JPS5618751A - Gas detector - Google Patents

Gas detector

Info

Publication number
JPS5618751A
JPS5618751A JP9363979A JP9363979A JPS5618751A JP S5618751 A JPS5618751 A JP S5618751A JP 9363979 A JP9363979 A JP 9363979A JP 9363979 A JP9363979 A JP 9363979A JP S5618751 A JPS5618751 A JP S5618751A
Authority
JP
Japan
Prior art keywords
gas
substance
constitution
cavity
heating units
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9363979A
Other languages
Japanese (ja)
Other versions
JPS6122899B2 (en
Inventor
Mitsuteru Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP9363979A priority Critical patent/JPS5618751A/en
Publication of JPS5618751A publication Critical patent/JPS5618751A/en
Publication of JPS6122899B2 publication Critical patent/JPS6122899B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To permit the gas-sensing element of a gas detector to be readily incorporated in a bridge circuit and to simplify the constitution of the element by forming a cavity in the substrate lower layer, and coating one of two heating units provided on the bridge portions on the cavity with a substance which is inert on a gas to be detected.
CONSTITUTION: A portion of a wafer 1 under the upper layer 10 of a heat resisting and electrically insulative substance such as silicon oxide is removed to form a cavity 2, above which two bridge portions 10a and 10b are provided adjacently to each other in the upper layer 10. Then terminals 13a and 13b and heating units 13a' and 13b' are formed of conductive substance on the bridge portions 10a and 10b respectively, and one of the heating units 13a' and 13b' is coated with a substance inert to a gas to be detected such as a SiO2 film 14. This permits the element to be readily incorporated in a bridge circuit, and enables the constitution of the element to be simplified.
COPYRIGHT: (C)1981,JPO&Japio
JP9363979A 1979-07-25 1979-07-25 Gas detector Granted JPS5618751A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9363979A JPS5618751A (en) 1979-07-25 1979-07-25 Gas detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9363979A JPS5618751A (en) 1979-07-25 1979-07-25 Gas detector

Publications (2)

Publication Number Publication Date
JPS5618751A true JPS5618751A (en) 1981-02-21
JPS6122899B2 JPS6122899B2 (en) 1986-06-03

Family

ID=14087915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9363979A Granted JPS5618751A (en) 1979-07-25 1979-07-25 Gas detector

Country Status (1)

Country Link
JP (1) JPS5618751A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050419A (en) * 1983-08-26 1985-03-20 イノバス Thermal mass flowmeter
JPS6295454A (en) * 1985-10-22 1987-05-01 Nippon Telegr & Teleph Corp <Ntt> Micro gas sensor and its production
JPH01299452A (en) * 1988-05-27 1989-12-04 Ricoh Co Ltd Four-terminal detecting type gas detector
US5165292A (en) * 1985-12-09 1992-11-24 Ottosensors Corporation Channel Device and tube connection and their fabrication procedures

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050419A (en) * 1983-08-26 1985-03-20 イノバス Thermal mass flowmeter
JPH0342616B2 (en) * 1983-08-26 1991-06-27
JPS6295454A (en) * 1985-10-22 1987-05-01 Nippon Telegr & Teleph Corp <Ntt> Micro gas sensor and its production
US5165292A (en) * 1985-12-09 1992-11-24 Ottosensors Corporation Channel Device and tube connection and their fabrication procedures
JPH01299452A (en) * 1988-05-27 1989-12-04 Ricoh Co Ltd Four-terminal detecting type gas detector

Also Published As

Publication number Publication date
JPS6122899B2 (en) 1986-06-03

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