JPS55129741A - Detector for external atmosphere - Google Patents
Detector for external atmosphereInfo
- Publication number
- JPS55129741A JPS55129741A JP3692079A JP3692079A JPS55129741A JP S55129741 A JPS55129741 A JP S55129741A JP 3692079 A JP3692079 A JP 3692079A JP 3692079 A JP3692079 A JP 3692079A JP S55129741 A JPS55129741 A JP S55129741A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- insulation layer
- transfer
- electrodes
- charge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To enable to use the gas sensing material of high resistance without hindrance and to enable small size and low power consumption, by the constitution that the film of which dielectric factor or conductivity is changed with the gas or vapor concentration in the atmosphere is inserted between the transfer electrode of CTD and insulation layer.
CONSTITUTION: The charge injection electrode 1 and the charge pickup electrode 4 are provided on one semiconductor substrate 2 respectively via the diffusion layers 3 and 5, and four or more (e.g., four) transfer electrode are provided on the semiconductor substrate 2 between the both electrodes 1 and 4 via the insulation layer 12, and the charge injected from the injection electrode 1 is transferred to the pickup electrode 4. Although the second and fourth transfer electrodes, 7, 9 are directly provided on the insulation layer 12, the first and third transfer electrodes 6, 8 are provided on the insulation layer 12, by further clipping the atmosphere sensing material 11, and the transfer electrodes 6 and 7, and 8 and 9 are connected with the pattern wiring 10 respectively.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3692079A JPS55129741A (en) | 1979-03-30 | 1979-03-30 | Detector for external atmosphere |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3692079A JPS55129741A (en) | 1979-03-30 | 1979-03-30 | Detector for external atmosphere |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55129741A true JPS55129741A (en) | 1980-10-07 |
JPS6120811B2 JPS6120811B2 (en) | 1986-05-23 |
Family
ID=12483189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3692079A Granted JPS55129741A (en) | 1979-03-30 | 1979-03-30 | Detector for external atmosphere |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55129741A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61223644A (en) * | 1985-03-29 | 1986-10-04 | Nohmi Bosai Kogyo Co Ltd | Gaseous hydrogen detecting element and its production |
JPS61223642A (en) * | 1985-03-29 | 1986-10-04 | Nohmi Bosai Kogyo Co Ltd | Gaseous hydrogen detecting element and its production |
JPS61223643A (en) * | 1985-03-29 | 1986-10-04 | Nohmi Bosai Kogyo Co Ltd | Gaseous hydrogen detecting element and its production |
JPS6269157A (en) * | 1985-09-21 | 1987-03-30 | Shinkosumosu Denki Kk | Hydrogen sulfide selective sensor |
JP2009236502A (en) * | 2008-03-25 | 2009-10-15 | Toyohashi Univ Of Technology | Chemical or physical phenomenon detection device, and control method therefor |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0671624A (en) * | 1992-07-30 | 1994-03-15 | Mitsubishi Materials Corp | Concrete product with artificial stone and its production |
-
1979
- 1979-03-30 JP JP3692079A patent/JPS55129741A/en active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61223644A (en) * | 1985-03-29 | 1986-10-04 | Nohmi Bosai Kogyo Co Ltd | Gaseous hydrogen detecting element and its production |
JPS61223642A (en) * | 1985-03-29 | 1986-10-04 | Nohmi Bosai Kogyo Co Ltd | Gaseous hydrogen detecting element and its production |
JPS61223643A (en) * | 1985-03-29 | 1986-10-04 | Nohmi Bosai Kogyo Co Ltd | Gaseous hydrogen detecting element and its production |
JPH0473544B2 (en) * | 1985-03-29 | 1992-11-24 | ||
JPH0473543B2 (en) * | 1985-03-29 | 1992-11-24 | ||
JPH0473545B2 (en) * | 1985-03-29 | 1992-11-24 | ||
JPS6269157A (en) * | 1985-09-21 | 1987-03-30 | Shinkosumosu Denki Kk | Hydrogen sulfide selective sensor |
JPH0438310B2 (en) * | 1985-09-21 | 1992-06-24 | ||
JP2009236502A (en) * | 2008-03-25 | 2009-10-15 | Toyohashi Univ Of Technology | Chemical or physical phenomenon detection device, and control method therefor |
Also Published As
Publication number | Publication date |
---|---|
JPS6120811B2 (en) | 1986-05-23 |
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