JP3955302B2 - フリップチップ実装体の製造方法 - Google Patents
フリップチップ実装体の製造方法 Download PDFInfo
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- JP3955302B2 JP3955302B2 JP2005091347A JP2005091347A JP3955302B2 JP 3955302 B2 JP3955302 B2 JP 3955302B2 JP 2005091347 A JP2005091347 A JP 2005091347A JP 2005091347 A JP2005091347 A JP 2005091347A JP 3955302 B2 JP3955302 B2 JP 3955302B2
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- resin
- solder powder
- chip mounting
- semiconductor chip
- wiring board
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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Description
(1)前記配線基板上に、はんだ粉及び対流添加剤を含有する樹脂を供給する工程と、
(2)前記樹脂表面に、前記半導体チップを当接させる工程と、
(3)前記配線基板を、前記はんだ粉が溶融する温度に加熱する工程と、
(4)前記加熱工程後、前記樹脂を硬化させる工程と
を含む。
また、上記溶剤はフラックス中に含まれていても対流添加剤としての効果が得られる。還元性材料および溶剤を含むフラックス等を使用する場合は、溶剤からだけではなく、導体パターン、導電粒子等の金属の酸化物の還元反応によって酸素の気泡が発生することがある。この場合、その気泡も対流添加剤の効果を発揮できるのでより好ましい。また、配線基板に含まれている水分も対流添加剤として作用し得る。
尚、フラックスを用いる場合には、その中に一般的に含まれている樹脂、活性剤、艶消し剤等を、本発明の方法に用いる樹脂は含んでよい。従って、本発明において、樹脂は、溶剤およびフラックスに含まれている溶剤以外の他の成分を含んでよい、即ち、樹脂はフラックスを含んでよい。
(a)複数の電極端子を有する配線基板を用意する工程と、
(b)前記配線基板上に、はんだ粉及び対流添加剤を含有する樹脂を供給する工程と、
(c)前記配線基板を、前記はんだ粉が溶融する温度に加熱してバンプを形成する工程と、
(d)複数の接続端子を有する半導体チップを、前記接続端子と前記バンプとが対向するように、前記配線基板上に搭載する工程と、
(e)前記配線基板を、前記バンプが溶融する温度に加熱し、前記配線基板の前記電極端子と前記半導体チップの前記接続端子とを電気的に接続する接続体を形成する。
尚、接続体を形成する加熱工程(e)において、バンプを溶融させて前記接続端子と前記バンプとの接触部分を合金化することによって接続体を形成するのが好ましい。
尚、上述のもう1つのフリップチップ実装方法において、先に説明したフリップチップ実装方法に関するはんだ粉、樹脂、対流添加剤の特徴がそのまま当て嵌まる。
(参考例1)
樹脂:エポキシ樹脂
はんだ粉:SnAgCu(融点:220℃)
樹脂とはんだ粉の割合:50重量%:50重量%
プリント基板:松下電子部品(株)製ALIVH
(電極の直径およびピッチ:直径300μm、ピッチ500μm)
基板の加熱温度:250℃
対流添加剤:フラックスとして添加(沸点:170℃)
樹脂とはんだ粉とフラックスの割合:45重量%:50重量%:5重量%
他の条件は、図10の場合と同じ。
図2(a)〜(c)は、本発明の実施形態1におけるフリップチップ実装方法の基本的な工程を示した図である。
配線基板および/または半導体チップの端子以外の露出表面にはんだに対する濡れ性が劣る材料を配置してよい。例えばそのような露出表面にソルダーレジストを塗布してよい。
VA:VB≒SA:SB ・・・(1)
式(1)中、SAは配線基板10の電極端子11(または、半導体チップ20の接続端子21)の総面積、SBは配線基板10(または半導体チップ20)の面積をそれぞれ表す。
(はんだ粉の含有量、体積%)=VA/VB=SA/SB×100 ・・・(2)
実際には、全てのはんだ粉が端子間に自己集合するとは限らず、樹脂13中にいくらか残留することはある。また、端子間に形成される接続体22は、最終的には端子間を一定の条件を満たす電気的接続がなされていればよく、かかる条件を満たす範囲内であれば、必ずしも端子間を全て接続体22で満たす必要はない。
(はんだ粉の含有量、体積%)=(SA/SB×100)+α ・・・(3)
式(3)中、パラメータ(α)は、はんだ粉が端子間に自己集合する際の過不足分を調整するためのもので、種々の条件により決めることができる。例えば、使用する樹脂13の流動性が低い(粘度が高い)場合には、はんだ粉の樹脂13中での自由な移動が損なわれるので、はんだ粉の自己集合率(はんだ粉が電極間に自己集合する割合)が低下する。従って、この場合には、その不足分を補う量(αは正の値)を含めたはんだ粉を樹脂13中に含有させておくことが好ましい。なお、はんだ粉の自己集合率に影響を与えるものとしては、他に、対流添加剤12による対流効果や、電極端子の濡れ性等が考えられる。容易に理解できるように、バンプ形成条件を決定した後に、例えば試行錯誤法によってαの値を実験的に求めることができる。
図4に示した配置(ペリフェラル配置)・・・0.5〜5体積%
図5に示した配置(エリアアレイ配置)・・・15〜30%体積%
このように、はんだ粉の含有量を少ない量に押さえることができるのは、樹脂13中に分散する対流添加剤の樹脂13中での対流によって奏される作用効果によるものに他ならない。なお、一般に、はんだ粉と樹脂または対流添加剤との重量比は約7程度なので、上記0.5〜30体積%の割合は、概ね3〜75重量%の割合に相当する。
以下に、上述した実施形態1に対する種々の改変例に係る実施形態2について、図面を参照しながら説明する。
次に、半導体チップの他のフリップチップ実装方法について、図7(a)〜(e)を参照しながら説明をする。
本発明におけるフリップチップ実装方法は、はんだ粉の自己集合機能を利用しているので、均一な自己集合を行なわせるためには、電極の配置は均一である方が望ましく、その意味で、エリアアレイの半導体チップは、本発明のフリップチップ実装方法を適用するのに適していると言える。
図8は、配線基板10の平面図で、図9(a)〜(c)は、フリップチップ実装の工程断面図を示す。
11 電極端子
12 対流添加剤
13 樹脂
14 平板
16 バンプ
20 半導体チップ
21 接続端子
23 アンダーフィル材
30 中央領域
Claims (11)
- 複数の電極端子を有する配線基板上に、はんだ粉と沸点を有する添加剤とを含有する樹脂を供給する工程と、
複数の接続端子を有する半導体チップを前記樹脂の表面に当接させる工程であって、前記複数の接続端子と前記複数の電極端子とが対向するように前記半導体チップを前記樹脂の表面に当接させる工程と、
前記添加剤の沸点および前記はんだ粉が溶融する温度以上で前記樹脂を加熱し、前記添加剤を沸騰させて前記樹脂中に気泡を発生させ、前記気泡が前記樹脂中を対流することによって前記はんだ粉を前記電極端子および前記接続端子の周辺に集合させ、前記電極端子と前記接続端子とを電気的に接続する工程と、
を含むフリップチップ実装体の製造方法。 - 前記添加剤の沸点は、前記はんだ粉の融点よりも高いことを特徴とする、請求項1に記載のフリップチップ実装体の製造方法。
- 前記添加剤の沸点は、前記はんだ粉の融点よりも低いことを特徴とする、請求項1に記載のフリップチップ実装体の製造方法。
- 前記はんだ粉は、溶融状態で前記樹脂中を対流することを特徴とする、請求項1〜3のいずれか一つに記載のフリップチップ実装体の製造方法。
- 前記添加剤は、グリセリン、イソプロピルアルコール、酢酸ブチル、ブチルカルビトールおよびエチレングリコールよりなる群から選ばれた1種もしくは2種以上からなることを特徴とする、請求項1〜4のいずれか一つに記載のフリップチップ実装体の製造方法。
- 前記樹脂を硬化させる工程をさらに含む、請求項1〜5のいずれか一つに記載のフリップチップ実装体の製造方法。
- 前記半導体チップに一定の圧力を加えることによって、前記樹脂を押圧しながら、前記樹脂を加熱することを特徴とする、請求項1〜6のいずれか一つに記載のフリップチップ実装体の製造方法。
- 前記樹脂は、熱硬化性樹脂からなり、前記電極端子と前記接続端子を電気的に接続する工程の後で前記樹脂を硬化させることを特徴とする、請求項6に記載のフリップチップ実装体の製造方法。
- 前記樹脂は、光硬化性樹脂からなり、前記樹脂に光を照射することによって前記樹脂の硬化を行なうことを特徴とする、請求項6に記載のフリップチップ実装体の製造方法。
- 前記樹脂の表面に、複数の半導体チップを当接することにより、前記複数の半導体チップを前記配線基板にフリップチップ実装することを特徴とする、請求項1〜9のいずれか一つに記載のフリップチップ実装体の製造方法。
- 前記はんだ粉は、0.5〜30体積%の割合で、前記樹脂中に含有されていることを特徴とする、請求項1〜10のいずれか一つに記載のフリップチップ実装体の製造方法。
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