KR101912907B1 - X선 토포그래피 장치 - Google Patents

X선 토포그래피 장치 Download PDF

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KR101912907B1
KR101912907B1 KR1020130035372A KR20130035372A KR101912907B1 KR 101912907 B1 KR101912907 B1 KR 101912907B1 KR 1020130035372 A KR1020130035372 A KR 1020130035372A KR 20130035372 A KR20130035372 A KR 20130035372A KR 101912907 B1 KR101912907 B1 KR 101912907B1
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ray
sample
multilayer mirror
incident
rays
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KR20130112001A (ko
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가즈히코 오모테
요시노리 우에지
류지 마츠오
데츠오 기쿠치
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가부시키가이샤 리가쿠
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nanotechnology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
KR1020130035372A 2012-04-02 2013-04-01 X선 토포그래피 장치 Active KR101912907B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012083680A JP5838114B2 (ja) 2012-04-02 2012-04-02 Ｘ線トポグラフィ装置
JPJP-P-2012-083680 2012-04-02

Publications (2)

Publication Number Publication Date
KR20130112001A KR20130112001A (ko) 2013-10-11
KR101912907B1 true KR101912907B1 (ko) 2018-10-29

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KR1020130035372A Active KR101912907B1 (ko) 2012-04-02 2013-04-01 X선 토포그래피 장치

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US (1) US9335282B2 (https=)
JP (1) JP5838114B2 (https=)
KR (1) KR101912907B1 (https=)
DE (1) DE102013004503B4 (https=)

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JP6025211B2 (ja) * 2013-11-28 2016-11-16 株式会社リガク Ｘ線トポグラフィ装置
JP6202684B2 (ja) * 2014-06-05 2017-09-27 株式会社リガク Ｘ線回折装置
US10161887B2 (en) * 2015-01-20 2018-12-25 United Technologies Corporation Systems and methods for materials analysis
JP6999268B2 (ja) 2016-01-11 2022-01-18 ブルカー テクノロジーズ リミテッド Ｘ線スキャタロメトリーのための方法および装置
US10677744B1 (en) * 2016-06-03 2020-06-09 U.S. Department Of Energy Multi-cone x-ray imaging Bragg crystal spectrometer
US9859029B2 (en) * 2016-07-23 2018-01-02 Rising Star Pathway, a California Corporation X-ray laser microscopy sample analysis system and method
JP6978928B2 (ja) * 2017-12-25 2021-12-08 グローバルウェーハズ・ジャパン株式会社 シリコンウェーハの評価方法
US10816487B2 (en) 2018-04-12 2020-10-27 Bruker Technologies Ltd. Image contrast in X-ray topography imaging for defect inspection
JP2019191168A (ja) 2018-04-23 2019-10-31 ブルカー ジェイヴィ イスラエル リミテッドＢｒｕｋｅｒ Ｊｖ Ｉｓｒａｅｌ Ｌｔｄ． 小角ｘ線散乱測定用のｘ線源光学系
CN118624653A (zh) 2018-07-05 2024-09-10 布鲁克科技公司 小角度x射线散射测量
RU197307U1 (ru) * 2019-12-23 2020-04-21 Федеральное государственное автономное образовательное учреждение высшего образования "Балтийский федеральный университет имени Иммануила Канта" Многослойное зеркало для монохроматизации жесткого рентгеновского излучения
CN113030139B (zh) * 2021-05-31 2021-08-13 中国工程物理研究院激光聚变研究中心 一种新型晶体及紧凑型成像装置
US11781999B2 (en) 2021-09-05 2023-10-10 Bruker Technologies Ltd. Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
US12249059B2 (en) 2022-03-31 2025-03-11 Bruker Technologies Ltd. Navigation accuracy using camera coupled with detector assembly
US12339239B2 (en) 2023-04-27 2025-06-24 Bruker Technologies Ltd. X-ray diffraction imaging detector having multiple angled input faces

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JP2001021507A (ja) * 1999-07-05 2001-01-26 Rigaku Corp Ｘａｆｓ測定装置
JP2002310950A (ja) 2001-04-06 2002-10-23 Rigaku Corp Ｘ線トポグラフ装置およびｘ線トポグラフ方法
JP2005512050A (ja) * 2001-12-07 2005-04-28 ビード サイエンティフィック インストルメンツ リミテッド Ｘ線トポグラフィシステム

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DE3442061A1 (de) 1984-11-17 1986-05-28 Erno Raumfahrttechnik Gmbh, 2800 Bremen Verfahren zum zerstoerungsfreien pruefen inhomogener werkstoffe
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JP2940757B2 (ja) * 1992-04-09 1999-08-25 理学電機工業株式会社 Ｘ線回折分析装置
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JP3741411B2 (ja) * 1999-10-01 2006-02-01 株式会社リガク Ｘ線集光装置及びｘ線装置
DE10107914A1 (de) 2001-02-14 2002-09-05 Fraunhofer Ges Forschung Anordnung für röntgenanalytische Anwendungen
EP1403882B1 (en) * 2002-09-03 2012-06-13 Rigaku Corporation Parabolic mirror and movable X-ray source for obtaining parallel x-ray beams having different wavelengths
JP3919775B2 (ja) * 2004-07-15 2007-05-30 株式会社リガク Ｘ線反射率測定方法及び装置
JP5232373B2 (ja) 2006-09-28 2013-07-10 株式会社リガク ２結晶法ｘ線トポグラフィ装置
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JP4861283B2 (ja) * 2007-09-28 2012-01-25 株式会社リガク Ｘ線回折装置およびｘ線回折方法
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JP5024232B2 (ja) 2008-08-19 2012-09-12 富士ゼロックス株式会社 信号記憶装置、通信制御装置及び画像形成装置
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EP2442097A4 (en) * 2009-07-01 2014-04-23 Rigaku Denki Co Ltd X-RAY DEVICE, ITS METHOD OF USE, AND METHOD OF APPLYING X-RAY
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JP2001021507A (ja) * 1999-07-05 2001-01-26 Rigaku Corp Ｘａｆｓ測定装置
JP2002310950A (ja) 2001-04-06 2002-10-23 Rigaku Corp Ｘ線トポグラフ装置およびｘ線トポグラフ方法
JP2005512050A (ja) * 2001-12-07 2005-04-28 ビード サイエンティフィック インストルメンツ リミテッド Ｘ線トポグラフィシステム

Also Published As

Publication number Publication date
DE102013004503A1 (de) 2013-10-02
US20130259200A1 (en) 2013-10-03
DE102013004503B4 (de) 2017-08-03
JP2013213720A (ja) 2013-10-17
JP5838114B2 (ja) 2015-12-24
KR20130112001A (ko) 2013-10-11
US9335282B2 (en) 2016-05-10

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