NO20053153D0 - Sag med flere vaiere. - Google Patents
Sag med flere vaiere.Info
- Publication number
- NO20053153D0 NO20053153D0 NO20053153A NO20053153A NO20053153D0 NO 20053153 D0 NO20053153 D0 NO 20053153D0 NO 20053153 A NO20053153 A NO 20053153A NO 20053153 A NO20053153 A NO 20053153A NO 20053153 D0 NO20053153 D0 NO 20053153D0
- Authority
- NO
- Norway
- Prior art keywords
- case
- several wires
- wires
- several
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/007—Use, recovery or regeneration of abrasive mediums
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0633—Grinders for cutting-off using a cutting wire
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003365719 | 2003-10-27 | ||
JP2003366378 | 2003-10-27 | ||
JP2003369476 | 2003-10-29 | ||
JP2003370859 | 2003-10-30 | ||
PCT/JP2004/015705 WO2005039824A1 (ja) | 2003-10-27 | 2004-10-22 | マルチワイヤソー |
Publications (3)
Publication Number | Publication Date |
---|---|
NO20053153D0 true NO20053153D0 (no) | 2005-06-28 |
NO20053153L NO20053153L (no) | 2006-04-21 |
NO326031B1 NO326031B1 (no) | 2008-09-01 |
Family
ID=34528115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO20053153A NO326031B1 (no) | 2003-10-27 | 2005-06-28 | Sag med flere vaiere. |
Country Status (5)
Country | Link |
---|---|
US (1) | US7306508B2 (no) |
EP (2) | EP2343155B1 (no) |
JP (2) | JP4387361B2 (no) |
NO (1) | NO326031B1 (no) |
WO (1) | WO2005039824A1 (no) |
Families Citing this family (62)
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EP1757419B1 (de) * | 2005-08-25 | 2012-10-17 | Freiberger Compound Materials GmbH | Verfahren, Vorrichtung und Slurry zum Drahtsägen |
DE102005040343A1 (de) * | 2005-08-25 | 2007-03-01 | Freiberger Compound Materials Gmbh | Verfahren, Vorrichtung und Slurry zum Drahtsägen |
JP5072204B2 (ja) * | 2005-08-31 | 2012-11-14 | 信越半導体株式会社 | ウエーハの表面のナノトポグラフィを改善する方法及びワイヤソー装置 |
US7878883B2 (en) * | 2006-01-26 | 2011-02-01 | Memc Electronics Materials, Inc. | Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control |
JP4791306B2 (ja) * | 2006-09-22 | 2011-10-12 | 信越半導体株式会社 | 切断方法 |
JP5003294B2 (ja) * | 2007-06-08 | 2012-08-15 | 信越半導体株式会社 | 切断方法 |
EP2165805A4 (en) | 2007-06-27 | 2014-02-12 | Mitsubishi Electric Corp | MULTI-THREAD SAW AND CUTTING METHOD OF INGOT |
US8157876B2 (en) * | 2007-07-31 | 2012-04-17 | Cabot Microelectronics Corporation | Slurry composition containing non-ionic polymer and method for use |
US20090032006A1 (en) * | 2007-07-31 | 2009-02-05 | Chul Woo Nam | Wire saw process |
DE102007048879A1 (de) | 2007-10-11 | 2009-04-16 | Schott Ag | Wiederaufbereitung von fluiden Sägeslurries sowie deren Verwendung zur Herstellung von Wafern mit verbesserten Oberflächen |
EP2205387A1 (en) * | 2007-10-30 | 2010-07-14 | Pall Corporation | Method and system for manufacturing wafer-like slices from a substrate material |
WO2009078130A1 (ja) * | 2007-12-19 | 2009-06-25 | Shin-Etsu Handotai Co., Ltd. | ワイヤソーによるワークの切断方法およびワイヤソー |
FR2927272B1 (fr) * | 2008-02-07 | 2010-05-21 | Saint Gobain Ct Recherches | Poudre de grains abrasifs. |
US8425639B2 (en) * | 2008-05-30 | 2013-04-23 | Cabot Microelectronics Corporation | Wire saw slurry recycling process |
KR100898151B1 (ko) * | 2008-10-08 | 2009-05-19 | 장은영 | 친환경 와이어쏘 절단장치 및 이를 이용한 절단방법 |
JP5217918B2 (ja) * | 2008-11-07 | 2013-06-19 | 信越半導体株式会社 | インゴット切断装置及び切断方法 |
US20100126488A1 (en) * | 2008-11-25 | 2010-05-27 | Abhaya Kumar Bakshi | Method and apparatus for cutting wafers by wire sawing |
US8065995B2 (en) * | 2008-11-25 | 2011-11-29 | Cambridge Energy Resources Inc | Method and apparatus for cutting and cleaning wafers in a wire saw |
US8261730B2 (en) * | 2008-11-25 | 2012-09-11 | Cambridge Energy Resources Inc | In-situ wafer processing system and method |
CA2751456C (en) * | 2009-02-03 | 2017-06-20 | The Nanosteel Company, Inc. | Method and product for cutting materials |
GB2468874A (en) * | 2009-03-24 | 2010-09-29 | Rec Wafer Norway As | Apparatus for cutting wafers using wires and abrasive slurry |
FR2943848B1 (fr) * | 2009-03-27 | 2012-02-03 | Jean Pierre Medina | Procede et machine de fabrication d'un semi-conducteur, du type cellule photovoltaique ou composant electronique similaire |
JP2010253621A (ja) * | 2009-04-27 | 2010-11-11 | Ihi Compressor & Machinery Co Ltd | ワイヤソーのクーラント管理方法及び装置 |
JP5201086B2 (ja) * | 2009-06-10 | 2013-06-05 | 信越半導体株式会社 | ワークの切断方法 |
BRPI1013817B1 (pt) | 2009-06-16 | 2018-05-08 | Fujiwa Denki Co Ltd | método de fornecimento de metal fundido para máquina de vazamanto automática e equipamento para a mesma |
FR2947831B1 (fr) * | 2009-07-09 | 2012-02-03 | Saint Gobain Ct Recherches | Suspension de grains abrasifs |
KR101433750B1 (ko) | 2009-08-14 | 2014-08-27 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 연신체에 연마입자가 결합된 연마제품, 및 그의 형성 방법 |
RU2516318C2 (ru) | 2009-08-14 | 2014-05-20 | Сэнт-Гобэн Эбрейзивс, Инк. | Абразивное изделие (варианты) и способ резания сапфира с его использованием |
TW201112317A (en) * | 2009-09-22 | 2011-04-01 | Ching Hung Machinery & Electric Ind Co Ltd | Serial multi-thread saw crystal slicing device |
DE102010015111A1 (de) | 2010-03-23 | 2011-09-29 | Schott Solar Ag | Fluide Trennmedien und deren Verwendung |
DE102010014551A1 (de) | 2010-03-23 | 2011-09-29 | Schott Solar Ag | Fluide Trennmedien und deren Verwendung |
DE102010025606A1 (de) | 2010-06-30 | 2012-01-05 | Schott Solar Ag | Verfahren zur Wiederaufbereitung von verbrauchten Sägeflüssigkeiten aus der Herstellung von Siliziumwafern |
KR101279681B1 (ko) * | 2010-09-29 | 2013-06-27 | 주식회사 엘지실트론 | 단결정 잉곳 절단장치 |
GB2484348A (en) * | 2010-10-08 | 2012-04-11 | Rec Wafer Norway As | Abrasive slurry and method of production of photovoltaic wafers |
KR20120037576A (ko) * | 2010-10-12 | 2012-04-20 | 주식회사 엘지실트론 | 단결정 잉곳 절단장치 및 단결정 잉곳 절단방법 |
TW201507812A (zh) | 2010-12-30 | 2015-03-01 | Saint Gobain Abrasives Inc | 磨料物品及形成方法 |
TW201226087A (en) * | 2010-12-31 | 2012-07-01 | Micron Diamond Wire & Equipment Co Ltd | Cutting and cooling device of diamond wire |
DE102011014828A1 (de) | 2011-03-23 | 2012-09-27 | Schott Solar Ag | Fluide Trennmedien und deren Verwendung |
DE102011082366B3 (de) * | 2011-09-08 | 2013-02-28 | Siltronic Ag | Einlagiges Wickeln von Sägedraht mit fest gebundenem Schneidkorn für Drahtsägen zum Abtrennen von Scheiben von einem Werkstück |
JP5733120B2 (ja) * | 2011-09-09 | 2015-06-10 | 住友電気工業株式会社 | ソーワイヤおよびそれを用いたiii族窒化物結晶基板の製造方法 |
KR101618040B1 (ko) | 2011-09-16 | 2016-05-04 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 연마 물품 및 형성방법 |
US9211634B2 (en) | 2011-09-29 | 2015-12-15 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated substrate body having a barrier layer, and methods of forming thereof |
EP2583777A1 (en) * | 2011-10-22 | 2013-04-24 | Applied Materials Switzerland Sàrl | Clamping assembly for a wire guide of a wire saw |
WO2013128653A1 (ja) * | 2012-03-02 | 2013-09-06 | 株式会社クリスタル光学 | シリコンインゴットの切断方法 |
DE102012209974B4 (de) | 2012-06-14 | 2018-02-15 | Siltronic Ag | Verfahren zum gleichzeitigen Abtrennen einer Vielzahl von Scheiben von einem zylindrischen Werkstück |
TWI477343B (zh) | 2012-06-29 | 2015-03-21 | Saint Gobain Abrasives Inc | 研磨物品及形成方法 |
TW201402274A (zh) | 2012-06-29 | 2014-01-16 | Saint Gobain Abrasives Inc | 研磨物品及形成方法 |
TW201404527A (zh) | 2012-06-29 | 2014-02-01 | Saint Gobain Abrasives Inc | 研磨物品及形成方法 |
TWI483803B (zh) * | 2012-06-29 | 2015-05-11 | Saint Gobain Abrasives Inc | 在工件上進行切割操作之方法 |
JP5996308B2 (ja) * | 2012-07-10 | 2016-09-21 | コマツNtc株式会社 | ワイヤソー |
TW201441355A (zh) | 2013-04-19 | 2014-11-01 | Saint Gobain Abrasives Inc | 研磨製品及其形成方法 |
CN104354233A (zh) * | 2014-10-13 | 2015-02-18 | 灵璧县灵磁新材料有限公司 | 一种钕铁硼多线切割机的冷却装置 |
WO2016103397A1 (ja) * | 2014-12-25 | 2016-06-30 | エムティアール株式会社 | Cmpスラリー再生方法および再生装置 |
TWI621505B (zh) | 2015-06-29 | 2018-04-21 | 聖高拜磨料有限公司 | 研磨物品及形成方法 |
JP6270796B2 (ja) * | 2015-10-28 | 2018-01-31 | 株式会社リード | 固定砥粒ワイヤーソー及び固定砥粒ワイヤーのドレッシング方法 |
WO2018087619A1 (en) * | 2016-11-10 | 2018-05-17 | Meyer Burger (Switzerland) Ag | Wire saw |
JP7113365B2 (ja) * | 2017-05-10 | 2022-08-05 | パナソニックIpマネジメント株式会社 | ソーワイヤー及び切断装置 |
FR3070538B1 (fr) * | 2017-08-30 | 2020-02-21 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de desassemblage d'un module photovoltaique et installation associee |
KR102282063B1 (ko) * | 2020-01-30 | 2021-07-28 | 에스케이실트론 주식회사 | 잉곳 온도 제어기 및 그를 구비한 와이어 쏘잉 장치 |
CN113211278A (zh) * | 2021-05-14 | 2021-08-06 | 安徽省景隆电子科技有限公司 | 一种提高合金电阻落料效率的切割方法 |
CN115958709B (zh) * | 2022-12-28 | 2023-06-20 | 宁波合盛新材料有限公司 | 碳化硅晶片的多线切割方法 |
CN117340357B (zh) * | 2023-12-06 | 2024-03-19 | 成都游小木创新科技有限公司 | 一种汽车零件精度切割装置 |
Family Cites Families (27)
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NL7308102A (no) * | 1973-06-12 | 1974-12-16 | ||
JPS61125768A (ja) * | 1984-11-20 | 1986-06-13 | Sumitomo Metal Ind Ltd | 脆性材料の切断方法 |
JPS61284926A (ja) | 1985-06-10 | 1986-12-15 | Teikoku Seiki Kk | シリコンウエハ−加工用マスキングシ−トの切断除去方法 |
JPS6357171A (ja) * | 1986-08-29 | 1988-03-11 | Otaru Seisakusho:Kk | 多重鋼線式切断装置 |
JPH01316164A (ja) * | 1988-06-13 | 1989-12-21 | Osaka Titanium Co Ltd | 切削製品の製法およびワイヤソーマシン |
JPH02262955A (ja) | 1988-12-15 | 1990-10-25 | Nippon Steel Corp | Siインゴットのワイヤソーによる切断法 |
JPH02298280A (ja) * | 1989-05-11 | 1990-12-10 | Seiko Epson Corp | ワイヤーエッチング法 |
JPH0639095B2 (ja) | 1992-10-12 | 1994-05-25 | 住友金属工業株式会社 | 脆性材料の切断装置 |
JP3323621B2 (ja) * | 1993-12-29 | 2002-09-09 | 株式会社日平トヤマ | ワイヤソーのスラリ供給方法およびスラリ供給ノズル |
JP3071100B2 (ja) | 1994-08-05 | 2000-07-31 | 株式会社日平トヤマ | ワイヤソーにおけるスラリー供給装置 |
JP3187296B2 (ja) | 1995-08-31 | 2001-07-11 | 株式会社日平トヤマ | ワイヤソー及びワーク切断方法 |
JPH0985737A (ja) * | 1995-09-22 | 1997-03-31 | Toray Eng Co Ltd | ワイヤ式切断装置 |
JP3594375B2 (ja) | 1995-10-05 | 2004-11-24 | 三井化学株式会社 | 試料切断装置および試料切断方法 |
JP3655004B2 (ja) | 1996-03-28 | 2005-06-02 | 信越半導体株式会社 | ワイヤーソー装置 |
JPH1052816A (ja) * | 1996-08-13 | 1998-02-24 | M Ii M C Kk | ワイヤ式切断方法 |
JPH10180750A (ja) * | 1996-12-25 | 1998-07-07 | Nippei Toyama Corp | ワイヤソーにおけるスラリー温度調節装置 |
JPH10217036A (ja) * | 1997-01-29 | 1998-08-18 | Komatsu Electron Metals Co Ltd | 半導体結晶棒の切断装置及び切断方法 |
JP3741523B2 (ja) | 1997-07-30 | 2006-02-01 | 株式会社荏原製作所 | 研磨装置 |
JP3695124B2 (ja) * | 1998-03-31 | 2005-09-14 | 信越半導体株式会社 | ワイヤーソー装置 |
DE19841492A1 (de) * | 1998-09-10 | 2000-03-23 | Wacker Siltronic Halbleitermat | Verfahren und Vorrichtung zum Abtrennen einer Vielzahl von Scheiben von einem sprödharten Werkstück |
JP2000218493A (ja) * | 1999-01-28 | 2000-08-08 | Tokyo Seimitsu Co Ltd | ワイヤソー |
JP3314921B2 (ja) | 1999-06-08 | 2002-08-19 | 三菱住友シリコン株式会社 | 半導体材料の切断・加工方法 |
JP2001079747A (ja) | 1999-09-08 | 2001-03-27 | Nippei Toyama Corp | ワイヤソー |
JP2002307283A (ja) * | 2001-04-19 | 2002-10-23 | Shin Etsu Handotai Co Ltd | ワイヤーソー |
JP2003159650A (ja) * | 2001-11-22 | 2003-06-03 | Takatori Corp | ワイヤソー用スラリータンク |
US6832606B2 (en) * | 2001-11-30 | 2004-12-21 | Dowa Mining Co., Ltd. | Wire saw and cutting method thereof |
JP2008213111A (ja) * | 2007-03-06 | 2008-09-18 | Sharp Corp | マルチワイヤーソーおよびスラリー供給方法 |
-
2004
- 2004-10-22 US US10/540,020 patent/US7306508B2/en not_active Expired - Fee Related
- 2004-10-22 EP EP11161654.6A patent/EP2343155B1/en not_active Expired - Fee Related
- 2004-10-22 WO PCT/JP2004/015705 patent/WO2005039824A1/ja active Application Filing
- 2004-10-22 EP EP04792847.8A patent/EP1685927B1/en not_active Expired - Fee Related
- 2004-10-22 JP JP2005514977A patent/JP4387361B2/ja not_active Expired - Fee Related
-
2005
- 2005-06-28 NO NO20053153A patent/NO326031B1/no not_active IP Right Cessation
-
2009
- 2009-03-23 JP JP2009069968A patent/JP4907682B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1685927A4 (en) | 2008-11-26 |
US20060249134A1 (en) | 2006-11-09 |
JP4387361B2 (ja) | 2009-12-16 |
WO2005039824A1 (ja) | 2005-05-06 |
EP1685927A1 (en) | 2006-08-02 |
JP2009142986A (ja) | 2009-07-02 |
US7306508B2 (en) | 2007-12-11 |
JPWO2005039824A1 (ja) | 2007-03-01 |
EP2343155A1 (en) | 2011-07-13 |
NO326031B1 (no) | 2008-09-01 |
NO20053153L (no) | 2006-04-21 |
EP2343155B1 (en) | 2014-08-20 |
JP4907682B2 (ja) | 2012-04-04 |
EP1685927B1 (en) | 2013-04-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM1K | Lapsed by not paying the annual fees |