor
Phil Glynn
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Priority to EP01986506A priority Critical patent/EP1339622A4/en
Priority to JP2002548751A priority patent/JP2004515916A/en
Priority to KR10-2003-7007319A priority patent/KR20040019264A/en
Priority to AU2002237697A priority patent/AU2002237697A1/en
Publication of WO2002047118A2 publication Critical patent/WO2002047118A2/en
Publication of WO2002047118A3 publication Critical patent/WO2002047118A3/en
Publication of WO2002047118B1 publication Critical patent/WO2002047118B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Stackable Containers (AREA)

Abstract

A front opening wafer container (30) has a container portion (32) with a transparent shell and a door (34) to close the open front. The container portion (32) has a machine interface on the bottom of the shell, such as a kinematic coupling (56), and a receptacle (73) at the top of the shell to receive an accessories, in particular a robotic lifting flange or an adaptor plate (50). The adaptor plate (50) will ideally have a cooperating machine interface portions to allow stacking of the wafer carriers. The receptacle (73) has, in preferred embodiments, sliding support guides (72, 74) with undercut portions (75) for retention of the robotic lifting flange or the adaptor plate (50). The accessory will ideally have a detent positioned on the accessories to releasably lock said accessory in place on the container portion (32).
PCT/US2001/046538 2000-12-04 2001-12-04 Wafer carrier with stacking adaptor plate WO2002047118A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP01986506A EP1339622A4 (en) 2000-12-04 2001-12-04 Wafer carrier with stacking adaptor plate
JP2002548751A JP2004515916A (en) 2000-12-04 2001-12-04 Wafer carrier with stacking adapter plate
KR10-2003-7007319A KR20040019264A (en) 2000-12-04 2001-12-04 Wafer carrier with stacking adaptor plate
AU2002237697A AU2002237697A1 (en) 2000-12-04 2001-12-04 Wafer carrier with stacking adaptor plate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US25102500P 2000-12-04 2000-12-04
US60/251,025 2000-12-04

Publications (3)

Publication Number Publication Date
WO2002047118A2 WO2002047118A2 (en) 2002-06-13
WO2002047118A3 true WO2002047118A3 (en) 2002-10-17
WO2002047118B1 WO2002047118B1 (en) 2003-03-06

Family

ID=22950160

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/046538 WO2002047118A2 (en) 2000-12-04 2001-12-04 Wafer carrier with stacking adaptor plate

Country Status (7)

Country Link
US (1) US20020114686A1 (en)
EP (1) EP1339622A4 (en)
JP (1) JP2004515916A (en)
KR (1) KR20040019264A (en)
CN (1) CN1218364C (en)
AU (1) AU2002237697A1 (en)
WO (1) WO2002047118A2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4146718B2 (en) 2002-12-27 2008-09-10 ミライアル株式会社 Thin plate support container
JP2006351604A (en) * 2005-06-13 2006-12-28 Miraial Kk Sheet supporting vessel
CN100431930C (en) * 2005-08-04 2008-11-12 北京市塑料研究所 Packaging container for large diameter silicon wafer storage and transport
TWI363030B (en) * 2009-07-10 2012-05-01 Gudeng Prec Industral Co Ltd Wafer container with top flange structure
KR102000025B1 (en) * 2012-10-29 2019-07-17 세메스 주식회사 Substrate treating apparatus
KR102143884B1 (en) 2013-09-11 2020-08-12 삼성전자주식회사 Wafer loaders having buffer regions
US20150214084A1 (en) * 2014-01-30 2015-07-30 Infineon Technologies Ag Frame cassette
US9852934B2 (en) 2014-02-14 2017-12-26 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor wafer transportation
SG10201901758WA (en) * 2014-08-28 2019-03-28 Entegris Inc Substrate container
JP6675257B2 (en) * 2016-04-14 2020-04-01 株式会社荏原製作所 Plating apparatus and plating method
AU201711335S (en) * 2016-09-08 2017-03-29 Battlemax Pty Ltd Suction Cover
AU201711337S (en) * 2016-09-08 2017-03-29 Battlemax Pty Ltd Adaptor Plate
JP6817788B2 (en) * 2016-11-08 2021-01-20 株式会社ディスコ Simple table
CN106586180A (en) * 2017-01-06 2017-04-26 佛山市南海区广工大数控装备协同创新研究院 Silicon wafer splicing material box and automatic feeding device thereof
WO2020236923A1 (en) * 2019-05-23 2020-11-26 Entegris, Inc. Handle for wafer carrier
JP2023088414A (en) * 2021-12-15 2023-06-27 ポリプラスチックス株式会社 Polyacetal resin composition used in application of radiation sterilization, and radiation resistance improvement method of polyacetal resin

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5944194A (en) * 1995-10-13 1999-08-31 Empak, Inc. 300 mm microenvironment pod with door on side
US6006919A (en) * 1997-09-30 1999-12-28 Shin-Etsu Polymer Co., Ltd. Storage container for precision substrates and a positioning mechanism therefor and a method of positioning the storage container for precision substrates
US6216874B1 (en) * 1998-07-10 2001-04-17 Fluoroware, Inc. Wafer carrier having a low tolerance build-up
US6273261B1 (en) * 1999-04-30 2001-08-14 Shin-Etsu Polymer Co., Ltd. Identification structure of a substrate storage container and method of identifying a substrate storage container
US6382419B1 (en) * 1999-04-20 2002-05-07 Shin-Etsu Polymer Co. Ltd. Wafer container box

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4557382A (en) * 1983-08-17 1985-12-10 Empak Inc. Disk package
US6010008A (en) * 1997-07-11 2000-01-04 Fluoroware, Inc. Transport module

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5944194A (en) * 1995-10-13 1999-08-31 Empak, Inc. 300 mm microenvironment pod with door on side
US6006919A (en) * 1997-09-30 1999-12-28 Shin-Etsu Polymer Co., Ltd. Storage container for precision substrates and a positioning mechanism therefor and a method of positioning the storage container for precision substrates
US6216874B1 (en) * 1998-07-10 2001-04-17 Fluoroware, Inc. Wafer carrier having a low tolerance build-up
US6382419B1 (en) * 1999-04-20 2002-05-07 Shin-Etsu Polymer Co. Ltd. Wafer container box
US6273261B1 (en) * 1999-04-30 2001-08-14 Shin-Etsu Polymer Co., Ltd. Identification structure of a substrate storage container and method of identifying a substrate storage container

Also Published As

Publication number Publication date
WO2002047118B1 (en) 2003-03-06
CN1478293A (en) 2004-02-25
JP2004515916A (en) 2004-05-27
EP1339622A2 (en) 2003-09-03
EP1339622A4 (en) 2006-03-08
WO2002047118A2 (en) 2002-06-13
CN1218364C (en) 2005-09-07
US20020114686A1 (en) 2002-08-22
KR20040019264A (en) 2004-03-05
AU2002237697A1 (en) 2002-06-18

Similar Documents

Publication Publication Date Title
WO2002047118A3 (en) Wafer carrier with stacking adaptor plate
CA2394319A1 (en) Vehicle storage box
USD390555S (en) Mobile phone housing
USD353375S (en) Combined telephone handset with charging base station
CA2274659A1 (en) Freely openable container
AU2003276110A1 (en) Removable dust collector
USD408813S (en) Handset
GB2294838A (en) Telephone mounting receptacle having opposed retractable latch members
AU6082299A (en) Method and device for accommodating a cell culture
EP1116651A3 (en) Aircraft stowage bin with pull-down housing
USD411205S (en) Front cover for a telephone handset
CA2087050A1 (en) Food Product Carrier for an Automatic Cooking Machine
CA2134568A1 (en) Closure device
EP1321119A3 (en) Diaper dispenser
USD427171S (en) Handset
USD391253S (en) Telephone
USD454837S1 (en) Battery charger
USD464262S1 (en) Opening and closing device for containers
CA2322088A1 (en) Refuse container
GB9402298D0 (en) Closure
USD487538S1 (en) Trash can receptacle
USD427145S (en) Battery charger/analyzer design
USD345155S (en) Facsimile transceiver
USD437554S1 (en) Paint container
USD363278S (en) Facsimile transceiver

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
AK Designated states

Kind code of ref document: A3

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
B Later publication of amended claims
WWE Wipo information: entry into national phase

Ref document number: 2001986506

Country of ref document: EP

Ref document number: 1020037007319

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 018199313

Country of ref document: CN

WWE Wipo information: entry into national phase

Ref document number: 2002548751

Country of ref document: JP

WWP Wipo information: published in national office

Ref document number: 2001986506

Country of ref document: EP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

WWP Wipo information: published in national office

Ref document number: 1020037007319

Country of ref document: KR

WWW Wipo information: withdrawn in national office

Ref document number: 2001986506

Country of ref document: EP