KR100714482B1 - 반도체 장치, 테스트 기판, 반도체 장치의 테스트 시스템및 반도체 장치의 테스트 방법 - Google Patents

반도체 장치, 테스트 기판, 반도체 장치의 테스트 시스템및 반도체 장치의 테스트 방법 Download PDF

Info

Publication number
KR100714482B1
KR100714482B1 KR1020050062368A KR20050062368A KR100714482B1 KR 100714482 B1 KR100714482 B1 KR 100714482B1 KR 1020050062368 A KR1020050062368 A KR 1020050062368A KR 20050062368 A KR20050062368 A KR 20050062368A KR 100714482 B1 KR100714482 B1 KR 100714482B1
Authority
KR
South Korea
Prior art keywords
pattern data
test pattern
test
speed
input terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020050062368A
Other languages
English (en)
Korean (ko)
Other versions
KR20070007627A (ko
Inventor
김우섭
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR1020050062368A priority Critical patent/KR100714482B1/ko
Priority to TW095124101A priority patent/TWI308964B/zh
Priority to US11/483,753 priority patent/US7555686B2/en
Priority to JP2006190578A priority patent/JP2007024884A/ja
Priority to DE102006033188A priority patent/DE102006033188A1/de
Publication of KR20070007627A publication Critical patent/KR20070007627A/ko
Application granted granted Critical
Publication of KR100714482B1 publication Critical patent/KR100714482B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56012—Timing aspects, clock generation, synchronisation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C2029/5602—Interface to device under test

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
KR1020050062368A 2005-07-11 2005-07-11 반도체 장치, 테스트 기판, 반도체 장치의 테스트 시스템및 반도체 장치의 테스트 방법 Expired - Fee Related KR100714482B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020050062368A KR100714482B1 (ko) 2005-07-11 2005-07-11 반도체 장치, 테스트 기판, 반도체 장치의 테스트 시스템및 반도체 장치의 테스트 방법
TW095124101A TWI308964B (en) 2005-07-11 2006-07-03 Semiconductor device, test board for testing the same, and test system and method for testing the same
US11/483,753 US7555686B2 (en) 2005-07-11 2006-07-10 Semiconductor device, test board for testing the same, and test system and method for testing the same
JP2006190578A JP2007024884A (ja) 2005-07-11 2006-07-11 半導体装置、テスト基板、半導体装置のテストシステム及び半導体装置のテスト方法
DE102006033188A DE102006033188A1 (de) 2005-07-11 2006-07-11 Halbleiterbauelement, Testplatine, Testsystem, und Testverfahren

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050062368A KR100714482B1 (ko) 2005-07-11 2005-07-11 반도체 장치, 테스트 기판, 반도체 장치의 테스트 시스템및 반도체 장치의 테스트 방법

Publications (2)

Publication Number Publication Date
KR20070007627A KR20070007627A (ko) 2007-01-16
KR100714482B1 true KR100714482B1 (ko) 2007-05-04

Family

ID=37680421

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050062368A Expired - Fee Related KR100714482B1 (ko) 2005-07-11 2005-07-11 반도체 장치, 테스트 기판, 반도체 장치의 테스트 시스템및 반도체 장치의 테스트 방법

Country Status (5)

Country Link
US (1) US7555686B2 (https=)
JP (1) JP2007024884A (https=)
KR (1) KR100714482B1 (https=)
DE (1) DE102006033188A1 (https=)
TW (1) TWI308964B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9437328B2 (en) * 2012-11-30 2016-09-06 Silicon Motion Inc. Apparatus and method for applying at-speed functional test with lower-speed tester
JP6121853B2 (ja) * 2013-09-18 2017-04-26 株式会社東芝 出力装置およびその診断方法
CN105067988B (zh) * 2015-07-02 2018-03-30 英特尔公司 集成电路、集成电路测试装置以及方法
US10097341B1 (en) * 2017-08-30 2018-10-09 Keyssa Systems, Inc. Testing of clock and data recovery circuits
TWI871453B (zh) * 2020-05-14 2025-02-01 台灣積體電路製造股份有限公司 用於檢測有缺陷邏輯器件的方法和裝置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08170978A (ja) * 1994-08-29 1996-07-02 Matsushita Electric Ind Co Ltd 半導体集積回路
JPH11194152A (ja) * 1998-01-05 1999-07-21 Nec Ic Microcomput Syst Ltd 半導体集積回路
KR20030049481A (ko) * 2001-12-15 2003-06-25 삼성전자주식회사 저속의 테스트 장비와 인터페이스할 수 있는 반도체 장치및 이를 이용한 테스트 시스템

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01149543A (ja) * 1987-12-04 1989-06-12 Fujitsu Ltd Ｆｉｆｏメモリ制御方法
JPH02245681A (ja) * 1989-03-17 1990-10-01 Nec Corp 複合型集積回路
JPH0481080U (https=) * 1990-11-27 1992-07-15
JPH0530778U (ja) * 1991-10-02 1993-04-23 日本電気株式会社 故障ｌｓｉ検出システム
JPH08262087A (ja) 1995-03-20 1996-10-11 Hitachi Shonan Denshi Co Ltd 被測定物に対する周期的バーストデータによるデータ透過性試験装置
US5633634A (en) * 1995-09-29 1997-05-27 Ag Communication Systems Corporation Data rate conversion circuit
JP2850817B2 (ja) * 1995-12-20 1999-01-27 日本電気株式会社 データハイウェイ用信号速度変換回路
US5677914A (en) * 1996-04-25 1997-10-14 Hughes Electronics Test vectro feed-thru
SE506817C2 (sv) 1996-06-20 1998-02-16 Ericsson Telefon Ab L M Seriell-parallell- och parallell-seriellomvandlare innefattande frekvensdelare
JPH1073643A (ja) * 1996-09-02 1998-03-17 Mitsubishi Electric Corp 半導体装置試験治具
US5933739A (en) * 1997-09-11 1999-08-03 Vlsi Technology, Inc. Self-aligned silicidation structure and method of formation thereof
JP2001289915A (ja) 2000-04-11 2001-10-19 Matsushita Electric Ind Co Ltd 半導体装置
DE10113458C2 (de) * 2001-03-19 2003-03-20 Infineon Technologies Ag Testschaltung
JP2003004809A (ja) 2001-06-20 2003-01-08 Toshiba Microelectronics Corp 半導体集積回路及び高速テストシステム
JP2003098221A (ja) * 2001-09-25 2003-04-03 Mitsubishi Electric Corp 半導体装置、半導体装置の試験方法及び半導体装置の試験装置
JP3871676B2 (ja) * 2001-10-05 2007-01-24 松下電器産業株式会社 Ｌｓｉ検査方法および装置、並びにｌｓｉテスタ
KR100493027B1 (ko) * 2002-10-01 2005-06-07 삼성전자주식회사 외부클럭의 주파수 체배기와 테스트 데이터의 출력버퍼를 구비하는 반도체 장치 및 반도체 장치의 테스트 방법
US7401281B2 (en) * 2004-01-29 2008-07-15 International Business Machines Corporation Remote BIST high speed test and redundancy calculation
JP2005337740A (ja) * 2004-05-24 2005-12-08 Matsushita Electric Ind Co Ltd 高速インターフェース回路検査モジュール、高速インターフェース回路検査対象モジュールおよび高速インターフェース回路検査方法
US7305598B1 (en) * 2005-03-25 2007-12-04 Amit Sanghani Test clock generation for higher-speed testing of a semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08170978A (ja) * 1994-08-29 1996-07-02 Matsushita Electric Ind Co Ltd 半導体集積回路
JPH11194152A (ja) * 1998-01-05 1999-07-21 Nec Ic Microcomput Syst Ltd 半導体集積回路
KR20030049481A (ko) * 2001-12-15 2003-06-25 삼성전자주식회사 저속의 테스트 장비와 인터페이스할 수 있는 반도체 장치및 이를 이용한 테스트 시스템

Also Published As

Publication number Publication date
JP2007024884A (ja) 2007-02-01
US7555686B2 (en) 2009-06-30
US20070022334A1 (en) 2007-01-25
DE102006033188A1 (de) 2007-02-15
KR20070007627A (ko) 2007-01-16
TWI308964B (en) 2009-04-21
TW200702678A (en) 2007-01-16

Similar Documents

Publication Publication Date Title
US8072253B2 (en) Clock adjusting circuit and semiconductor integrated circuit device
US7139957B2 (en) Automatic self test of an integrated circuit component via AC I/O loopback
US20080205170A1 (en) Ddr-sdram interface circuitry, and method and system for testing the interface circuitry
US7941720B2 (en) Scan test circuit and scan test control method
US8677201B2 (en) Semiconductor integrated circuit and method of retrieving signal to semiconductor integrated circuit
US20110271160A1 (en) Accelerating scan test by re-using response data as stimulus data abstract
CN107093451B (zh) Ddr sdram控制电路、ddr sdram芯片、pcb板及电子设备
JP5186485B2 (ja) 試験装置
JP2002289776A (ja) 半導体装置
JP2005164440A (ja) 半導体集積回路及び半導体集積回路のテスト方法
US8743633B2 (en) Integrated semiconductor device
KR100714482B1 (ko) 반도체 장치, 테스트 기판, 반도체 장치의 테스트 시스템및 반도체 장치의 테스트 방법
WO2012115840A2 (en) Delay fault testing for chip i/o
KR20080037384A (ko) 테스트가 용이한 반도체 장치, 반도체 장치 테스트 방법,반도체 장치 테스트를 위한 테스트 클럭 생성 방법 및 장치
JP2009216619A (ja) 半導体集積回路装置
JPH07270492A (ja) 半導体集積回路装置
US6898741B2 (en) Arrangements for self-measurement of I/O timing
US5848075A (en) Test device employing scan path having circuitry at switches between a scan in signal transmitted and previously held at a predetermined clock timing
US20240329123A1 (en) Semiconductor device and test method
JP4906030B2 (ja) テスト回路およびテスト方法
JP2011158440A (ja) クロック生成回路、半導体集積回路およびその試験システム
JP4191185B2 (ja) 半導体集積回路
EP4644922A1 (en) Critical path sensitization in electronic systems
TWI783555B (zh) 半導體裝置與測試脈衝訊號產生方法
JP2013088400A (ja) 半導体集積回路の検査方法および半導体集積回路

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment
PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

FPAY Annual fee payment
PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

FPAY Annual fee payment

Payment date: 20190329

Year of fee payment: 13

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 13

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 14

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 15

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 16

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 17

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 18

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20250427

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

H13 Ip right lapsed

Free format text: ST27 STATUS EVENT CODE: N-4-6-H10-H13-OTH-PC1903 (AS PROVIDED BY THE NATIONAL OFFICE); TERMINATION CATEGORY : DEFAULT_OF_REGISTRATION_FEE

Effective date: 20250427

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20250427