CN1223908C - 形成图形的方法和在其中使用的处理剂 - Google Patents
形成图形的方法和在其中使用的处理剂 Download PDFInfo
- Publication number
- CN1223908C CN1223908C CNB018188796A CN01818879A CN1223908C CN 1223908 C CN1223908 C CN 1223908C CN B018188796 A CNB018188796 A CN B018188796A CN 01818879 A CN01818879 A CN 01818879A CN 1223908 C CN1223908 C CN 1223908C
- Authority
- CN
- China
- Prior art keywords
- photoresist film
- treating agent
- chemistry
- photoresist
- chemically amplified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
Abstract
Description
处理之后抗蚀剂的接触角(度) | 接触角降低的角度(度) | 图形形状 | ||
实施例1 | 处理剂1 | 11 | 68 | △ |
实施例2 | 处理剂2 | 10 | 69 | ○ |
实施例3 | 处理剂3 | 9 | 70 | ◎ |
实施例4 | 处理剂4 | 8 | 71 | ◎ |
实施例5 | 处理剂5 | 8 | 71 | ○ |
实施例6 | 处理剂6 | 8 | 71 | ▲ |
比较实施例1 | 处理剂7 | 39 | 40 | × |
比较实施例2 | 没有处理剂 | 79 | 0 | × |
Claims (2)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP347661/2000 | 2000-11-15 | ||
JP2000347661A JP2002148820A (ja) | 2000-11-15 | 2000-11-15 | パターン形成方法及びこの方法に使用される処理剤 |
JP347661/00 | 2000-11-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1474962A CN1474962A (zh) | 2004-02-11 |
CN1223908C true CN1223908C (zh) | 2005-10-19 |
Family
ID=18821354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB018188796A Expired - Fee Related CN1223908C (zh) | 2000-11-15 | 2001-10-24 | 形成图形的方法和在其中使用的处理剂 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7018785B2 (zh) |
EP (1) | EP1338923A4 (zh) |
JP (1) | JP2002148820A (zh) |
KR (1) | KR100825657B1 (zh) |
CN (1) | CN1223908C (zh) |
MY (1) | MY140694A (zh) |
TW (1) | TW583517B (zh) |
WO (1) | WO2002041081A1 (zh) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050164122A1 (en) * | 2004-01-26 | 2005-07-28 | Matsushita Electric Industrial Co., Ltd. | Chemically amplified resist and pattern formation method |
EP1752826A4 (en) * | 2004-04-23 | 2009-03-18 | Tokyo Ohka Kogyo Co Ltd | RESISTANCE STRUCTURE-EDUCATION PROCEDURE AND COMPOUND SUBSTANCE |
JP4493393B2 (ja) * | 2004-04-23 | 2010-06-30 | 東京応化工業株式会社 | リソグラフィー用リンス液 |
JP4665712B2 (ja) | 2004-10-26 | 2011-04-06 | 株式会社ニコン | 基板処理方法、露光装置及びデバイス製造方法 |
JP4485913B2 (ja) | 2004-11-05 | 2010-06-23 | 東京応化工業株式会社 | レジスト組成物の製造方法およびレジスト組成物 |
JP5008280B2 (ja) * | 2004-11-10 | 2012-08-22 | 株式会社Sokudo | 基板処理装置および基板処理方法 |
JP4794232B2 (ja) * | 2004-12-06 | 2011-10-19 | 株式会社Sokudo | 基板処理装置 |
JP5154007B2 (ja) * | 2004-12-06 | 2013-02-27 | 株式会社Sokudo | 基板処理装置 |
JP4926433B2 (ja) * | 2004-12-06 | 2012-05-09 | 株式会社Sokudo | 基板処理装置および基板処理方法 |
JP4585299B2 (ja) * | 2004-12-09 | 2010-11-24 | 東京応化工業株式会社 | リソグラフィー用リンス液及びそれを用いたレジストパターン形成方法 |
JP4237184B2 (ja) * | 2005-03-31 | 2009-03-11 | エルピーダメモリ株式会社 | 半導体装置の製造方法 |
JP4761907B2 (ja) * | 2005-09-28 | 2011-08-31 | 株式会社Sokudo | 基板処理装置 |
JP4654119B2 (ja) * | 2005-11-29 | 2011-03-16 | 東京エレクトロン株式会社 | 塗布・現像装置及び塗布・現像方法 |
JP5018388B2 (ja) * | 2007-10-11 | 2012-09-05 | 東京エレクトロン株式会社 | 塗布、現像装置、塗布、現像方法及び記憶媒体 |
JP2010128464A (ja) * | 2008-12-01 | 2010-06-10 | Az Electronic Materials Kk | レジストパターン形成方法 |
JPWO2014088018A1 (ja) * | 2012-12-07 | 2017-01-05 | 富士フイルム株式会社 | 硬化膜の製造方法、硬化膜、液晶表示装置および有機el表示装置 |
JP6089667B2 (ja) * | 2012-12-13 | 2017-03-08 | 大日本印刷株式会社 | レジスト付きフォトマスクブランクスの製造方法、および、フォトマスクの製造方法 |
TWI558850B (zh) * | 2014-03-29 | 2016-11-21 | 精密聚合物股份有限公司 | 電子零件用處理液及電子零件之製造方法 |
TWI559082B (zh) | 2014-07-07 | 2016-11-21 | 財團法人工業技術研究院 | 生質材料與其形成方法與印刷電路板 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69214035T2 (de) | 1991-06-28 | 1997-04-10 | Ibm | Reflexionsverminderde Überzüge |
JP2961975B2 (ja) | 1991-08-06 | 1999-10-12 | 日本電気株式会社 | 微細パターンの形成方法 |
KR100258494B1 (ko) * | 1992-06-02 | 2000-06-15 | 미우라 아끼라 | 레지스트 표면 반사 방지막 형성 조성물 및 패턴 형성방법 |
JPH05341536A (ja) | 1992-06-12 | 1993-12-24 | Toshiba Corp | レジストパターンの形成方法 |
JPH06242605A (ja) | 1993-02-15 | 1994-09-02 | Hoechst Japan Ltd | ポジ型放射感応性混合物 |
JP3300089B2 (ja) | 1993-02-15 | 2002-07-08 | クラリアント インターナショナル リミテッド | ポジ型放射感応性混合物 |
JPH06267838A (ja) | 1993-03-11 | 1994-09-22 | Hitachi Ltd | レジストパターンの形成方法 |
JP2803549B2 (ja) * | 1993-12-21 | 1998-09-24 | 信越化学工業株式会社 | 光反射性防止材料及びパターン形成方法 |
JP3402415B2 (ja) | 1994-03-03 | 2003-05-06 | 沖電気工業株式会社 | レジストパターン形成方法 |
JPH086256A (ja) * | 1994-06-24 | 1996-01-12 | Mitsubishi Electric Corp | レジストパターンの形成方法および該方法に用いられる酸性の水溶性材料組成物 |
JPH0980753A (ja) | 1995-09-13 | 1997-03-28 | Toshiba Corp | 感光性組成物 |
US5879853A (en) * | 1996-01-18 | 1999-03-09 | Kabushiki Kaisha Toshiba | Top antireflective coating material and its process for DUV and VUV lithography systems |
JP3694703B2 (ja) * | 1996-04-25 | 2005-09-14 | Azエレクトロニックマテリアルズ株式会社 | 反射防止コーティング用組成物 |
JPH1195442A (ja) * | 1997-09-24 | 1999-04-09 | Sharp Corp | フォトレジストパターン形成方法 |
JP3673399B2 (ja) * | 1998-06-03 | 2005-07-20 | クラリアント インターナショナル リミテッド | 反射防止コーティング用組成物 |
JP3967466B2 (ja) * | 1998-06-19 | 2007-08-29 | 信越化学工業株式会社 | 反射防止膜材料 |
CN1145194C (zh) * | 1998-11-20 | 2004-04-07 | 克拉瑞特金融(Bvi)有限公司 | 光致抗蚀图形的形成方法 |
-
2000
- 2000-11-15 JP JP2000347661A patent/JP2002148820A/ja active Pending
-
2001
- 2001-10-24 KR KR1020037006529A patent/KR100825657B1/ko not_active IP Right Cessation
- 2001-10-24 EP EP01978871A patent/EP1338923A4/en not_active Withdrawn
- 2001-10-24 CN CNB018188796A patent/CN1223908C/zh not_active Expired - Fee Related
- 2001-10-24 WO PCT/JP2001/009320 patent/WO2002041081A1/ja active Application Filing
- 2001-10-24 US US10/416,412 patent/US7018785B2/en not_active Expired - Lifetime
- 2001-10-26 MY MYPI20014966A patent/MY140694A/en unknown
- 2001-11-06 TW TW090127496A patent/TW583517B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20030051815A (ko) | 2003-06-25 |
MY140694A (en) | 2010-01-15 |
JP2002148820A (ja) | 2002-05-22 |
EP1338923A4 (en) | 2007-04-11 |
US7018785B2 (en) | 2006-03-28 |
US20040053170A1 (en) | 2004-03-18 |
CN1474962A (zh) | 2004-02-11 |
TW583517B (en) | 2004-04-11 |
WO2002041081A1 (fr) | 2002-05-23 |
KR100825657B1 (ko) | 2008-04-29 |
EP1338923A1 (en) | 2003-08-27 |
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Owner name: AZ ELECTRON MATERIAL ( JAPAN )) CO., LTD. Free format text: FORMER OWNER: CLARIANT INTERNATIONAL LTD. Effective date: 20050325 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Effective date of registration: 20050325 Address after: Japan Tokyo (113-0021) the Beijing area of the Komagome two chome 28 No. 8 Green Beijing office building Applicant after: Clariant Int Ltd. Address before: Mu Tengci, Switzerland Applicant before: Clariant International Ltd. |
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Owner name: AZ ELECTRONIC MATERIALS IP (JAPAN) K.K. Free format text: FORMER OWNER: AZ ELECTRONIC MATERIAL (JAPAN) CO., LTD. Effective date: 20120522 |
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Effective date of registration: 20120522 Address after: Japan Tokyo (113-0021) the Beijing area of the Komagome two chome 28 No. 8 Green Beijing office building Patentee after: AZ Electronic Materials (Japan) K. K. Address before: Japan Tokyo (113-0021) the Beijing area of the Komagome two chome 28 No. 8 Green Beijing office building Patentee before: AZ electronic materials (Japan) Co., Ltd. |
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Owner name: MERCK PATENT GMBH Free format text: FORMER OWNER: AZ ELECTRONIC MATERIALS IP (JAPAN) K.K. Effective date: 20150413 |
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Effective date of registration: 20150413 Address after: Darmstadt Patentee after: Merck Patent GmbH Address before: Japan's Tokyo Bunkyo the Komagome two chome 28 No. 8 Green Beijing office building Patentee before: AZ Electronic Materials (Japan) K. K. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20051019 Termination date: 20181024 |
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CF01 | Termination of patent right due to non-payment of annual fee |