SE8405100L - Kapacitiv fuktsensor och forfarande for dess framstellning - Google Patents
Kapacitiv fuktsensor och forfarande for dess framstellningInfo
- Publication number
- SE8405100L SE8405100L SE8405100A SE8405100A SE8405100L SE 8405100 L SE8405100 L SE 8405100L SE 8405100 A SE8405100 A SE 8405100A SE 8405100 A SE8405100 A SE 8405100A SE 8405100 L SE8405100 L SE 8405100L
- Authority
- SE
- Sweden
- Prior art keywords
- moisture
- structured
- film
- base electrode
- polyimide
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19833339276 DE3339276A1 (de) | 1983-10-28 | 1983-10-28 | Kapazitiver feuchtefuehler und verfahren zu seiner herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
SE8405100D0 SE8405100D0 (sv) | 1984-10-11 |
SE8405100L true SE8405100L (sv) | 1985-05-30 |
Family
ID=6213031
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8405100A SE8405100L (sv) | 1983-10-28 | 1984-10-11 | Kapacitiv fuktsensor och forfarande for dess framstellning |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS60166854A (sv) |
DE (1) | DE3339276A1 (sv) |
FI (1) | FI844116L (sv) |
FR (1) | FR2554237A1 (sv) |
GB (1) | GB2149922A (sv) |
IT (1) | IT1177031B (sv) |
NL (1) | NL8403264A (sv) |
SE (1) | SE8405100L (sv) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI65674C (fi) * | 1982-12-21 | 1984-06-11 | Vaisala Oy | Kapacitiv fuktighetsgivare och foerfarande foer framstaellningdaerav |
JPS6486053A (en) * | 1987-09-29 | 1989-03-30 | Toshiba Corp | Sensitive element |
JPH0786491B2 (ja) * | 1987-12-15 | 1995-09-20 | 三菱化学株式会社 | 湿度センサ |
JPH0786492B2 (ja) * | 1987-12-15 | 1995-09-20 | 三菱化学株式会社 | 湿度センサ |
JPH0786489B2 (ja) * | 1987-12-15 | 1995-09-20 | 三菱化学株式会社 | 結露センサ |
FI901655A0 (fi) * | 1989-05-02 | 1990-04-02 | Siemens Ag | Kapacitiv fuktsensor. |
DE3919864A1 (de) * | 1989-06-19 | 1990-12-20 | Testoterm Mestechnik Gmbh & Co | Kapazitiver feuchtesensor |
WO1991003735A1 (de) * | 1989-08-29 | 1991-03-21 | E + E Elektronik Gesellschaft M.B.H. | Verfahren zur herstellung eines feuchtesensors |
US4965698A (en) * | 1989-09-27 | 1990-10-23 | Johnson Service Company | Capacitance humidity sensor |
DE4438892C2 (de) * | 1994-10-31 | 1997-09-04 | Testo Gmbh & Co | Abgleichbarer kapazitiver Sensor und Verfahren zum Abgleichen eines solchen Sensors |
WO2000025120A1 (de) * | 1998-10-22 | 2000-05-04 | Marco Koch | Kapazitiver feuchtigkeitssensor sowie verfahren zu dessen herstellung |
DE19917717C2 (de) * | 1999-04-20 | 2002-10-17 | Joerg Mueller | Kapazitiver Feuchtesensor |
ATE310950T1 (de) * | 1999-12-08 | 2005-12-15 | Sensirion Ag | Kapazitiver sensor |
JP2002243689A (ja) | 2001-02-15 | 2002-08-28 | Denso Corp | 容量式湿度センサおよびその製造方法 |
US6580600B2 (en) | 2001-02-20 | 2003-06-17 | Nippon Soken, Inc. | Capacitance type humidity sensor and manufacturing method of the same |
JP2002243690A (ja) * | 2001-02-20 | 2002-08-28 | Denso Corp | 容量式湿度センサおよびその製造方法 |
JP2003004683A (ja) | 2001-06-15 | 2003-01-08 | Denso Corp | 容量式湿度センサ |
JP4501320B2 (ja) | 2001-07-16 | 2010-07-14 | 株式会社デンソー | 容量式湿度センサ |
JP2006019589A (ja) * | 2004-07-02 | 2006-01-19 | Denso Corp | 半導体装置 |
DE102009047201A1 (de) | 2009-11-26 | 2011-06-01 | Hagen, Gunter, Dipl.-Ing. | Verwendung von metallorganischem Gerüstmaterial zur Herstellung von feuchteempfindlichen Schichten für Sensoren |
US9063067B1 (en) | 2010-11-17 | 2015-06-23 | Alvin P. Schmitt | Moisture sensing devices |
JP7120519B2 (ja) * | 2018-07-12 | 2022-08-17 | ミネベアミツミ株式会社 | 湿度センサ及びその製造方法 |
JP7193203B2 (ja) * | 2018-11-16 | 2022-12-20 | ミネベアミツミ株式会社 | 検出装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI48229C (sv) * | 1972-10-12 | 1974-07-10 | Vaisala Oy | Kapacitiv fuktighetsgivare och framställningsförfarande för densamma. |
DE2848034A1 (de) * | 1978-11-06 | 1980-05-14 | Siemens Ag | Kapazitiver feuchtefuehler |
FR2486656A1 (fr) * | 1980-07-09 | 1982-01-15 | Commissariat Energie Atomique | Hygrometre capacitif |
FI65674C (fi) * | 1982-12-21 | 1984-06-11 | Vaisala Oy | Kapacitiv fuktighetsgivare och foerfarande foer framstaellningdaerav |
-
1983
- 1983-10-28 DE DE19833339276 patent/DE3339276A1/de not_active Withdrawn
-
1984
- 1984-10-11 GB GB08425691A patent/GB2149922A/en not_active Withdrawn
- 1984-10-11 SE SE8405100A patent/SE8405100L/sv not_active Application Discontinuation
- 1984-10-18 FI FI844116A patent/FI844116L/fi not_active Application Discontinuation
- 1984-10-22 JP JP59220649A patent/JPS60166854A/ja active Pending
- 1984-10-24 FR FR8416263A patent/FR2554237A1/fr active Pending
- 1984-10-25 IT IT23303/84A patent/IT1177031B/it active
- 1984-10-26 NL NL8403264A patent/NL8403264A/nl not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
NL8403264A (nl) | 1985-05-17 |
IT8423303A1 (it) | 1986-04-25 |
GB8425691D0 (en) | 1984-11-14 |
FI844116A0 (fi) | 1984-10-18 |
SE8405100D0 (sv) | 1984-10-11 |
GB2149922A (en) | 1985-06-19 |
DE3339276A1 (de) | 1985-05-09 |
FR2554237A1 (fr) | 1985-05-03 |
IT1177031B (it) | 1987-08-26 |
IT8423303A0 (it) | 1984-10-25 |
JPS60166854A (ja) | 1985-08-30 |
FI844116L (fi) | 1985-04-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NAV | Patent application has lapsed |
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