NO20053153D0 - Sag med flere vaiere. - Google Patents

Sag med flere vaiere.

Info

Publication number
NO20053153D0
NO20053153D0 NO20053153A NO20053153A NO20053153D0 NO 20053153 D0 NO20053153 D0 NO 20053153D0 NO 20053153 A NO20053153 A NO 20053153A NO 20053153 A NO20053153 A NO 20053153A NO 20053153 D0 NO20053153 D0 NO 20053153D0
Authority
NO
Norway
Prior art keywords
case
several wires
wires
several
Prior art date
Application number
NO20053153A
Other languages
English (en)
Other versions
NO326031B1 (no
NO20053153L (no
Inventor
Takafumi Kawasaki
Hirozoh Tsuruta
Hirokazu Nishida
Seiichi Mimura
Masayuki Hamayasu
Hisashi Tominaga
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of NO20053153D0 publication Critical patent/NO20053153D0/no
Publication of NO20053153L publication Critical patent/NO20053153L/no
Publication of NO326031B1 publication Critical patent/NO326031B1/no

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007Use, recovery or regeneration of abrasive mediums
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • B24B27/0633Grinders for cutting-off using a cutting wire
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
NO20053153A 2003-10-27 2005-06-28 Sag med flere vaiere. NO326031B1 (no)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2003365719 2003-10-27
JP2003366378 2003-10-27
JP2003369476 2003-10-29
JP2003370859 2003-10-30
PCT/JP2004/015705 WO2005039824A1 (ja) 2003-10-27 2004-10-22 マルチワイヤソー

Publications (3)

Publication Number Publication Date
NO20053153D0 true NO20053153D0 (no) 2005-06-28
NO20053153L NO20053153L (no) 2006-04-21
NO326031B1 NO326031B1 (no) 2008-09-01

Family

ID=34528115

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20053153A NO326031B1 (no) 2003-10-27 2005-06-28 Sag med flere vaiere.

Country Status (5)

Country Link
US (1) US7306508B2 (no)
EP (2) EP2343155B1 (no)
JP (2) JP4387361B2 (no)
NO (1) NO326031B1 (no)
WO (1) WO2005039824A1 (no)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1757419B1 (de) * 2005-08-25 2012-10-17 Freiberger Compound Materials GmbH Verfahren, Vorrichtung und Slurry zum Drahtsägen
DE102005040343A1 (de) * 2005-08-25 2007-03-01 Freiberger Compound Materials Gmbh Verfahren, Vorrichtung und Slurry zum Drahtsägen
JP5072204B2 (ja) * 2005-08-31 2012-11-14 信越半導体株式会社 ウエーハの表面のナノトポグラフィを改善する方法及びワイヤソー装置
US7878883B2 (en) * 2006-01-26 2011-02-01 Memc Electronics Materials, Inc. Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control
JP4791306B2 (ja) * 2006-09-22 2011-10-12 信越半導体株式会社 切断方法
JP5003294B2 (ja) * 2007-06-08 2012-08-15 信越半導体株式会社 切断方法
EP2165805A4 (en) 2007-06-27 2014-02-12 Mitsubishi Electric Corp MULTI-THREAD SAW AND CUTTING METHOD OF INGOT
US8157876B2 (en) * 2007-07-31 2012-04-17 Cabot Microelectronics Corporation Slurry composition containing non-ionic polymer and method for use
US20090032006A1 (en) * 2007-07-31 2009-02-05 Chul Woo Nam Wire saw process
DE102007048879A1 (de) 2007-10-11 2009-04-16 Schott Ag Wiederaufbereitung von fluiden Sägeslurries sowie deren Verwendung zur Herstellung von Wafern mit verbesserten Oberflächen
EP2205387A1 (en) * 2007-10-30 2010-07-14 Pall Corporation Method and system for manufacturing wafer-like slices from a substrate material
WO2009078130A1 (ja) * 2007-12-19 2009-06-25 Shin-Etsu Handotai Co., Ltd. ワイヤソーによるワークの切断方法およびワイヤソー
FR2927272B1 (fr) * 2008-02-07 2010-05-21 Saint Gobain Ct Recherches Poudre de grains abrasifs.
US8425639B2 (en) * 2008-05-30 2013-04-23 Cabot Microelectronics Corporation Wire saw slurry recycling process
KR100898151B1 (ko) * 2008-10-08 2009-05-19 장은영 친환경 와이어쏘 절단장치 및 이를 이용한 절단방법
JP5217918B2 (ja) * 2008-11-07 2013-06-19 信越半導体株式会社 インゴット切断装置及び切断方法
US20100126488A1 (en) * 2008-11-25 2010-05-27 Abhaya Kumar Bakshi Method and apparatus for cutting wafers by wire sawing
US8065995B2 (en) * 2008-11-25 2011-11-29 Cambridge Energy Resources Inc Method and apparatus for cutting and cleaning wafers in a wire saw
US8261730B2 (en) * 2008-11-25 2012-09-11 Cambridge Energy Resources Inc In-situ wafer processing system and method
CA2751456C (en) * 2009-02-03 2017-06-20 The Nanosteel Company, Inc. Method and product for cutting materials
GB2468874A (en) * 2009-03-24 2010-09-29 Rec Wafer Norway As Apparatus for cutting wafers using wires and abrasive slurry
FR2943848B1 (fr) * 2009-03-27 2012-02-03 Jean Pierre Medina Procede et machine de fabrication d'un semi-conducteur, du type cellule photovoltaique ou composant electronique similaire
JP2010253621A (ja) * 2009-04-27 2010-11-11 Ihi Compressor & Machinery Co Ltd ワイヤソーのクーラント管理方法及び装置
JP5201086B2 (ja) * 2009-06-10 2013-06-05 信越半導体株式会社 ワークの切断方法
BRPI1013817B1 (pt) 2009-06-16 2018-05-08 Fujiwa Denki Co Ltd método de fornecimento de metal fundido para máquina de vazamanto automática e equipamento para a mesma
FR2947831B1 (fr) * 2009-07-09 2012-02-03 Saint Gobain Ct Recherches Suspension de grains abrasifs
KR101433750B1 (ko) 2009-08-14 2014-08-27 생-고뱅 어브레이시브즈, 인코포레이티드 연신체에 연마입자가 결합된 연마제품, 및 그의 형성 방법
RU2516318C2 (ru) 2009-08-14 2014-05-20 Сэнт-Гобэн Эбрейзивс, Инк. Абразивное изделие (варианты) и способ резания сапфира с его использованием
TW201112317A (en) * 2009-09-22 2011-04-01 Ching Hung Machinery & Electric Ind Co Ltd Serial multi-thread saw crystal slicing device
DE102010015111A1 (de) 2010-03-23 2011-09-29 Schott Solar Ag Fluide Trennmedien und deren Verwendung
DE102010014551A1 (de) 2010-03-23 2011-09-29 Schott Solar Ag Fluide Trennmedien und deren Verwendung
DE102010025606A1 (de) 2010-06-30 2012-01-05 Schott Solar Ag Verfahren zur Wiederaufbereitung von verbrauchten Sägeflüssigkeiten aus der Herstellung von Siliziumwafern
KR101279681B1 (ko) * 2010-09-29 2013-06-27 주식회사 엘지실트론 단결정 잉곳 절단장치
GB2484348A (en) * 2010-10-08 2012-04-11 Rec Wafer Norway As Abrasive slurry and method of production of photovoltaic wafers
KR20120037576A (ko) * 2010-10-12 2012-04-20 주식회사 엘지실트론 단결정 잉곳 절단장치 및 단결정 잉곳 절단방법
TW201507812A (zh) 2010-12-30 2015-03-01 Saint Gobain Abrasives Inc 磨料物品及形成方法
TW201226087A (en) * 2010-12-31 2012-07-01 Micron Diamond Wire & Equipment Co Ltd Cutting and cooling device of diamond wire
DE102011014828A1 (de) 2011-03-23 2012-09-27 Schott Solar Ag Fluide Trennmedien und deren Verwendung
DE102011082366B3 (de) * 2011-09-08 2013-02-28 Siltronic Ag Einlagiges Wickeln von Sägedraht mit fest gebundenem Schneidkorn für Drahtsägen zum Abtrennen von Scheiben von einem Werkstück
JP5733120B2 (ja) * 2011-09-09 2015-06-10 住友電気工業株式会社 ソーワイヤおよびそれを用いたiii族窒化物結晶基板の製造方法
KR101618040B1 (ko) 2011-09-16 2016-05-04 생-고뱅 어브레이시브즈, 인코포레이티드 연마 물품 및 형성방법
US9211634B2 (en) 2011-09-29 2015-12-15 Saint-Gobain Abrasives, Inc. Abrasive articles including abrasive particles bonded to an elongated substrate body having a barrier layer, and methods of forming thereof
EP2583777A1 (en) * 2011-10-22 2013-04-24 Applied Materials Switzerland Sàrl Clamping assembly for a wire guide of a wire saw
WO2013128653A1 (ja) * 2012-03-02 2013-09-06 株式会社クリスタル光学 シリコンインゴットの切断方法
DE102012209974B4 (de) 2012-06-14 2018-02-15 Siltronic Ag Verfahren zum gleichzeitigen Abtrennen einer Vielzahl von Scheiben von einem zylindrischen Werkstück
TWI477343B (zh) 2012-06-29 2015-03-21 Saint Gobain Abrasives Inc 研磨物品及形成方法
TW201402274A (zh) 2012-06-29 2014-01-16 Saint Gobain Abrasives Inc 研磨物品及形成方法
TW201404527A (zh) 2012-06-29 2014-02-01 Saint Gobain Abrasives Inc 研磨物品及形成方法
TWI483803B (zh) * 2012-06-29 2015-05-11 Saint Gobain Abrasives Inc 在工件上進行切割操作之方法
JP5996308B2 (ja) * 2012-07-10 2016-09-21 コマツNtc株式会社 ワイヤソー
TW201441355A (zh) 2013-04-19 2014-11-01 Saint Gobain Abrasives Inc 研磨製品及其形成方法
CN104354233A (zh) * 2014-10-13 2015-02-18 灵璧县灵磁新材料有限公司 一种钕铁硼多线切割机的冷却装置
WO2016103397A1 (ja) * 2014-12-25 2016-06-30 エムティアール株式会社 Cmpスラリー再生方法および再生装置
TWI621505B (zh) 2015-06-29 2018-04-21 聖高拜磨料有限公司 研磨物品及形成方法
JP6270796B2 (ja) * 2015-10-28 2018-01-31 株式会社リード 固定砥粒ワイヤーソー及び固定砥粒ワイヤーのドレッシング方法
WO2018087619A1 (en) * 2016-11-10 2018-05-17 Meyer Burger (Switzerland) Ag Wire saw
JP7113365B2 (ja) * 2017-05-10 2022-08-05 パナソニックIpマネジメント株式会社 ソーワイヤー及び切断装置
FR3070538B1 (fr) * 2017-08-30 2020-02-21 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de desassemblage d'un module photovoltaique et installation associee
KR102282063B1 (ko) * 2020-01-30 2021-07-28 에스케이실트론 주식회사 잉곳 온도 제어기 및 그를 구비한 와이어 쏘잉 장치
CN113211278A (zh) * 2021-05-14 2021-08-06 安徽省景隆电子科技有限公司 一种提高合金电阻落料效率的切割方法
CN115958709B (zh) * 2022-12-28 2023-06-20 宁波合盛新材料有限公司 碳化硅晶片的多线切割方法
CN117340357B (zh) * 2023-12-06 2024-03-19 成都游小木创新科技有限公司 一种汽车零件精度切割装置

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7308102A (no) * 1973-06-12 1974-12-16
JPS61125768A (ja) * 1984-11-20 1986-06-13 Sumitomo Metal Ind Ltd 脆性材料の切断方法
JPS61284926A (ja) 1985-06-10 1986-12-15 Teikoku Seiki Kk シリコンウエハ−加工用マスキングシ−トの切断除去方法
JPS6357171A (ja) * 1986-08-29 1988-03-11 Otaru Seisakusho:Kk 多重鋼線式切断装置
JPH01316164A (ja) * 1988-06-13 1989-12-21 Osaka Titanium Co Ltd 切削製品の製法およびワイヤソーマシン
JPH02262955A (ja) 1988-12-15 1990-10-25 Nippon Steel Corp Siインゴットのワイヤソーによる切断法
JPH02298280A (ja) * 1989-05-11 1990-12-10 Seiko Epson Corp ワイヤーエッチング法
JPH0639095B2 (ja) 1992-10-12 1994-05-25 住友金属工業株式会社 脆性材料の切断装置
JP3323621B2 (ja) * 1993-12-29 2002-09-09 株式会社日平トヤマ ワイヤソーのスラリ供給方法およびスラリ供給ノズル
JP3071100B2 (ja) 1994-08-05 2000-07-31 株式会社日平トヤマ ワイヤソーにおけるスラリー供給装置
JP3187296B2 (ja) 1995-08-31 2001-07-11 株式会社日平トヤマ ワイヤソー及びワーク切断方法
JPH0985737A (ja) * 1995-09-22 1997-03-31 Toray Eng Co Ltd ワイヤ式切断装置
JP3594375B2 (ja) 1995-10-05 2004-11-24 三井化学株式会社 試料切断装置および試料切断方法
JP3655004B2 (ja) 1996-03-28 2005-06-02 信越半導体株式会社 ワイヤーソー装置
JPH1052816A (ja) * 1996-08-13 1998-02-24 M Ii M C Kk ワイヤ式切断方法
JPH10180750A (ja) * 1996-12-25 1998-07-07 Nippei Toyama Corp ワイヤソーにおけるスラリー温度調節装置
JPH10217036A (ja) * 1997-01-29 1998-08-18 Komatsu Electron Metals Co Ltd 半導体結晶棒の切断装置及び切断方法
JP3741523B2 (ja) 1997-07-30 2006-02-01 株式会社荏原製作所 研磨装置
JP3695124B2 (ja) * 1998-03-31 2005-09-14 信越半導体株式会社 ワイヤーソー装置
DE19841492A1 (de) * 1998-09-10 2000-03-23 Wacker Siltronic Halbleitermat Verfahren und Vorrichtung zum Abtrennen einer Vielzahl von Scheiben von einem sprödharten Werkstück
JP2000218493A (ja) * 1999-01-28 2000-08-08 Tokyo Seimitsu Co Ltd ワイヤソー
JP3314921B2 (ja) 1999-06-08 2002-08-19 三菱住友シリコン株式会社 半導体材料の切断・加工方法
JP2001079747A (ja) 1999-09-08 2001-03-27 Nippei Toyama Corp ワイヤソー
JP2002307283A (ja) * 2001-04-19 2002-10-23 Shin Etsu Handotai Co Ltd ワイヤーソー
JP2003159650A (ja) * 2001-11-22 2003-06-03 Takatori Corp ワイヤソー用スラリータンク
US6832606B2 (en) * 2001-11-30 2004-12-21 Dowa Mining Co., Ltd. Wire saw and cutting method thereof
JP2008213111A (ja) * 2007-03-06 2008-09-18 Sharp Corp マルチワイヤーソーおよびスラリー供給方法

Also Published As

Publication number Publication date
EP1685927A4 (en) 2008-11-26
US20060249134A1 (en) 2006-11-09
JP4387361B2 (ja) 2009-12-16
WO2005039824A1 (ja) 2005-05-06
EP1685927A1 (en) 2006-08-02
JP2009142986A (ja) 2009-07-02
US7306508B2 (en) 2007-12-11
JPWO2005039824A1 (ja) 2007-03-01
EP2343155A1 (en) 2011-07-13
NO326031B1 (no) 2008-09-01
NO20053153L (no) 2006-04-21
EP2343155B1 (en) 2014-08-20
JP4907682B2 (ja) 2012-04-04
EP1685927B1 (en) 2013-04-10

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