JPS55129740A - Detector for external atmosphere - Google Patents
Detector for external atmosphereInfo
- Publication number
- JPS55129740A JPS55129740A JP3691979A JP3691979A JPS55129740A JP S55129740 A JPS55129740 A JP S55129740A JP 3691979 A JP3691979 A JP 3691979A JP 3691979 A JP3691979 A JP 3691979A JP S55129740 A JPS55129740 A JP S55129740A
- Authority
- JP
- Japan
- Prior art keywords
- charge
- electrode
- transfer
- changed
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE: To enable to use the gas sensing material even with high resistance without hindrance and to enable small size and low power consumption, with the constitution that the film of which dielectric factor or conductivity is changed with the gas or vapor concentration in the atmosphere is inserted between the transfer electrode of CTD and insulation layer.
CONSTITUTION: The charge injection electrode 1 and the charge pickup electrode 4 are provided on one semiconductor substrate 2 via the diffusion layers 3 and 5, two or more transfer electrodes 6, 7 are provided between the both electrodes 1 and 4 via the insulation layer 9, and the charge injected from the injection electrode 1 is transferred to the pickup electrode 4. Under the injection electrode side of the both transfer electrodes 6 and 7, the atmosphere sensing material 8 in which the dielectric factor or conductivity is changed with the effect of external atmosphere and the amount of charge transferred with the transfer electrode is changed is provided between the insulation layers 9 so that the charge transfer path of semiconductor is substantially crossed.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3691979A JPS55129740A (en) | 1979-03-30 | 1979-03-30 | Detector for external atmosphere |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3691979A JPS55129740A (en) | 1979-03-30 | 1979-03-30 | Detector for external atmosphere |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55129740A true JPS55129740A (en) | 1980-10-07 |
JPS6120810B2 JPS6120810B2 (en) | 1986-05-23 |
Family
ID=12483163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3691979A Granted JPS55129740A (en) | 1979-03-30 | 1979-03-30 | Detector for external atmosphere |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55129740A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009236502A (en) * | 2008-03-25 | 2009-10-15 | Toyohashi Univ Of Technology | Chemical or physical phenomenon detection device, and control method therefor |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6342710U (en) * | 1986-09-05 | 1988-03-22 | ||
JPH0596226U (en) * | 1992-06-01 | 1993-12-27 | 日本建鐵株式会社 | Water-stop structure of grit curtain wall |
AU747878B2 (en) | 1998-04-09 | 2002-05-30 | California Institute Of Technology | Electronic techniques for analyte detection |
JP2001244454A (en) * | 2000-02-29 | 2001-09-07 | Horiba Ltd | Molecule recognition type electrochemical ccd device |
-
1979
- 1979-03-30 JP JP3691979A patent/JPS55129740A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009236502A (en) * | 2008-03-25 | 2009-10-15 | Toyohashi Univ Of Technology | Chemical or physical phenomenon detection device, and control method therefor |
Also Published As
Publication number | Publication date |
---|---|
JPS6120810B2 (en) | 1986-05-23 |
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