KR100881681B1 - 기화기 및 이를 이용한 각종 장치와 기화 방법 - Google Patents
기화기 및 이를 이용한 각종 장치와 기화 방법 Download PDFInfo
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- KR100881681B1 KR100881681B1 KR1020037009560A KR20037009560A KR100881681B1 KR 100881681 B1 KR100881681 B1 KR 100881681B1 KR 1020037009560 A KR1020037009560 A KR 1020037009560A KR 20037009560 A KR20037009560 A KR 20037009560A KR 100881681 B1 KR100881681 B1 KR 100881681B1
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Abstract
Description
비점(℃)/압력(mmHg) | 융점(℃) | |
Sr(DPM)2 | 231/0.1 | 210 |
Bi(C6H5)3 | 130/0.1 | 80 |
Ta(OC2H5)5 | 118/0.1 | 22 |
THF | 67 | -109 |
Sr(Ta(OEt)6)2 | 176/0.1 | 130 |
Bi(OtAm)3 | 87/0.1 | 87 |
Claims (87)
- ① 내부에 형성된 가스 통로와,상기 가스 통로에 캐리어 가스를 도입하기 위한 가스 도입구와,상기 가스 통로에 원료용액을 공급하기 위한 수단과,원료용액을 포함하는 캐리어 가스를 기화부에 보내기 위한 가스출구와,상기 가스 통로를 냉각하기 위한 수단을 가지는 분산부와;② 한 쪽 끝이 막형성장치의 반응부에 접속되고, 다른 쪽 끝이 상기 가스출구에 접속된 기화관과,상기 기화관을 가열하기 위한 가열수단을 가지고,상기 분산부로부터 보내어진 안개화된 원료용액을 포함하는 캐리어 가스를 가열하여 기화시키기 위한 기화부;를 가지며,상기 가스출구의 외측에 미세한 홀을 가지는 복사방지부를 구비한 것을 특징으로 하는 기화기.
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- 제 1 항에 있어서,상기 미세한 홀은, 분출하는 가스유속이 아음속이 되는 길이를 가지는 것을 특징으로 하는 기화기.
- 제 1 항에 있어서,상기 미세한 홀의 단면적은, 상기 가스 통로의 단면적보다 작은 것을 특징으로 하는 기화기.
- 제 1 항에 있어서,상기 미세한 홀의 단면적은, 상기 가스 통로의 단면적의 1/2이하인 것을 특징으로 하는 기화기.
- 제 1 항에 있어서,상기 미세한 홀의 단면적은, 상기 가스 통로의 단면적의 1/3이하인 것을 특징으로 하는 기화기.
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- 제 1 항에 있어서,상기 미세한 홀의 길이는, 상기 미세한 홀 치수의 5배 이상인 것을 특징으로 하는 기화기.
- 제 1 항에 있어서,상기 미세한 홀의 길이는, 상기 미세한 홀 치수의 10배 이상인 것을 특징으로 하는 기화기.
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JPJP-P-2001-00010827 | 2001-01-18 | ||
JP2001010827 | 2001-01-18 | ||
JPJP-P-2001-00392833 | 2001-11-18 | ||
JP2001392833 | 2001-11-18 | ||
PCT/JP2002/000330 WO2002058141A1 (fr) | 2001-01-18 | 2002-01-18 | Carburateur, dispositifs de divers types utilisant ce carburateur et procede de vaporisation |
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KR100881681B1 true KR100881681B1 (ko) | 2009-02-06 |
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US (2) | US7246796B2 (ko) |
EP (1) | EP1361610B1 (ko) |
JP (2) | JPWO2002058141A1 (ko) |
KR (1) | KR100881681B1 (ko) |
CN (2) | CN100595910C (ko) |
AT (1) | ATE535940T1 (ko) |
IL (2) | IL156978A0 (ko) |
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EP1361610A1 (en) | 2003-11-12 |
CN100595910C (zh) | 2010-03-24 |
CN1531753A (zh) | 2004-09-22 |
CN1966762A (zh) | 2007-05-23 |
TW560029B (en) | 2003-11-01 |
IL156978A0 (en) | 2004-02-08 |
CN1966762B (zh) | 2015-01-21 |
US20040113289A1 (en) | 2004-06-17 |
US7246796B2 (en) | 2007-07-24 |
WO2002058141A1 (fr) | 2002-07-25 |
IL156978A (en) | 2008-03-20 |
JP2008196054A (ja) | 2008-08-28 |
EP1361610A4 (en) | 2007-03-14 |
KR20030091968A (ko) | 2003-12-03 |
ATE535940T1 (de) | 2011-12-15 |
US20080193645A1 (en) | 2008-08-14 |
JPWO2002058141A1 (ja) | 2004-05-27 |
JP4986163B2 (ja) | 2012-07-25 |
US7673856B2 (en) | 2010-03-09 |
EP1361610B1 (en) | 2011-11-30 |
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