KR102475021B1 - 감광 화학물질 또는 감광 화학 증폭형 레지스트의 사용에 의한 임계 치수 제어 - Google Patents

감광 화학물질 또는 감광 화학 증폭형 레지스트의 사용에 의한 임계 치수 제어 Download PDF

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KR102475021B1
KR102475021B1 KR1020187035932A KR20187035932A KR102475021B1 KR 102475021 B1 KR102475021 B1 KR 102475021B1 KR 1020187035932 A KR1020187035932 A KR 1020187035932A KR 20187035932 A KR20187035932 A KR 20187035932A KR 102475021 B1 KR102475021 B1 KR 102475021B1
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wavelength
radiation
light
sensitive material
flood
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KR20190007019A (ko
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마이클 에이. 카르카시
안톤 제이. 데빌리어스
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도쿄엘렉트론가부시키가이샤
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2024—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure of the already developed image
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/38—Treatment before imagewise removal, e.g. prebaking
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G03F7/405—Treatment with inorganic or organometallic reagents after imagewise removal
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/22—Matching criteria, e.g. proximity measures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Data Mining & Analysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Biology (AREA)
  • Evolutionary Computation (AREA)
  • General Engineering & Computer Science (AREA)
  • Artificial Intelligence (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020187035932A 2016-05-13 2017-05-12 감광 화학물질 또는 감광 화학 증폭형 레지스트의 사용에 의한 임계 치수 제어 Active KR102475021B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662335977P 2016-05-13 2016-05-13
US62/335,977 2016-05-13
PCT/US2017/032435 WO2017197279A1 (en) 2016-05-13 2017-05-12 Critical dimension control by use of photo-sensitized chemicals or photo-sensitized chemically amplified resist

Publications (2)

Publication Number Publication Date
KR20190007019A KR20190007019A (ko) 2019-01-21
KR102475021B1 true KR102475021B1 (ko) 2022-12-06

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Country Status (6)

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US (1) US10551743B2 (enExample)
JP (1) JP6909374B2 (enExample)
KR (1) KR102475021B1 (enExample)
CN (1) CN109313394B (enExample)
TW (1) TWI657314B (enExample)
WO (1) WO2017197279A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9618848B2 (en) * 2014-02-24 2017-04-11 Tokyo Electron Limited Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes
DE112015000546T5 (de) 2014-02-25 2016-11-10 Tokyo Electron Limited Chemische Verstärkungsverfahren und -methoden für entwickelbare untere Antireflexbeläge und gefärbte Implantationsresists
US10048594B2 (en) 2016-02-19 2018-08-14 Tokyo Electron Limited Photo-sensitized chemically amplified resist (PS-CAR) model calibration
US10429745B2 (en) 2016-02-19 2019-10-01 Osaka University Photo-sensitized chemically amplified resist (PS-CAR) simulation
JP6750155B2 (ja) 2016-05-13 2020-09-02 東京エレクトロン株式会社 光剤を用いた限界寸法制御
WO2017197279A1 (en) 2016-05-13 2017-11-16 Tokyo Electron Limited Critical dimension control by use of photo-sensitized chemicals or photo-sensitized chemically amplified resist
DE102016221261A1 (de) * 2016-10-28 2018-05-03 Carl Zeiss Smt Gmbh Verfahren zur mikrolithographischen Herstellung mikrostrukturierter Bauelemente
CN111919283B (zh) * 2018-03-19 2024-02-27 东京毅力科创株式会社 用于使用经校准的修整剂量校正关键尺寸的方法
US11796919B2 (en) * 2018-06-14 2023-10-24 Osaka University Resist pattern formation method
WO2021034567A1 (en) * 2019-08-16 2021-02-25 Tokyo Electron Limited Method and process for stochastic driven defectivity healing
JP7196121B2 (ja) * 2020-02-10 2022-12-26 富士フイルム株式会社 パターン形成方法、感光性樹脂組成物、積層体の製造方法、及び、電子デバイスの製造方法
US11747733B2 (en) * 2021-01-08 2023-09-05 Tokyo Electron Limited Freeze-less methods for self-aligned double patterning
US20250244680A1 (en) * 2024-01-30 2025-07-31 Tokyo Electron Limited Method for selective exposure of wafer to corrective irradiation at a per-die level

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6180320B1 (en) 1998-03-09 2001-01-30 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing a semiconductor device having a fine pattern, and semiconductor device manufactured thereby
US20100273099A1 (en) * 2009-04-27 2010-10-28 Tokyo Electron Limited Flood exposure process for dual tone development in lithographic applications
US20130260313A1 (en) 2012-03-31 2013-10-03 Central Glass Co., Ltd. Photoacid generating polymers containing a urethane linkage for lithography
WO2015127353A1 (en) * 2014-02-24 2015-08-27 Tokyo Electron Limited Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist

Family Cites Families (95)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4402571A (en) 1981-02-17 1983-09-06 Polaroid Corporation Method for producing a surface relief pattern
US4609615A (en) 1983-03-31 1986-09-02 Oki Electric Industry Co., Ltd. Process for forming pattern with negative resist using quinone diazide compound
DE3576088D1 (de) 1985-05-29 1990-03-29 Ibm Deutschland Verfahren zur reparatur von transmissionsmasken.
US4931380A (en) 1985-07-18 1990-06-05 Microsi, Inc. Pre-exposure method for increased sensitivity in high contrast resist development of positive working diazo ketone photoresist
JPH0654390B2 (ja) 1986-07-18 1994-07-20 東京応化工業株式会社 高耐熱性ポジ型ホトレジスト組成物
JPH0740543B2 (ja) 1987-02-17 1995-05-01 松下電子工業株式会社 半導体装置の製造方法
JPH04239116A (ja) 1991-01-14 1992-08-27 Fujitsu Ltd 半導体装置の製造方法
JP2723405B2 (ja) 1991-11-12 1998-03-09 松下電器産業株式会社 微細電極の形成方法
US5294680A (en) 1992-07-24 1994-03-15 International Business Machines Corporation Polymeric dyes for antireflective coatings
JP3158710B2 (ja) 1992-09-16 2001-04-23 日本ゼオン株式会社 化学増幅レジストパターンの形成方法
US5534970A (en) 1993-06-11 1996-07-09 Nikon Corporation Scanning exposure apparatus
TW276353B (enExample) 1993-07-15 1996-05-21 Hitachi Seisakusyo Kk
JP3288884B2 (ja) * 1995-03-13 2002-06-04 株式会社東芝 レジストパターン形成方法
JPH0990621A (ja) 1995-09-21 1997-04-04 Canon Inc レジスト組成物、同組成物を用いるパターン形成方法、および半導体デバイスの製造方法
JP2910654B2 (ja) 1996-01-30 1999-06-23 日本電気株式会社 レジストパターン形成方法
JP2867964B2 (ja) 1996-06-27 1999-03-10 日本電気株式会社 レジスト膜パターンの形成方法
US5905019A (en) 1997-09-26 1999-05-18 International Business Machines Corporation Thin resist process by sub-threshold exposure
JPH11237737A (ja) 1997-12-19 1999-08-31 Kansai Shingijutsu Kenkyusho:Kk 感光性樹脂組成物およびその製造方法
US6245492B1 (en) 1998-08-13 2001-06-12 International Business Machines Corporation Photoresist system and process for aerial image enhancement
JP2000208408A (ja) 1999-01-19 2000-07-28 Nec Corp 化学増幅系レジストのパタ―ン形成方法
JP4557328B2 (ja) 1999-02-01 2010-10-06 富士フイルム株式会社 ポジ型フォトレジスト組成物
US6824879B2 (en) 1999-06-10 2004-11-30 Honeywell International Inc. Spin-on-glass anti-reflective coatings for photolithography
US6582891B1 (en) 1999-12-02 2003-06-24 Axcelis Technologies, Inc. Process for reducing edge roughness in patterned photoresist
JP2002006512A (ja) 2000-06-20 2002-01-09 Mitsubishi Electric Corp 微細パターン形成方法、微細パターン形成用材料、およびこの微細パターン形成方法を用いた半導体装置の製造方法
KR20020041413A (ko) 2000-06-22 2002-06-01 롤페스 요하네스 게라투스 알베르투스 광영상을 형성하는 방법, 이 방법에 사용하는 마스크, 이방법을 사용하는 소자를 제조하는 방법 및 이 방법을수행하는 장치
US6548219B2 (en) 2001-01-26 2003-04-15 International Business Machines Corporation Substituted norbornene fluoroacrylate copolymers and use thereof in lithographic photoresist compositions
US6555479B1 (en) 2001-06-11 2003-04-29 Advanced Micro Devices, Inc. Method for forming openings for conductive interconnects
WO2003001297A2 (en) 2001-06-26 2003-01-03 Kla-Tencor Corporation Method for determining lithographic focus and exposure
US7136796B2 (en) 2002-02-28 2006-11-14 Timbre Technologies, Inc. Generation and use of integrated circuit profile-based simulation information
JP3711083B2 (ja) * 2002-04-12 2005-10-26 株式会社東芝 パターン形成方法
JP4410977B2 (ja) 2002-07-09 2010-02-10 富士通株式会社 化学増幅レジスト材料及びそれを用いたパターニング方法
US6900001B2 (en) 2003-01-31 2005-05-31 Applied Materials, Inc. Method for modifying resist images by electron beam exposure
US6968253B2 (en) 2003-05-07 2005-11-22 Kla-Tencor Technologies Corp. Computer-implemented method and carrier medium configured to generate a set of process parameters for a lithography process
SG115693A1 (en) 2003-05-21 2005-10-28 Asml Netherlands Bv Method for coating a substrate for euv lithography and substrate with photoresist layer
US7186486B2 (en) 2003-08-04 2007-03-06 Micronic Laser Systems Ab Method to pattern a substrate
WO2005081295A1 (ja) 2004-02-20 2005-09-01 Nikon Corporation 露光方法、露光装置及び露光システム並びにデバイス製造方法
US20050214674A1 (en) 2004-03-25 2005-09-29 Yu Sui Positive-working photoimageable bottom antireflective coating
JP4481723B2 (ja) 2004-05-25 2010-06-16 株式会社東芝 評価方法、マスクパターン補正方法、半導体装置の製造方法、及びプログラム
JP4524154B2 (ja) 2004-08-18 2010-08-11 富士フイルム株式会社 化学増幅型レジスト組成物及びそれを用いたパターン形成方法
US20060269879A1 (en) 2005-05-24 2006-11-30 Infineon Technologies Ag Method and apparatus for a post exposure bake of a resist
JP2007033882A (ja) * 2005-07-27 2007-02-08 Hitachi Via Mechanics Ltd 露光装置及び露光方法並びに配線基板の製造方法
US7488933B2 (en) 2005-08-05 2009-02-10 Brion Technologies, Inc. Method for lithography model calibration
KR100703007B1 (ko) 2005-11-17 2007-04-06 삼성전자주식회사 감광성 유기 반사 방지막 형성용 조성물 및 이를 이용한패턴 형성 방법
US20070275330A1 (en) 2006-05-25 2007-11-29 International Business Machines Corporation Bottom anti-reflective coating
US7687205B2 (en) 2006-06-15 2010-03-30 The Boeing Company Photolithographic method and apparatus employing a polychromatic mask
JP2007334036A (ja) 2006-06-15 2007-12-27 Sekisui Chem Co Ltd 感光性樹脂組成物、これを用いた薄膜パターンの製造方法、電子機器用保護膜、トランジスタ、カラーフィルタ、有機ｅｌ素子、ゲート絶縁膜及び薄膜トランジスタ
DE102006053074B4 (de) 2006-11-10 2012-03-29 Qimonda Ag Strukturierungsverfahren unter Verwendung chemisch verstärkter Fotolacke und Belichtungsvorrichtung
JP4678383B2 (ja) 2007-03-29 2011-04-27 信越化学工業株式会社 化学増幅ネガ型レジスト組成物及びパターン形成方法
US20090096106A1 (en) 2007-10-12 2009-04-16 Air Products And Chemicals, Inc. Antireflective coatings
US8088548B2 (en) 2007-10-23 2012-01-03 Az Electronic Materials Usa Corp. Bottom antireflective coating compositions
JP4961324B2 (ja) 2007-10-26 2012-06-27 富士フイルム株式会社 電子線、ｘ線又はｅｕｖ用ポジ型レジスト組成物及びそれを用いたパターン形成方法
KR101585992B1 (ko) 2007-12-20 2016-01-19 삼성전자주식회사 반사방지 코팅용 고분자, 반사방지 코팅용 조성물 및 이를 이용한 반도체 장치의 패턴 형성 방법
US20090214985A1 (en) 2008-02-27 2009-08-27 Tokyo Electron Limited Method for reducing surface defects on patterned resist features
US20090274974A1 (en) 2008-04-30 2009-11-05 David Abdallah Spin-on graded k silicon antireflective coating
US7966582B2 (en) 2008-05-23 2011-06-21 Synopsys, Inc. Method and apparatus for modeling long-range EUVL flare
CN102056913A (zh) 2008-06-12 2011-05-11 巴斯夫欧洲公司 锍衍生物及其作为潜酸的用途
NL2003654A (en) 2008-11-06 2010-05-10 Brion Tech Inc Methods and system for lithography calibration.
US8455176B2 (en) 2008-11-12 2013-06-04 Az Electronic Materials Usa Corp. Coating composition
US8383318B2 (en) 2009-02-19 2013-02-26 Brewer Science Inc. Acid-sensitive, developer-soluble bottom anti-reflective coatings
DE102009015717B4 (de) 2009-03-31 2012-12-13 Globalfoundries Dresden Module One Limited Liability Company & Co. Kg Verfahren und System zum Erkennen einer Teilchenkontamination in einer Immersionslithographieanlage
JP5011345B2 (ja) 2009-05-15 2012-08-29 東京エレクトロン株式会社 レジストパターンのスリミング処理方法
JP2013502592A (ja) 2009-08-24 2013-01-24 エーエスエムエル ネザーランズ ビー．ブイ． メトロロジ方法および装置、リソグラフィ装置、リソグラフィプロセシングセル、およびメトロロジターゲットを備える基板
US8428762B2 (en) 2009-08-28 2013-04-23 Kla-Tencor Corporation Spin coating modeling
US8589827B2 (en) 2009-11-12 2013-11-19 Kla-Tencor Corporation Photoresist simulation
US8623458B2 (en) 2009-12-18 2014-01-07 International Business Machines Corporation Methods of directed self-assembly, and layered structures formed therefrom
US8795952B2 (en) 2010-02-21 2014-08-05 Tokyo Electron Limited Line pattern collapse mitigation through gap-fill material application
US8124319B2 (en) 2010-04-12 2012-02-28 Nanya Technology Corp. Semiconductor lithography process
US8940475B2 (en) * 2010-11-23 2015-01-27 Tokyo Electron Limited Double patterning with inline critical dimension slimming
US8443308B2 (en) 2011-05-02 2013-05-14 Synopsys Inc. EUV lithography flare calculation and compensation
CN108594599B (zh) 2011-07-08 2022-04-22 Asml荷兰有限公司 抗蚀剂材料、光刻图案化方法和氧化物的用途
CN103034048B (zh) 2011-09-29 2015-04-22 中芯国际集成电路制造(北京)有限公司 光刻方法
JP5846046B2 (ja) 2011-12-06 2016-01-20 信越化学工業株式会社 レジスト保護膜材料及びパターン形成方法
JP5705103B2 (ja) 2011-12-26 2015-04-22 株式会社東芝 パターン形成方法
US8647817B2 (en) 2012-01-03 2014-02-11 Tokyo Electron Limited Vapor treatment process for pattern smoothing and inline critical dimension slimming
JP5789275B2 (ja) 2012-02-03 2015-10-07 エーエスエムエル ネザーランズ ビー．ブイ． ３ｄレジストプロファイルのシミュレーション用のリソグラフィモデル
CN103309164A (zh) 2012-03-09 2013-09-18 中芯国际集成电路制造(上海)有限公司 半导体结构的形成方法
JP5741518B2 (ja) 2012-04-24 2015-07-01 信越化学工業株式会社 レジスト下層膜材料及びパターン形成方法
JP6004172B2 (ja) 2012-07-31 2016-10-05 日産化学工業株式会社 カルボニル基含有カルバゾールノボラックを含むリソグラフィー用レジスト下層膜形成組成物
JP2014143415A (ja) 2012-12-31 2014-08-07 Rohm & Haas Electronic Materials Llc イオン注入法
US9977332B2 (en) 2013-02-20 2018-05-22 Osaka University Resist patterning method, latent resist image forming device, resist patterning device, and resist material
JP6337757B2 (ja) * 2014-01-20 2018-06-06 東京エレクトロン株式会社 露光装置、レジストパターン形成方法及び記憶媒体
JP6321189B2 (ja) * 2014-01-27 2018-05-09 東京エレクトロン株式会社 パターン化膜の臨界寸法をシフトするシステムおよび方法
CN106030417B (zh) 2014-02-21 2020-02-28 东京毅力科创株式会社 光增感化学放大型抗蚀剂材料及使用了其的图案形成方法、以及半导体器件、光刻用掩模和纳米压印用模板的制造方法
WO2015127348A1 (en) * 2014-02-24 2015-08-27 Tokyo Electron Limited Mitigation of euv shot noise replicating into acid shot noise in photo-sensitized chemically-amplified resist
US9618848B2 (en) 2014-02-24 2017-04-11 Tokyo Electron Limited Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes
DE112015000546T5 (de) 2014-02-25 2016-11-10 Tokyo Electron Limited Chemische Verstärkungsverfahren und -methoden für entwickelbare untere Antireflexbeläge und gefärbte Implantationsresists
WO2016025210A1 (en) * 2014-08-13 2016-02-18 Tokyo Electron Limited Critical dimension control in photo-sensitized chemically-amplified resist
JP6175455B2 (ja) * 2015-01-22 2017-08-02 東京エレクトロン株式会社 レジストパターン形成方法
JP6774814B2 (ja) 2015-08-20 2020-10-28 国立大学法人大阪大学 化学増幅型レジスト材料及びパターン形成方法
JP6809843B2 (ja) 2015-08-20 2021-01-06 国立大学法人大阪大学 パターン形成方法
JP6512994B2 (ja) 2015-08-20 2019-05-15 国立大学法人大阪大学 化学増幅型レジスト材料
US10429745B2 (en) 2016-02-19 2019-10-01 Osaka University Photo-sensitized chemically amplified resist (PS-CAR) simulation
US10048594B2 (en) 2016-02-19 2018-08-14 Tokyo Electron Limited Photo-sensitized chemically amplified resist (PS-CAR) model calibration
WO2017197279A1 (en) 2016-05-13 2017-11-16 Tokyo Electron Limited Critical dimension control by use of photo-sensitized chemicals or photo-sensitized chemically amplified resist
JP6750155B2 (ja) 2016-05-13 2020-09-02 東京エレクトロン株式会社 光剤を用いた限界寸法制御

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6180320B1 (en) 1998-03-09 2001-01-30 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing a semiconductor device having a fine pattern, and semiconductor device manufactured thereby
US20100273099A1 (en) * 2009-04-27 2010-10-28 Tokyo Electron Limited Flood exposure process for dual tone development in lithographic applications
WO2010126735A1 (en) 2009-04-27 2010-11-04 Tokyo Electron Limited Flood exposure process for dual tone development in lithographic applications
US20130260313A1 (en) 2012-03-31 2013-10-03 Central Glass Co., Ltd. Photoacid generating polymers containing a urethane linkage for lithography
WO2015127353A1 (en) * 2014-02-24 2015-08-27 Tokyo Electron Limited Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist

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