KR101179744B1 - 플립 칩 실장 방법 및 플립 칩 실장체 - Google Patents

플립 칩 실장 방법 및 플립 칩 실장체 Download PDF

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KR101179744B1
KR101179744B1 KR1020077005769A KR20077005769A KR101179744B1 KR 101179744 B1 KR101179744 B1 KR 101179744B1 KR 1020077005769 A KR1020077005769 A KR 1020077005769A KR 20077005769 A KR20077005769 A KR 20077005769A KR 101179744 B1 KR101179744 B1 KR 101179744B1
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resin
wiring board
solder powder
semiconductor chip
heating
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Korean (ko)
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KR20070052791A (ko
Inventor
세이지 가라시마
요시히사 야마시타
사토루 도메카와
다카시 기타에
세이이치 나카타니
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파나소닉 주식회사
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    • H05K3/341—Surface mounted components
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4543899B2 (ja) * 2004-11-24 2010-09-15 パナソニック株式会社 フリップチップ実装方法およびフリップチップ実装装置
US8709293B2 (en) 2004-12-17 2014-04-29 Panasonic Corporation Flip-chip mounting resin composition and bump forming resin composition
US7921551B2 (en) * 2005-03-24 2011-04-12 Panasonic Corporation Electronic component mounting method
CN100495677C (zh) * 2005-03-29 2009-06-03 松下电器产业株式会社 倒装芯片封装方法及其焊锡点形成方法
WO2006103949A1 (ja) * 2005-03-29 2006-10-05 Matsushita Electric Industrial Co., Ltd. フリップチップ実装方法および基板間接続方法
US7951700B2 (en) * 2005-04-06 2011-05-31 Panasonic Corporation Flip chip mounting method and bump forming method
US20090085227A1 (en) * 2005-05-17 2009-04-02 Matsushita Electric Industrial Co., Ltd. Flip-chip mounting body and flip-chip mounting method
JP5002583B2 (ja) * 2006-03-16 2012-08-15 パナソニック株式会社 バンプ形成方法
US7537961B2 (en) * 2006-03-17 2009-05-26 Panasonic Corporation Conductive resin composition, connection method between electrodes using the same, and electric connection method between electronic component and circuit substrate using the same
JP5002587B2 (ja) * 2006-03-28 2012-08-15 パナソニック株式会社 バンプ形成方法およびバンプ形成装置
US20070238222A1 (en) 2006-03-28 2007-10-11 Harries Richard J Apparatuses and methods to enhance passivation and ILD reliability
DE102006016275B4 (de) * 2006-03-31 2013-12-19 Asm Assembly Systems Gmbh & Co. Kg Verfahren zum Platzieren von elektrisch kontaktierbaren Bauelementen auf einem Schaltungsträger
KR100793078B1 (ko) * 2006-06-15 2008-01-10 한국전자통신연구원 플립 칩 패키지 및 그 제조방법
JP5329028B2 (ja) * 2006-09-15 2013-10-30 パナソニック株式会社 電子部品実装構造体の製造方法
CN101542706B (zh) 2007-04-27 2011-07-13 松下电器产业株式会社 电子部件安装体及带焊料凸台的电子部件的制造方法
US7977155B2 (en) * 2007-05-04 2011-07-12 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer-level flip-chip assembly methods
KR100872711B1 (ko) * 2007-06-29 2008-12-05 주식회사 동부하이텍 칩적층 구조물 및 이의 제조 방법
US20090057378A1 (en) * 2007-08-27 2009-03-05 Chi-Won Hwang In-situ chip attachment using self-organizing solder
JP2009186707A (ja) * 2008-02-06 2009-08-20 Seiko Epson Corp 電気光学装置の製造方法、電気光学装置
JP5247571B2 (ja) * 2008-04-24 2013-07-24 パナソニック株式会社 配線基板と配線基板の接続方法
JP5264585B2 (ja) 2009-03-24 2013-08-14 パナソニック株式会社 電子部品接合方法および電子部品
KR101208028B1 (ko) 2009-06-22 2012-12-04 한국전자통신연구원 반도체 패키지의 제조 방법 및 이에 의해 제조된 반도체 패키지
KR101234597B1 (ko) 2009-10-15 2013-02-22 한국전자통신연구원 플립 칩 본딩 방법 및 그의 구조
JP6008475B2 (ja) * 2010-07-16 2016-10-19 大日本印刷株式会社 太陽電池モジュールの製造方法
KR101711499B1 (ko) 2010-10-20 2017-03-13 삼성전자주식회사 반도체 패키지 및 그 제조 방법
US8476115B2 (en) 2011-05-03 2013-07-02 Stats Chippac, Ltd. Semiconductor device and method of mounting cover to semiconductor die and interposer with adhesive material
KR101678749B1 (ko) 2011-10-26 2016-12-06 히타치가세이가부시끼가이샤 리플로우 필름, 땜납 범프 형성 방법, 땜납 접합의 형성 방법 및 반도체 장치
JP6112797B2 (ja) * 2012-07-30 2017-04-12 国立大学法人大阪大学 電子部品の実装方法、回路基板の作製方法及び電子部品のはんだ接合部の形成方法、並びに、接続層付きプリント配線板及びシート状接合部材
KR101988890B1 (ko) * 2012-10-30 2019-10-01 한국전자통신연구원 솔더 온 패드의 제조방법 및 그를 이용한 플립 칩 본딩 방법
US9793198B2 (en) 2014-05-12 2017-10-17 Invensas Corporation Conductive connections, structures with such connections, and methods of manufacture
US9437566B2 (en) 2014-05-12 2016-09-06 Invensas Corporation Conductive connections, structures with such connections, and methods of manufacture
KR102411356B1 (ko) 2014-09-18 2022-06-22 세키스이가가쿠 고교가부시키가이샤 도전 페이스트, 접속 구조체 및 접속 구조체의 제조 방법
US10002843B2 (en) * 2015-03-24 2018-06-19 Advanced Semiconductor Engineering, Inc. Semiconductor substrate structure, semiconductor package and method of manufacturing the same
JP6769740B2 (ja) * 2015-05-25 2020-10-14 積水化学工業株式会社 接続構造体の製造方法
KR102569944B1 (ko) 2015-05-25 2023-08-24 세키스이가가쿠 고교가부시키가이샤 도전 재료 및 접속 구조체
JP7220558B2 (ja) * 2018-12-26 2023-02-10 エルジー ディスプレイ カンパニー リミテッド 表示装置及び表示装置の製造方法
US11166384B2 (en) * 2019-03-20 2021-11-02 Konica Minolta Laboratory U.S.A., Inc. Fabrication process for flip chip bump bonds using nano-LEDs and conductive resin
KR20210001630A (ko) * 2019-06-28 2021-01-06 주식회사 노피온 자가 조립 및 정렬이 가능한 솔더페이스트를 이용한 마이크로소자 접합방법
JP7145839B2 (ja) * 2019-12-18 2022-10-03 株式会社オリジン はんだ付け基板の製造方法及びはんだ付け装置
JPWO2024071266A1 (enExample) * 2022-09-30 2024-04-04

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11186334A (ja) * 1997-12-25 1999-07-09 Toshiba Corp 半導体実装装置及びその製造方法及び異方性導電材料
WO2004070827A1 (ja) * 2003-02-05 2004-08-19 Senju Metal Industry Co., Ltd. 端子間の接続方法及び半導体装置の実装方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4611192A (en) * 1985-01-25 1986-09-09 Eagle Electric Mfg. Co., Inc. Heavy-duty time-delay fuse
JPH0747233B2 (ja) * 1987-09-14 1995-05-24 古河電気工業株式会社 半田析出用組成物および半田析出方法
JPH02251145A (ja) * 1989-03-24 1990-10-08 Citizen Watch Co Ltd 突起電極形成方法
JPH06125169A (ja) * 1992-10-13 1994-05-06 Fujitsu Ltd 予備はんだ法
JPH0927516A (ja) 1995-07-12 1997-01-28 Nippondenso Co Ltd 電子部品の接続構造
CN1638072A (zh) * 1997-11-19 2005-07-13 松下电器产业株式会社 应力衰减型电子元器件、布线板及其安装体
JP3996276B2 (ja) 1998-09-22 2007-10-24 ハリマ化成株式会社 ソルダペースト及びその製造方法並びにはんだプリコート方法
JP2000332055A (ja) 1999-05-17 2000-11-30 Sony Corp フリップチップ実装構造及び実装方法
JP2001093938A (ja) * 1999-09-20 2001-04-06 Nec Kansai Ltd 半導体装置及びその製造方法
JP2001329048A (ja) 2000-03-15 2001-11-27 Harima Chem Inc 封止充填剤用液状エポキシ樹脂組成物
JP2002026070A (ja) 2000-07-04 2002-01-25 Toshiba Corp 半導体装置およびその製造方法
JP3866591B2 (ja) * 2001-10-29 2007-01-10 富士通株式会社 電極間接続構造体の形成方法および電極間接続構造体
JP3996802B2 (ja) * 2002-05-15 2007-10-24 太陽インキ製造株式会社 低放射線性の光硬化性・熱硬化性樹脂組成物及びその硬化被膜
US20040084206A1 (en) * 2002-11-06 2004-05-06 I-Chung Tung Fine pad pitch organic circuit board for flip chip joints and board to board solder joints and method
JP3769688B2 (ja) 2003-02-05 2006-04-26 独立行政法人科学技術振興機構 端子間の接続方法及び半導体装置の実装方法
JP3964911B2 (ja) * 2004-09-03 2007-08-22 松下電器産業株式会社 バンプ付き基板の製造方法
US8709293B2 (en) * 2004-12-17 2014-04-29 Panasonic Corporation Flip-chip mounting resin composition and bump forming resin composition
CN100495677C (zh) * 2005-03-29 2009-06-03 松下电器产业株式会社 倒装芯片封装方法及其焊锡点形成方法
WO2006103949A1 (ja) * 2005-03-29 2006-10-05 Matsushita Electric Industrial Co., Ltd. フリップチップ実装方法および基板間接続方法
US7951700B2 (en) * 2005-04-06 2011-05-31 Panasonic Corporation Flip chip mounting method and bump forming method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11186334A (ja) * 1997-12-25 1999-07-09 Toshiba Corp 半導体実装装置及びその製造方法及び異方性導電材料
WO2004070827A1 (ja) * 2003-02-05 2004-08-19 Senju Metal Industry Co., Ltd. 端子間の接続方法及び半導体装置の実装方法

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