CN1176736C - 气体的分离纯化方法及其装置 - Google Patents

气体的分离纯化方法及其装置 Download PDF

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Publication number
CN1176736C
CN1176736C CNB018053491A CN01805349A CN1176736C CN 1176736 C CN1176736 C CN 1176736C CN B018053491 A CNB018053491 A CN B018053491A CN 01805349 A CN01805349 A CN 01805349A CN 1176736 C CN1176736 C CN 1176736C
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China
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gas
adsorption separation
pressure fluctuation
mentioned
type pressure
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Chinese (zh)
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CN1404413A (zh
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川井雅人
中村章宽
长坂彻
林田茂
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Taiyo Nippon Sanso Corp
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Nippon Sanso Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/18—Noble gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40058—Number of sequence steps, including sub-steps, per cycle
    • B01D2259/40062—Four
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/404—Further details for adsorption processes and devices using four beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B01D53/053—Pressure swing adsorption with storage or buffer vessel

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)
CNB018053491A 2000-10-20 2001-10-19 气体的分离纯化方法及其装置 Expired - Fee Related CN1176736C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000320544A JP3891773B2 (ja) 2000-10-20 2000-10-20 ガスの分離精製方法及びその装置
JP320544/2000 2000-10-20

Publications (2)

Publication Number Publication Date
CN1404413A CN1404413A (zh) 2003-03-19
CN1176736C true CN1176736C (zh) 2004-11-24

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CNB018053491A Expired - Fee Related CN1176736C (zh) 2000-10-20 2001-10-19 气体的分离纯化方法及其装置

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US (1) US6752851B2 (enExample)
EP (1) EP1334758B1 (enExample)
JP (1) JP3891773B2 (enExample)
KR (1) KR100612536B1 (enExample)
CN (1) CN1176736C (enExample)
DE (1) DE60127574T2 (enExample)
IL (1) IL150322A (enExample)
TW (1) TW495371B (enExample)
WO (1) WO2002032550A1 (enExample)

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CN112557157B (zh) * 2021-02-28 2021-05-04 中国工程物理研究院核物理与化学研究所 一种基于特定装置的空气样品中氙的分离纯化收集方法
JP7381554B2 (ja) * 2021-12-28 2023-11-15 大陽日酸株式会社 圧力変動吸着式ガス分離装置
KR20240112889A (ko) * 2021-12-28 2024-07-19 다이요 닛산 가부시키가이샤 압력 변동 흡착식 가스 분리 장치
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Also Published As

Publication number Publication date
US20030000385A1 (en) 2003-01-02
IL150322A0 (en) 2002-12-01
IL150322A (en) 2005-07-25
EP1334758A1 (en) 2003-08-13
JP2002126435A (ja) 2002-05-08
WO2002032550A1 (en) 2002-04-25
KR100612536B1 (ko) 2006-08-11
KR20020062979A (ko) 2002-07-31
CN1404413A (zh) 2003-03-19
DE60127574T2 (de) 2007-12-27
EP1334758B1 (en) 2007-03-28
JP3891773B2 (ja) 2007-03-14
US6752851B2 (en) 2004-06-22
TW495371B (en) 2002-07-21
DE60127574D1 (de) 2007-05-10
EP1334758A4 (en) 2004-09-01

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