KR20100015513A - 패턴형성방법, 이 패턴형성방법에 사용되는 레지스트 조성물, 현상액 및 린스액 - Google Patents
패턴형성방법, 이 패턴형성방법에 사용되는 레지스트 조성물, 현상액 및 린스액 Download PDFInfo
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
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Abstract
Description
네거티브 톤 현상액 | 네거티브 톤 현상용 린스액 | 치수 균일성 (nm) | |
실시예 1 | 아세트산 부틸 | 1-헥산올 | 3.1 |
실시예 5 | 아세트산 에틸 | 1-헥산올 | 8.4 |
실시예 6 | 아세트산 이소아밀 | 1-헥산올 | 3.1 |
실시예 7 | 메틸이소부틸케톤 | 1-헥산올 | 3.5 |
실시예 8 | 2-헥사논 | 1-헥산올 | 2.7 |
실시예 9 | 메틸에틸케톤 | 1-헥산올 | 9.6 |
실시예 10 | 디프로필에테르 | 1-헥산올 | 11.6 |
실시예 11 | 디부틸에테르 | 1-헥산올 | 4.2 |
실시예 12 | 아세트산 부틸/2-헥사논 (80/20) | 1-헥산올 | 3.5 |
실시예 13 | 아세트산 이소아밀/디부틸에테르 (70/30) | 1-헥산올 | 3.8 |
실시예 14 | 아세트산 이소아밀 | 1-헥산올 | 8.8 |
실시예 15 | 아세트산 이소아밀 | 2-헥산올 | 3.3 |
실시예 16 | 아세트산 이소아밀 | 데칸 | 4.3 |
실시예 17 | 아세트산 이소아밀 | 도데칸 | 9.2 |
실시예 18 | 아세트산 이소아밀 | 1-헵탄올/데칸 (50/50) | 3.7 |
Claims (15)
- (i) 지환식 탄화수소 구조를 갖고, 분산도가 1.7 이하이며, 또한 산의 작용에 의해 극성이 증대하는 수지를 함유하고, 활성광선 또는 방사선의 조사에 의해 네거티브 톤 현상액에 대한 용해도가 감소하는 레지스트 조성물을 도포하는 공정;(ii) 노광공정; 및(iv) 네거티브 톤 현상액을 사용해서 현상하는 공정을 포함하는 것을 특징으로 하는 패턴형성방법.
- (i) 지환식 탄화수소 구조를 갖고, 중량 평균 분자량이 6000 이하이며, 또한 산의 작용에 의해 극성이 증대하는 수지를 함유하고, 활성광선 또는 방사선의 조사에 의해 네거티브 톤 현상액에 대한 용해도가 감소하는 레지스트 조성물을 도포하는 공정;(ii) 노광공정; 및(iv) 네거티브 톤 현상액을 사용해서 현상하는 공정을 포함하는 것을 특징으로 하는 패턴형성방법.
- (i) 지환식 탄화수소 구조를 갖고, 분산도가 1.7 이하이고, 중량 평균 분자량이 6000 이하이며, 또한 산의 작용에 의해 극성이 증대하는 수지를 함유하고, 활성광선 또는 방사선의 조사에 의해 네거티브 톤 현상액에 대한 용해도가 감소하는 레지스트 조성물을 도포하는 공정;(ii) 노광공정; 및(iv) 네거티브 톤 현상액을 사용해서 현상하는 공정을 포함하는 것을 특징으로 하는 패턴형성방법.
- 제 1 항 내지 제 3 항 중 어느 한 항에 있어서,상기 (iv) 네거티브 톤 현상액을 사용해서 현상하는 공정은 유기용제에서 선택되는 1종류 이상의 용제를 함유하는 20℃에 있어서의 증기압이 5.0kPa 이하인 현상액을 사용해서 행하는 공정인 것을 특징으로 하는 패턴형성방법.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,(vi) 유기용제를 포함하는 린스액을 사용해서 세정하는 공정을 더 포함하는 것을 특징으로 하는 패턴형성방법.
- 제 5 항에 있어서,상기 유기용제를 포함하는 린스액은 20℃에 있어서의 증기압이 0.1kPa 이상인 린스액인 것을 특징으로 하는 패턴형성방법.
- 제 1 항 내지 제 6 항 중 어느 한 항에 있어서,상기 (iii) 포지티브 톤 현상액을 사용해서 현상하는 공정을 더 포함하는 것 을 특징으로 하는 패턴형성방법.
- (a1) 지환식 탄화수소 구조를 갖고, 분산도가 1.7 이하이며, 또한 산의 작용에 의해 극성이 증대하는 수지;(B) 광산발생제; 및(C) 용제를 함유하는 것을 특징으로 하는 네거티브 톤 현상용 레지스트 조성물.
- (a2) 지환식 탄화수소 구조를 갖고, 중량 평균 분자량이 6000 이하이며, 또한 산의 작용에 의해 극성이 증대하는 수지;(B) 광산발생제; 및(C) 용제를 함유하는 것을 특징으로 하는 네거티브 톤 현상용 레지스트 조성물.
- (a3) 지환식 탄화수소 구조를 갖고, 분산도가 1.7 이하이고, 중량 평균 분자량이 6000 이하이며, 또한 산의 작용에 의해 극성이 증대하는 수지;(B) 광산발생제; 및(C) 용제를 함유하는 것을 특징으로 하는 네거티브 톤 현상용 레지스트 조성물.
- (a1) 지환식 탄화수소 구조를 갖고, 분산도가 1.7 이하이며, 또한 산의 작용에 의해 극성이 증대하는 수지;(B) 광산발생제; 및(C) 용제를 함유하는 것을 특징으로 하는 다중 현상용 레지스트 조성물.
- (a2) 지환식 탄화수소 구조를 갖고, 중량 평균 분자량이 6000 이하이며, 또한 산의 작용에 의해 극성이 증대하는 수지;(B) 광산발생제; 및(C) 용제를 함유하는 것을 특징으로 하는 다중 현상용 레지스트 조성물.
- (a3) 지환식 탄화수소 구조를 갖고, 분산도가 1.7 이하이고, 중량 평균 분자량이 6000 이하이며, 또한 산의 작용에 의해 극성이 증대하는 수지;(B) 광산발생제; 및(C) 용제를 함유하는 것을 특징으로 하는 다중 현상용 레지스트 조성물.
- 제 8 항 내지 제 13 항 중 어느 한 항에 기재된 레지스트 조성물에 사용하는 네거티브 톤 현상용 현상액으로서:유기용제를 함유하고, 20℃에 있어서의 증기압이 5kPa 이하인 것을 특징으로 하는 네거티브 톤 현상용 현상액.
- 제 8 항 내지 제 13 항 중 어느 한 항에 기재된 패턴형성방법에 사용하는 네거티브 톤 현상용 린스액으로서:유기용제를 함유하고, 20℃에 있어서의 증기압이 0.1kPa 이상인 것을 특징으로 하는 네거티브 톤 현상용 린스액.
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JPJP-P-2007-106175 | 2007-04-13 | ||
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KR20140024220A (ko) * | 2012-08-20 | 2014-02-28 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 패턴 형성 방법 및 레지스트 조성물 |
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US8530148B2 (en) | 2006-12-25 | 2013-09-10 | Fujifilm Corporation | Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method |
US8637229B2 (en) | 2006-12-25 | 2014-01-28 | Fujifilm Corporation | Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method |
KR100990106B1 (ko) | 2007-04-13 | 2010-10-29 | 후지필름 가부시키가이샤 | 패턴형성방법, 이 패턴형성방법에 사용되는 레지스트 조성물, 현상액 및 린스액 |
US8603733B2 (en) | 2007-04-13 | 2013-12-10 | Fujifilm Corporation | Pattern forming method, and resist composition, developer and rinsing solution used in the pattern forming method |
US8034547B2 (en) | 2007-04-13 | 2011-10-11 | Fujifilm Corporation | Pattern forming method, resist composition to be used in the pattern forming method, negative developing solution to be used in the pattern forming method and rinsing solution for negative development to be used in the pattern forming method |
US8476001B2 (en) | 2007-05-15 | 2013-07-02 | Fujifilm Corporation | Pattern forming method |
KR100989567B1 (ko) | 2007-05-15 | 2010-10-25 | 후지필름 가부시키가이샤 | 패턴형성방법 |
US8632942B2 (en) | 2007-06-12 | 2014-01-21 | Fujifilm Corporation | Method of forming patterns |
US8617794B2 (en) | 2007-06-12 | 2013-12-31 | Fujifilm Corporation | Method of forming patterns |
JP4590431B2 (ja) | 2007-06-12 | 2010-12-01 | 富士フイルム株式会社 | パターン形成方法 |
US7851140B2 (en) * | 2007-06-12 | 2010-12-14 | Fujifilm Corporation | Resist composition for negative tone development and pattern forming method using the same |
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2008
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- 2008-04-11 EP EP08740284.8A patent/EP2138898B1/en active Active
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Publication number | Priority date | Publication date | Assignee | Title |
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KR20140024220A (ko) * | 2012-08-20 | 2014-02-28 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 패턴 형성 방법 및 레지스트 조성물 |
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US8017304B2 (en) | 2011-09-13 |
JP4562784B2 (ja) | 2010-10-13 |
EP2138898A1 (en) | 2009-12-30 |
EP2138898B1 (en) | 2014-05-21 |
KR100990106B1 (ko) | 2010-10-29 |
EP2138898A4 (en) | 2012-12-05 |
US20100040972A1 (en) | 2010-02-18 |
WO2008129964A1 (ja) | 2008-10-30 |
US20100040971A1 (en) | 2010-02-18 |
JP2009053657A (ja) | 2009-03-12 |
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