JPS5618751A - Gas detector - Google Patents
Gas detectorInfo
- Publication number
- JPS5618751A JPS5618751A JP9363979A JP9363979A JPS5618751A JP S5618751 A JPS5618751 A JP S5618751A JP 9363979 A JP9363979 A JP 9363979A JP 9363979 A JP9363979 A JP 9363979A JP S5618751 A JPS5618751 A JP S5618751A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- substance
- constitution
- cavity
- heating units
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To permit the gas-sensing element of a gas detector to be readily incorporated in a bridge circuit and to simplify the constitution of the element by forming a cavity in the substrate lower layer, and coating one of two heating units provided on the bridge portions on the cavity with a substance which is inert on a gas to be detected.
CONSTITUTION: A portion of a wafer 1 under the upper layer 10 of a heat resisting and electrically insulative substance such as silicon oxide is removed to form a cavity 2, above which two bridge portions 10a and 10b are provided adjacently to each other in the upper layer 10. Then terminals 13a and 13b and heating units 13a' and 13b' are formed of conductive substance on the bridge portions 10a and 10b respectively, and one of the heating units 13a' and 13b' is coated with a substance inert to a gas to be detected such as a SiO2 film 14. This permits the element to be readily incorporated in a bridge circuit, and enables the constitution of the element to be simplified.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9363979A JPS5618751A (en) | 1979-07-25 | 1979-07-25 | Gas detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9363979A JPS5618751A (en) | 1979-07-25 | 1979-07-25 | Gas detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5618751A true JPS5618751A (en) | 1981-02-21 |
JPS6122899B2 JPS6122899B2 (en) | 1986-06-03 |
Family
ID=14087915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9363979A Granted JPS5618751A (en) | 1979-07-25 | 1979-07-25 | Gas detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5618751A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050419A (en) * | 1983-08-26 | 1985-03-20 | イノバス | Thermal mass flowmeter |
JPS6295454A (en) * | 1985-10-22 | 1987-05-01 | Nippon Telegr & Teleph Corp <Ntt> | Micro gas sensor and its production |
JPH01299452A (en) * | 1988-05-27 | 1989-12-04 | Ricoh Co Ltd | Four-terminal detecting type gas detector |
US5165292A (en) * | 1985-12-09 | 1992-11-24 | Ottosensors Corporation | Channel Device and tube connection and their fabrication procedures |
-
1979
- 1979-07-25 JP JP9363979A patent/JPS5618751A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050419A (en) * | 1983-08-26 | 1985-03-20 | イノバス | Thermal mass flowmeter |
JPH0342616B2 (en) * | 1983-08-26 | 1991-06-27 | ||
JPS6295454A (en) * | 1985-10-22 | 1987-05-01 | Nippon Telegr & Teleph Corp <Ntt> | Micro gas sensor and its production |
US5165292A (en) * | 1985-12-09 | 1992-11-24 | Ottosensors Corporation | Channel Device and tube connection and their fabrication procedures |
JPH01299452A (en) * | 1988-05-27 | 1989-12-04 | Ricoh Co Ltd | Four-terminal detecting type gas detector |
Also Published As
Publication number | Publication date |
---|---|
JPS6122899B2 (en) | 1986-06-03 |
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