KR920004846B1 - 마그네트론 스퍼터링 장치 및 방법 - Google Patents
마그네트론 스퍼터링 장치 및 방법 Download PDFInfo
- Publication number
- KR920004846B1 KR920004846B1 KR1019890001489A KR890001489A KR920004846B1 KR 920004846 B1 KR920004846 B1 KR 920004846B1 KR 1019890001489 A KR1019890001489 A KR 1019890001489A KR 890001489 A KR890001489 A KR 890001489A KR 920004846 B1 KR920004846 B1 KR 920004846B1
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- Prior art keywords
- substrate
- sputter
- carrier
- ion source
- sputtering
- Prior art date
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- H01J2237/02—Details
- H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Catching Or Destruction (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/154,177 US4851095A (en) | 1988-02-08 | 1988-02-08 | Magnetron sputtering apparatus and process |
US154,177 | 1988-02-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR890013215A KR890013215A (ko) | 1989-09-22 |
KR920004846B1 true KR920004846B1 (ko) | 1992-06-19 |
Family
ID=22550315
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019890001489A KR920004846B1 (ko) | 1988-02-08 | 1989-02-08 | 마그네트론 스퍼터링 장치 및 방법 |
Country Status (7)
Country | Link |
---|---|
US (1) | US4851095A (fr) |
EP (2) | EP0328257B2 (fr) |
JP (1) | JP3064301B2 (fr) |
KR (1) | KR920004846B1 (fr) |
AT (2) | ATE183245T1 (fr) |
CA (1) | CA1340651C (fr) |
DE (3) | DE68929053T2 (fr) |
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JPS62177176A (ja) * | 1986-01-30 | 1987-08-04 | Nippon Steel Corp | 薄膜形成装置 |
JPH0819518B2 (ja) * | 1986-06-02 | 1996-02-28 | 株式会社シンクロン | 薄膜形成方法および装置 |
JPS62287073A (ja) * | 1986-06-04 | 1987-12-12 | Sony Corp | マグネトロンスパツタリング用カソ−ド装置 |
-
1988
- 1988-02-08 US US07/154,177 patent/US4851095A/en not_active Expired - Lifetime
-
1989
- 1989-01-19 EP EP89300521A patent/EP0328257B2/fr not_active Expired - Lifetime
- 1989-01-19 DE DE68929053T patent/DE68929053T2/de not_active Expired - Lifetime
- 1989-01-19 DE DE198989300521T patent/DE328257T1/de active Pending
- 1989-01-19 AT AT95101758T patent/ATE183245T1/de not_active IP Right Cessation
- 1989-01-19 EP EP95101758A patent/EP0655515B2/fr not_active Expired - Lifetime
- 1989-01-19 AT AT89300521T patent/ATE151119T1/de not_active IP Right Cessation
- 1989-01-19 DE DE68927920T patent/DE68927920T3/de not_active Expired - Lifetime
- 1989-02-07 CA CA000590272A patent/CA1340651C/fr not_active Expired - Lifetime
- 1989-02-08 KR KR1019890001489A patent/KR920004846B1/ko not_active IP Right Cessation
- 1989-02-08 JP JP1029573A patent/JP3064301B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE68927920T3 (de) | 2004-12-16 |
JP3064301B2 (ja) | 2000-07-12 |
EP0655515B2 (fr) | 2008-10-15 |
ATE151119T1 (de) | 1997-04-15 |
ATE183245T1 (de) | 1999-08-15 |
EP0328257B1 (fr) | 1997-04-02 |
DE68929053T2 (de) | 2000-02-03 |
EP0328257A3 (fr) | 1990-10-31 |
DE68927920T2 (de) | 1997-07-17 |
CA1340651C (fr) | 1999-07-13 |
EP0328257B2 (fr) | 2004-07-14 |
EP0328257A2 (fr) | 1989-08-16 |
DE68927920D1 (de) | 1997-05-07 |
DE328257T1 (de) | 1990-05-03 |
EP0655515B1 (fr) | 1999-08-11 |
US4851095A (en) | 1989-07-25 |
DE68929053D1 (de) | 1999-09-16 |
JPH024967A (ja) | 1990-01-09 |
EP0655515A1 (fr) | 1995-05-31 |
KR890013215A (ko) | 1989-09-22 |
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