JPS55129740A - Detector for external atmosphere - Google Patents

Detector for external atmosphere

Info

Publication number
JPS55129740A
JPS55129740A JP3691979A JP3691979A JPS55129740A JP S55129740 A JPS55129740 A JP S55129740A JP 3691979 A JP3691979 A JP 3691979A JP 3691979 A JP3691979 A JP 3691979A JP S55129740 A JPS55129740 A JP S55129740A
Authority
JP
Japan
Prior art keywords
charge
electrode
transfer
changed
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3691979A
Other languages
Japanese (ja)
Other versions
JPS6120810B2 (en
Inventor
Youzou Kouno
Shintaro Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP3691979A priority Critical patent/JPS55129740A/en
Publication of JPS55129740A publication Critical patent/JPS55129740A/en
Publication of JPS6120810B2 publication Critical patent/JPS6120810B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE: To enable to use the gas sensing material even with high resistance without hindrance and to enable small size and low power consumption, with the constitution that the film of which dielectric factor or conductivity is changed with the gas or vapor concentration in the atmosphere is inserted between the transfer electrode of CTD and insulation layer.
CONSTITUTION: The charge injection electrode 1 and the charge pickup electrode 4 are provided on one semiconductor substrate 2 via the diffusion layers 3 and 5, two or more transfer electrodes 6, 7 are provided between the both electrodes 1 and 4 via the insulation layer 9, and the charge injected from the injection electrode 1 is transferred to the pickup electrode 4. Under the injection electrode side of the both transfer electrodes 6 and 7, the atmosphere sensing material 8 in which the dielectric factor or conductivity is changed with the effect of external atmosphere and the amount of charge transferred with the transfer electrode is changed is provided between the insulation layers 9 so that the charge transfer path of semiconductor is substantially crossed.
COPYRIGHT: (C)1980,JPO&Japio
JP3691979A 1979-03-30 1979-03-30 Detector for external atmosphere Granted JPS55129740A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3691979A JPS55129740A (en) 1979-03-30 1979-03-30 Detector for external atmosphere

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3691979A JPS55129740A (en) 1979-03-30 1979-03-30 Detector for external atmosphere

Publications (2)

Publication Number Publication Date
JPS55129740A true JPS55129740A (en) 1980-10-07
JPS6120810B2 JPS6120810B2 (en) 1986-05-23

Family

ID=12483163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3691979A Granted JPS55129740A (en) 1979-03-30 1979-03-30 Detector for external atmosphere

Country Status (1)

Country Link
JP (1) JPS55129740A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009236502A (en) * 2008-03-25 2009-10-15 Toyohashi Univ Of Technology Chemical or physical phenomenon detection device, and control method therefor

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6342710U (en) * 1986-09-05 1988-03-22
JPH0596226U (en) * 1992-06-01 1993-12-27 日本建鐵株式会社 Water-stop structure of grit curtain wall
AU747878B2 (en) 1998-04-09 2002-05-30 California Institute Of Technology Electronic techniques for analyte detection
JP2001244454A (en) * 2000-02-29 2001-09-07 Horiba Ltd Molecule recognition type electrochemical ccd device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009236502A (en) * 2008-03-25 2009-10-15 Toyohashi Univ Of Technology Chemical or physical phenomenon detection device, and control method therefor

Also Published As

Publication number Publication date
JPS6120810B2 (en) 1986-05-23

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