MY140694A - Pattern forming method and treating agent therefor - Google Patents

Pattern forming method and treating agent therefor

Info

Publication number
MY140694A
MY140694A MYPI20014966A MYPI20014966A MY140694A MY 140694 A MY140694 A MY 140694A MY PI20014966 A MYPI20014966 A MY PI20014966A MY PI20014966 A MYPI20014966 A MY PI20014966A MY 140694 A MY140694 A MY 140694A
Authority
MY
Malaysia
Prior art keywords
photoresist film
chemically amplified
treating agent
amplified photoresist
applying
Prior art date
Application number
MYPI20014966A
Other languages
English (en)
Inventor
Kazuyo Ijima
Yusuke Takano
Hatsuyuki Tanaka
Satoru Funato
Original Assignee
Az Electronic Materials Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Az Electronic Materials Japan filed Critical Az Electronic Materials Japan
Publication of MY140694A publication Critical patent/MY140694A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
MYPI20014966A 2000-11-15 2001-10-26 Pattern forming method and treating agent therefor MY140694A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000347661A JP2002148820A (ja) 2000-11-15 2000-11-15 パターン形成方法及びこの方法に使用される処理剤

Publications (1)

Publication Number Publication Date
MY140694A true MY140694A (en) 2010-01-15

Family

ID=18821354

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20014966A MY140694A (en) 2000-11-15 2001-10-26 Pattern forming method and treating agent therefor

Country Status (8)

Country Link
US (1) US7018785B2 (enExample)
EP (1) EP1338923A4 (enExample)
JP (1) JP2002148820A (enExample)
KR (1) KR100825657B1 (enExample)
CN (1) CN1223908C (enExample)
MY (1) MY140694A (enExample)
TW (1) TW583517B (enExample)
WO (1) WO2002041081A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050164122A1 (en) * 2004-01-26 2005-07-28 Matsushita Electric Industrial Co., Ltd. Chemically amplified resist and pattern formation method
CN1947065B (zh) * 2004-04-23 2011-03-30 东京应化工业株式会社 抗蚀图案的形成方法及复合冲洗液
JP4493393B2 (ja) * 2004-04-23 2010-06-30 東京応化工業株式会社 リソグラフィー用リンス液
TWI436403B (zh) 2004-10-26 2014-05-01 尼康股份有限公司 A cleaning method, a substrate processing method, an exposure apparatus, and an element manufacturing method
JP4485913B2 (ja) * 2004-11-05 2010-06-23 東京応化工業株式会社 レジスト組成物の製造方法およびレジスト組成物
JP5008280B2 (ja) * 2004-11-10 2012-08-22 株式会社Ｓｏｋｕｄｏ 基板処理装置および基板処理方法
JP4794232B2 (ja) * 2004-12-06 2011-10-19 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP5154007B2 (ja) 2004-12-06 2013-02-27 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP4926433B2 (ja) * 2004-12-06 2012-05-09 株式会社Ｓｏｋｕｄｏ 基板処理装置および基板処理方法
JP4585299B2 (ja) * 2004-12-09 2010-11-24 東京応化工業株式会社 リソグラフィー用リンス液及びそれを用いたレジストパターン形成方法
JP4237184B2 (ja) * 2005-03-31 2009-03-11 エルピーダメモリ株式会社 半導体装置の製造方法
JP4761907B2 (ja) * 2005-09-28 2011-08-31 株式会社Sokudo 基板処理装置
JP4654119B2 (ja) * 2005-11-29 2011-03-16 東京エレクトロン株式会社 塗布・現像装置及び塗布・現像方法
JP5018388B2 (ja) * 2007-10-11 2012-09-05 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及び記憶媒体
JP2010128464A (ja) * 2008-12-01 2010-06-10 Az Electronic Materials Kk レジストパターン形成方法
WO2014088018A1 (ja) * 2012-12-07 2014-06-12 富士フイルム株式会社 硬化膜の製造方法、硬化膜、液晶表示装置および有機ｅｌ表示装置
JP6089667B2 (ja) * 2012-12-13 2017-03-08 大日本印刷株式会社 レジスト付きフォトマスクブランクスの製造方法、および、フォトマスクの製造方法
TWI558850B (zh) * 2014-03-29 2016-11-21 精密聚合物股份有限公司 電子零件用處理液及電子零件之製造方法
TWI559082B (zh) 2014-07-07 2016-11-21 財團法人工業技術研究院 生質材料與其形成方法與印刷電路板

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2643056B2 (ja) 1991-06-28 1997-08-20 インターナショナル・ビジネス・マシーンズ・コーポレイション 表面反射防止コーティング形成組成物及びその使用
JP2961975B2 (ja) 1991-08-06 1999-10-12 日本電気株式会社 微細パターンの形成方法
US5514526A (en) * 1992-06-02 1996-05-07 Mitsubishi Chemical Corporation Fluorine-containing composition for forming anti-reflection film on resist surface and pattern formation method
JPH05341536A (ja) * 1992-06-12 1993-12-24 Toshiba Corp レジストパターンの形成方法
JPH06242605A (ja) 1993-02-15 1994-09-02 Hoechst Japan Ltd ポジ型放射感応性混合物
JP3300089B2 (ja) 1993-02-15 2002-07-08 クラリアント インターナショナル リミテッド ポジ型放射感応性混合物
JPH06267838A (ja) 1993-03-11 1994-09-22 Hitachi Ltd レジストパターンの形成方法
JP2803549B2 (ja) * 1993-12-21 1998-09-24 信越化学工業株式会社 光反射性防止材料及びパターン形成方法
JP3402415B2 (ja) 1994-03-03 2003-05-06 沖電気工業株式会社 レジストパターン形成方法
JPH086256A (ja) * 1994-06-24 1996-01-12 Mitsubishi Electric Corp レジストパターンの形成方法および該方法に用いられる酸性の水溶性材料組成物
JPH0980753A (ja) 1995-09-13 1997-03-28 Toshiba Corp 感光性組成物
US5879853A (en) * 1996-01-18 1999-03-09 Kabushiki Kaisha Toshiba Top antireflective coating material and its process for DUV and VUV lithography systems
JP3694703B2 (ja) * 1996-04-25 2005-09-14 Ａｚエレクトロニックマテリアルズ株式会社 反射防止コーティング用組成物
JPH1195442A (ja) * 1997-09-24 1999-04-09 Sharp Corp フォトレジストパターン形成方法
JP3673399B2 (ja) * 1998-06-03 2005-07-20 クラリアント インターナショナル リミテッド 反射防止コーティング用組成物
JP3967466B2 (ja) * 1998-06-19 2007-08-29 信越化学工業株式会社 反射防止膜材料
CN1145194C (zh) * 1998-11-20 2004-04-07 克拉瑞特金融(Bvi)有限公司 光致抗蚀图形的形成方法

Also Published As

Publication number Publication date
WO2002041081A1 (fr) 2002-05-23
KR100825657B1 (ko) 2008-04-29
CN1223908C (zh) 2005-10-19
EP1338923A4 (en) 2007-04-11
US20040053170A1 (en) 2004-03-18
TW583517B (en) 2004-04-11
JP2002148820A (ja) 2002-05-22
EP1338923A1 (en) 2003-08-27
CN1474962A (zh) 2004-02-11
KR20030051815A (ko) 2003-06-25
US7018785B2 (en) 2006-03-28

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