SG66545A1 - Apparatus for inspecting printed circuit boards and the like and method of operating the same - Google Patents

Apparatus for inspecting printed circuit boards and the like and method of operating the same

Info

Publication number
SG66545A1
SG66545A1 SG1996003498A SG1996003498A SG66545A1 SG 66545 A1 SG66545 A1 SG 66545A1 SG 1996003498 A SG1996003498 A SG 1996003498A SG 1996003498 A SG1996003498 A SG 1996003498A SG 66545 A1 SG66545 A1 SG 66545A1
Authority
SG
Singapore
Prior art keywords
light
printed circuit
inspection
circuit board
inspecting
Prior art date
Application number
SG1996003498A
Other languages
English (en)
Inventor
Shigeki Kobayashi
Yasuaki Tanimura
Teruhisa Yotsuya
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63112054A external-priority patent/JPH061173B2/ja
Priority claimed from JP63226767A external-priority patent/JP2629880B2/ja
Priority claimed from JP63226768A external-priority patent/JP2629881B2/ja
Priority claimed from JP63227963A external-priority patent/JP2629882B2/ja
Priority claimed from JP63227964A external-priority patent/JP2748977B2/ja
Priority claimed from JP63230738A external-priority patent/JPH07107514B2/ja
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Publication of SG66545A1 publication Critical patent/SG66545A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Monitoring And Testing Of Exchanges (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Led Device Packages (AREA)
  • Pressure Sensors (AREA)
  • Tests Of Electronic Circuits (AREA)
SG1996003498A 1988-05-09 1989-05-02 Apparatus for inspecting printed circuit boards and the like and method of operating the same SG66545A1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP63112054A JPH061173B2 (ja) 1988-05-09 1988-05-09 曲面性状検査装置
JP63226767A JP2629880B2 (ja) 1988-09-09 1988-09-09 基板検査装置における教示方法
JP63226768A JP2629881B2 (ja) 1988-09-09 1988-09-09 基板検査のための検査領域設定方法およびその方法を用いた検査領域設定装置
JP63227963A JP2629882B2 (ja) 1988-09-12 1988-09-12 基板検査のための教示方法及びその方法を用いた基板基査教示装置
JP63227964A JP2748977B2 (ja) 1988-09-12 1988-09-12 基板検査結果表示装置
JP63230738A JPH07107514B2 (ja) 1988-09-14 1988-09-14 基板検査装置における表示方法および表示装置

Publications (1)

Publication Number Publication Date
SG66545A1 true SG66545A1 (en) 1999-07-20

Family

ID=27552364

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996003498A SG66545A1 (en) 1988-05-09 1989-05-02 Apparatus for inspecting printed circuit boards and the like and method of operating the same

Country Status (8)

Country Link
US (1) US5245671A (fr)
EP (3) EP0413817B1 (fr)
KR (1) KR920006031B1 (fr)
AT (1) ATE135110T1 (fr)
AU (1) AU3543689A (fr)
DE (3) DE68929062T2 (fr)
SG (1) SG66545A1 (fr)
WO (1) WO1989011093A1 (fr)

Families Citing this family (91)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5039868A (en) * 1988-11-24 1991-08-13 Omron Corporation Method of and apparatus for inspecting printed circuit boards and the like
EP0370527B1 (fr) * 1988-11-24 1994-02-02 Omron Tateisi Electronics Co. Méthode et appareil pour inspecter un substrat
JPH02231510A (ja) * 1989-03-02 1990-09-13 Omron Tateisi Electron Co 基板検査装置
US5060065A (en) * 1990-02-23 1991-10-22 Cimflex Teknowledge Corporation Apparatus and method for illuminating a printed circuit board for inspection
JP3072998B2 (ja) * 1990-04-18 2000-08-07 株式会社日立製作所 はんだ付け状態検査方法及びその装置
US5598345A (en) * 1990-11-29 1997-01-28 Matsushita Electric Industrial Co., Ltd. Method and apparatus for inspecting solder portions
SG45181A1 (en) * 1991-07-22 1998-01-16 Omron Tateisi Electronics Co Teaching method and system for mounted component inspection
KR0170542B1 (ko) 1993-04-21 1999-05-01 다테이시 요시오 육안 검사 지원장치 및 기판 검사장치와 이것들을 이용한 납땜 검사방법 및 수정방법
JP3205432B2 (ja) * 1993-06-10 2001-09-04 松下電器産業株式会社 装着部品検査装置と装着部品検査方法
SG80529A1 (en) * 1993-06-14 2001-05-22 Omron Tateisi Electronics Co Visual inspection supporting apparatus and printed circuit board inspecting apparatus, and methods of soldering inspection and correction using the apparatus
US5500886A (en) * 1994-04-06 1996-03-19 Thermospectra X-ray position measuring and calibration device
EP0718623B1 (fr) * 1994-12-19 2004-04-07 Omron Corporation Procédé et dispositif pour établir des zones d'observation et l'inspection des produits employant de telles zones
KR0168243B1 (ko) * 1994-12-19 1999-05-01 다떼이시 요시오 관측 영역 설정 방법 및 그 장치와, 이 관측 영역 설정 방법을 이용한 외관 검사 방법 및 그 장치
DE19511534C2 (de) * 1995-03-29 1998-01-22 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Erfassung von 3D-Fehlstellen bei der automatischen Inspektion von Oberflächen mit Hilfe farbtüchtiger Bildauswertungssysteme
US5751910A (en) * 1995-05-22 1998-05-12 Eastman Kodak Company Neural network solder paste inspection system
DE69530007D1 (de) * 1995-06-15 2003-04-24 British Nuclear Fuels Plc Prüfen der oberfläche eines objekts
US5991436A (en) * 1995-06-30 1999-11-23 Cognex Corporation Apparatus and method for inspecting wirebonds on leads
KR100200215B1 (ko) * 1996-04-08 1999-06-15 윤종용 상관 신경 회로망을 이용한 납땜 검사 장치 및방법
JP3423572B2 (ja) * 1996-06-06 2003-07-07 キヤノン株式会社 画像読み取りシステム、その制御装置、画像読み取り方法、及び記憶媒体
JP3129245B2 (ja) 1996-10-31 2001-01-29 オムロン株式会社 撮像装置
JPH10143660A (ja) 1996-11-11 1998-05-29 Hitachi Ltd 欠陥判定処理方法およびその装置
JPH10141929A (ja) * 1996-11-12 1998-05-29 Hitachi Ltd はんだ付け検査装置
JP3802957B2 (ja) * 1996-12-19 2006-08-02 富士機械製造株式会社 光沢を有する球冠状突起の撮像，位置特定方法およびシステム
US6236747B1 (en) 1997-02-26 2001-05-22 Acuity Imaging, Llc System and method for image subtraction for ball and bumped grid array inspection
US6201892B1 (en) 1997-02-26 2001-03-13 Acuity Imaging, Llc System and method for arithmetic operations for electronic package inspection
US6118524A (en) * 1997-02-26 2000-09-12 Acuity Imaging, Llc Arc illumination apparatus and method
US5828449A (en) * 1997-02-26 1998-10-27 Acuity Imaging, Llc Ring illumination reflective elements on a generally planar surface
US5926557A (en) * 1997-02-26 1999-07-20 Acuity Imaging, Llc Inspection method
DE19709939A1 (de) * 1997-03-11 1998-09-17 Atg Test Systems Gmbh Verfahren und Vorrichtung zum Prüfen von Leiterplatten
US5774212A (en) * 1997-03-19 1998-06-30 General Electric Co. Method and apparatus for detecting and analyzing directionally reflective surface flaws
EP0871027A3 (fr) * 1997-04-07 1999-05-19 Hewlett-Packard Company ContrÔle de plaques de circuits imprimés
US6055054A (en) * 1997-05-05 2000-04-25 Beaty; Elwin M. Three dimensional inspection system
US6346966B1 (en) 1997-07-07 2002-02-12 Agilent Technologies, Inc. Image acquisition system for machine vision applications
CA2307031C (fr) * 1997-10-09 2007-03-27 Joseph L. Vilella Systeme d'inspection video d'ensemble electronique
US6072898A (en) * 1998-01-16 2000-06-06 Beaty; Elwin M. Method and apparatus for three dimensional inspection of electronic components
US6915006B2 (en) * 1998-01-16 2005-07-05 Elwin M. Beaty Method and apparatus for three dimensional inspection of electronic components
US6915007B2 (en) * 1998-01-16 2005-07-05 Elwin M. Beaty Method and apparatus for three dimensional inspection of electronic components
US6324298B1 (en) 1998-07-15 2001-11-27 August Technology Corp. Automated wafer defect inspection system and a process of performing such inspection
KR100345001B1 (ko) * 1998-08-27 2002-07-19 삼성전자 주식회사 기판 납땜 검사용 조명 및 광학 장치
US6088109A (en) * 1998-09-24 2000-07-11 Advanced Semiconductor Engineering, Inc. System for detecting the presence of deposited metals on soldering points of an integrated circuit board substrate
US6774931B1 (en) 1999-04-27 2004-08-10 Matsushita Electric Industrial Co., Ltd. Inspection method and device by movement of the field of view of the camera
IL131282A (en) 1999-08-05 2009-02-11 Orbotech Ltd Apparatus and methods for inspection of objects
US6542630B1 (en) * 1999-09-14 2003-04-01 Teradyne, Inc. Inspecting component placement relative to component pads
WO2001029542A1 (fr) * 1999-10-18 2001-04-26 Mv Research Limited Systeme de vision artificielle
EP1111375B1 (fr) * 1999-12-22 2014-12-17 Novartis AG Dispositif de contrôle pour des emballages
US6757420B2 (en) 1999-12-22 2004-06-29 Novartis Ag Inspection device for packages
EP1126412B1 (fr) * 2000-02-16 2013-01-30 FUJIFILM Corporation Appareil de saisie d'images et méthode de mesure de distance
SE516239C2 (sv) * 2000-04-28 2001-12-03 Mydata Automation Ab Metod och anordning för bestämning av nominella data för elektroniska kretsar, genom att ta en digital bild och jämföra med lagrade nominella data.
US6621566B1 (en) 2000-10-02 2003-09-16 Teradyne, Inc. Optical inspection system having integrated component learning
DE10128476C2 (de) * 2001-06-12 2003-06-12 Siemens Dematic Ag Optische Sensorvorrichtung zur visuellen Erfassung von Substraten
US7062080B2 (en) 2001-11-26 2006-06-13 Omron Corporation Method of inspecting curved surface and device for inspecting printed circuit board
EP1314974B1 (fr) * 2001-11-26 2005-02-02 Omron Corporation Méthode pour inspecter une surface courbée et dispositif pour inspecter un circuit imprimé
JP3551188B2 (ja) * 2002-01-10 2004-08-04 オムロン株式会社 表面状態検査方法および基板検査装置
JP2003269919A (ja) * 2002-03-11 2003-09-25 Mitsutoyo Corp 画像処理型測定機の照明装置
US9684675B2 (en) 2002-09-30 2017-06-20 Adobe Systems Incorporated Reduction of search ambiguity with multiple media references
TWI221531B (en) * 2002-10-25 2004-10-01 Hwan-Chia Chang Method for testing soldering reliability
FI20021973A (fi) * 2002-11-05 2004-05-06 Sr Instr Oy Synkroninen optinen mittaus- ja tarkistusmenetelmä ja laite
DE10393783T5 (de) * 2002-11-28 2005-10-27 Advantest Corp. Positionserfassungsvorrichtung, Positionserfassungsverfahren und Tragvorrichtung für elektronische Komponenten
EP1455179A1 (fr) * 2003-03-07 2004-09-08 MV Research Limited Système de vision artificielle et procédé pour l'inspection
US20040184653A1 (en) * 2003-03-20 2004-09-23 Baer Richard L. Optical inspection system, illumination apparatus and method for use in imaging specular objects based on illumination gradients
US7352892B2 (en) * 2003-03-20 2008-04-01 Micron Technology, Inc. System and method for shape reconstruction from optical images
US7171037B2 (en) * 2003-03-20 2007-01-30 Agilent Technologies, Inc. Optical inspection system and method for displaying imaged objects in greater than two dimensions
US7019826B2 (en) * 2003-03-20 2006-03-28 Agilent Technologies, Inc. Optical inspection system, apparatus and method for reconstructing three-dimensional images for printed circuit board and electronics manufacturing inspection
WO2004088588A1 (fr) * 2003-03-28 2004-10-14 Fujitsu Limited Camera, procede de reglage de la source lumineuse et progiciel associe
JP4299049B2 (ja) * 2003-04-24 2009-07-22 株式会社 日立ディスプレイズ 表示デバイス用制御信号の検査方法及び検査装置並びにこの検査機能を備えた表示装置
US20040218006A1 (en) * 2003-04-30 2004-11-04 Dickerson Stephen Lang Scanning apparatus
JP3953988B2 (ja) * 2003-07-29 2007-08-08 Ｔｄｋ株式会社 検査装置および検査方法
JP4041042B2 (ja) * 2003-09-17 2008-01-30 大日本スクリーン製造株式会社 欠陥確認装置および欠陥確認方法
ES2229927B1 (es) * 2003-10-02 2006-03-16 Sony España, S.A. Procedimiento y equipo para la inspeccion de soldadura de dispositivos de montaje en superficie.
JP3867724B2 (ja) * 2004-02-27 2007-01-10 オムロン株式会社 表面状態検査方法およびその方法を用いた表面状態検査装置ならびに基板検査装置
JP4736764B2 (ja) * 2005-01-11 2011-07-27 オムロン株式会社 基板検査装置並びにその検査ロジック設定方法および検査ロジック設定装置
US7315361B2 (en) * 2005-04-29 2008-01-01 Gsi Group Corporation System and method for inspecting wafers in a laser marking system
CN2867100Y (zh) * 2005-07-13 2007-02-07 王锦峰 在线光源发生装置
JP2007188128A (ja) * 2006-01-11 2007-07-26 Omron Corp カラー画像を用いた測定方法および測定装置
CN101520309A (zh) * 2008-02-28 2009-09-02 鸿富锦精密工业（深圳）有限公司 成像装置
US8077307B2 (en) * 2008-04-09 2011-12-13 Orbotech Ltd. Illumination system for optical inspection
IT1395116B1 (it) * 2009-07-29 2012-09-05 Utpvision S R L Sistema di rilevamento ottico di difetti superficiali
JP5948797B2 (ja) * 2011-11-07 2016-07-06 オムロン株式会社 検査結果の目視確認作業の支援用のシステムおよび装置ならびに方法
US8947590B2 (en) 2011-11-22 2015-02-03 Cognex Corporation Vision system camera with mount for multiple lens types
US10498933B2 (en) 2011-11-22 2019-12-03 Cognex Corporation Camera system with exchangeable illumination assembly
US11366284B2 (en) 2011-11-22 2022-06-21 Cognex Corporation Vision system camera with mount for multiple lens types and lens module for the same
JP6116710B2 (ja) * 2014-01-08 2017-04-19 ヤマハ発動機株式会社 外観検査装置および外観検査方法
JP6470506B2 (ja) * 2014-06-09 2019-02-13 株式会社キーエンス 検査装置
KR101610148B1 (ko) * 2014-11-17 2016-04-08 현대자동차 주식회사 차체 검사 시스템 및 방법
KR101622628B1 (ko) 2014-12-16 2016-05-20 주식회사 고영테크놀러지 부품이 실장된 기판 검사방법 및 검사장치
CN104568964B (zh) * 2014-12-24 2018-05-01 昆山元茂电子科技有限公司 一种印刷电路板外观检测装置及其检测方法
KR101750521B1 (ko) * 2015-07-27 2017-07-03 주식회사 고영테크놀러지 기판 검사 장치 및 방법
KR101739696B1 (ko) * 2016-07-13 2017-05-25 서장일 재질인식 조명 시스템 및 이를 이용한 재질인식 방법
CN106645161B (zh) * 2016-09-27 2020-02-04 凌云光技术集团有限责任公司 一种表面缺陷检测系统及方法
JP6815169B2 (ja) * 2016-11-07 2021-01-20 Juki株式会社 極性判別装置、実装装置、極性判別方法
US11282187B2 (en) * 2019-08-19 2022-03-22 Ricoh Company, Ltd. Inspection system, inspection apparatus, and method using multiple angle illumination

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4249827A (en) * 1978-04-17 1981-02-10 Solid Photography Inc. Arrangement for color coding of surfaces
JPS59153108A (ja) * 1983-02-22 1984-09-01 Matsushita Electric Ind Co Ltd 鏡面体の表面欠陥検査方法
US4727498A (en) * 1984-10-31 1988-02-23 University Of South Carolina Process for segmenting reservoir pores
US4748335A (en) * 1985-04-19 1988-05-31 Siscan Systems, Inc. Method and aparatus for determining surface profiles
JPS61293657A (ja) * 1985-06-21 1986-12-24 Matsushita Electric Works Ltd 半田付け外観検査方法
JPS62127617A (ja) * 1985-11-29 1987-06-09 Fujitsu Ltd 線状物体検査装置
US4688939A (en) * 1985-12-27 1987-08-25 At&T Technologies, Inc. Method and apparatus for inspecting articles
JPS62180250A (ja) * 1986-02-05 1987-08-07 Omron Tateisi Electronics Co 部品実装基板の検査方法
JPH07117497B2 (ja) * 1986-02-05 1995-12-18 オムロン株式会社 基板自動検査装置におけるティーチング方法および装置
US4894790A (en) * 1986-02-05 1990-01-16 Omron Tateisi Electronics Co. Input method for reference printed circuit board assembly data to an image processing printed circuit board assembly automatic inspection apparatus
JPS62190450A (ja) * 1986-02-17 1987-08-20 Omron Tateisi Electronics Co 部品実装基板検査装置
JPH0754302B2 (ja) * 1986-05-07 1995-06-07 オムロン株式会社 プリント基板処理装置
US4730930A (en) * 1986-06-24 1988-03-15 Technical Arts Corporation Scanning apparatus and method
US4971437A (en) * 1986-07-28 1990-11-20 Texaco Inc. Optical spectral analysis system and method
DE3750285T2 (de) * 1986-10-03 1995-03-30 Omron Tateisi Electronics Co Gerät zur Untersuchung einer elektronischen Vorrichtung in fester Baugruppe.
US5093797A (en) * 1987-01-13 1992-03-03 Omron Tateisi Electronics Co. Apparatus for inspecting packaged electronic device
JPH02116259A (ja) * 1988-10-26 1990-04-27 Toshiba Corp 画像形成装置
JPH02231510A (ja) * 1989-03-02 1990-09-13 Omron Tateisi Electron Co 基板検査装置

Also Published As

Publication number Publication date
ATE135110T1 (de) 1996-03-15
DE68929062D1 (de) 1999-09-30
EP0413817A1 (fr) 1991-02-27
WO1989011093A1 (fr) 1989-11-16
DE68925901T2 (de) 1996-11-14
DE68929481T2 (de) 2004-06-09
DE68925901D1 (de) 1996-04-11
AU3543689A (en) 1989-11-29
EP0413817A4 (en) 1991-10-23
DE68929481D1 (de) 2003-09-18
KR920006031B1 (ko) 1992-07-27
DE68929062T2 (de) 2000-03-16
EP0413817B1 (fr) 1996-03-06
US5245671A (en) 1993-09-14
KR900702353A (ko) 1990-12-06
EP0687901B1 (fr) 2003-08-13
EP0685732B1 (fr) 1999-08-25
EP0685732A1 (fr) 1995-12-06
EP0687901A1 (fr) 1995-12-20

Similar Documents

Publication Publication Date Title
SG66545A1 (en) Apparatus for inspecting printed circuit boards and the like and method of operating the same
US5039868A (en) Method of and apparatus for inspecting printed circuit boards and the like
US7394084B2 (en) Method of generating image and illumination device for inspecting substrate
EP0385474A3 (fr) Méthode et appareil pour le contrôle de plaquettes à circuits imprimés
US20050073590A1 (en) Three-dimensional measuring instrument, filter striped plate, and illuminating means
CN101221122A (zh) 可调式光源装置和具有该光源装置的自动光学检测系统
CN101694278A (zh) 用于自动光学检查机的光源装置
CN106353317A (zh) 检测待测目标物的检测装置与方法
JPH01282410A (ja) 曲面性状検査装置
US20020089599A1 (en) Illumination and image acquisition system
ATE67618T1 (de) Verfahren zur untersuchung von leiterplatten mittels arithmetischen vergleichs von mehreren bildern in verschiedenen farben.
JPH0278937A (ja) 基板検査装置における表示方法および表示装置
JP2748977B2 (ja) 基板検査結果表示装置
JP2587600B2 (ja) プリント配線板及びプリント配線板検査装置
EP0370527B1 (fr) Méthode et appareil pour inspecter un substrat
JPH10339704A (ja) 外観検査装置
JPH02213711A (ja) 部品検査装置
JP2001068900A (ja) 実装部品検査方法並びに実装部品検査装置及びその照明器具
JP2696878B2 (ja) 基板の検査方法およびその装置
JPH02141604A (ja) 基板検査方法
JPH0274848A (ja) 基板検査装置における教示方法
SU1428911A1 (ru) Способ контрол качества плоских изделий с отверсти ми
JPH0276079A (ja) 基板検査のための教示方法及びその方法を用いた基板基査教示装置
JPH07239222A (ja) 表面欠陥検査装置
JPH07128027A (ja) 半田ペースト検査装置