KR101477069B1 - 제진 장치 - Google Patents

제진 장치 Download PDF

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Publication number
KR101477069B1
KR101477069B1 KR1020080116704A KR20080116704A KR101477069B1 KR 101477069 B1 KR101477069 B1 KR 101477069B1 KR 1020080116704 A KR1020080116704 A KR 1020080116704A KR 20080116704 A KR20080116704 A KR 20080116704A KR 101477069 B1 KR101477069 B1 KR 101477069B1
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KR
South Korea
Prior art keywords
cleaning gas
port
vibration
damped
vibration damping
Prior art date
Application number
KR1020080116704A
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English (en)
Korean (ko)
Other versions
KR20100028457A (ko
Inventor
모리토시 간노
Original Assignee
휴글엘렉트로닉스가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 휴글엘렉트로닉스가부시키가이샤 filed Critical 휴글엘렉트로닉스가부시키가이샤
Publication of KR20100028457A publication Critical patent/KR20100028457A/ko
Application granted granted Critical
Publication of KR101477069B1 publication Critical patent/KR101477069B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
KR1020080116704A 2008-09-04 2008-11-24 제진 장치 KR101477069B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008226780A JP5268097B2 (ja) 2008-09-04 2008-09-04 除塵装置
JPJP-P-2008-226780 2008-09-04

Publications (2)

Publication Number Publication Date
KR20100028457A KR20100028457A (ko) 2010-03-12
KR101477069B1 true KR101477069B1 (ko) 2014-12-29

Family

ID=41801610

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080116704A KR101477069B1 (ko) 2008-09-04 2008-11-24 제진 장치

Country Status (5)

Country Link
JP (1) JP5268097B2 (zh)
KR (1) KR101477069B1 (zh)
CN (1) CN101664744A (zh)
SG (1) SG159432A1 (zh)
TW (1) TWI382883B (zh)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102485357B (zh) * 2010-12-03 2014-11-05 北京北方微电子基地设备工艺研究中心有限责任公司 一种载板清洗方法、装置及基片镀膜设备
JP2013074112A (ja) * 2011-09-28 2013-04-22 Yaskawa Electric Corp ハンドおよび基板搬送装置
CN102705911B (zh) * 2012-06-07 2014-07-16 镇江新梦溪能源科技有限公司 太阳能蒸汽喷射式风冷空气清洁系统
CN102692058B (zh) * 2012-06-07 2015-07-01 镇江新梦溪能源科技有限公司 太阳能蒸汽喷射式水冷空气清洁系统
JP6058312B2 (ja) * 2012-08-06 2017-01-11 ヒューグル開発株式会社 クリーニングヘッド
JP6146664B2 (ja) * 2013-07-22 2017-06-14 大日本印刷株式会社 対向型エアブロー
CN103801184B (zh) * 2014-03-04 2015-06-17 南京工业职业技术学院 一种行星跟踪喷液同步负压吸收气体装置
CN104014557A (zh) * 2014-06-18 2014-09-03 苏州昊枫环保科技有限公司 带有振动辅助除尘的多区域除尘系统
CN105195907B (zh) * 2015-07-20 2017-03-15 广东正业科技股份有限公司 一种除尘装置及使用该除尘装置的激光加工设备及方法
CN105268696A (zh) * 2015-11-16 2016-01-27 无锡华光锅炉股份有限公司 一种逆喷式除尘器
KR101900283B1 (ko) * 2016-03-03 2018-11-05 에이피시스템 주식회사 레이저 리프트 오프 장비
CN106842646B (zh) * 2017-03-03 2019-11-29 惠科股份有限公司 一种显示面板清洗机
JP6963784B2 (ja) * 2017-05-22 2021-11-10 ヒューグル開発株式会社 クリーニングヘッド
US11318509B2 (en) * 2017-11-06 2022-05-03 Air Systems Design, Inc. Dust hood
CN107962003A (zh) * 2017-11-29 2018-04-27 四川珩必鑫电子科技有限公司 一种lcd板除尘装置
JP7048287B2 (ja) * 2017-12-07 2022-04-05 株式会社エンビジョンＡｅｓｃジャパン 除塵装置
CN111299245A (zh) * 2018-12-11 2020-06-19 韶阳科技股份有限公司 气体循环装置
CN109530335A (zh) * 2018-12-28 2019-03-29 湖南科伦制药有限公司 一种自带密封功能管口微粒清理装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07181467A (ja) * 1993-12-22 1995-07-21 Toshiba Corp 基板のクリーニング方法およびその装置
JP2000210630A (ja) * 1999-01-26 2000-08-02 Hugle Electronics Inc 基板用搬送除塵装置
KR20010038334A (ko) * 1999-10-25 2001-05-15 휴글엘렉트로닉스가부시키가이샤 제진 방법 및 제진 장치
JP2004041851A (ja) * 2002-07-09 2004-02-12 Hugle Electronics Inc 除塵ヘッド

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205412A (en) * 1978-12-04 1980-06-03 Weber Ronald W Automotive brake dust recovery unit
GB9102381D0 (en) * 1991-02-04 1991-03-20 Smith Alexander Bristle cleaner for carpet cutters
JPH05138136A (ja) * 1991-11-12 1993-06-01 Toray Ind Inc シート状物用除塵装置
JP2820599B2 (ja) * 1993-08-31 1998-11-05 株式会社伸興 除塵装置
JPH10209097A (ja) * 1997-01-21 1998-08-07 Dainippon Screen Mfg Co Ltd 基板洗浄方法及び装置
JP2000084510A (ja) * 1998-09-10 2000-03-28 Huegle Electronics Kk 基板用搬送除塵装置
JP2002316110A (ja) * 2001-04-19 2002-10-29 Matsushita Electric Ind Co Ltd 電子部品の洗浄方法およびそれに用いる洗浄装置
JP2003053939A (ja) * 2001-08-14 2003-02-26 Nec Kagoshima Ltd 印刷装置における基板洗浄機構
JP2003332401A (ja) * 2002-05-09 2003-11-21 Hugle Electronics Inc 基板用搬送除塵装置
ATE389781T1 (de) * 2003-06-13 2008-04-15 Cft Gmbh Entstauber mit mehrstrahldüsen
TWI232492B (en) * 2004-06-04 2005-05-11 Au Optronics Corp A process chamber equipped with a cleaning function
JP4948787B2 (ja) * 2005-06-13 2012-06-06 東洋熱工業株式会社 除塵装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07181467A (ja) * 1993-12-22 1995-07-21 Toshiba Corp 基板のクリーニング方法およびその装置
JP2000210630A (ja) * 1999-01-26 2000-08-02 Hugle Electronics Inc 基板用搬送除塵装置
KR20010038334A (ko) * 1999-10-25 2001-05-15 휴글엘렉트로닉스가부시키가이샤 제진 방법 및 제진 장치
JP2004041851A (ja) * 2002-07-09 2004-02-12 Hugle Electronics Inc 除塵ヘッド

Also Published As

Publication number Publication date
JP2010058057A (ja) 2010-03-18
JP5268097B2 (ja) 2013-08-21
TWI382883B (zh) 2013-01-21
KR20100028457A (ko) 2010-03-12
CN101664744A (zh) 2010-03-10
TW201010802A (en) 2010-03-16
SG159432A1 (en) 2010-03-30

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