KR102188751B1 - 실리콘-함유 막을 증착시키기 위한 조성물 및 이를 사용하는 방법 - Google Patents

실리콘-함유 막을 증착시키기 위한 조성물 및 이를 사용하는 방법 Download PDF

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KR102188751B1
KR102188751B1 KR1020177013995A KR20177013995A KR102188751B1 KR 102188751 B1 KR102188751 B1 KR 102188751B1 KR 1020177013995 A KR1020177013995 A KR 1020177013995A KR 20177013995 A KR20177013995 A KR 20177013995A KR 102188751 B1 KR102188751 B1 KR 102188751B1
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plasma
silicon
nitrogen
reactor
silicon nitride
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KR20170074958A (ko
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신지안 레이
무성 김
매튜 알. 맥도날드
만차오 시아오
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버슘머트리얼즈 유에스, 엘엘씨
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    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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