KR101179744B1 - 플립 칩 실장 방법 및 플립 칩 실장체 - Google Patents

플립 칩 실장 방법 및 플립 칩 실장체 Download PDF

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KR101179744B1
KR101179744B1 KR1020077005769A KR20077005769A KR101179744B1 KR 101179744 B1 KR101179744 B1 KR 101179744B1 KR 1020077005769 A KR1020077005769 A KR 1020077005769A KR 20077005769 A KR20077005769 A KR 20077005769A KR 101179744 B1 KR101179744 B1 KR 101179744B1
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South Korea
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resin
wiring board
solder powder
semiconductor chip
heating
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Expired - Fee Related
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KR1020077005769A
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Korean (ko)
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KR20070052791A (ko
Inventor
세이지 가라시마
요시히사 야마시타
사토루 도메카와
다카시 기타에
세이이치 나카타니
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파나소닉 주식회사
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    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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    • H10W74/00—Encapsulations, e.g. protective coatings
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    • H10W74/012—Manufacture or treatment of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills
    • H—ELECTRICITY
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    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3465—Application of solder
    • H05K3/3485—Application of solder paste, slurry or powder
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    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
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    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10954—Other details of electrical connections
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    • H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/0278—Flat pressure, e.g. for connecting terminals with anisotropic conductive adhesive
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    • H05K2203/04—Soldering or other types of metallurgic bonding
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    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/321—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by conductive adhesives
    • H05K3/323—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
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    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components
    • H05K3/3431—Leadless components
    • H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
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    • H10W72/01204—Manufacture or treatment of bump connectors, dummy bumps or thermal bumps using temporary auxiliary members, e.g. using sacrificial coatings or handle substrates
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    • H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • H10W72/07252—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting changes in structures or sizes
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    • H10W72/073—Connecting or disconnecting of die-attach connectors
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    • H10W72/07332—Compression bonding, e.g. thermocompression bonding
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    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07351—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
    • H10W72/07353—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in shapes
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    • H10W72/00—Interconnections or connectors in packages
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    • H10W72/221—Structures or relative sizes
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    • H10W72/251—Materials
    • H10W72/252—Materials comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu
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    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
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    • H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
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    • Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Wire Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
KR1020077005769A 2004-09-15 2005-09-07 플립 칩 실장 방법 및 플립 칩 실장체 Expired - Fee Related KR101179744B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2004267919 2004-09-15
JPJP-P-2004-00267919 2004-09-15
JP2005091347A JP3955302B2 (ja) 2004-09-15 2005-03-28 フリップチップ実装体の製造方法
JPJP-P-2005-00091347 2005-03-28
PCT/JP2005/016423 WO2006030674A1 (ja) 2004-09-15 2005-09-07 フリップチップ実装方法及びフリップチップ実装体

Publications (2)

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Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4543899B2 (ja) * 2004-11-24 2010-09-15 パナソニック株式会社 フリップチップ実装方法およびフリップチップ実装装置
EP1830399A4 (en) * 2004-12-17 2012-07-11 Panasonic Corp RESIN COMPOSITION FOR FLIP CHIP CAPSULATION AND RESIN COMPOSITION FOR FORMING A BULB
WO2006101155A1 (ja) * 2005-03-24 2006-09-28 Matsushita Electric Industrial Co., Ltd. 電子部品の実装方法および電子回路装置
US7531385B1 (en) * 2005-03-29 2009-05-12 Panasonic Corporation Flip chip mounting method and method for connecting substrates
JP4084834B2 (ja) * 2005-03-29 2008-04-30 松下電器産業株式会社 フリップチップ実装方法およびバンプ形成方法
US7951700B2 (en) 2005-04-06 2011-05-31 Panasonic Corporation Flip chip mounting method and bump forming method
US20090085227A1 (en) * 2005-05-17 2009-04-02 Matsushita Electric Industrial Co., Ltd. Flip-chip mounting body and flip-chip mounting method
KR101257977B1 (ko) * 2006-03-16 2013-04-24 파나소닉 주식회사 범프형성방법 및 범프형성장치
US7537961B2 (en) * 2006-03-17 2009-05-26 Panasonic Corporation Conductive resin composition, connection method between electrodes using the same, and electric connection method between electronic component and circuit substrate using the same
WO2007122868A1 (ja) * 2006-03-28 2007-11-01 Matsushita Electric Industrial Co., Ltd. バンプ形成方法およびバンプ形成装置
US20070238222A1 (en) 2006-03-28 2007-10-11 Harries Richard J Apparatuses and methods to enhance passivation and ILD reliability
DE102006016275B4 (de) * 2006-03-31 2013-12-19 Asm Assembly Systems Gmbh & Co. Kg Verfahren zum Platzieren von elektrisch kontaktierbaren Bauelementen auf einem Schaltungsträger
KR100793078B1 (ko) * 2006-06-15 2008-01-10 한국전자통신연구원 플립 칩 패키지 및 그 제조방법
JP5329028B2 (ja) * 2006-09-15 2013-10-30 パナソニック株式会社 電子部品実装構造体の製造方法
WO2008139701A1 (ja) 2007-04-27 2008-11-20 Panasonic Corporation 電子部品実装体及びハンダバンプ付き電子部品並びにそれらの製造方法
US7977155B2 (en) * 2007-05-04 2011-07-12 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer-level flip-chip assembly methods
KR100872711B1 (ko) * 2007-06-29 2008-12-05 주식회사 동부하이텍 칩적층 구조물 및 이의 제조 방법
US20090057378A1 (en) * 2007-08-27 2009-03-05 Chi-Won Hwang In-situ chip attachment using self-organizing solder
JP2009186707A (ja) * 2008-02-06 2009-08-20 Seiko Epson Corp 電気光学装置の製造方法、電気光学装置
JP5247571B2 (ja) * 2008-04-24 2013-07-24 パナソニック株式会社 配線基板と配線基板の接続方法
JP5264585B2 (ja) 2009-03-24 2013-08-14 パナソニック株式会社 電子部品接合方法および電子部品
KR101208028B1 (ko) 2009-06-22 2012-12-04 한국전자통신연구원 반도체 패키지의 제조 방법 및 이에 의해 제조된 반도체 패키지
KR101234597B1 (ko) 2009-10-15 2013-02-22 한국전자통신연구원 플립 칩 본딩 방법 및 그의 구조
JP6008475B2 (ja) * 2010-07-16 2016-10-19 大日本印刷株式会社 太陽電池モジュールの製造方法
KR101711499B1 (ko) 2010-10-20 2017-03-13 삼성전자주식회사 반도체 패키지 및 그 제조 방법
US8476115B2 (en) 2011-05-03 2013-07-02 Stats Chippac, Ltd. Semiconductor device and method of mounting cover to semiconductor die and interposer with adhesive material
CN103907179B (zh) * 2011-10-26 2017-07-07 日立化成株式会社 回流膜、焊料凸块形成方法、焊料接合的形成方法以及半导体装置
JP6112797B2 (ja) * 2012-07-30 2017-04-12 国立大学法人大阪大学 電子部品の実装方法、回路基板の作製方法及び電子部品のはんだ接合部の形成方法、並びに、接続層付きプリント配線板及びシート状接合部材
KR101988890B1 (ko) * 2012-10-30 2019-10-01 한국전자통신연구원 솔더 온 패드의 제조방법 및 그를 이용한 플립 칩 본딩 방법
US9437566B2 (en) 2014-05-12 2016-09-06 Invensas Corporation Conductive connections, structures with such connections, and methods of manufacture
US9793198B2 (en) 2014-05-12 2017-10-17 Invensas Corporation Conductive connections, structures with such connections, and methods of manufacture
JP6577867B2 (ja) 2014-09-18 2019-09-18 積水化学工業株式会社 導電ペースト、接続構造体及び接続構造体の製造方法
US10002843B2 (en) * 2015-03-24 2018-06-19 Advanced Semiconductor Engineering, Inc. Semiconductor substrate structure, semiconductor package and method of manufacturing the same
JP6769740B2 (ja) * 2015-05-25 2020-10-14 積水化学工業株式会社 接続構造体の製造方法
CN107210084A (zh) 2015-05-25 2017-09-26 积水化学工业株式会社 导电材料及连接结构体
JP7220558B2 (ja) * 2018-12-26 2023-02-10 エルジー ディスプレイ カンパニー リミテッド 表示装置及び表示装置の製造方法
US11166384B2 (en) * 2019-03-20 2021-11-02 Konica Minolta Laboratory U.S.A., Inc. Fabrication process for flip chip bump bonds using nano-LEDs and conductive resin
KR20210001630A (ko) * 2019-06-28 2021-01-06 주식회사 노피온 자가 조립 및 정렬이 가능한 솔더페이스트를 이용한 마이크로소자 접합방법
JP7145839B2 (ja) * 2019-12-18 2022-10-03 株式会社オリジン はんだ付け基板の製造方法及びはんだ付け装置
TW202214806A (zh) * 2020-09-30 2022-04-16 日商太陽油墨製造股份有限公司 各向異性導電連接材料及使用各向異性導電連接材料之電子元件的安裝方法
JPWO2024071266A1 (enExample) * 2022-09-30 2024-04-04

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11186334A (ja) * 1997-12-25 1999-07-09 Toshiba Corp 半導体実装装置及びその製造方法及び異方性導電材料
WO2004070827A1 (ja) * 2003-02-05 2004-08-19 Senju Metal Industry Co., Ltd. 端子間の接続方法及び半導体装置の実装方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4611192A (en) * 1985-01-25 1986-09-09 Eagle Electric Mfg. Co., Inc. Heavy-duty time-delay fuse
JPH0747233B2 (ja) 1987-09-14 1995-05-24 古河電気工業株式会社 半田析出用組成物および半田析出方法
JPH02251145A (ja) 1989-03-24 1990-10-08 Citizen Watch Co Ltd 突起電極形成方法
JPH06125169A (ja) * 1992-10-13 1994-05-06 Fujitsu Ltd 予備はんだ法
JPH0927516A (ja) * 1995-07-12 1997-01-28 Nippondenso Co Ltd 電子部品の接続構造
KR100432800B1 (ko) * 1997-11-19 2004-05-24 마츠시타 덴끼 산교 가부시키가이샤 응력완화형 전자부품, 응력완화형 배선기판 및 응력완화형 전자부품 실장체
JP3996276B2 (ja) 1998-09-22 2007-10-24 ハリマ化成株式会社 ソルダペースト及びその製造方法並びにはんだプリコート方法
JP2000332055A (ja) 1999-05-17 2000-11-30 Sony Corp フリップチップ実装構造及び実装方法
JP2001093938A (ja) * 1999-09-20 2001-04-06 Nec Kansai Ltd 半導体装置及びその製造方法
JP2001329048A (ja) 2000-03-15 2001-11-27 Harima Chem Inc 封止充填剤用液状エポキシ樹脂組成物
JP2002026070A (ja) * 2000-07-04 2002-01-25 Toshiba Corp 半導体装置およびその製造方法
JP3866591B2 (ja) 2001-10-29 2007-01-10 富士通株式会社 電極間接続構造体の形成方法および電極間接続構造体
JP3996802B2 (ja) * 2002-05-15 2007-10-24 太陽インキ製造株式会社 低放射線性の光硬化性・熱硬化性樹脂組成物及びその硬化被膜
US20040084206A1 (en) 2002-11-06 2004-05-06 I-Chung Tung Fine pad pitch organic circuit board for flip chip joints and board to board solder joints and method
JP3769688B2 (ja) 2003-02-05 2006-04-26 独立行政法人科学技術振興機構 端子間の接続方法及び半導体装置の実装方法
JP3964911B2 (ja) * 2004-09-03 2007-08-22 松下電器産業株式会社 バンプ付き基板の製造方法
EP1830399A4 (en) * 2004-12-17 2012-07-11 Panasonic Corp RESIN COMPOSITION FOR FLIP CHIP CAPSULATION AND RESIN COMPOSITION FOR FORMING A BULB
US7531385B1 (en) 2005-03-29 2009-05-12 Panasonic Corporation Flip chip mounting method and method for connecting substrates
JP4084834B2 (ja) 2005-03-29 2008-04-30 松下電器産業株式会社 フリップチップ実装方法およびバンプ形成方法
US7951700B2 (en) 2005-04-06 2011-05-31 Panasonic Corporation Flip chip mounting method and bump forming method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11186334A (ja) * 1997-12-25 1999-07-09 Toshiba Corp 半導体実装装置及びその製造方法及び異方性導電材料
WO2004070827A1 (ja) * 2003-02-05 2004-08-19 Senju Metal Industry Co., Ltd. 端子間の接続方法及び半導体装置の実装方法

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