JPS6480845A - Catalyst carrying method for oxygen sensor - Google Patents
Catalyst carrying method for oxygen sensorInfo
- Publication number
- JPS6480845A JPS6480845A JP23946187A JP23946187A JPS6480845A JP S6480845 A JPS6480845 A JP S6480845A JP 23946187 A JP23946187 A JP 23946187A JP 23946187 A JP23946187 A JP 23946187A JP S6480845 A JPS6480845 A JP S6480845A
- Authority
- JP
- Japan
- Prior art keywords
- insulating substrate
- catalyst
- semiconductor layer
- oxide semiconductor
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To reduce variance in catalyst carrying amount by adding dropwise a solution which contains a catalyst to an oxide semiconductor layer formed on a substrate and drying it. CONSTITUTION:An insulating substrate 1c which is provided with a heater 2 and in the same shape and of the same size with an insulating substrate 1b which has two electrodes 3a and 3b at an end part is superposed on the insulating substrate 1b, and further covered with an insulating substrate 1a. Then the oxide semiconductor layer 4 is provided to the end part of the insulating substrate 1b where the electrodes 3a and 3b are provided so that the electrodes 3a and 3b are covered; and they are baked integrally. Then the catalyst solution 5 which contains Pt as the catalyst is added dropwise to the oxide semiconductor layer 4 at the end part of the united insulating substrate 1. Then the catalyst solution 5 spreads properly over the entire surface of the oxide semiconductor layer 4. Then the insulating substrate 1 is put in a dryer and the catalyst solution is dried to obtain the oxygen sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23946187A JPS6480845A (en) | 1987-09-24 | 1987-09-24 | Catalyst carrying method for oxygen sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23946187A JPS6480845A (en) | 1987-09-24 | 1987-09-24 | Catalyst carrying method for oxygen sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6480845A true JPS6480845A (en) | 1989-03-27 |
Family
ID=17045105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23946187A Pending JPS6480845A (en) | 1987-09-24 | 1987-09-24 | Catalyst carrying method for oxygen sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6480845A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015200644A (en) * | 2014-04-07 | 2015-11-12 | イノチップ テクノロジー シーオー エルティディー | Sensor device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS625166A (en) * | 1985-07-02 | 1987-01-12 | Ngk Spark Plug Co Ltd | Gas sensitive element |
| JPS62217151A (en) * | 1986-03-19 | 1987-09-24 | Ngk Spark Plug Co Ltd | Thick film type gas sensitive body element |
| JPS63124952A (en) * | 1986-11-14 | 1988-05-28 | Ngk Spark Plug Co Ltd | Gas sensitive body element |
| JPS63313048A (en) * | 1987-06-15 | 1988-12-21 | Figaro Eng Inc | Gas sensor |
-
1987
- 1987-09-24 JP JP23946187A patent/JPS6480845A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS625166A (en) * | 1985-07-02 | 1987-01-12 | Ngk Spark Plug Co Ltd | Gas sensitive element |
| JPS62217151A (en) * | 1986-03-19 | 1987-09-24 | Ngk Spark Plug Co Ltd | Thick film type gas sensitive body element |
| JPS63124952A (en) * | 1986-11-14 | 1988-05-28 | Ngk Spark Plug Co Ltd | Gas sensitive body element |
| JPS63313048A (en) * | 1987-06-15 | 1988-12-21 | Figaro Eng Inc | Gas sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015200644A (en) * | 2014-04-07 | 2015-11-12 | イノチップ テクノロジー シーオー エルティディー | Sensor device |
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