KR20050101172A - 진공흡착 헤드 - Google Patents
진공흡착 헤드 Download PDFInfo
- Publication number
- KR20050101172A KR20050101172A KR1020057012939A KR20057012939A KR20050101172A KR 20050101172 A KR20050101172 A KR 20050101172A KR 1020057012939 A KR1020057012939 A KR 1020057012939A KR 20057012939 A KR20057012939 A KR 20057012939A KR 20050101172 A KR20050101172 A KR 20050101172A
- Authority
- KR
- South Korea
- Prior art keywords
- pad
- adsorption
- vacuum
- substrate
- vacuum adsorption
- Prior art date
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
- B25B11/007—Vacuum work holders portable, e.g. handheld
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H3/00—Separating articles from piles
- B65H3/08—Separating articles from piles using pneumatic force
- B65H3/0808—Suction grippers
- B65H3/0883—Construction of suction grippers or their holding devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/30—End effector
- Y10S901/40—Vacuum or mangetic
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Robotics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Valves And Accessory Devices For Braking Systems (AREA)
- Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Claims (6)
- 기판(基板)을 진공흡착(眞空吸着)하는 진공흡착 헤드로서,판자모양 부재를 이용하여 그 일방의 면에 대하여 다수의 독립한 볼록부와 오목부를 형성한 흡착부, 상기 흡착부를 둘러싸는 상기 판자모양 부재의 외주(外周)위치에 고리모양으로 형성한 기밀부(氣密部), 상기 흡착부의 기체를 배기하는 통로가 되는 홈부, 상기 홈부의 기체를 외부로 배기하는 개구(開口)를 형성하는 진공흡착 패드와,상기 진공흡착 패드를 수용하도록 형성되고, 상기 진공흡착 패드가 흡착 대상의 기판에 근접했을 때에 상기 진공흡착 패드의 주변 공간으로부터 외기(外氣)를 차단하는 탄성부재(彈性部材)를 구비하고,또한 상기 탄성부재는 그 탄성부재의 외측의 기체를 내측으로 리크(leak) 시키는 기능을 구비하는 것을 특징으로 하는 진공흡착 헤드.
- 제1항에 있어서,상기 탄성부재는 스커트 모양으로 형성된 스커트 패드(skirt pad)로서,상기 진공흡착 패드를 흡착면의 배후에서 지지하는 플레이트부(plate部)와,상기 진공흡착 패드의 외주부를 소정의 간격을 사이에 두고 둘러싸도록 상기 플레이트부의 외측 가장자리 부분에 두꺼운 고리 모양으로 형성한 환상부(環狀部)와,상기 환상부의 외주부에서 두께를 얇게 하여 원추(圓錐) 고리 모양으로 형성한 스커트부(skirt部)를 구비하는 것을 특징으로 하는 진공흡착 헤드.
- 제2항에 있어서,상기 스커트 패드는 상기 환상부의 외측과 내측 공간을 연통(連通)하고 상기 외측과 내측 공간의 압력 차이가 클 때에 상기 외측의 기체를 내측으로 리크(leak) 시키는 슬릿을 상기 환상부에 형성한 것을 특징으로 하는 진공흡착 헤드.
- 제1항에 있어서,상기 탄성부재는 원통 모양으로 형성된 스펀지 패드(sponge pad)로서,상기 진공흡착 패드가 흡착 대상의 기판에 근접했을 때에 상기 진공흡착 패드의 주변 공간을 외기로부터 차폐(遮蔽)하도록 연속기포체(連續氣泡體)의 스펀지 부재를 이용하여 원통 모양으로 성형되고, 차폐 상태에서 외측과 내측 공간의 압력차이가 있을 때에 상기 외측의 기체를 내측으로 리크 시키는 것을 특징으로 하는 진공흡착 헤드.
- 제1항에 있어서,상기 진공흡착 패드의 흡착부는,에칭 가능한 판자모양 부재를 이용하여 그 일방의 면에 대하여 다수의 독립한 볼록부와 오목부를 에칭에 의하여 형성한 것이고, 상기 기밀부는 상기 판자모양 부재의 외주를 비에칭 영역으로 하여 고리 모양으로 형성한 것을 특징으로 하는 진공흡착 헤드.
- 제5항에 있어서,상기 진공흡착 패드는 자외선 조사(紫外線 照射) 및 용제(溶劑)를 이용하여 선택적으로 에칭이 가능한 감광성 수지 재료(感光性 樹脂 材料)를 이용한 것을 특징으로 하는 진공흡착 헤드.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2003-00020620 | 2003-01-29 | ||
JP2003020620 | 2003-01-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050101172A true KR20050101172A (ko) | 2005-10-20 |
KR101019469B1 KR101019469B1 (ko) | 2011-03-07 |
Family
ID=32820631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020057012939A KR101019469B1 (ko) | 2003-01-29 | 2004-01-28 | 진공흡착 헤드 |
Country Status (10)
Country | Link |
---|---|
US (1) | US7726715B2 (ko) |
EP (1) | EP1593465B1 (ko) |
JP (1) | JP4468893B2 (ko) |
KR (1) | KR101019469B1 (ko) |
CN (1) | CN100396454C (ko) |
AT (1) | ATE454960T1 (ko) |
DE (1) | DE602004025084D1 (ko) |
HK (1) | HK1088276A1 (ko) |
TW (1) | TW200505626A (ko) |
WO (1) | WO2004067234A1 (ko) |
Cited By (3)
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KR101477631B1 (ko) * | 2013-04-30 | 2014-12-31 | (주)엠프리시젼 | 흡착 패드 및 그 제조 방법 |
KR20190135861A (ko) * | 2018-05-29 | 2019-12-09 | (주)포인트엔지니어링 | 마이크로 led 전사헤드 및 이를 이용한 마이크로 led 전사 시스템 |
KR20190135858A (ko) * | 2018-05-29 | 2019-12-09 | (주)포인트엔지니어링 | 마이크로 led 전사헤드 및 이를 이용한 마이크로 led 전사 시스템 |
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2004
- 2004-01-28 TW TW093101838A patent/TW200505626A/zh not_active IP Right Cessation
- 2004-01-28 KR KR1020057012939A patent/KR101019469B1/ko active IP Right Grant
- 2004-01-28 DE DE602004025084T patent/DE602004025084D1/de not_active Expired - Lifetime
- 2004-01-28 CN CNB2004800030764A patent/CN100396454C/zh not_active Expired - Fee Related
- 2004-01-28 JP JP2005504733A patent/JP4468893B2/ja not_active Expired - Fee Related
- 2004-01-28 EP EP04705888A patent/EP1593465B1/en not_active Expired - Lifetime
- 2004-01-28 WO PCT/JP2004/000785 patent/WO2004067234A1/ja active Application Filing
- 2004-01-28 AT AT04705888T patent/ATE454960T1/de not_active IP Right Cessation
- 2004-01-28 US US10/543,726 patent/US7726715B2/en not_active Expired - Fee Related
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101477631B1 (ko) * | 2013-04-30 | 2014-12-31 | (주)엠프리시젼 | 흡착 패드 및 그 제조 방법 |
KR20190135861A (ko) * | 2018-05-29 | 2019-12-09 | (주)포인트엔지니어링 | 마이크로 led 전사헤드 및 이를 이용한 마이크로 led 전사 시스템 |
KR20190135858A (ko) * | 2018-05-29 | 2019-12-09 | (주)포인트엔지니어링 | 마이크로 led 전사헤드 및 이를 이용한 마이크로 led 전사 시스템 |
Also Published As
Publication number | Publication date |
---|---|
ATE454960T1 (de) | 2010-01-15 |
EP1593465A4 (en) | 2008-07-23 |
HK1088276A1 (en) | 2006-11-03 |
CN100396454C (zh) | 2008-06-25 |
TW200505626A (en) | 2005-02-16 |
DE602004025084D1 (de) | 2010-03-04 |
EP1593465B1 (en) | 2010-01-13 |
JPWO2004067234A1 (ja) | 2006-05-18 |
WO2004067234A1 (ja) | 2004-08-12 |
US7726715B2 (en) | 2010-06-01 |
CN1744970A (zh) | 2006-03-08 |
KR101019469B1 (ko) | 2011-03-07 |
TWI309993B (ko) | 2009-05-21 |
JP4468893B2 (ja) | 2010-05-26 |
US20060232085A1 (en) | 2006-10-19 |
EP1593465A1 (en) | 2005-11-09 |
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