DE602004012595D1 - Gas-port-baugruppe - Google Patents

Gas-port-baugruppe

Info

Publication number
DE602004012595D1
DE602004012595D1 DE602004012595T DE602004012595T DE602004012595D1 DE 602004012595 D1 DE602004012595 D1 DE 602004012595D1 DE 602004012595 T DE602004012595 T DE 602004012595T DE 602004012595 T DE602004012595 T DE 602004012595T DE 602004012595 D1 DE602004012595 D1 DE 602004012595D1
Authority
DE
Germany
Prior art keywords
gas
port assembly
port
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004012595T
Other languages
English (en)
Other versions
DE602004012595T2 (de
Inventor
Nityalendra Singh
Simon Hall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford Instruments Plasma Technology Ltd
Original Assignee
Oxford Instruments Plasma Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford Instruments Plasma Technology Ltd filed Critical Oxford Instruments Plasma Technology Ltd
Publication of DE602004012595D1 publication Critical patent/DE602004012595D1/de
Application granted granted Critical
Publication of DE602004012595T2 publication Critical patent/DE602004012595T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE602004012595T 2003-11-13 2004-10-27 Gas-port-baugruppe Active DE602004012595T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0326500 2003-11-13
GBGB0326500.6A GB0326500D0 (en) 2003-11-13 2003-11-13 Gas port assembly
PCT/GB2004/004542 WO2005052980A1 (en) 2003-11-13 2004-10-27 Gas port assembly

Publications (2)

Publication Number Publication Date
DE602004012595D1 true DE602004012595D1 (de) 2008-04-30
DE602004012595T2 DE602004012595T2 (de) 2008-07-03

Family

ID=29726494

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004012595T Active DE602004012595T2 (de) 2003-11-13 2004-10-27 Gas-port-baugruppe

Country Status (5)

Country Link
US (1) US7651552B2 (de)
EP (1) EP1683177B1 (de)
DE (1) DE602004012595T2 (de)
GB (1) GB0326500D0 (de)
WO (1) WO2005052980A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010225640A (ja) * 2009-03-19 2010-10-07 Tokyo Electron Ltd 基板処理装置及び排気方法
US10392703B2 (en) * 2014-03-20 2019-08-27 Toyota Jidosha Kabushiki Kaisha Plasma CVD apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3520110A (en) * 1966-12-19 1970-07-14 Hughes Aircraft Co Electrical isolator for gas feed line
JPS6167922A (ja) * 1984-09-12 1986-04-08 Fujitsu Ltd プラズマ処理装置
US5542559A (en) * 1993-02-16 1996-08-06 Tokyo Electron Kabushiki Kaisha Plasma treatment apparatus
US6334983B1 (en) 1997-04-11 2002-01-01 Tokyo Electron Limited Processing system
US6744213B2 (en) * 1999-11-15 2004-06-01 Lam Research Corporation Antenna for producing uniform process rates
US20070170867A1 (en) * 2006-01-24 2007-07-26 Varian Semiconductor Equipment Associates, Inc. Plasma Immersion Ion Source With Low Effective Antenna Voltage

Also Published As

Publication number Publication date
GB0326500D0 (en) 2003-12-17
WO2005052980A1 (en) 2005-06-09
US7651552B2 (en) 2010-01-26
US20070194039A1 (en) 2007-08-23
EP1683177B1 (de) 2008-03-19
DE602004012595T2 (de) 2008-07-03
EP1683177A1 (de) 2006-07-26

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