KR100612536B1 - 가스의 분리정제방법 및 그 장치 - Google Patents

가스의 분리정제방법 및 그 장치 Download PDF

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KR100612536B1
KR100612536B1 KR1020027007868A KR20027007868A KR100612536B1 KR 100612536 B1 KR100612536 B1 KR 100612536B1 KR 1020027007868 A KR1020027007868 A KR 1020027007868A KR 20027007868 A KR20027007868 A KR 20027007868A KR 100612536 B1 KR100612536 B1 KR 100612536B1
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gas
adsorption
pressure swing
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KR20020062979A (ko
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가와이마사토
나카무라아키히로
나가사카도루
하야시다시게루
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다이요 닛산 가부시키가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/18—Noble gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40058—Number of sequence steps, including sub-steps, per cycle
    • B01D2259/40062—Four
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/404—Further details for adsorption processes and devices using four beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B01D53/053—Pressure swing adsorption with storage or buffer vessel

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)
KR1020027007868A 2000-10-20 2001-10-19 가스의 분리정제방법 및 그 장치 Expired - Fee Related KR100612536B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000320544A JP3891773B2 (ja) 2000-10-20 2000-10-20 ガスの分離精製方法及びその装置
JPJP-P-2000-00320544 2000-10-20

Publications (2)

Publication Number Publication Date
KR20020062979A KR20020062979A (ko) 2002-07-31
KR100612536B1 true KR100612536B1 (ko) 2006-08-11

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Country Link
US (1) US6752851B2 (enExample)
EP (1) EP1334758B1 (enExample)
JP (1) JP3891773B2 (enExample)
KR (1) KR100612536B1 (enExample)
CN (1) CN1176736C (enExample)
DE (1) DE60127574T2 (enExample)
IL (1) IL150322A (enExample)
TW (1) TW495371B (enExample)
WO (1) WO2002032550A1 (enExample)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
KR101414491B1 (ko) 2013-07-10 2014-07-04 지에스건설 주식회사 기체 분리시스템 및 분리방법

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JP4580694B2 (ja) * 2004-06-11 2010-11-17 大陽日酸株式会社 ガスの分離方法及び装置
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JP5202836B2 (ja) 2006-12-01 2013-06-05 日本エア・リキード株式会社 キセノンの回収システムおよび回収装置
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JP7310031B2 (ja) 2020-09-28 2023-07-18 大陽日酸株式会社 ガス分離方法、およびガス分離装置
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JP7289908B1 (ja) 2021-12-28 2023-06-12 大陽日酸株式会社 圧力変動吸着式ガス分離装置
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JP7289909B1 (ja) 2021-12-28 2023-06-12 大陽日酸株式会社 圧力変動吸着式ガス分離装置
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Publication number Priority date Publication date Assignee Title
KR101414491B1 (ko) 2013-07-10 2014-07-04 지에스건설 주식회사 기체 분리시스템 및 분리방법

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Publication number Publication date
KR20020062979A (ko) 2002-07-31
EP1334758A1 (en) 2003-08-13
JP3891773B2 (ja) 2007-03-14
US20030000385A1 (en) 2003-01-02
CN1176736C (zh) 2004-11-24
EP1334758A4 (en) 2004-09-01
EP1334758B1 (en) 2007-03-28
TW495371B (en) 2002-07-21
IL150322A0 (en) 2002-12-01
DE60127574D1 (de) 2007-05-10
CN1404413A (zh) 2003-03-19
IL150322A (en) 2005-07-25
US6752851B2 (en) 2004-06-22
JP2002126435A (ja) 2002-05-08
DE60127574T2 (de) 2007-12-27
WO2002032550A1 (en) 2002-04-25

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