GB2375232B - Transport module - Google Patents

Transport module

Info

Publication number
GB2375232B
GB2375232B GB0218144A GB0218144A GB2375232B GB 2375232 B GB2375232 B GB 2375232B GB 0218144 A GB0218144 A GB 0218144A GB 0218144 A GB0218144 A GB 0218144A GB 2375232 B GB2375232 B GB 2375232B
Authority
GB
United Kingdom
Prior art keywords
transport module
transport
module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0218144A
Other versions
GB2375232A (en
GB0218144D0 (en
Inventor
David L Nyseth
Dennis J Krampotich
Todd M Ulschmid
Gregory W Bores
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fluoroware Inc
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/891,644 external-priority patent/US6010008A/en
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of GB0218144D0 publication Critical patent/GB0218144D0/en
Publication of GB2375232A publication Critical patent/GB2375232A/en
Application granted granted Critical
Publication of GB2375232B publication Critical patent/GB2375232B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
GB0218144A 1997-07-11 1998-07-10 Transport module Expired - Fee Related GB2375232B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/891,644 US6010008A (en) 1997-07-11 1997-07-11 Transport module
GB9815090A GB2327298B (en) 1997-07-11 1998-07-10 Transport module

Publications (3)

Publication Number Publication Date
GB0218144D0 GB0218144D0 (en) 2002-09-11
GB2375232A GB2375232A (en) 2002-11-06
GB2375232B true GB2375232B (en) 2002-12-24

Family

ID=26314017

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0218144A Expired - Fee Related GB2375232B (en) 1997-07-11 1998-07-10 Transport module

Country Status (1)

Country Link
GB (1) GB2375232B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995017004A1 (en) * 1993-12-14 1995-06-22 W.L. Gore & Associates, Inc. Semiconductor wafer transport container
WO1996022609A1 (en) * 1995-01-17 1996-07-25 W.L. Gore & Associates, Inc. Multiple interface door for wafer storage and handling container
GB2315260A (en) * 1996-07-12 1998-01-28 Flouroware Inc Wafer container

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995017004A1 (en) * 1993-12-14 1995-06-22 W.L. Gore & Associates, Inc. Semiconductor wafer transport container
WO1996022609A1 (en) * 1995-01-17 1996-07-25 W.L. Gore & Associates, Inc. Multiple interface door for wafer storage and handling container
GB2315260A (en) * 1996-07-12 1998-01-28 Flouroware Inc Wafer container

Also Published As

Publication number Publication date
GB2375232A (en) 2002-11-06
GB0218144D0 (en) 2002-09-11

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20150710