JPS55129741A - Detector for external atmosphere - Google Patents

Detector for external atmosphere

Info

Publication number
JPS55129741A
JPS55129741A JP3692079A JP3692079A JPS55129741A JP S55129741 A JPS55129741 A JP S55129741A JP 3692079 A JP3692079 A JP 3692079A JP 3692079 A JP3692079 A JP 3692079A JP S55129741 A JPS55129741 A JP S55129741A
Authority
JP
Japan
Prior art keywords
electrode
insulation layer
transfer
electrodes
charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3692079A
Other languages
Japanese (ja)
Other versions
JPS6120811B2 (en
Inventor
Youzou Kouno
Shintaro Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP3692079A priority Critical patent/JPS55129741A/en
Publication of JPS55129741A publication Critical patent/JPS55129741A/en
Publication of JPS6120811B2 publication Critical patent/JPS6120811B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To enable to use the gas sensing material of high resistance without hindrance and to enable small size and low power consumption, by the constitution that the film of which dielectric factor or conductivity is changed with the gas or vapor concentration in the atmosphere is inserted between the transfer electrode of CTD and insulation layer.
CONSTITUTION: The charge injection electrode 1 and the charge pickup electrode 4 are provided on one semiconductor substrate 2 respectively via the diffusion layers 3 and 5, and four or more (e.g., four) transfer electrode are provided on the semiconductor substrate 2 between the both electrodes 1 and 4 via the insulation layer 12, and the charge injected from the injection electrode 1 is transferred to the pickup electrode 4. Although the second and fourth transfer electrodes, 7, 9 are directly provided on the insulation layer 12, the first and third transfer electrodes 6, 8 are provided on the insulation layer 12, by further clipping the atmosphere sensing material 11, and the transfer electrodes 6 and 7, and 8 and 9 are connected with the pattern wiring 10 respectively.
COPYRIGHT: (C)1980,JPO&Japio
JP3692079A 1979-03-30 1979-03-30 Detector for external atmosphere Granted JPS55129741A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3692079A JPS55129741A (en) 1979-03-30 1979-03-30 Detector for external atmosphere

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3692079A JPS55129741A (en) 1979-03-30 1979-03-30 Detector for external atmosphere

Publications (2)

Publication Number Publication Date
JPS55129741A true JPS55129741A (en) 1980-10-07
JPS6120811B2 JPS6120811B2 (en) 1986-05-23

Family

ID=12483189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3692079A Granted JPS55129741A (en) 1979-03-30 1979-03-30 Detector for external atmosphere

Country Status (1)

Country Link
JP (1) JPS55129741A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61223644A (en) * 1985-03-29 1986-10-04 Nohmi Bosai Kogyo Co Ltd Gaseous hydrogen detecting element and its production
JPS61223642A (en) * 1985-03-29 1986-10-04 Nohmi Bosai Kogyo Co Ltd Gaseous hydrogen detecting element and its production
JPS61223643A (en) * 1985-03-29 1986-10-04 Nohmi Bosai Kogyo Co Ltd Gaseous hydrogen detecting element and its production
JPS6269157A (en) * 1985-09-21 1987-03-30 Shinkosumosu Denki Kk Hydrogen sulfide selective sensor
JP2009236502A (en) * 2008-03-25 2009-10-15 Toyohashi Univ Of Technology Chemical or physical phenomenon detection device, and control method therefor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0671624A (en) * 1992-07-30 1994-03-15 Mitsubishi Materials Corp Concrete product with artificial stone and its production

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61223644A (en) * 1985-03-29 1986-10-04 Nohmi Bosai Kogyo Co Ltd Gaseous hydrogen detecting element and its production
JPS61223642A (en) * 1985-03-29 1986-10-04 Nohmi Bosai Kogyo Co Ltd Gaseous hydrogen detecting element and its production
JPS61223643A (en) * 1985-03-29 1986-10-04 Nohmi Bosai Kogyo Co Ltd Gaseous hydrogen detecting element and its production
JPH0473544B2 (en) * 1985-03-29 1992-11-24
JPH0473543B2 (en) * 1985-03-29 1992-11-24
JPH0473545B2 (en) * 1985-03-29 1992-11-24
JPS6269157A (en) * 1985-09-21 1987-03-30 Shinkosumosu Denki Kk Hydrogen sulfide selective sensor
JPH0438310B2 (en) * 1985-09-21 1992-06-24
JP2009236502A (en) * 2008-03-25 2009-10-15 Toyohashi Univ Of Technology Chemical or physical phenomenon detection device, and control method therefor

Also Published As

Publication number Publication date
JPS6120811B2 (en) 1986-05-23

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