JP2017535077A - ケイ素含有膜の堆積のための組成物及びそれを使用した方法 - Google Patents

ケイ素含有膜の堆積のための組成物及びそれを使用した方法 Download PDF

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JP2017535077A
JP2017535077A JP2017522032A JP2017522032A JP2017535077A JP 2017535077 A JP2017535077 A JP 2017535077A JP 2017522032 A JP2017522032 A JP 2017522032A JP 2017522032 A JP2017522032 A JP 2017522032A JP 2017535077 A JP2017535077 A JP 2017535077A
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branched
linear
group
compound
plasma
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リー ジエンホゥオン
リー ジエンホゥオン
フランシス レーマン ジョン
フランシス レーマン ジョン
レイ シンジエン
レイ シンジエン
レイモンド　ニコラス　バーティス
ニコラス バーティス レイモンド
ゴードン リッジウェイ ロバート
ゴードン リッジウェイ ロバート
ロバート エントリー ウィリアム
ロバート エントリー ウィリアム
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バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー
バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー
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Publication of JP2017535077A publication Critical patent/JP2017535077A/ja
Priority to JP2019164049A priority Critical patent/JP6949912B2/ja
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    • H10P14/692—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses
    • H10P14/6921—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon
    • H10P14/6922—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon the material containing Si, O and at least one of H, N, C, F or other non-metal elements, e.g. SiOC, SiOC:H or SiONC

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