KR102157973B1 - 이물질 제거 장치 및 이물질 제거 방법 - Google Patents

이물질 제거 장치 및 이물질 제거 방법 Download PDF

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Publication number
KR102157973B1
KR102157973B1 KR1020197018146A KR20197018146A KR102157973B1 KR 102157973 B1 KR102157973 B1 KR 102157973B1 KR 1020197018146 A KR1020197018146 A KR 1020197018146A KR 20197018146 A KR20197018146 A KR 20197018146A KR 102157973 B1 KR102157973 B1 KR 102157973B1
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KR
South Korea
Prior art keywords
cleaning head
sheet
foreign matter
ejection slit
fluid
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KR1020197018146A
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English (en)
Korean (ko)
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KR20190089182A (ko
Inventor
코지 칸바라
Original Assignee
휴글 가이하쓰 가부시키가이샤
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Publication of KR20190089182A publication Critical patent/KR20190089182A/ko
Application granted granted Critical
Publication of KR102157973B1 publication Critical patent/KR102157973B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B08B5/023—Cleaning travelling work
    • B08B5/026—Cleaning moving webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • B08B5/043—Cleaning travelling work
    • B08B5/046—Cleaning moving webs

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  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020197018146A 2016-12-28 2017-12-19 이물질 제거 장치 및 이물질 제거 방법 KR102157973B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016255096A JP6975953B2 (ja) 2016-12-28 2016-12-28 異物除去装置及び異物除去方法
JPJP-P-2016-255096 2016-12-28
PCT/JP2017/045465 WO2018123715A1 (ja) 2016-12-28 2017-12-19 異物除去装置及び異物除去方法

Publications (2)

Publication Number Publication Date
KR20190089182A KR20190089182A (ko) 2019-07-30
KR102157973B1 true KR102157973B1 (ko) 2020-09-18

Family

ID=62708125

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020197018146A KR102157973B1 (ko) 2016-12-28 2017-12-19 이물질 제거 장치 및 이물질 제거 방법

Country Status (5)

Country Link
JP (1) JP6975953B2 (zh)
KR (1) KR102157973B1 (zh)
CN (1) CN110087784B (zh)
TW (1) TWI668056B (zh)
WO (1) WO2018123715A1 (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11318509B2 (en) * 2017-11-06 2022-05-03 Air Systems Design, Inc. Dust hood
CN110963564B (zh) * 2019-12-19 2020-08-18 浙江海盐力源环保科技股份有限公司 一种工业废水中去除重金属离子的处理设备

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001156033A (ja) 1999-11-25 2001-06-08 Yokogawa Electric Corp ドライ洗浄方法及び装置
KR101248534B1 (ko) 2005-07-06 2013-04-02 휴글엘렉트로닉스가부시키가이샤 기판용 반송 제진 장치의 사용 방법 및 기판용 반송 제진장치
KR101598360B1 (ko) 2014-09-05 2016-02-29 지에스티 반도체장비(주) 기판 세척용 기판 위치 제어 장치

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JP5403407B2 (ja) * 2008-06-18 2014-01-29 株式会社リコー 洗浄装置
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JP6090837B2 (ja) * 2012-06-13 2017-03-08 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6058312B2 (ja) * 2012-08-06 2017-01-11 ヒューグル開発株式会社 クリーニングヘッド
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JP6504890B2 (ja) * 2015-04-09 2019-04-24 東京エレクトロン株式会社 異物除去装置、異物除去方法および剥離装置
CN105977547B (zh) * 2016-05-18 2018-09-18 合肥国轩高科动力能源有限公司 一种用于卷绕叠片电池极片清理装置及清理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001156033A (ja) 1999-11-25 2001-06-08 Yokogawa Electric Corp ドライ洗浄方法及び装置
KR101248534B1 (ko) 2005-07-06 2013-04-02 휴글엘렉트로닉스가부시키가이샤 기판용 반송 제진 장치의 사용 방법 및 기판용 반송 제진장치
KR101598360B1 (ko) 2014-09-05 2016-02-29 지에스티 반도체장비(주) 기판 세척용 기판 위치 제어 장치

Also Published As

Publication number Publication date
TW201829079A (zh) 2018-08-16
CN110087784A (zh) 2019-08-02
TWI668056B (zh) 2019-08-11
JP6975953B2 (ja) 2021-12-01
JP2018103153A (ja) 2018-07-05
KR20190089182A (ko) 2019-07-30
WO2018123715A1 (ja) 2018-07-05
CN110087784B (zh) 2022-03-18

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