SG188386A1 - Photosensitive composition, cured film formed from same, and element having cured film - Google Patents
Photosensitive composition, cured film formed from same, and element having cured film Download PDFInfo
- Publication number
- SG188386A1 SG188386A1 SG2013015979A SG2013015979A SG188386A1 SG 188386 A1 SG188386 A1 SG 188386A1 SG 2013015979 A SG2013015979 A SG 2013015979A SG 2013015979 A SG2013015979 A SG 2013015979A SG 188386 A1 SG188386 A1 SG 188386A1
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- SG
- Singapore
- Prior art keywords
- group
- compound
- film
- polysiloxane
- weight
- Prior art date
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- 239000000203 mixture Substances 0.000 title claims abstract description 101
- -1 naphthoquinone diazide compound Chemical class 0.000 claims abstract description 210
- 150000001875 compounds Chemical class 0.000 claims abstract description 103
- 229910052751 metal Inorganic materials 0.000 claims abstract description 48
- 239000002184 metal Substances 0.000 claims abstract description 48
- 239000013522 chelant Substances 0.000 claims abstract description 28
- 239000002904 solvent Substances 0.000 claims abstract description 24
- 238000011161 development Methods 0.000 claims abstract 34
- 239000011347 resin Substances 0.000 claims abstract 29
- 229920005989 resin Polymers 0.000 claims abstract 29
- 239000010408 film Substances 0.000 claims description 173
- 229920001296 polysiloxane Polymers 0.000 claims description 103
- 229920000178 Acrylic resin Polymers 0.000 claims description 35
- 239000004925 Acrylic resin Substances 0.000 claims description 35
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 29
- 229910052726 zirconium Inorganic materials 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 28
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 27
- 239000010936 titanium Substances 0.000 claims description 27
- 229910052719 titanium Inorganic materials 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 22
- 238000004132 cross linking Methods 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- 238000009413 insulation Methods 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 8
- 239000004973 liquid crystal related substance Substances 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 7
- 239000011229 interlayer Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 206010034972 Photosensitivity reaction Diseases 0.000 claims description 5
- 230000036211 photosensitivity Effects 0.000 claims description 5
- 239000002738 chelating agent Substances 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000000243 solution Substances 0.000 claims 98
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims 61
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 49
- 238000003756 stirring Methods 0.000 claims 44
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims 42
- 125000004429 atom Chemical group 0.000 claims 37
- 230000015572 biosynthetic process Effects 0.000 claims 35
- 238000003786 synthesis reaction Methods 0.000 claims 33
- 230000018109 developmental process Effects 0.000 claims 32
- 238000010438 heat treatment Methods 0.000 claims 32
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 32
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims 31
- 239000002253 acid Substances 0.000 claims 29
- 125000000217 alkyl group Chemical group 0.000 claims 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 28
- 150000001282 organosilanes Chemical class 0.000 claims 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 25
- 125000003118 aryl group Chemical group 0.000 claims 25
- 239000002245 particle Substances 0.000 claims 25
- 239000000126 substance Substances 0.000 claims 25
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 24
- 229910052782 aluminium Inorganic materials 0.000 claims 23
- 125000004432 carbon atom Chemical group C* 0.000 claims 22
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims 21
- 239000001257 hydrogen Substances 0.000 claims 21
- 229910052739 hydrogen Inorganic materials 0.000 claims 21
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 21
- 239000003921 oil Substances 0.000 claims 20
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 19
- 229910052750 molybdenum Inorganic materials 0.000 claims 19
- 239000011733 molybdenum Substances 0.000 claims 19
- 229910052710 silicon Inorganic materials 0.000 claims 19
- 230000035945 sensitivity Effects 0.000 claims 17
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims 16
- 238000006243 chemical reaction Methods 0.000 claims 16
- 238000013007 heat curing Methods 0.000 claims 16
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims 16
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims 15
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 claims 15
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims 15
- 229910000077 silane Inorganic materials 0.000 claims 15
- 239000007787 solid Substances 0.000 claims 15
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims 15
- 239000000047 product Substances 0.000 claims 14
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims 14
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims 13
- 125000003342 alkenyl group Chemical group 0.000 claims 13
- 239000003054 catalyst Substances 0.000 claims 13
- 239000000178 monomer Substances 0.000 claims 13
- 238000006467 substitution reaction Methods 0.000 claims 13
- 125000002252 acyl group Chemical group 0.000 claims 12
- 239000006227 byproduct Substances 0.000 claims 12
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 claims 12
- 239000002612 dispersion medium Substances 0.000 claims 12
- 125000003700 epoxy group Chemical group 0.000 claims 12
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 12
- 229910052757 nitrogen Inorganic materials 0.000 claims 12
- 150000004756 silanes Chemical class 0.000 claims 12
- 238000002834 transmittance Methods 0.000 claims 12
- 238000004061 bleaching Methods 0.000 claims 11
- 239000003431 cross linking reagent Substances 0.000 claims 11
- 239000011521 glass Substances 0.000 claims 11
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 11
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 claims 11
- 239000004094 surface-active agent Substances 0.000 claims 11
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 claims 11
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 claims 11
- 239000006087 Silane Coupling Agent Substances 0.000 claims 10
- 125000003545 alkoxy group Chemical group 0.000 claims 10
- 230000000694 effects Effects 0.000 claims 10
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 claims 10
- 229940093858 ethyl acetoacetate Drugs 0.000 claims 10
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims 10
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 10
- 150000003254 radicals Chemical class 0.000 claims 10
- 238000005259 measurement Methods 0.000 claims 9
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 9
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 claims 8
- NGNBDVOYPDDBFK-UHFFFAOYSA-N 2-[2,4-di(pentan-2-yl)phenoxy]acetyl chloride Chemical compound CCCC(C)C1=CC=C(OCC(Cl)=O)C(C(C)CCC)=C1 NGNBDVOYPDDBFK-UHFFFAOYSA-N 0.000 claims 8
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 8
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 claims 7
- 238000005481 NMR spectroscopy Methods 0.000 claims 7
- 230000008859 change Effects 0.000 claims 7
- 238000011156 evaluation Methods 0.000 claims 7
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 claims 7
- 238000006116 polymerization reaction Methods 0.000 claims 7
- 238000012360 testing method Methods 0.000 claims 7
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 6
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims 6
- 238000010521 absorption reaction Methods 0.000 claims 6
- 238000007334 copolymerization reaction Methods 0.000 claims 6
- 238000006460 hydrolysis reaction Methods 0.000 claims 6
- 239000002244 precipitate Substances 0.000 claims 6
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 claims 6
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 claims 5
- 239000007983 Tris buffer Substances 0.000 claims 5
- 230000001476 alcoholic effect Effects 0.000 claims 5
- 239000012670 alkaline solution Substances 0.000 claims 5
- 238000009833 condensation Methods 0.000 claims 5
- 230000005494 condensation Effects 0.000 claims 5
- 238000001723 curing Methods 0.000 claims 5
- 230000007062 hydrolysis Effects 0.000 claims 5
- 230000001771 impaired effect Effects 0.000 claims 5
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 claims 5
- 230000009467 reduction Effects 0.000 claims 5
- JIDDFPFGMDDOLO-UHFFFAOYSA-N 5-fluoro-1-(1-oxothiolan-2-yl)pyrimidine-2,4-dione Chemical compound O=C1NC(=O)C(F)=CN1C1S(=O)CCC1 JIDDFPFGMDDOLO-UHFFFAOYSA-N 0.000 claims 4
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 claims 4
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims 4
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 claims 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 claims 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 4
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 claims 4
- 229910052788 barium Inorganic materials 0.000 claims 4
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims 4
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims 4
- 229910052791 calcium Inorganic materials 0.000 claims 4
- 239000011575 calcium Substances 0.000 claims 4
- 229910017052 cobalt Inorganic materials 0.000 claims 4
- 239000010941 cobalt Substances 0.000 claims 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims 4
- 238000001035 drying Methods 0.000 claims 4
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 claims 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 claims 4
- 239000003456 ion exchange resin Substances 0.000 claims 4
- 229920003303 ion-exchange polymer Polymers 0.000 claims 4
- 229910052746 lanthanum Inorganic materials 0.000 claims 4
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 4
- 229910052749 magnesium Inorganic materials 0.000 claims 4
- 239000011777 magnesium Substances 0.000 claims 4
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 claims 4
- 150000002989 phenols Chemical class 0.000 claims 4
- 229910052712 strontium Inorganic materials 0.000 claims 4
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims 4
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 claims 4
- 238000009834 vaporization Methods 0.000 claims 4
- 230000008016 vaporization Effects 0.000 claims 4
- 229910052725 zinc Inorganic materials 0.000 claims 4
- 239000011701 zinc Substances 0.000 claims 4
- NVZWEEGUWXZOKI-UHFFFAOYSA-N 1-ethenyl-2-methylbenzene Chemical compound CC1=CC=CC=C1C=C NVZWEEGUWXZOKI-UHFFFAOYSA-N 0.000 claims 3
- XVXKXOPCFWAOLN-UHFFFAOYSA-N 1-ethenyl-4-(methoxymethyl)benzene Chemical compound COCC1=CC=C(C=C)C=C1 XVXKXOPCFWAOLN-UHFFFAOYSA-N 0.000 claims 3
- 238000001644 13C nuclear magnetic resonance spectroscopy Methods 0.000 claims 3
- 238000005160 1H NMR spectroscopy Methods 0.000 claims 3
- KUMMBDBTERQYCG-UHFFFAOYSA-N 2,6-bis(hydroxymethyl)-4-methylphenol Chemical compound CC1=CC(CO)=C(O)C(CO)=C1 KUMMBDBTERQYCG-UHFFFAOYSA-N 0.000 claims 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims 3
- BXVXPASMKWYBFD-UHFFFAOYSA-N 2-[[2-hydroxy-3-(hydroxymethyl)-5-methylphenyl]methyl]-6-(hydroxymethyl)-4-methylphenol Chemical compound CC1=CC(CO)=C(O)C(CC=2C(=C(CO)C=C(C)C=2)O)=C1 BXVXPASMKWYBFD-UHFFFAOYSA-N 0.000 claims 3
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 claims 3
- FVCSARBUZVPSQF-UHFFFAOYSA-N 5-(2,4-dioxooxolan-3-yl)-7-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C(C(OC2=O)=O)C2C(C)=CC1C1C(=O)COC1=O FVCSARBUZVPSQF-UHFFFAOYSA-N 0.000 claims 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims 3
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims 3
- 239000004793 Polystyrene Substances 0.000 claims 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims 3
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 claims 3
- 239000007864 aqueous solution Substances 0.000 claims 3
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 claims 3
- 150000001735 carboxylic acids Chemical class 0.000 claims 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims 3
- 229910001873 dinitrogen Inorganic materials 0.000 claims 3
- 238000004090 dissolution Methods 0.000 claims 3
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 claims 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims 3
- 238000001914 filtration Methods 0.000 claims 3
- 239000011737 fluorine Substances 0.000 claims 3
- 229910052731 fluorine Inorganic materials 0.000 claims 3
- 235000019253 formic acid Nutrition 0.000 claims 3
- 238000005227 gel permeation chromatography Methods 0.000 claims 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims 3
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 claims 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 3
- 229910052753 mercury Inorganic materials 0.000 claims 3
- QVEIBLDXZNGPHR-UHFFFAOYSA-N naphthalene-1,4-dione;diazide Chemical compound [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1=CC=C2C(=O)C=CC(=O)C2=C1 QVEIBLDXZNGPHR-UHFFFAOYSA-N 0.000 claims 3
- 125000001624 naphthyl group Chemical group 0.000 claims 3
- 125000000962 organic group Chemical group 0.000 claims 3
- 125000003566 oxetanyl group Chemical group 0.000 claims 3
- 238000005191 phase separation Methods 0.000 claims 3
- 238000011907 photodimerization Methods 0.000 claims 3
- 229920002223 polystyrene Polymers 0.000 claims 3
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 claims 3
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 3
- 125000001424 substituent group Chemical group 0.000 claims 3
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 claims 3
- ZUEKXCXHTXJYAR-UHFFFAOYSA-N tetrapropan-2-yl silicate Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)OC(C)C ZUEKXCXHTXJYAR-UHFFFAOYSA-N 0.000 claims 3
- ZQZCOBSUOFHDEE-UHFFFAOYSA-N tetrapropyl silicate Chemical compound CCCO[Si](OCCC)(OCCC)OCCC ZQZCOBSUOFHDEE-UHFFFAOYSA-N 0.000 claims 3
- YZVRVDPMGYFCGL-UHFFFAOYSA-N triacetyloxysilyl acetate Chemical compound CC(=O)O[Si](OC(C)=O)(OC(C)=O)OC(C)=O YZVRVDPMGYFCGL-UHFFFAOYSA-N 0.000 claims 3
- 238000005406 washing Methods 0.000 claims 3
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 claims 2
- YOBOXHGSEJBUPB-MTOQALJVSA-N (z)-4-hydroxypent-3-en-2-one;zirconium Chemical compound [Zr].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O YOBOXHGSEJBUPB-MTOQALJVSA-N 0.000 claims 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims 2
- RUGCMQKIAPUIQM-UHFFFAOYSA-N 1-ethenyl-3-(ethoxymethyl)benzene Chemical compound CCOCC1=CC=CC(C=C)=C1 RUGCMQKIAPUIQM-UHFFFAOYSA-N 0.000 claims 2
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- 238000011417 postcuring Methods 0.000 claims 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims 1
- 238000012545 processing Methods 0.000 claims 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 claims 1
- OGHBATFHNDZKSO-UHFFFAOYSA-N propan-2-olate Chemical compound CC(C)[O-] OGHBATFHNDZKSO-UHFFFAOYSA-N 0.000 claims 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 claims 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims 1
- 125000004309 pyranyl group Chemical group O1C(C=CC=C1)* 0.000 claims 1
- 238000004445 quantitative analysis Methods 0.000 claims 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 229910052761 rare earth metal Inorganic materials 0.000 claims 1
- 239000012925 reference material Substances 0.000 claims 1
- 150000003839 salts Chemical class 0.000 claims 1
- 125000005920 sec-butoxy group Chemical group 0.000 claims 1
- 239000010454 slate Substances 0.000 claims 1
- 239000011734 sodium Substances 0.000 claims 1
- 229910052708 sodium Inorganic materials 0.000 claims 1
- 239000004324 sodium propionate Substances 0.000 claims 1
- 239000003381 stabilizer Substances 0.000 claims 1
- 238000000859 sublimation Methods 0.000 claims 1
- 230000008022 sublimation Effects 0.000 claims 1
- OPQYOFWUFGEMRZ-UHFFFAOYSA-N tert-butyl 2,2-dimethylpropaneperoxoate Chemical compound CC(C)(C)OOC(=O)C(C)(C)C OPQYOFWUFGEMRZ-UHFFFAOYSA-N 0.000 claims 1
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 claims 1
- QEMXHQIAXOOASZ-UHFFFAOYSA-N tetramethylammonium Chemical compound C[N+](C)(C)C QEMXHQIAXOOASZ-UHFFFAOYSA-N 0.000 claims 1
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 claims 1
- 150000003609 titanium compounds Chemical class 0.000 claims 1
- AXKMJJJDGBIFDA-UHFFFAOYSA-J titanium(4+) 2,4,4-trimethyl-3-oxopentanoate Chemical compound CC(C(=O)[O-])C(=O)C(C)(C)C.[Ti+4].CC(C(=O)[O-])C(=O)C(C)(C)C.CC(C(=O)[O-])C(=O)C(C)(C)C.CC(C(=O)[O-])C(=O)C(C)(C)C AXKMJJJDGBIFDA-UHFFFAOYSA-J 0.000 claims 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 claims 1
- 230000007704 transition Effects 0.000 claims 1
- WOZZOSDBXABUFO-UHFFFAOYSA-N tri(butan-2-yloxy)alumane Chemical compound [Al+3].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-] WOZZOSDBXABUFO-UHFFFAOYSA-N 0.000 claims 1
- GIHPVQDFBJMUAO-UHFFFAOYSA-N tributoxy(ethyl)silane Chemical compound CCCCO[Si](CC)(OCCCC)OCCCC GIHPVQDFBJMUAO-UHFFFAOYSA-N 0.000 claims 1
- GYZQBXUDWTVJDF-UHFFFAOYSA-N tributoxy(methyl)silane Chemical compound CCCCO[Si](C)(OCCCC)OCCCC GYZQBXUDWTVJDF-UHFFFAOYSA-N 0.000 claims 1
- ZQJYXISBATZORI-UHFFFAOYSA-N tributyl(ethoxy)silane Chemical compound CCCC[Si](CCCC)(CCCC)OCC ZQJYXISBATZORI-UHFFFAOYSA-N 0.000 claims 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 claims 1
- WUMSTCDLAYQDNO-UHFFFAOYSA-N triethoxy(hexyl)silane Chemical compound CCCCCC[Si](OCC)(OCC)OCC WUMSTCDLAYQDNO-UHFFFAOYSA-N 0.000 claims 1
- BOVWGKNFLVZRDU-UHFFFAOYSA-N triethoxy(trifluoromethyl)silane Chemical compound CCO[Si](OCC)(OCC)C(F)(F)F BOVWGKNFLVZRDU-UHFFFAOYSA-N 0.000 claims 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 claims 1
- JLGNHOJUQFHYEZ-UHFFFAOYSA-N trimethoxy(3,3,3-trifluoropropyl)silane Chemical compound CO[Si](OC)(OC)CCC(F)(F)F JLGNHOJUQFHYEZ-UHFFFAOYSA-N 0.000 claims 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 claims 1
- XJMULQBEYKPFGJ-UHFFFAOYSA-N trimethyl-[2-[10-(2-trimethylsilylethynyl)anthracen-9-yl]ethynyl]silane Chemical compound C1=CC=C2C(C#C[Si](C)(C)C)=C(C=CC=C3)C3=C(C#C[Si](C)(C)C)C2=C1 XJMULQBEYKPFGJ-UHFFFAOYSA-N 0.000 claims 1
- OPSWAWSNPREEFQ-UHFFFAOYSA-K triphenoxyalumane Chemical compound [Al+3].[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1 OPSWAWSNPREEFQ-UHFFFAOYSA-K 0.000 claims 1
- PBRKCNMSBIMTKC-UHFFFAOYSA-N triphenyl-(10-triphenylsilylanthracen-9-yl)silane Chemical compound C1=CC=CC=C1[Si](C=1C2=CC=CC=C2C(=C2C=CC=CC2=1)[Si](C=1C=CC=CC=1)(C=1C=CC=CC=1)C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 PBRKCNMSBIMTKC-UHFFFAOYSA-N 0.000 claims 1
- 125000005580 triphenylene group Chemical group 0.000 claims 1
- OBROYCQXICMORW-UHFFFAOYSA-N tripropoxyalumane Chemical compound [Al+3].CCC[O-].CCC[O-].CCC[O-] OBROYCQXICMORW-UHFFFAOYSA-N 0.000 claims 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 claims 1
- 125000002221 trityl group Chemical group [H]C1=C([H])C([H])=C([H])C([H])=C1C([*])(C1=C(C(=C(C(=C1[H])[H])[H])[H])[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 claims 1
- 239000003643 water by type Substances 0.000 claims 1
- 230000004580 weight loss Effects 0.000 claims 1
- 230000002087 whitening effect Effects 0.000 claims 1
- 239000002023 wood Substances 0.000 claims 1
- 239000008096 xylene Substances 0.000 claims 1
- 150000003755 zirconium compounds Chemical class 0.000 claims 1
- DJIFSIBYHXVGSS-UHFFFAOYSA-J zirconium(4+);tetraphenoxide Chemical compound [Zr+4].[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1 DJIFSIBYHXVGSS-UHFFFAOYSA-J 0.000 claims 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 3
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/05—Alcohols; Metal alcoholates
- C08K5/057—Metal alcoholates
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0751—Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Medicinal Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Materials For Photolithography (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (2)
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JP2010196348 | 2010-09-02 | ||
PCT/JP2011/069515 WO2012029734A1 (ja) | 2010-09-02 | 2011-08-30 | 感光性組成物、それから形成された硬化膜および硬化膜を有する素子 |
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SG2013015979A SG188386A1 (en) | 2010-09-02 | 2011-08-30 | Photosensitive composition, cured film formed from same, and element having cured film |
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JP (1) | JP5765235B2 (ja) |
KR (1) | KR101842891B1 (ja) |
CN (1) | CN103180784B (ja) |
SG (1) | SG188386A1 (ja) |
TW (1) | TWI490649B (ja) |
WO (1) | WO2012029734A1 (ja) |
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KR20140058847A (ko) * | 2012-11-07 | 2014-05-15 | 롬엔드하스전자재료코리아유한회사 | 유무기 복합 실록산계 고분자 및 이를 포함하는 포지티브형 감광성 수지 조성물 |
TWI484293B (zh) * | 2012-11-07 | 2015-05-11 | Chi Mei Corp | 感光性樹脂組成物及其應用 |
JP6319082B2 (ja) * | 2013-02-12 | 2018-05-09 | 東レ株式会社 | 感光性樹脂組成物、それを熱硬化させてなる保護膜又は絶縁膜、それを用いたタッチパネル及びその製造方法 |
JP6295950B2 (ja) * | 2013-03-28 | 2018-03-20 | 東レ株式会社 | 感光性樹脂組成物、保護膜又は絶縁膜、タッチパネル及びその製造方法 |
KR102229661B1 (ko) * | 2013-10-21 | 2021-03-18 | 닛산 가가쿠 가부시키가이샤 | 포지티브형 감광성 수지 조성물 |
JP6468853B2 (ja) * | 2015-01-19 | 2019-02-13 | 東京応化工業株式会社 | ポジ型感光性樹脂組成物及び硬化膜 |
WO2016133023A1 (ja) * | 2015-02-19 | 2016-08-25 | 日本ゼオン株式会社 | 樹脂組成物、樹脂膜、及び電子部品 |
KR101881943B1 (ko) * | 2015-02-26 | 2018-07-26 | 삼성에스디아이 주식회사 | 포지티브형 감광성 수지 조성물, 감광성 수지막 및 이를 이용한 표시 소자 |
CN104789041B (zh) * | 2015-04-23 | 2017-02-01 | 湖北金三峡印务有限公司 | 锆螯合物改性的复合碱可溶乳液及其制备的高复溶性水性油墨及方法 |
KR20170053561A (ko) * | 2015-11-06 | 2017-05-16 | 롬엔드하스전자재료코리아유한회사 | 감광성 수지 조성물 및 이로부터 제조된 경화막 |
CN105301916A (zh) * | 2015-11-16 | 2016-02-03 | 北京中科紫鑫科技有限责任公司 | 一种光刻胶图案的形成方法 |
CN105301901A (zh) * | 2015-11-16 | 2016-02-03 | 北京中科紫鑫科技有限责任公司 | 一种正性光刻胶组合物的制备方法 |
CN105301904B (zh) * | 2015-11-16 | 2017-05-31 | 北京中科紫鑫科技有限责任公司 | 一种光刻胶组合物及其制备方法 |
CN105301903A (zh) * | 2015-11-16 | 2016-02-03 | 北京中科紫鑫科技有限责任公司 | 一种形成光刻胶组合物 |
KR102399714B1 (ko) * | 2016-09-30 | 2022-05-19 | 도레이 카부시키가이샤 | 감광성 수지 조성물, 도전성 패턴의 제조 방법, 기판, 터치 패널 및 디스플레이 |
JP6807226B2 (ja) * | 2016-12-09 | 2021-01-06 | 東京応化工業株式会社 | 基材上に平坦化膜又はマイクロレンズを形成するために用いられるエネルギー感受性組成物、硬化体の製造方法、硬化体、マイクロレンズの製造方法、及びcmosイメージセンサ |
CN111837075A (zh) * | 2018-03-23 | 2020-10-27 | 默克专利股份有限公司 | 负型超厚膜光刻胶 |
KR20190136248A (ko) * | 2018-05-30 | 2019-12-10 | 롬엔드하스전자재료코리아유한회사 | 포지티브형 감광성 수지 조성물 및 이를 이용한 경화막 |
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JP4401196B2 (ja) * | 2003-03-10 | 2010-01-20 | 富士フイルム株式会社 | 染料含有硬化性組成物、カラーフィルタ及びその製造方法 |
WO2005081065A1 (ja) * | 2004-02-20 | 2005-09-01 | Nippon Soda Co., Ltd. | 光感応性基体及びパターニング方法 |
JP4529616B2 (ja) * | 2004-09-24 | 2010-08-25 | Jsr株式会社 | 層間絶縁膜形成用感放射線性樹脂組成物および層間絶縁膜 |
CN101296999A (zh) * | 2005-10-28 | 2008-10-29 | 东丽株式会社 | 硅氧烷树脂组合物及其制造方法 |
JP4932414B2 (ja) * | 2005-11-01 | 2012-05-16 | 富士フイルム株式会社 | ネガ型染料含有感放射線性硬化性組成物、カラーフィルタおよびその製造方法 |
MY151139A (en) * | 2005-11-30 | 2014-04-30 | Sumitomo Bakelite Co | Positive photosensitive resin composition, and simiconductor device and display therewith |
JP4899844B2 (ja) * | 2006-12-07 | 2012-03-21 | 住友ベークライト株式会社 | ポジ型感光性樹脂組成物、硬化膜、保護膜、絶縁膜およびそれを用いた半導体装置、表示体装置。 |
KR101428718B1 (ko) * | 2007-02-02 | 2014-09-24 | 삼성디스플레이 주식회사 | 감광성 유기물, 이의 도포 방법, 이를 이용한 유기막 패턴형성 방법, 이로써 제조되는 표시 장치 |
JP5003375B2 (ja) * | 2007-09-20 | 2012-08-15 | Jsr株式会社 | 感放射線性樹脂組成物、層間絶縁膜およびマイクロレンズ、ならびにそれらの製造方法 |
WO2009101885A1 (ja) * | 2008-02-14 | 2009-08-20 | Kyowa Hakko Chemical Co., Ltd. | ポリイミド |
JP2010085758A (ja) * | 2008-09-30 | 2010-04-15 | Fujifilm Corp | ジピロメテン系化合物及びその互変異性体、着色硬化性組成物、カラーフィルタ及びその製造方法 |
JP5540632B2 (ja) * | 2008-12-25 | 2014-07-02 | 東レ株式会社 | 感光性組成物、それから形成された硬化膜、および硬化膜を有する素子 |
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2011
- 2011-08-30 KR KR1020137006189A patent/KR101842891B1/ko active IP Right Grant
- 2011-08-30 CN CN201180052802.1A patent/CN103180784B/zh active Active
- 2011-08-30 SG SG2013015979A patent/SG188386A1/en unknown
- 2011-08-30 WO PCT/JP2011/069515 patent/WO2012029734A1/ja active Application Filing
- 2011-08-30 JP JP2011551347A patent/JP5765235B2/ja active Active
- 2011-08-31 TW TW100131313A patent/TWI490649B/zh active
Also Published As
Publication number | Publication date |
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JPWO2012029734A1 (ja) | 2013-10-28 |
KR101842891B1 (ko) | 2018-05-14 |
TW201211697A (en) | 2012-03-16 |
CN103180784B (zh) | 2016-01-20 |
TWI490649B (zh) | 2015-07-01 |
KR20130108289A (ko) | 2013-10-02 |
WO2012029734A1 (ja) | 2012-03-08 |
JP5765235B2 (ja) | 2015-08-19 |
CN103180784A (zh) | 2013-06-26 |
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