SE8405100L - Kapacitiv fuktsensor och forfarande for dess framstellning - Google Patents

Kapacitiv fuktsensor och forfarande for dess framstellning

Info

Publication number
SE8405100L
SE8405100L SE8405100A SE8405100A SE8405100L SE 8405100 L SE8405100 L SE 8405100L SE 8405100 A SE8405100 A SE 8405100A SE 8405100 A SE8405100 A SE 8405100A SE 8405100 L SE8405100 L SE 8405100L
Authority
SE
Sweden
Prior art keywords
moisture
structured
film
base electrode
polyimide
Prior art date
Application number
SE8405100A
Other languages
Unknown language ( )
English (en)
Swedish (sv)
Other versions
SE8405100D0 (sv
Inventor
F Hegner
Original Assignee
Endress Hauser Gmbh Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress Hauser Gmbh Co filed Critical Endress Hauser Gmbh Co
Publication of SE8405100D0 publication Critical patent/SE8405100D0/xx
Publication of SE8405100L publication Critical patent/SE8405100L/

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
SE8405100A 1983-10-28 1984-10-11 Kapacitiv fuktsensor och forfarande for dess framstellning SE8405100L (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833339276 DE3339276A1 (de) 1983-10-28 1983-10-28 Kapazitiver feuchtefuehler und verfahren zu seiner herstellung

Publications (2)

Publication Number Publication Date
SE8405100D0 SE8405100D0 (sv) 1984-10-11
SE8405100L true SE8405100L (sv) 1985-05-30

Family

ID=6213031

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8405100A SE8405100L (sv) 1983-10-28 1984-10-11 Kapacitiv fuktsensor och forfarande for dess framstellning

Country Status (8)

Country Link
JP (1) JPS60166854A (it)
DE (1) DE3339276A1 (it)
FI (1) FI844116L (it)
FR (1) FR2554237A1 (it)
GB (1) GB2149922A (it)
IT (1) IT1177031B (it)
NL (1) NL8403264A (it)
SE (1) SE8405100L (it)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI65674C (fi) * 1982-12-21 1984-06-11 Vaisala Oy Kapacitiv fuktighetsgivare och foerfarande foer framstaellningdaerav
JPS6486053A (en) * 1987-09-29 1989-03-30 Toshiba Corp Sensitive element
JPH0786492B2 (ja) * 1987-12-15 1995-09-20 三菱化学株式会社 湿度センサ
JPH0786489B2 (ja) * 1987-12-15 1995-09-20 三菱化学株式会社 結露センサ
JPH0786491B2 (ja) * 1987-12-15 1995-09-20 三菱化学株式会社 湿度センサ
FI901655A0 (fi) * 1989-05-02 1990-04-02 Siemens Ag Kapacitiv fuktsensor.
DE3919864A1 (de) * 1989-06-19 1990-12-20 Testoterm Mestechnik Gmbh & Co Kapazitiver feuchtesensor
WO1991003735A1 (de) * 1989-08-29 1991-03-21 E + E Elektronik Gesellschaft M.B.H. Verfahren zur herstellung eines feuchtesensors
US4965698A (en) * 1989-09-27 1990-10-23 Johnson Service Company Capacitance humidity sensor
DE4438892C2 (de) * 1994-10-31 1997-09-04 Testo Gmbh & Co Abgleichbarer kapazitiver Sensor und Verfahren zum Abgleichen eines solchen Sensors
WO2000025120A1 (de) * 1998-10-22 2000-05-04 Marco Koch Kapazitiver feuchtigkeitssensor sowie verfahren zu dessen herstellung
DE19917717C2 (de) * 1999-04-20 2002-10-17 Joerg Mueller Kapazitiver Feuchtesensor
US6690569B1 (en) * 1999-12-08 2004-02-10 Sensirion A/G Capacitive sensor
JP2002243689A (ja) 2001-02-15 2002-08-28 Denso Corp 容量式湿度センサおよびその製造方法
US6580600B2 (en) 2001-02-20 2003-06-17 Nippon Soken, Inc. Capacitance type humidity sensor and manufacturing method of the same
JP2002243690A (ja) * 2001-02-20 2002-08-28 Denso Corp 容量式湿度センサおよびその製造方法
JP2003004683A (ja) 2001-06-15 2003-01-08 Denso Corp 容量式湿度センサ
JP4501320B2 (ja) 2001-07-16 2010-07-14 株式会社デンソー 容量式湿度センサ
JP2006019589A (ja) * 2004-07-02 2006-01-19 Denso Corp 半導体装置
DE102009047201A1 (de) 2009-11-26 2011-06-01 Hagen, Gunter, Dipl.-Ing. Verwendung von metallorganischem Gerüstmaterial zur Herstellung von feuchteempfindlichen Schichten für Sensoren
US9063067B1 (en) 2010-11-17 2015-06-23 Alvin P. Schmitt Moisture sensing devices
JP7120519B2 (ja) * 2018-07-12 2022-08-17 ミネベアミツミ株式会社 湿度センサ及びその製造方法
JP7193203B2 (ja) * 2018-11-16 2022-12-20 ミネベアミツミ株式会社 検出装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI48229C (fi) * 1972-10-12 1974-07-10 Vaisala Oy Kapasitiivinen kosteusanturi ja sen valmistumenetelmä.
DE2848034A1 (de) * 1978-11-06 1980-05-14 Siemens Ag Kapazitiver feuchtefuehler
FR2486656A1 (fr) * 1980-07-09 1982-01-15 Commissariat Energie Atomique Hygrometre capacitif
FI65674C (fi) * 1982-12-21 1984-06-11 Vaisala Oy Kapacitiv fuktighetsgivare och foerfarande foer framstaellningdaerav

Also Published As

Publication number Publication date
DE3339276A1 (de) 1985-05-09
FI844116L (fi) 1985-04-29
IT8423303A1 (it) 1986-04-25
IT1177031B (it) 1987-08-26
FR2554237A1 (fr) 1985-05-03
GB8425691D0 (en) 1984-11-14
IT8423303A0 (it) 1984-10-25
SE8405100D0 (sv) 1984-10-11
GB2149922A (en) 1985-06-19
NL8403264A (nl) 1985-05-17
FI844116A0 (fi) 1984-10-18
JPS60166854A (ja) 1985-08-30

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