KR101393353B1 - 발광다이오드 - Google Patents
발광다이오드 Download PDFInfo
- Publication number
- KR101393353B1 KR101393353B1 KR1020070108686A KR20070108686A KR101393353B1 KR 101393353 B1 KR101393353 B1 KR 101393353B1 KR 1020070108686 A KR1020070108686 A KR 1020070108686A KR 20070108686 A KR20070108686 A KR 20070108686A KR 101393353 B1 KR101393353 B1 KR 101393353B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- emitting diode
- light emitting
- type semiconductor
- transparent electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 claims abstract description 51
- 229910002601 GaN Inorganic materials 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 9
- 238000005530 etching Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 238000000605 extraction Methods 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/862—Resonant cavity structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/814—Bodies having reflecting means, e.g. semiconductor Bragg reflectors
- H10H20/8142—Bodies having reflecting means, e.g. semiconductor Bragg reflectors forming resonant cavity structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/832—Electrodes characterised by their material
- H10H20/833—Transparent materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/84—Coatings, e.g. passivation layers or antireflective coatings
- H10H20/841—Reflective coatings, e.g. dielectric Bragg reflectors
Landscapes
- Led Devices (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020070108686A KR101393353B1 (ko) | 2007-10-29 | 2007-10-29 | 발광다이오드 |
| JP2008196779A JP5259292B2 (ja) | 2007-10-29 | 2008-07-30 | 発光ダイオード |
| US12/203,762 US7863599B2 (en) | 2007-10-29 | 2008-09-03 | Light emitting diode |
| US12/942,635 US7982207B2 (en) | 2007-10-29 | 2010-11-09 | Light emitting diode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020070108686A KR101393353B1 (ko) | 2007-10-29 | 2007-10-29 | 발광다이오드 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020100052445A Division KR101165253B1 (ko) | 2010-06-03 | 2010-06-03 | 발광다이오드 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20090043057A KR20090043057A (ko) | 2009-05-06 |
| KR101393353B1 true KR101393353B1 (ko) | 2014-05-13 |
Family
ID=40581658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020070108686A Active KR101393353B1 (ko) | 2007-10-29 | 2007-10-29 | 발광다이오드 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US7863599B2 (https=) |
| JP (1) | JP5259292B2 (https=) |
| KR (1) | KR101393353B1 (https=) |
Families Citing this family (60)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101393353B1 (ko) * | 2007-10-29 | 2014-05-13 | 서울바이오시스 주식회사 | 발광다이오드 |
| US8115222B2 (en) * | 2008-01-16 | 2012-02-14 | Rohm Co., Ltd. | Semiconductor light emitting device and fabrication method for the semiconductor light emitting device |
| US20110316033A1 (en) * | 2009-03-05 | 2011-12-29 | Koito Manufacturing Co., Ltd. | Light emitting module, method of manufacturing the light emitting module, and lamp unit |
| JP2011066047A (ja) * | 2009-09-15 | 2011-03-31 | Sharp Corp | 窒化物半導体発光素子 |
| KR101039886B1 (ko) * | 2009-10-21 | 2011-06-09 | 엘지이노텍 주식회사 | 발광 소자 및 그 제조방법 |
| US8963178B2 (en) | 2009-11-13 | 2015-02-24 | Seoul Viosys Co., Ltd. | Light emitting diode chip having distributed bragg reflector and method of fabricating the same |
| KR101654340B1 (ko) * | 2009-12-28 | 2016-09-06 | 서울바이오시스 주식회사 | 발광 다이오드 |
| JP5106558B2 (ja) * | 2010-03-09 | 2012-12-26 | 株式会社東芝 | 発光素子およびその製造方法 |
| KR101081135B1 (ko) | 2010-03-15 | 2011-11-07 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 제조방법 및 발광 소자 패키지 |
| KR101163861B1 (ko) | 2010-03-22 | 2012-07-09 | 엘지이노텍 주식회사 | 발광소자, 전극 구조 및 발광 소자 패키지 |
| KR101666442B1 (ko) * | 2010-03-25 | 2016-10-17 | 엘지이노텍 주식회사 | 발광 다이오드 및 이를 포함하는 발광 소자 패키지 |
| KR101054984B1 (ko) * | 2010-03-26 | 2011-08-05 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 제조방법 및 발광 소자 패키지 |
| KR101047792B1 (ko) * | 2010-04-23 | 2011-07-07 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 제조방법 및 발광 소자 패키지 |
| KR101039948B1 (ko) * | 2010-04-23 | 2011-06-09 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 제조방법 및 발광 소자 패키지 |
| WO2011145794A1 (ko) | 2010-05-18 | 2011-11-24 | 서울반도체 주식회사 | 파장변환층을 갖는 발광 다이오드 칩과 그 제조 방법, 및 그것을 포함하는 패키지 및 그 제조 방법 |
| KR20120003775A (ko) | 2010-07-05 | 2012-01-11 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 제조방법, 발광 소자 패키지, 및 조명 시스템 |
| JP2012028381A (ja) * | 2010-07-20 | 2012-02-09 | Sharp Corp | 半導体発光素子およびその製造方法 |
| JP2012028749A (ja) * | 2010-07-22 | 2012-02-09 | Seoul Opto Devices Co Ltd | 発光ダイオード |
| WO2012015153A2 (en) * | 2010-07-28 | 2012-02-02 | Seoul Opto Device Co., Ltd. | Light emitting diode having distributed bragg reflector |
| KR20120015651A (ko) | 2010-08-12 | 2012-02-22 | 서울옵토디바이스주식회사 | 개선된 광 추출 효율을 갖는 발광 다이오드 |
| KR101259482B1 (ko) * | 2010-09-24 | 2013-05-06 | 서울옵토디바이스주식회사 | 고효율 발광다이오드 |
| JP2012124321A (ja) * | 2010-12-08 | 2012-06-28 | Showa Denko Kk | 半導体発光素子、ランプおよび半導体発光素子の製造方法 |
| KR20120084104A (ko) * | 2011-01-19 | 2012-07-27 | 엘지전자 주식회사 | 태양전지 |
| TWI529963B (zh) * | 2011-07-25 | 2016-04-11 | 廣鎵光電股份有限公司 | 發光元件結構 |
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| TWI610416B (zh) * | 2013-02-15 | 2018-01-01 | 首爾偉傲世有限公司 | 抗靜電放電的led晶片以及包含該led晶片的led封裝 |
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| JP6269362B2 (ja) * | 2014-07-15 | 2018-01-31 | 豊田合成株式会社 | Iii族窒化物半導体発光素子とその製造方法 |
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| KR100721515B1 (ko) | 2006-01-09 | 2007-05-23 | 서울옵토디바이스주식회사 | Ⅰto층을 갖는 발광다이오드 및 그 제조방법 |
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2007
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| KR100721515B1 (ko) | 2006-01-09 | 2007-05-23 | 서울옵토디바이스주식회사 | Ⅰto층을 갖는 발광다이오드 및 그 제조방법 |
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| JP2009111342A (ja) | 2009-05-21 |
| US7982207B2 (en) | 2011-07-19 |
| US20110049472A1 (en) | 2011-03-03 |
| KR20090043057A (ko) | 2009-05-06 |
| US7863599B2 (en) | 2011-01-04 |
| JP5259292B2 (ja) | 2013-08-07 |
| US20090108250A1 (en) | 2009-04-30 |
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